Mass Production of Small Parts Made from Photosensitive Resin (Englisch)
- Neue Suche nach: Kobayashi, Y.
- Neue Suche nach: Shirai, K.
- Neue Suche nach: European Society for Precision Engineering and Nanotechnology
- Neue Suche nach: Kobayashi, Y.
- Neue Suche nach: Shirai, K.
- Neue Suche nach: Weck, M.
- Neue Suche nach: Kunzmann, H.
- Neue Suche nach: European Society for Precision Engineering and Nanotechnology
In:
International topical conference on precision engineering, micro technology, measurement techniques and equipment; EUSPEN
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359-362
;
2003
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Mass Production of Small Parts Made from Photosensitive Resin
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Beteiligte:Kobayashi, Y. ( Autor:in ) / Shirai, K. ( Autor:in ) / Weck, M. / Kunzmann, H. / European Society for Precision Engineering and Nanotechnology
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Kongress:International topical conference on precision engineering, micro technology, measurement techniques and equipment; EUSPEN ; 2003 ; Aachen, Germany
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Erschienen in:
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Verlag:
- Neue Suche nach: Riehm,
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Erscheinungsort:Voerde:
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Erscheinungsdatum:01.01.2003
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Format / Umfang:4 pages
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Metrology and Testing for Micro- to Nano-Technology: A Wish List with Associated ProblemsLeach, R. K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 11
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Investigation on the International State of the Art of Micro Production TechnologyHesselbach, J. / Raatz, A. / Wrege, J. / Herrmann, H. / Weule, H. / Fleischer, J. / Buchholz, C. / Tritschler, H. / Knoll, M. / Elsner, J. et al. | 2003
- 23
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Methodological Investigation of the Product Development in Micro TechnologyMarz, J. / Burkardt, N. / Albers, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 27
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Compact Hybrid Optical Devices Realised with Thick SU-8™ Photo-Resist StructuresAnsel, Y. / Gindele, F. / Scheurer, J. / Reinhard, C. / Neumann, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 31
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Design for Micro AssemblyBullema, J. E. / Veninga, E. / Tillie, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 35
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Determination of Mechanical Properties of Micro-Specimens Produced by Micro-Moulding TechniquesAuhorn, M. / Beck, T. / Schulze, V. / Lohe, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Silicon as a Suitable Material in Precision EngineeringFruhauf, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Flexural Solid Hinges Etched from SiliconGartner, E. / Fruhauf, J. / Jansch, E. / Reuter, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Design of Spiral Piezoelectric Cantilever Unimorphs for MicroactuationWilson, S. A. / Haigh, R. D. / Southin, J. E. A. / Dorey, R. A. / Whatmore, R. W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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World MEMS Fab: An Overview of the MEMS Industry WorldwideMounier, E. / Eloy, J. C. / Leroy, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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A New Multi-Probe Method for Precision Measurement of Cylindrical FiguresEndo, K. / Gao, W. / Kiyono, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Improvement of Air Bearing Performance by Means of Laminarization and its Application to Ultraprecision MicromachiningSawada, K. / Kawai, T. / Ebihara, K. / Takeuchi, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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A Manufacturing System for Ultraprecision Polishing of Slight Curved Optical ComponentsHerold, V. / Jungstand, U. / Schaffel, C. / Waak, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultra-precise Positioning with Nanometric Resolution Using Rolling Guide Way and Leadscrew Mechanism Equipped with Viscous-elastic ElementFukada, S. / Mikoshiba, T. / Inagaki, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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A Miniaturized Fast Tool Servo for Generating Micro-Structured SurfaceTano, M. / Gao, W. / Kiyono, S. / Mito, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Friction-Free TCP-Kinematic for Tilt Micro ManipulatorNeugebauer, R. / Schubert, A. / Koriath, H.-J. / Schulz, B. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Laser Planar Encoder with High Head-to-Scale Alignment ToleranceWu, C. C. / Chang, C. C. / Kao, C. F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of a Practical High-Performance Laser-Guided Deep-Hole Boring Tool - Improvement of Guiding Strategy -Katsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Moriyama, T. / Hamano, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Enhancement of Operator and System Precision in MicromanipulationShacklock, A. P. / Pickering, J. P. / Spowage, A. C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Linear Displacement of a Miniature Robot Using On/Off Controlled Piezoelectric ElementsTorii, A. / Fukaya, Y. / Doki, K. / Ueda, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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A Piezoelectric Drive Combining a Resonant and a Stepping Positioning ModeDevos, S. / De Volder, M. / Reynaerts, D. / Van Brussel, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Kinematics and Application of Simultaneous Double-Disk Grinding in Silicon Wafer PlanarizationPietsch, G. J. / Kerstan, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Coupled Simulation of Structural Dynamics and Control Loops for the Development of Machine ToolsWeck, M. / Queins, M. / Witt, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Investigations on the Limitations of the FE-Analysis of Micro-DevicesAlbers, A. / Metz, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Accuracy Improvement of Parallel Kinematic Machine -Compensation Method for Elastic and Thermal Deformation of Machine Frame-Oiwa, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Study of Friction on Miniature Robot Driven by On/Off Controlled Piezo ElementsTorii, A. / Ueda, A. / Liu, X. / Chetwynd, D. G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Modular OD/ID Grinding Machine with Bearings Preloaded by Inclined Iron Core Linear Electric MotorSlocum, A. / Basaran, M. / Cortesi, R. / Marsh, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Long Stroke Fast Tool Servo with Dynamic Mass Compensation and Hydrostatic BearingsWeck, M. / Henning, J. / Wetter, O. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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High Dynamic Intelligence - Boring Tool with Local Integrated Control SystemWeck, M. / Zimmerschitt-Halbig, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Highly Dynamic Turning Machine with PC-based Control System using FireWire BusWeck, M. / Borner, U. / Wetter, O. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Adaptable module for five-axis polishingWeck, M. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Direct Drive NC Rotary Tilt Unit for the Micro TechnologyKorischem, B. / Holter, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Combined In-Process Monitoring and Post-Process Measurement Technique for Micro-Machining ApplicationsMorantz, P. / Shore, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Micro Machining of Cemented Carbide and Polycrystalline Diamond Using Wire-EDMKlocke, F. / Lung, D. / Antonoglou, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Polishing of Structured SurfacesBrinksmeier, E. / Riemer, O. / Gessenharter, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Electrodes for Micro-EDMSchmidt, J. / Fleischer, J. / Knoll, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Prediction and Compensation of Machining Error in Ball-End Milling for Microscale Curved SurfacesLiu, X.-W. / Cheng, K. / Webb, D. / Longstaff, A. P. / Widiyarto, M. H. / Jiang, X.-Q. / Blunt, L. / Ford, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Joining of a Micro Converter by MS-PVD-Deposited Solder SystemsLugscheider, E. / Bobzin, K. / Erdie, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Diamond Contour Boring and Raster-Milling of Molds for an Ultraprecision Open Ring Light SystemBrinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of Ultraprecise Milling Techniques for the Manufacture of Optical Quality Molds with Continuous and Microstructured SurfacesBrinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Cost - Effective Fabrication of Reflection Optical Gratings for Displacement SensorBlanc, D. / Barbier, A. / Saoudi, R. / Jourlin, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Connection Between Pessure Dstribution and Shape Formation in the Polishing Process of Plane SurfacesBergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Prediction of Contact between Grinding Wheel and Workpiece - Clearance Prediction by Using Hydrophone -Yui, A. / Mototani, S. / Okuyama, S. / Kitajima, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Tool Design for End Milling of Micro Structures in SteelSchmidt, J. / Tritschler, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Mechanical Drilling of Microholes in Al/Al2O3 CompositesKudla, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Inspections of Micro Systems in the Field of Micro AssemblyPfeifer, T. / Dussler, G. / Driessen, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Diamond Turning Compatible Nickel CoatingPeeters, P. G. J. M. / van der Hoorn, G. / van den Broek, D. A. A. / Kurowski, A. / Staikov, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Industrial Microsystem Electro PlatingPeeters, P. G. J. M. / van den Broek, D. A. A. / de Kubber, D. L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Dynamic Tool Behaviour During Micro Milling of Metallic Composite Materials Measured with a Laser VibrometerUhlmann, E. / Doll, U. / Schauer, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Germanium Immersion Grating by Using the Ultraprecision Machine Tool by Micro-ELID GrindingSuzuki, T. / Ohmori, H. / Uehara, Y. / Lin, W. / Dai, Y. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Analysis of Cutting Process in Cutting off Composite Materials with SawbladeMizuno, M. / Iyama, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Cutting Tool Wear Mechanism in Precision Single-Point Diamond Machining of Optical and Bioengineering PolymersLavrynenko, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development Desktop Machine Tool Applying ELID Grinding System with Constant Pressure TableUehara, Y. / Ohmori, H. / Susuki, T. / Mitsuishi, N. / Miura, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultraprecision Processing of Solid Immersion Mirror by ELID GrindingOhmori, H. / Suzuki, T. / Uehara, Y. / Shimizu, T. / Ueyanagi, K. / Adashi, Y. / Wakabayashi, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Precision of Etched Bulk Silicon Structures with Dimensions up to the mm-RangeFruhauf, J. / Kronert, S. / Kruger-Sehm, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultra-Precision Cutting of Titanium Alloy with the Formed Coated-Cemented-Carbide Cutting ToolSakamoto, S. / Yasui, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Research on Fine Structure of the Micro Groove Cut into Sputtered Thin FilmNakamura, I. / Horii, N. / Sato, Y. / Seki, H. / Sato, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Modelling of Cutting Tool and Work Material Interface Process in Ultraprecision Single-Point Diamond MachiningMamalis, A. G. / Lavrynenko, S. N. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Influences of Crystallographic Orientations in Microcutting of Single Crystalline CopperZhang, C. / Rentsch, R. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of a 3D Packaging Concept for MEMS and Micro ElectronicsVeninga, E. P. / Meuwissen, M. H. H. / Bullema, J. E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Best Simultaneous Clamping for Multi Micro-ElementsBalon, S. A. P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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2D and 3D Micro-Engraving of Polymer Foils for Laser Targets ApplicationsLegaie, O. / Bednarczyk, S. / Faese, F. / Perron, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Discussion of the Ability of Statistical Signal Processing Methods for the Use in Predictive Tool Break Monitoring in Micro MillingFleischer, J. / Schmidt, J. / Ruoff, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Mechanical Model and Simulation of the Ultrasonic Vibration Assisted Turning ProcessJeng-Shyong, C. / Winn-Chin, J. / gwo-yuh, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Optimization of Chemical Mechanical Polishing of Thin Silicon WafersGatzen, H. H. / Guenzel, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Effect of ELID (Electrolytic In-process Dressing) Grinding Method on Corrosion Resistance and Micro-Hardness of Metallic Biomaterials (Ti-6Al-4V Alloy)Mizutani, M. / Komotori, J. / Katahira, K. / Ohmori, H. / Watanabe, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of On-machine Profile Measuring System with Non-Contact Laser-Probe and its PropertiesWatanabe, Y. / Ohmori, H. / Lin, W. / Katahira, K. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of Metal-free Electro-Conductive Resin Bonded Wheel for ELID GrindingItoh, N. / Komazawa, R. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Micro-Removal Mechanism of Engineered ToolImai, K. / Hashimoto, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultraprecision Fabrication of Glass Ceramic Mirror by ELID-grinding with Hydrostatic Driving MachineShimizu, T. / Ohmori, H. / Suzuki, T. / Uehara, Y. / Lin, W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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ELID Grinding Characteristics for the Machining of Optical Surface Quality for Ceramic Spherical Lens MoldsKatahira, K. / Schmidt, C. / Dambon, O. / Schneider, U. / Klocke, F. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultraprecision Diamond Cutting of Dies for Micro-Lens Array by ShapingMoriwaki, T. / Iguchi, Y. / Hino, R. / Matsuo, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Non-Contact Handling in MicrofabricationZah, M. F. / Zimmermann, J. / Zitzmann, A. / Schilp, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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High-Precision Hard Turning of Cemented CarbidesKlocke, F. / Bertalan, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Advanced Multi Wire Slicing According the "Both Direction" Machinig CinematicKlocke, F. / Huttenhuis, S. / Pahler, D. / Themis, V. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Grinding of Microstructures in Hardend Steel with CBN ToolsHoffmeister, H.-W. / Hlavac, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Design Issues for the Development of Microformed PartsAntonelli, D. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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ELID Grinding of Neutron Fresnel Lens with Forming WheelLin, W. / Ohmori, H. / Guo, J. / Moriyasu, S. / Iwaki, M. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 349
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Precision Profile Grinding of High Aspect Ratio MicrostructuresGatzen, H. H. / Morsbach, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Ultrasonic Plastification Concepts in Micro Injection MouldingMichaeli, W. / Opfermann, D. / Gartner, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Mass Production of Small Parts Made from Photosensitive ResinKobayashi, Y. / Shirai, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Microstructuring Glass via Hot EmbossingBurkhardt, T. / Ebeling, P. / Schubert, A. / Semar, W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Powder Injection Molding for Production of Micro PartsRuprecht, R. / Merz, L. / Orlygsson, G. / Piotter, V. / Rath, S. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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High Accuracy Absolute Distance Measurement within 2m using two Diode LasersZhang, C. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Standing Wave Interferometer for Length MeasurementsBuchner, H.-J. / Mandryka, V. / Jager, G. / Bunte, E. / Stiebig, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Metrological Characterization of a New Three-axis Piezoresistive Micro ProbeBergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development and Investigation of a Calibration Method for the Depth Measuring System of a Nanoindentation InstrumentHerrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development and investigation of a calibration method for the depth measuring system of a nanoindentation intstrumentHerrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. et al. | 2003
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Alternative Measuring Modes for Scanning Probe InstrumentationKoops, K. R. / Dirscherl, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Developments on the NMi-VSL Traceable Scanning Probe MicroscopeDirscherl, K. / Koops, K. R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development of Micro Force Setting Standards for Stylus InstrumentsDoering, L. / Brand, U. / Peiner, E. / Fruhauf, J. / Gartner, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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High Precision, Low Force 3D Touch Probe for Measurements on Small ObjectsMeli, F. / Fracheboud, M. / Bottinelli, S. / Bieri, M. / Thalmann, R. / Breguet, J.-M. / Clavel, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Uncertainty Evaluation of Squareness Measurement by Reversal TechniqueLui, P. K. W. / Huang, H. / Peng, G. S. / Lin, V. T. Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Real-Time Control for Two-Dimensional Positioning and Scanning with Nanometer PrecisionSu, Y.-Y. / Yeh, H.-C. / Pan, S.-s. / Gwo-Sheng, G.-S. / Tsuei, P. K.-Y. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Self-Calibration of Coordinate Measuring MachinesYoo, S. / Kim, S.-W. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Design and Manufacture of a Tensile Testing Machine for In-situ Atomic Force Microscope (AFM) Mechanical TestingBamberg, E. / Grippo, C. / Slocum, A. / Boyce, M. C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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A new Acoustic Method for Determination of the Effective Air Temperature for Length InterferometersKorpelainen, V. / Hemming, B. / Lehto, H. / Lassila, A. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Measurement of 3D Surface Topography Using Non Contact Sensors - Identification of the Macro- and Micro-Geometric ParametersLartigue, C. / Bourdet, P. / Deleuze, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Homodyne Fiber Coupled Laser VibrometerDontsov, D. / Jager, G. / Buchner, H.-J. / Gerhard, U. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Estimation of Work Damaged Layer Using Magnetic Force MicroscopyIchida, Y. / Morimoto, Y. / Sato, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Remote Calibration of Frequency-Stabilized Lasers in CMS-NMLLin, T.-Y. / Cheng, K.-Y. / Lu, S.-H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Precision Plane Angle Measurements in Dynamic Mode by Means of Optical EncoderGoncharov, N. V. / Filatov, Y. V. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Comparative Investigation of Optical Techniques for Topography Measurement of Rough Plastic SurfacesBariani, P. / Hansen, H. N. / Theilade, U. R. A. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Quality of Topographical Micro Replication in Injection MouldingTheilade, U. R. A. / Hansen, H. N. / Bariani, P. / De Chiffre, L. / Kjaer, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Novel Edge Profile Measurement for Micro Cutting Tool by Laser DiffractionKhajornrungruang, P. / Miyoshi, T. / Takaya, Y. / Takahashi, S. / Harada, T. / Isago, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Further Improvement of the Measurement Capability of the Metrological Scanning Probe Microscope Veritekt CDai, G. / Pohlenz, F. / Hasche, K. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Development and Validation of a Novel Approach to the Calibration of Internal and External Threads on Coordinate Measuring MachinesCarmignato, S. / De Chiffre, L. / Savio, E. / Tosello, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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International Comparison in the Field of Nanometrology: Step Height (NANO2)Koenders, L. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Heterodyne Laser Interferometry Using a Single Polarisation-Preserving Optical FibreKnarren, B. A. W. H. / Haitjema, H. / Schellekens, P. H. J. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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CAD-Based Measurements in Profile Tolerances VerificationMeneghello, R. / Concheri, G. / Savio, E. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Surface Property Mapping and CharacterisationLiu, X. / Zhang, J. / Sun, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
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Influence of Nanostandard Properties on Calibration Procedures of SPMsDziomba, T. / Hassler-Grohne, W. / Bosse, H. / Danzebrink, H. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 495
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Nano-Roughness Standards With a Very Low Roughness ValueGatzen, H. H. / Kourouklis, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 499
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Measurement of line scales and linear encoders on the PTB Nanometer ComparatorFlugge, J. / Koning, R. / Bosse, H. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 503
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New Approaches in Interferometric Analysis of Microstructured SurfacesSchneefuss, K. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 507
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Development of a Simulation Tool for the Analysis of Workshop Influences on Interferometrical MeasurementsDorner, D. / Bai, A. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 511
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Development of a Ultra-Fast Confocal Scanner for High Quality 3D-InspectionSchick, A. / Neubauer, S. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 515
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Photogrammetric 3D-Measurement of Microstructures from SEM imagesMolnar, G. / Tutsch, R. / Fischer, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 519
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Laser Optical Surface Characterization of Complex Optical Elements in the Nanometric RangePatzelt, S. / Bosse, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 523
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Uncertainty Contributions Due to Different Measurement Strategies Applied to Optomechanical Hole PlateMorace, R. E. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 527
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Retrieval of the Spatial Frequency Profile of a Laser Written Grating ScaleJourlin, Y. / Tishchenko, A. V. / Pigeon, F. / Bouchet, G. / Parriaux, O. / Schimansky, C. / Buchner, C. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 531
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Optical Metrology for MEMS CharacterizationPasop, F. / Novak, E. / Browne, T. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 535
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Calibration of Rings Using Multi-Step and Reversal Techniques on CMMsSavio, E. / Tosello, G. / De Chiffre, L. / Zeleny, V. / Skalnik, P. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 539
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Validation of Calibration Procedures for Freeform Parts on CMMsSavio, E. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2003
- 543
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Improved Accuracy with Fibre Optic Laser Scale System and Real Time Compensation for Refractive IndexKrug, R. / European Society for Precision Engineering and Nanotechnology et al. | 2003