Stability of structural defects of polycrystalline silicon grown by rapid thermal annealing of amorphous silicon films (Englisch)
- Neue Suche nach: Girginoudi, D.
- Neue Suche nach: Girginoudi, S.
- Neue Suche nach: Thanailakis, A.
- Neue Suche nach: Georgoulas, N.
- Neue Suche nach: Stoemenos, J.
- Neue Suche nach: Antonopoulos, J.
- Neue Suche nach: Girginoudi, D.
- Neue Suche nach: Girginoudi, S.
- Neue Suche nach: Thanailakis, A.
- Neue Suche nach: Georgoulas, N.
- Neue Suche nach: Stoemenos, J.
- Neue Suche nach: Antonopoulos, J.
In:
THIN SOLID FILMS
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268
, 1/2
;
1-4
;
1995
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Stability of structural defects of polycrystalline silicon grown by rapid thermal annealing of amorphous silicon films
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Beteiligte:Girginoudi, D. ( Autor:in ) / Girginoudi, S. ( Autor:in ) / Thanailakis, A. ( Autor:in ) / Georgoulas, N. ( Autor:in ) / Stoemenos, J. ( Autor:in ) / Antonopoulos, J. ( Autor:in )
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Erschienen in:THIN SOLID FILMS ; 268, 1/2 ; 1-4
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Verlag:
- Neue Suche nach: ELSEVIER SEQUOIA SA
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Erscheinungsdatum:01.01.1995
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Format / Umfang:4 pages
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ISSN:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 530.4275
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 530.4275 -
Datenquelle:
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Inhaltsverzeichnis – Band 268, Ausgabe 1/2
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Stability of structural defects of polycrystalline silicon grown by rapid thermal annealing of amorphous silicon filmsGirginoudi, D. et al. | 1995
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Tensilely-stressed SiN films reactively sputtered in Kr-N~2 plasmas for producing free-standing devicesSugimoto, I. / Nakano, S. / Kuwano, H. et al. | 1995
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Author Index| 1995
- 162
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Subject Index| 1995