Improving the accuracy of 3D displacement measurement using ring-shaped laser beam and high resolution CCD (Englisch)
- Neue Suche nach: Usuki, S.
- Neue Suche nach: Enami, K.
- Neue Suche nach: Sato, O.
- Neue Suche nach: Takahashi, S.
- Neue Suche nach: Takamasu, K.
- Neue Suche nach: Usuki, S.
- Neue Suche nach: Enami, K.
- Neue Suche nach: Sato, O.
- Neue Suche nach: Takahashi, S.
- Neue Suche nach: Takamasu, K.
In:
European Society for Precision Engineering
;
328-329
;
2004
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Improving the accuracy of 3D displacement measurement using ring-shaped laser beam and high resolution CCD
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Beteiligte:Usuki, S. ( Autor:in ) / Enami, K. ( Autor:in ) / Sato, O. ( Autor:in ) / Takahashi, S. ( Autor:in ) / Takamasu, K. ( Autor:in )
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Kongress:Conference; 4th, European Society for Precision Engineering ; 2004 ; Glasgow, Scotland
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Erschienen in:
-
Verlag:
- Neue Suche nach: LG Digital
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Erscheinungsort:Kempston
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Erscheinungsdatum:01.01.2004
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Format / Umfang:2 pages
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Anmerkungen:Includes bibliographical references
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Results of the international line scale comparison Nano3Bosse, H. / Hassler-Grohne, W. / Flugge, J. / Koning, R. et al. | 2004
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Optical pressure gauge used on a micro-mixer module with laminar flow regimePfeifer, T. / Aleriano, U. / Depiereux, F. et al. | 2004
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Recent development in absolute interferometry using two diode lasersWu, J. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. et al. | 2004
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Development of a Sensitive Probe for Coordinate Measuring MachineFurutani, R. / Watanabe, M. et al. | 2004
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Precision Measurement of Large Step Height Using Confocal Differential Heterodyne Interferometry (CDHI)Kim, T.J. / Lee, S.W. / Gweon, D.G. / Kim, K.S. et al. | 2004
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Measurement Uncertainty in Nanometrology - an exemplary application on NanoscratchesWeckenmann, A. / Wiedenhoefer, T. et al. | 2004
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Design and Performance Test of 6-DOF Fine Positioner for Alignment of Condenser in Soft X-ray Microscope Using Stewart Platform and Cylindrical FlexureKang, S.-h. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, J.Y. et al. | 2004
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Precision Position Control for a Self-moving Stage Utilizing Spring-mounted Piezoelectric ActuatorsLiu, Y.-T. / Wang, C.-W. et al. | 2004
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A Fibre-Optic Device for Micro Dozes CharacterizationKorposh, S.O. / Sakalosh, I.I. / Sharkany, J.P. / Sichka, M.Y. et al. | 2004
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Approximation of Surface Texture Profiles and ParametersBrennan, J.K. / Mason, J.C. / Jiang, X. / Leach, R.K. / Harris, P.M. et al. | 2004
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Metrology for Microsystems - Characterisation of a new broadband interferometerLee-Bennett, I. / Leach, R. et al. | 2004
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The Role of Metrology in Nanotechnology and Precision EngineeringCarneiro, K. et al. | 2004
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A Device for Rapid Measurement of 6-DOF Dynamic Motion ErrorsSpiewak, S. et al. | 2004
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Nonlinearity Measurement and Correction of Metrology Data from an Interferometer SystemChu, D.C. / Ray, A.B. et al. | 2004
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In-Situ measurement of large microstructured surfaces for optical applicationsPfeifer, T. / Schneefuss, K. / Dorner, D. et al. | 2004
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Measurement of mechanical properties of materials at the nanoscale: directions and limitationsMendels, D.-A. / Evanno, N.M.P. / Cuenat, A. et al. | 2004
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Mapping micro-mechanical properties of carbon-filled polymer composites by TPMLiu, X. / Zhang, J. / Piotter, V. et al. | 2004
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A new instrument for measuring crystal orientation with extreme accuracyBecker, P. / Drosemeyer, H. / Jager, V. et al. | 2004
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Microscopic Friction Force Measuring System for the Investigation of Micro ComponentsPhataralaoha, A. / Buttgenbach, S. et al. | 2004
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Optimized selection of indirect methods of measureSevilla, L. / Sebastian, M.A. et al. | 2004
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Simultaneous measurement and compensation of 5-DOF motion errors using extended Twyman-Green interferometryOh, J.S. / Bae, E.D. / Kim, S.-W. et al. | 2004
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Development of calibration methods for spherical indenters used in the nanoindentation testDai, G. / Herrmann, K. / Pohlenz, F. et al. | 2004
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Dynamic goniometers based on ring laser and optical encoderBournachev, M. / Filatov, Y. / Goncharov, N. / Loukianov, D. / Pavlov, P. et al. | 2004
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Micro litre-scale flow measurement for Microsystems studiesHowell, G.P. / Tamadoni, R. / Chetwynd, D.G. et al. | 2004
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A simple microtensometer for polymeric micro-partsSun, M.-C. / Chetwynd, D.G. / Gardner, J.W. et al. | 2004
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Traceability of Dimensional Measurements using the Scanning Electron MicroscopeDe Chiffre, L. / Bariani, P. / Hansen, H.N. / Horsewell, A. et al. | 2004
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Surface Mapping with an AFM-CMM Integrated System and Stitching SoftwareDe Chiffre, L. / Marinello, F. / Bariani, P. / Hansen, H.N. et al. | 2004
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Improving the accuracy of 3D displacement measurement using ring-shaped laser beam and high resolution CCDUsuki, S. / Enami, K. / Sato, O. / Takahashi, S. / Takamasu, K. et al. | 2004
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Precision measurement of carriage straightness and tilt error motions of an ultra-precision aspheric grinding machineArai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. et al. | 2004
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Precision measurement of carnage straightness and tilt error motions of an ultra-precision asphenc grinding machineArai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. et al. | 2003
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Shape measurement of long microbores applying photon counting methodJablonski, R. / Orzechowski, P. et al. | 2004
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A Precision Sensor for Detecting Foreign Bodies in Soft TissueShimizu, H. / Gao, W. / Nakashima, S. / Kiyono, S. et al. | 2004
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An Abbe-compliant 3D-measurement concept based on linear scalesHemschoote, D. / Vleugels, P. / Qian, J. / Van Brussel, H. / Reynaerts, D. et al. | 2004
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Study on Particle Detection for Patterned Wafers by Evanescent Light IlluminationYoshioka, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S. et al. | 2004
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Investigation and evaluation of mechanical properties of ZrO~2 micro-bending specimens produced by different micro-moulding techniquesAuhorn, M. / Beck, T. / Schulze, V. / Lohe, D. et al. | 2004
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The characteristics of force-deformation curves in fast mapping mode by TPMZhang, J. / Liu, X. et al. | 2004
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Measurement and Simulation of Heat Development during the Micro-Grinding Process of Hardened SteelsHoffmeister, H.-W. / Hlavac, M. et al. | 2004
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Nonlinear error compensation for optical profilerGuo, J. / Gao, Y. / Wang, X. / Xie, T. et al. | 2004
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Wave Front Metrology ErrorsJohnstone, E. / Schluchter, C. / Ray, A.B. et al. | 2004
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Complex wavelet transform for extraction of morphological features on surface topographyMa, J.W. / Jiang, X. / Blunt, L. et al. | 2004
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Development of Tolerances for Microsystems on the Example of Plasma Deposited SurfacesWestkaemper, E. / Schoebel, J. / Gottwald, B. / Sommadossi, S. et al. | 2004
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Position measurement of a miniature robot using position sensitive detectorsTorii, A. / Inoue, T. / Doki, K. / Ueda, A. et al. | 2004
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Development of a Virtual Standard for Nanoindentation InstrumentsLi, Z. / Herrmann, K. / Pohlenz, F. / Menelao, F. et al. | 2004
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Alignment measurement of two-dimensional zero-reference marksChenggang, Z. / Yingnan, W. / Yuhang, C. / Wenhao, H. et al. | 2004
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A Miniatre PH Meter on an Optical MonofibreSharkany, J.P. / Korposh, S.A. / Sichka, M.Y. / Zhitov, N.B. et al. | 2004
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Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometersFruehauf, J. / Gaertner, E. / Brand, U. / Doering, L. et al. | 2004
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The 3D Measurement and Analysis of Aspheric SurfacesMcBride, J.W. / Sun, W. / Maul, C. et al. | 2004
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Assessing thermally induced errors of machine tools using a telescopic double ball barDelbressine, F.L.M. / Florussen, G.H.J. / Schijvenaars, L.A. / Schellekens, P.H.J. et al. | 2004
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Magnetically Preloaded WheelsSlocum, A. / Lang, J. / Awtar, S. / Hart, A.J. / Mukaddam, K. et al. | 2004
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Design, Simulation and Testing of a Precision Alignment Frame for the Next Linear ColliderFitsos, P. et al. | 2004
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A novel design for a high precision freeform ELID grinding machineQian, J. / Vleugels, P. / Hemschoote, D. / Reynaerts, D. / van Brussel, H. et al. | 2004
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High Speed Creation of Ultraprecision Straight Microgrooves by Means of a Shuttle UnitEbihara, K. / Kawai, T. / Sawada, K. et al. | 2004
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Development of a Hydrostatic Linear Guidance based on the Design of Ball Bearing GuidanceBrecher, C. / Weck, M. / Winterschladen, M. / Paepenmuller, F. et al. | 2004
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An Ultraprecision Positioning System using Twist-roller Friction Drive with Fine AdjustmentMizumoto, H. / Shimizu, Y. / Yabuta, Y. / Arii, S. / Kami, Y. et al. | 2004
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Long Distance Microscope for Measurement of Tool Shape in High Precision X-Y TumingHaberland, R. et al. | 2004
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Investigation of the noise behaviour of aerostatic bearings for ultra-precisions stagesSchaeffel, C. / Hesse, S. / Mohr, H.-U. et al. | 2004
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Planar Motion System for a Nanopositioning- and Nanomeasuring Machine (NPM/NMM) with 200x200mm^2 operating rangeHesse, S. / Schaeffel, C. / Mohr, H.-U. et al. | 2004
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Improving axial depth of cut accuracy in micro millingBissacco, G. / Hansen, H.N. / De Chiffre, L. et al. | 2004
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The Abbe principle, self-calibration and the design of co-ordinate measuring systemsForbes, A.B. / Leach, R.K. / Brill, N. et al. | 2004
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Six Degrees of Freedom Planar MotorsCompter, J.C. et al. | 2004
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Characterization of a scanning microscopy tuning fork and optical fiber assembly with an application to biotechnologyWoody, S. / Jain, P. et al. | 2004
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Flexible Support For Cantilever LoadLeow, Y.P. et al. | 2004
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Full parameter calibration of parallel mechanismSato, O. / Shimojima, K. / Olea, G. / Furutani, R. / Takamasu, K. et al. | 2004
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Flexure Hinge Load Capacity and OptimisationHaberland, R. et al. | 2004
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Performance of machining table with feed driver made of PZT actuatorsInoue, M. / Ohta, A. / Tochigi, M. et al. | 2004
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Development of a laser-guided deep-hole grinding toolKatsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Park, H.K. / Hamano, Y. et al. | 2004
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Preliminary design of an ultraprecision mother machine supported by active mountsHoriuchi, O. / Yamaguchi, Y. / Shibutani, H. et al. | 2004
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A predictive 3D grinding method for large cylindersKuosmanen, P. / Juhanko, J. et al. | 2004
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A Low Cost- High Precision Variable Stiffness Flexure Valve Element SystemFreeman, D. / Slocum, A. et al. | 2004
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Understanding the dynamic response of a machine tool structure by finite element analysisXu, Q. / Barrans, S. / Holmes, A. / Ford, D. et al. | 2004
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Force Ripple Compensation and High Speed Tracking Control of a High Precision Linear Motor System using a Multi-Segment Magnet ArrayChoi, Y.-M. / Lee, M.G. / Gweon, D.-G. / Suk-Won, L. / Jong-Hwan, O. et al. | 2004
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A planar piezoelectric drive with a stepping and a resonant operation modeDevos, S. / Van de Vijver, W. / Decoster, K. / Reynaerts, D. / Van Brussel, H. et al. | 2004
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Tolerance Allocation and Alignment of Focusing Unit for Near Field Recording SystemLee, J.H. / Yoon, H.K. / Jeong, J. / Kim, T.J. / Gweon, D.G. et al. | 2004
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Optimal design of ultra precision X-Y-Theta stage with flexure mechanismKang, D.W. / Kim, K.H. / Gweon, D.G. / Lee, S.W. / Song, S.K. et al. | 2004
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Analysis of Flexure Mechanisms: a New Semi-Analytical TechniqueVenanzi, S. / Giesen, P. et al. | 2004
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Finite Element Analysis: precision of principlesFolgering, H.T.E. et al. | 2004
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Design of a PoliGrind MachineKnaapen, R.J.W. / Krastev, K.T. / Dona, M.J.J. et al. | 2004
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Additional imaging optics for soft x-ray microscopeYoo, H.K. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, H.J. et al. | 2004
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Design approach of a magnetostrictive actuatorYang, B. / Bonis, M. / Tao, H. / Prelle, C. et al. | 2004
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Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS)Brecher, C. / Weck, M. / Winterschladen, M. / Wetter, O. / Hennig, J. et al. | 2004
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Thrust Balance for Ground Testing of Electric ThrustersHughes, E.B. / Oldfield, S. et al. | 2004
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Development of Externally Pressurised Foil bearingsAl-Bender, F. / Smets, K. et al. | 2004
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Development of Ultra-High Speed Rotating DeviceAl-bender, F. / Gregoir, C. et al. | 2004
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The design of high precision X-Y-Theta stage using VCMKim, D. / Kim, K. / Gweon, D. / Lee, S.-W. / Choi, W. et al. | 2004
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Advanced Design Principles to Develop Nanopositioning MachinesTheska, R. / Frank, T. / Lotz, M. / Hackel, T. / Hohne, G. / Frank, S. et al. | 2004
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The Micro/Nano InterfaceDavies, G.J. / Ward, M. et al. | 2004