Proceedings // EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment : May 19th - 20th, 2003, Aachen, Germany / [Fraunhofer Institut Produktionstechnologie, IPT; PTB]. Ed. by Manfred Weck ... ; Vol. 1 (Englisch)

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  • Titel:
    Proceedings // EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment : May 19th - 20th, 2003, Aachen, Germany / [Fraunhofer Institut Produktionstechnologie, IPT; PTB]. Ed. by Manfred Weck ... ; Vol. 1
  • Sonstige Beteiligte:
  • Kongress:
    EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment; 2003; Aachen
    EUSPEN international topical conference ; 2003; 2003; Aachen
  • Verlag:
    Rhiem
  • Erscheinungsort:
    Voerde
  • Erscheinungsjahr:
    2003
  • Format / Umfang:
    XVII, 352 S
  • Anmerkungen:
    Ill., graph. Darst
  • ISBN:
  • Medientyp:
    Konferenzband
  • Format:
    Print
  • Sprache:
    Englisch
  • Schlagwörter:
  • Klassifikation:
    BKL:    52.88 Feinwerktechnik, Mechatronik / 50.94 Mikrosystemtechnik, Nanotechnologie
  • Datenquelle:
    TIBKAT

Inhaltsverzeichnis Konferenzband

Das Inhaltsverzeichnis des Konferenzbandes wird automatisch erzeugt, daher kann es lückenhaft sein, obwohl alle Artikel in der TIB verfügbar sind.

3
Metrology and Testing for Micro- to Nano-Technology: A Wish List with Associated Problems
Leach, R. K. / European Society for Precision Engineering and Nanotechnology | 2003
11
Investigation on the International State of the Art of Micro Production Technology
Hesselbach, J. / Raatz, A. / Wrege, J. / Herrmann, H. / Weule, H. / Fleischer, J. / Buchholz, C. / Tritschler, H. / Knoll, M. / Elsner, J. et al. | 2003
23
Methodological Investigation of the Product Development in Micro Technology
Marz, J. / Burkardt, N. / Albers, A. / European Society for Precision Engineering and Nanotechnology | 2003
27
Compact Hybrid Optical Devices Realised with Thick SU-8™ Photo-Resist Structures
Ansel, Y. / Gindele, F. / Scheurer, J. / Reinhard, C. / Neumann, F. / European Society for Precision Engineering and Nanotechnology | 2003
31
Design for Micro Assembly
Bullema, J. E. / Veninga, E. / Tillie, L. / European Society for Precision Engineering and Nanotechnology | 2003
35
Determination of Mechanical Properties of Micro-Specimens Produced by Micro-Moulding Techniques
Auhorn, M. / Beck, T. / Schulze, V. / Lohe, D. / European Society for Precision Engineering and Nanotechnology | 2003
39
Silicon as a Suitable Material in Precision Engineering
Fruhauf, J. / European Society for Precision Engineering and Nanotechnology | 2003
43
Flexural Solid Hinges Etched from Silicon
Gartner, E. / Fruhauf, J. / Jansch, E. / Reuter, D. / European Society for Precision Engineering and Nanotechnology | 2003
47
Design of Spiral Piezoelectric Cantilever Unimorphs for Microactuation
Wilson, S. A. / Haigh, R. D. / Southin, J. E. A. / Dorey, R. A. / Whatmore, R. W. / European Society for Precision Engineering and Nanotechnology | 2003
51
World MEMS Fab: An Overview of the MEMS Industry Worldwide
Mounier, E. / Eloy, J. C. / Leroy, S. / European Society for Precision Engineering and Nanotechnology | 2003
57
A New Multi-Probe Method for Precision Measurement of Cylindrical Figures
Endo, K. / Gao, W. / Kiyono, S. / European Society for Precision Engineering and Nanotechnology | 2003
61
Improvement of Air Bearing Performance by Means of Laminarization and its Application to Ultraprecision Micromachining
Sawada, K. / Kawai, T. / Ebihara, K. / Takeuchi, Y. / European Society for Precision Engineering and Nanotechnology | 2003
65
A Manufacturing System for Ultraprecision Polishing of Slight Curved Optical Components
Herold, V. / Jungstand, U. / Schaffel, C. / Waak, T. / European Society for Precision Engineering and Nanotechnology | 2003
69
Ultra-precise Positioning with Nanometric Resolution Using Rolling Guide Way and Leadscrew Mechanism Equipped with Viscous-elastic Element
Fukada, S. / Mikoshiba, T. / Inagaki, T. / European Society for Precision Engineering and Nanotechnology | 2003
73
A Miniaturized Fast Tool Servo for Generating Micro-Structured Surface
Tano, M. / Gao, W. / Kiyono, S. / Mito, M. / European Society for Precision Engineering and Nanotechnology | 2003
77
Friction-Free TCP-Kinematic for Tilt Micro Manipulator
Neugebauer, R. / Schubert, A. / Koriath, H.-J. / Schulz, B. / European Society for Precision Engineering and Nanotechnology | 2003
81
Design of a Small Precision Lathe
Loffler, F. / European Society for Precision Engineering and Nanotechnology | 2003
85
Diamond Turning of Platinum Alloys
Feist, C. / Loffler, F. / Waldele, F. / European Society for Precision Engineering and Nanotechnology | 2003
89
Connecting Machine Evaluation and Dynamic Simulation Part1: System Identification and Contouring Evaluation
Mueller, U. / Nogi, S. / Liu, J. / European Society for Precision Engineering and Nanotechnology | 2003
93
Laser Planar Encoder with High Head-to-Scale Alignment Tolerance
Wu, C. C. / Chang, C. C. / Kao, C. F. / European Society for Precision Engineering and Nanotechnology | 2003
97
Development of a Practical High-Performance Laser-Guided Deep-Hole Boring Tool - Improvement of Guiding Strategy -
Katsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Moriyama, T. / Hamano, Y. / European Society for Precision Engineering and Nanotechnology | 2003
101
Enhancement of Operator and System Precision in Micromanipulation
Shacklock, A. P. / Pickering, J. P. / Spowage, A. C. / European Society for Precision Engineering and Nanotechnology | 2003
105
Linear Displacement of a Miniature Robot Using On/Off Controlled Piezoelectric Elements
Torii, A. / Fukaya, Y. / Doki, K. / Ueda, A. / European Society for Precision Engineering and Nanotechnology | 2003
109
A Piezoelectric Drive Combining a Resonant and a Stepping Positioning Mode
Devos, S. / De Volder, M. / Reynaerts, D. / Van Brussel, H. / European Society for Precision Engineering and Nanotechnology | 2003
113
Kinematics and Application of Simultaneous Double-Disk Grinding in Silicon Wafer Planarization
Pietsch, G. J. / Kerstan, M. / European Society for Precision Engineering and Nanotechnology | 2003
117
Coupled Simulation of Structural Dynamics and Control Loops for the Development of Machine Tools
Weck, M. / Queins, M. / Witt, S. / European Society for Precision Engineering and Nanotechnology | 2003
121
Investigations on the Limitations of the FE-Analysis of Micro-Devices
Albers, A. / Metz, D. / European Society for Precision Engineering and Nanotechnology | 2003
125
Accuracy Improvement of Parallel Kinematic Machine -Compensation Method for Elastic and Thermal Deformation of Machine Frame-
Oiwa, T. / European Society for Precision Engineering and Nanotechnology | 2003
129
Study of Friction on Miniature Robot Driven by On/Off Controlled Piezo Elements
Torii, A. / Ueda, A. / Liu, X. / Chetwynd, D. G. / European Society for Precision Engineering and Nanotechnology | 2003
133
Modular OD/ID Grinding Machine with Bearings Preloaded by Inclined Iron Core Linear Electric Motor
Slocum, A. / Basaran, M. / Cortesi, R. / Marsh, E. / European Society for Precision Engineering and Nanotechnology | 2003
137
Improving Machine Tool Accuracy by a Direct Position Measurement Using a New Approach of Laser Goniometry
Schroder, K. / Ament, C. / Patzelt, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology | 2003
141
Long Stroke Fast Tool Servo with Dynamic Mass Compensation and Hydrostatic Bearings
Weck, M. / Henning, J. / Wetter, O. / European Society for Precision Engineering and Nanotechnology | 2003
145
High Dynamic Intelligence - Boring Tool with Local Integrated Control System
Weck, M. / Zimmerschitt-Halbig, P. / European Society for Precision Engineering and Nanotechnology | 2003
149
Highly Dynamic Turning Machine with PC-based Control System using FireWire Bus
Weck, M. / Borner, U. / Wetter, O. / European Society for Precision Engineering and Nanotechnology | 2003
153
Adaptable module for five-axis polishing
Weck, M. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology | 2003
157
Direct Drive NC Rotary Tilt Unit for the Micro Technology
Korischem, B. / Holter, H. / European Society for Precision Engineering and Nanotechnology | 2003
165
Combined In-Process Monitoring and Post-Process Measurement Technique for Micro-Machining Applications
Morantz, P. / Shore, P. / European Society for Precision Engineering and Nanotechnology | 2003
169
Micro Machining of Cemented Carbide and Polycrystalline Diamond Using Wire-EDM
Klocke, F. / Lung, D. / Antonoglou, G. / European Society for Precision Engineering and Nanotechnology | 2003
173
Polishing of Structured Surfaces
Brinksmeier, E. / Riemer, O. / Gessenharter, A. / European Society for Precision Engineering and Nanotechnology | 2003
177
Electrodes for Micro-EDM
Schmidt, J. / Fleischer, J. / Knoll, M. / European Society for Precision Engineering and Nanotechnology | 2003
181
Prediction and Compensation of Machining Error in Ball-End Milling for Microscale Curved Surfaces
Liu, X.-W. / Cheng, K. / Webb, D. / Longstaff, A. P. / Widiyarto, M. H. / Jiang, X.-Q. / Blunt, L. / Ford, D. / European Society for Precision Engineering and Nanotechnology | 2003
185
Joining of a Micro Converter by MS-PVD-Deposited Solder Systems
Lugscheider, E. / Bobzin, K. / Erdie, A. / European Society for Precision Engineering and Nanotechnology | 2003
189
Diamond Contour Boring and Raster-Milling of Molds for an Ultraprecision Open Ring Light System
Brinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology | 2003
193
Development of Ultraprecise Milling Techniques for the Manufacture of Optical Quality Molds with Continuous and Microstructured Surfaces
Brinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology | 2003
197
Cost - Effective Fabrication of Reflection Optical Gratings for Displacement Sensor
Blanc, D. / Barbier, A. / Saoudi, R. / Jourlin, Y. / European Society for Precision Engineering and Nanotechnology | 2003
201
Connection Between Pessure Dstribution and Shape Formation in the Polishing Process of Plane Surfaces
Bergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology | 2003
205
Prediction of Contact between Grinding Wheel and Workpiece - Clearance Prediction by Using Hydrophone -
Yui, A. / Mototani, S. / Okuyama, S. / Kitajima, T. / European Society for Precision Engineering and Nanotechnology | 2003
209
Tool Design for End Milling of Micro Structures in Steel
Schmidt, J. / Tritschler, H. / European Society for Precision Engineering and Nanotechnology | 2003
213
Mechanical Drilling of Microholes in Al/Al2O3 Composites
Kudla, L. / European Society for Precision Engineering and Nanotechnology | 2003
217
Inspections of Micro Systems in the Field of Micro Assembly
Pfeifer, T. / Dussler, G. / Driessen, S. / European Society for Precision Engineering and Nanotechnology | 2003
221
Diamond Turning Compatible Nickel Coating
Peeters, P. G. J. M. / van der Hoorn, G. / van den Broek, D. A. A. / Kurowski, A. / Staikov, G. / European Society for Precision Engineering and Nanotechnology | 2003
225
Industrial Microsystem Electro Plating
Peeters, P. G. J. M. / van den Broek, D. A. A. / de Kubber, D. L. / European Society for Precision Engineering and Nanotechnology | 2003
229
Dynamic Tool Behaviour During Micro Milling of Metallic Composite Materials Measured with a Laser Vibrometer
Uhlmann, E. / Doll, U. / Schauer, K. / European Society for Precision Engineering and Nanotechnology | 2003
233
Germanium Immersion Grating by Using the Ultraprecision Machine Tool by Micro-ELID Grinding
Suzuki, T. / Ohmori, H. / Uehara, Y. / Lin, W. / Dai, Y. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology | 2003
237
Analysis of Cutting Process in Cutting off Composite Materials with Sawblade
Mizuno, M. / Iyama, T. / European Society for Precision Engineering and Nanotechnology | 2003
241
Cutting Tool Wear Mechanism in Precision Single-Point Diamond Machining of Optical and Bioengineering Polymers
Lavrynenko, S. / European Society for Precision Engineering and Nanotechnology | 2003
245
Development Desktop Machine Tool Applying ELID Grinding System with Constant Pressure Table
Uehara, Y. / Ohmori, H. / Susuki, T. / Mitsuishi, N. / Miura, T. / European Society for Precision Engineering and Nanotechnology | 2003
249
Ultraprecision Processing of Solid Immersion Mirror by ELID Grinding
Ohmori, H. / Suzuki, T. / Uehara, Y. / Shimizu, T. / Ueyanagi, K. / Adashi, Y. / Wakabayashi, K. / European Society for Precision Engineering and Nanotechnology | 2003
253
Precision of Etched Bulk Silicon Structures with Dimensions up to the mm-Range
Fruhauf, J. / Kronert, S. / Kruger-Sehm, R. / European Society for Precision Engineering and Nanotechnology | 2003
257
Ultra-Precision Cutting of Titanium Alloy with the Formed Coated-Cemented-Carbide Cutting Tool
Sakamoto, S. / Yasui, H. / European Society for Precision Engineering and Nanotechnology | 2003
261
Research on Fine Structure of the Micro Groove Cut into Sputtered Thin Film
Nakamura, I. / Horii, N. / Sato, Y. / Seki, H. / Sato, M. / European Society for Precision Engineering and Nanotechnology | 2003
265
Modelling of Cutting Tool and Work Material Interface Process in Ultraprecision Single-Point Diamond Machining
Mamalis, A. G. / Lavrynenko, S. N. / European Society for Precision Engineering and Nanotechnology | 2003
269
Influences of Crystallographic Orientations in Microcutting of Single Crystalline Copper
Zhang, C. / Rentsch, R. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2003
273
Development of a 3D Packaging Concept for MEMS and Micro Electronics
Veninga, E. P. / Meuwissen, M. H. H. / Bullema, J. E. / European Society for Precision Engineering and Nanotechnology | 2003
277
Best Simultaneous Clamping for Multi Micro-Elements
Balon, S. A. P. / European Society for Precision Engineering and Nanotechnology | 2003
281
2D and 3D Micro-Engraving of Polymer Foils for Laser Targets Applications
Legaie, O. / Bednarczyk, S. / Faese, F. / Perron, G. / European Society for Precision Engineering and Nanotechnology | 2003
285
Discussion of the Ability of Statistical Signal Processing Methods for the Use in Predictive Tool Break Monitoring in Micro Milling
Fleischer, J. / Schmidt, J. / Ruoff, E. / European Society for Precision Engineering and Nanotechnology | 2003
289
Mechanical Model and Simulation of the Ultrasonic Vibration Assisted Turning Process
Jeng-Shyong, C. / Winn-Chin, J. / gwo-yuh, J. / European Society for Precision Engineering and Nanotechnology | 2003
293
Optimization of Chemical Mechanical Polishing of Thin Silicon Wafers
Gatzen, H. H. / Guenzel, G. / European Society for Precision Engineering and Nanotechnology | 2003
297
Effect of ELID (Electrolytic In-process Dressing) Grinding Method on Corrosion Resistance and Micro-Hardness of Metallic Biomaterials (Ti-6Al-4V Alloy)
Mizutani, M. / Komotori, J. / Katahira, K. / Ohmori, H. / Watanabe, Y. / European Society for Precision Engineering and Nanotechnology | 2003
301
Development of On-machine Profile Measuring System with Non-Contact Laser-Probe and its Properties
Watanabe, Y. / Ohmori, H. / Lin, W. / Katahira, K. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology | 2003
305
Development of Metal-free Electro-Conductive Resin Bonded Wheel for ELID Grinding
Itoh, N. / Komazawa, R. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology | 2003
309
Micro-Removal Mechanism of Engineered Tool
Imai, K. / Hashimoto, H. / European Society for Precision Engineering and Nanotechnology | 2003
313
Ultraprecision Fabrication of Glass Ceramic Mirror by ELID-grinding with Hydrostatic Driving Machine
Shimizu, T. / Ohmori, H. / Suzuki, T. / Uehara, Y. / Lin, W. / European Society for Precision Engineering and Nanotechnology | 2003
317
ELID Grinding Characteristics for the Machining of Optical Surface Quality for Ceramic Spherical Lens Molds
Katahira, K. / Schmidt, C. / Dambon, O. / Schneider, U. / Klocke, F. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology | 2003
321
Ultraprecision Diamond Cutting of Dies for Micro-Lens Array by Shaping
Moriwaki, T. / Iguchi, Y. / Hino, R. / Matsuo, M. / European Society for Precision Engineering and Nanotechnology | 2003
325
Non-Contact Handling in Microfabrication
Zah, M. F. / Zimmermann, J. / Zitzmann, A. / Schilp, M. / European Society for Precision Engineering and Nanotechnology | 2003
329
High-Precision Hard Turning of Cemented Carbides
Klocke, F. / Bertalan, C. / European Society for Precision Engineering and Nanotechnology | 2003
333
Advanced Multi Wire Slicing According the "Both Direction" Machinig Cinematic
Klocke, F. / Huttenhuis, S. / Pahler, D. / Themis, V. / European Society for Precision Engineering and Nanotechnology | 2003
337
Grinding of Microstructures in Hardend Steel with CBN Tools
Hoffmeister, H.-W. / Hlavac, M. / European Society for Precision Engineering and Nanotechnology | 2003
341
Design Issues for the Development of Microformed Parts
Antonelli, D. / European Society for Precision Engineering and Nanotechnology | 2003
345
ELID Grinding of Neutron Fresnel Lens with Forming Wheel
Lin, W. / Ohmori, H. / Guo, J. / Moriyasu, S. / Iwaki, M. / European Society for Precision Engineering and Nanotechnology | 2003
349
Precision Profile Grinding of High Aspect Ratio Microstructures
Gatzen, H. H. / Morsbach, C. / European Society for Precision Engineering and Nanotechnology | 2003
355
Ultrasonic Plastification Concepts in Micro Injection Moulding
Michaeli, W. / Opfermann, D. / Gartner, R. / European Society for Precision Engineering and Nanotechnology | 2003
359
Mass Production of Small Parts Made from Photosensitive Resin
Kobayashi, Y. / Shirai, K. / European Society for Precision Engineering and Nanotechnology | 2003
363
Microstructuring Glass via Hot Embossing
Burkhardt, T. / Ebeling, P. / Schubert, A. / Semar, W. / European Society for Precision Engineering and Nanotechnology | 2003
367
Metal Micro Parts made by Electroforming on Two-Component Lost Polymer Moulds
Piotter, V. / Holstein, N. / Oskotski, E. / Ruprecht, R. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology | 2003
371
Powder Injection Molding for Production of Micro Parts
Ruprecht, R. / Merz, L. / Orlygsson, G. / Piotter, V. / Rath, S. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology | 2003
379
A Milestone in Nanometrology: Large Area AFM-Scans with the Nanometre Coordinate Measuring Machine (NCMM)
Petersen, R. / Rothe, H. / European Society for Precision Engineering and Nanotechnology | 2003
383
High Accuracy Absolute Distance Measurement within 2m using two Diode Lasers
Zhang, C. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. / European Society for Precision Engineering and Nanotechnology | 2003
387
Standing Wave Interferometer for Length Measurements
Buchner, H.-J. / Mandryka, V. / Jager, G. / Bunte, E. / Stiebig, H. / European Society for Precision Engineering and Nanotechnology | 2003
391
Metrological Characterization of a New Three-axis Piezoresistive Micro Probe
Bergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology | 2003
395
Development and Investigation of a Calibration Method for the Depth Measuring System of a Nanoindentation Instrument
Herrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. / European Society for Precision Engineering and Nanotechnology | 2003
399
Alternative Measuring Modes for Scanning Probe Instrumentation
Koops, K. R. / Dirscherl, K. / European Society for Precision Engineering and Nanotechnology | 2003
403
Developments on the NMi-VSL Traceable Scanning Probe Microscope
Dirscherl, K. / Koops, K. R. / European Society for Precision Engineering and Nanotechnology | 2003
407
Development of Micro Force Setting Standards for Stylus Instruments
Doering, L. / Brand, U. / Peiner, E. / Fruhauf, J. / Gartner, E. / European Society for Precision Engineering and Nanotechnology | 2003
411
High Precision, Low Force 3D Touch Probe for Measurements on Small Objects
Meli, F. / Fracheboud, M. / Bottinelli, S. / Bieri, M. / Thalmann, R. / Breguet, J.-M. / Clavel, R. / European Society for Precision Engineering and Nanotechnology | 2003
415
Uncertainty Evaluation of Squareness Measurement by Reversal Technique
Lui, P. K. W. / Huang, H. / Peng, G. S. / Lin, V. T. Y. / European Society for Precision Engineering and Nanotechnology | 2003
419
Real-Time Control for Two-Dimensional Positioning and Scanning with Nanometer Precision
Su, Y.-Y. / Yeh, H.-C. / Pan, S.-s. / Gwo-Sheng, G.-S. / Tsuei, P. K.-Y. / European Society for Precision Engineering and Nanotechnology | 2003
423
Self-Calibration of Coordinate Measuring Machines
Yoo, S. / Kim, S.-W. / European Society for Precision Engineering and Nanotechnology | 2003
427
Design and Manufacture of a Tensile Testing Machine for In-situ Atomic Force Microscope (AFM) Mechanical Testing
Bamberg, E. / Grippo, C. / Slocum, A. / Boyce, M. C. / European Society for Precision Engineering and Nanotechnology | 2003
431
A new Acoustic Method for Determination of the Effective Air Temperature for Length Interferometers
Korpelainen, V. / Hemming, B. / Lehto, H. / Lassila, A. / European Society for Precision Engineering and Nanotechnology | 2003
435
Measurement of 3D Surface Topography Using Non Contact Sensors - Identification of the Macro- and Micro-Geometric Parameters
Lartigue, C. / Bourdet, P. / Deleuze, S. / European Society for Precision Engineering and Nanotechnology | 2003
439
Homodyne Fiber Coupled Laser Vibrometer
Dontsov, D. / Jager, G. / Buchner, H.-J. / Gerhard, U. / European Society for Precision Engineering and Nanotechnology | 2003
443
Estimation of Work Damaged Layer Using Magnetic Force Microscopy
Ichida, Y. / Morimoto, Y. / Sato, R. / European Society for Precision Engineering and Nanotechnology | 2003
447
Remote Calibration of Frequency-Stabilized Lasers in CMS-NML
Lin, T.-Y. / Cheng, K.-Y. / Lu, S.-H. / European Society for Precision Engineering and Nanotechnology | 2003
451
Precision Plane Angle Measurements in Dynamic Mode by Means of Optical Encoder
Goncharov, N. V. / Filatov, Y. V. / European Society for Precision Engineering and Nanotechnology | 2003
455
Comparative Investigation of Optical Techniques for Topography Measurement of Rough Plastic Surfaces
Bariani, P. / Hansen, H. N. / Theilade, U. R. A. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology | 2003
459
Quality of Topographical Micro Replication in Injection Moulding
Theilade, U. R. A. / Hansen, H. N. / Bariani, P. / De Chiffre, L. / Kjaer, E. / European Society for Precision Engineering and Nanotechnology | 2003
463
Novel Edge Profile Measurement for Micro Cutting Tool by Laser Diffraction
Khajornrungruang, P. / Miyoshi, T. / Takaya, Y. / Takahashi, S. / Harada, T. / Isago, S. / European Society for Precision Engineering and Nanotechnology | 2003
467
Further Improvement of the Measurement Capability of the Metrological Scanning Probe Microscope Veritekt C
Dai, G. / Pohlenz, F. / Hasche, K. / European Society for Precision Engineering and Nanotechnology | 2003
471
Development and Validation of a Novel Approach to the Calibration of Internal and External Threads on Coordinate Measuring Machines
Carmignato, S. / De Chiffre, L. / Savio, E. / Tosello, G. / European Society for Precision Engineering and Nanotechnology | 2003
475
International Comparison in the Field of Nanometrology: Step Height (NANO2)
Koenders, L. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology | 2003
479
Heterodyne Laser Interferometry Using a Single Polarisation-Preserving Optical Fibre
Knarren, B. A. W. H. / Haitjema, H. / Schellekens, P. H. J. / European Society for Precision Engineering and Nanotechnology | 2003
483
CAD-Based Measurements in Profile Tolerances Verification
Meneghello, R. / Concheri, G. / Savio, E. / European Society for Precision Engineering and Nanotechnology | 2003
487
Surface Property Mapping and Characterisation
Liu, X. / Zhang, J. / Sun, T. / European Society for Precision Engineering and Nanotechnology | 2003
491
Influence of Nanostandard Properties on Calibration Procedures of SPMs
Dziomba, T. / Hassler-Grohne, W. / Bosse, H. / Danzebrink, H. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology | 2003
495
Nano-Roughness Standards With a Very Low Roughness Value
Gatzen, H. H. / Kourouklis, C. / European Society for Precision Engineering and Nanotechnology | 2003
499
Measurement of line scales and linear encoders on the PTB Nanometer Comparator
Flugge, J. / Koning, R. / Bosse, H. / European Society for Precision Engineering and Nanotechnology | 2003
503
New Approaches in Interferometric Analysis of Microstructured Surfaces
Schneefuss, K. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology | 2003
507
Development of a Simulation Tool for the Analysis of Workshop Influences on Interferometrical Measurements
Dorner, D. / Bai, A. / Pfeifer, T. / European Society for Precision Engineering and Nanotechnology | 2003
511
Development of a Ultra-Fast Confocal Scanner for High Quality 3D-Inspection
Schick, A. / Neubauer, S. / European Society for Precision Engineering and Nanotechnology | 2003
515
Photogrammetric 3D-Measurement of Microstructures from SEM images
Molnar, G. / Tutsch, R. / Fischer, G. / European Society for Precision Engineering and Nanotechnology | 2003
519
Laser Optical Surface Characterization of Complex Optical Elements in the Nanometric Range
Patzelt, S. / Bosse, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology | 2003
523
Uncertainty Contributions Due to Different Measurement Strategies Applied to Optomechanical Hole Plate
Morace, R. E. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology | 2003
527
Retrieval of the Spatial Frequency Profile of a Laser Written Grating Scale
Jourlin, Y. / Tishchenko, A. V. / Pigeon, F. / Bouchet, G. / Parriaux, O. / Schimansky, C. / Buchner, C. / European Society for Precision Engineering and Nanotechnology | 2003
531
Optical Metrology for MEMS Characterization
Pasop, F. / Novak, E. / Browne, T. / European Society for Precision Engineering and Nanotechnology | 2003
535
Calibration of Rings Using Multi-Step and Reversal Techniques on CMMs
Savio, E. / Tosello, G. / De Chiffre, L. / Zeleny, V. / Skalnik, P. / European Society for Precision Engineering and Nanotechnology | 2003
539
Validation of Calibration Procedures for Freeform Parts on CMMs
Savio, E. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology | 2003
543
Improved Accuracy with Fibre Optic Laser Scale System and Real Time Compensation for Refractive Index
Krug, R. / European Society for Precision Engineering and Nanotechnology | 2003