Optical Lithography Using Excimer Lamps: 172nm and Beyond (Englisch)
- Neue Suche nach: Diggs, J.
- Neue Suche nach: Ametepe, J.
- Neue Suche nach: Peng, S.
- Neue Suche nach: Kelley, M.
- Neue Suche nach: Manos, D.
- Neue Suche nach: IEEE
- Neue Suche nach: Virginian Commonwealth University
- Neue Suche nach: Diggs, J.
- Neue Suche nach: Ametepe, J.
- Neue Suche nach: Peng, S.
- Neue Suche nach: Kelley, M.
- Neue Suche nach: Manos, D.
- Neue Suche nach: IEEE
- Neue Suche nach: Virginian Commonwealth University
In:
Biennial university/government/industry microelectronics symposium
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135
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2001
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Optical Lithography Using Excimer Lamps: 172nm and Beyond
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Beteiligte:Diggs, J. ( Autor:in ) / Ametepe, J. ( Autor:in ) / Peng, S. ( Autor:in ) / Kelley, M. ( Autor:in ) / Manos, D. ( Autor:in ) / IEEE / Virginian Commonwealth University
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Kongress:14th, Biennial university/government/industry microelectronics symposium ; 2001 ; Richmond, VA
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:01.01.2001
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Format / Umfang:135 pages
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Anmerkungen:Also known as UGIM 2001. IEEE cat no 01CH37197
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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The Silicon DominionAllen, G. W. / IEEE / Virginian Commonwealth University et al. | 2001
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The Center for Nanoscopic Materials DesignGroves, J.F. / Hull, R. et al. | 2001
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The Determination of Junction Depth in Diffused pn JunctionsBelman, D. / French, C. S. / Kardes, D. / Fitzgibbons, G. / Hendricks, R. W. / IEEE / Virginian Commonwealth University et al. | 2001
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Determination of junction depths for phosphorous diffused in siliconFrench, C.S. / Belman, D.P. / Kardes, D.E. / Hendricks, R.W. et al. | 2001
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Beam Shaping of Ultra-Short Laser Pulses for Micro-Machining ApplicationsZhang, S. / Ren, Y. H. / Lupke, G. / Kelley, M. J. / IEEE / Virginian Commonwealth University et al. | 2001
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Silicon-on-Insulator Based Modulators and Switches for High Speed Optical TelecomHirschman, K. / Wescott, N. / Brown, T. / Neiser, J. / IEEE / Virginian Commonwealth University et al. | 2001
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Silicon-on-insulator based modulators and switches for high speed optical telecommunicationsHirschman, K.D. / Wescott, N.E. / Brown, T.G. / Neiser, J. et al. | 2001
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Equipment Technician Training at John Tyler Community CollegeCoake, D. / IEEE / Virginian Commonwealth University et al. | 2001
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Semiconductor fabrication equipment technician training at John Tyler Community CollegeCoake, D.G. et al. | 2001
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Tech 4 electronics workforce development systemHawat, G. et al. | 2001
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Interactive Tolls on Microelectronics for Early Science and Engineering StudentsBean, J. / Groves, J. / Kansari, N. / Vijaykumar, V. / Heaishman, R. / Wie, C. / IEEE / Virginian Commonwealth University et al. | 2001
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The creation of microelectronics-based visualizations to enhance science education and literacyBean, J.C. / Groves, J.F. / Kansari, N. / Appleyard, M. / Lehmbeck, C. / Wayne, T. / Brittingham, M. et al. | 2001
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An Innovative Materials Science Course for General Engineering StudentsPalmer, M. / Pearson, R. / Atkinson, G. / IEEE / Virginian Commonwealth University et al. | 2001
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A Paperless Wafer Traveler for an Undergraduate Microchip Fabrication FacilityEckerman, P. / Hendricks, R. / IEEE / Virginian Commonwealth University et al. | 2001
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Wafer traveler design for an undergraduate microchip fabrication facilityEckerman, P.D. / Hendricks, R.W. et al. | 2001
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- 128
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Optical lithography using excimer lamps: 172 nm and beyondDiggs, J. / Ametepe, J. / Sheng Peng, / Kelley, M.J. / Manos, D. et al. | 2001
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Is Backside Photoemission Microscopy Necessary?Albrecht, D. / IEEE / Virginian Commonwealth University et al. | 2001
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Is backside photoemission necessary? [IC failure analysis]Albrecht, D.R. et al. | 2001
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Meniscus Interface Etching of Silicon in KOHSchultz, J. / Ivanov, D. V. / Farmer, K. R. / IEEE / Virginian Commonwealth University et al. | 2001
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An interactive program for determining junction depths in diffused silicon devicesMyers, D.S. / Meyer, J.L. / DePasquale, P. / Hendricks, R.W. et al. | 2001
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Proceedings of the Fourteenth Biennial University/Government/Industry Microelectronics Symposium (Cat. No.01CH37197)| 2001