On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas (Englisch)
- Neue Suche nach: Bienholz, S.
- Neue Suche nach: Styrnoll, T.
- Neue Suche nach: Awakowicz, P.
- Neue Suche nach: Bienholz, S.
- Neue Suche nach: Styrnoll, T.
- Neue Suche nach: Awakowicz, P.
In:
JOURNAL OF PHYSICS -LONDON- D APPLIED PHYSICS
;
47
, 6
;
065201
;
2014
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:On the electrical asymmetry effect in large area multiple frequency capacitively coupled plasmas
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Beteiligte:
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Erschienen in:JOURNAL OF PHYSICS -LONDON- D APPLIED PHYSICS ; 47, 6 ; 065201
-
Verlag:
- Neue Suche nach: IOP PUBLISHING LTD
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Erscheinungsdatum:01.01.2014
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Format / Umfang:65201 pages
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ISSN:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 530
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 530 -
Datenquelle:
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