Proceedings // EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment : May 19th - 20th, 2003, Aachen, Germany / [Fraunhofer Institut Produktionstechnologie, IPT; PTB]. Ed. by Manfred Weck ... ; Vol. 1 (Englisch)

EUSPEN International Topical Conference on Precision Engineering, Micro Technology, Measurement Techniques and Equipment; 2003; Aachen
Rhiem , Voerde; 2003

Dokumentinformationen


Inhaltsverzeichnis Konferenzband

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3
Metrology and Testing for Micro- to Nano-Technology: A Wish List with Associated Problems
Leach, R. K. / European Society for Precision Engineering and Nanotechnology | 2003
11
Investigation on the International State of the Art of Micro Production Technology
Hesselbach, J. / Raatz, A. / Wrege, J. / Herrmann, H. / Weule, H. / Fleischer, J. / Buchholz, C. / Tritschler, H. / Knoll, M. / Elsner, J. et al. | 2003
23
Methodological Investigation of the Product Development in Micro Technology
Marz, J. / Burkardt, N. / Albers, A. / European Society for Precision Engineering and Nanotechnology | 2003
27
Compact hybrid optical devices realised with thick SU-8 photo-resist structures
Ansel, Y. / Gindele, F. / Scheurer, J. / Reinhard, C. / Neumann, F. | 2003
31
Design for Micro Assembly
Bullema, J. E. / Veninga, E. / Tillie, L. / European Society for Precision Engineering and Nanotechnology | 2003
35
Determination of mechanical properties of micro-specimens produced by micro-moulding techniques
Auhorn, M. / Beck, T. / Schulze, V. / Löhe, D. | 2003
39
Silicon as a Suitable Material in Precision Engineering
Fruhauf, J. / European Society for Precision Engineering and Nanotechnology | 2003
43
Flexural solid hinges etched from silicon
Gärtner, E. / Frühauf, J. / Jänsch, E. / Reuter, D. | 2003
47
Design of spiral piezoelectric cantilever unimorphs for microactuation
Wilson, S.A. / Haigh, R.D. / Southin, J.E.A. / Dorey, R.A. / Whatmore, R.W. | 2003
51
World MEMS Fab: An Overview of the MEMS Industry Worldwide
Mounier, E. / Eloy, J. C. / Leroy, S. / European Society for Precision Engineering and Nanotechnology | 2003
57
A new multi-probe method for precision measurement of cylindrical figures
Endo, K. / Gao, W. / Kiyono, S. | 2003
61
Improvement of air bearing performance by means of laminarization and its application to ultraprecision micromachining
Sawada, K. / Kawai, T. / Ebihara, K. / Takeuchi, Y. | 2003
65
A Manufacturing System for Ultraprecision Polishing of Slight Curved Optical Components
Herold, V. / Jungstand, U. / Schaffel, C. / Waak, T. / European Society for Precision Engineering and Nanotechnology | 2003
69
Ultra-precise positioning with nanometric resolution using rolling guide way and leadscrew mechanism equipped with viscous-elastic element
Fukada, S. / Mikoshiba, T. / Inagaki, T. | 2003
73
A miniaturized fast tool servo for generating micro-structured surface
Tano, M. / Gao, W. / Kiyono, S. / Mito, M. | 2003
77
Friction-free TCP-kinematic for tilt micro manipulator
Neugebauer, R. / Schubert, A. / Koriath, H.J. / Schulz, B. | 2003
81
Design of a small precision lathe
Löffler, F. | 2003
85
Diamond turning of platinum alloys
Feist, C. / Löffler, F. / Wäldele, F. | 2003
89
Connecting Machine Evaluation and Dynamic Simulation Part1: System Identification and Contouring Evaluation
Mueller, U. / Nogi, S. / Liu, J. / European Society for Precision Engineering and Nanotechnology | 2003
89
Connecting machine evaluation and dynamic simulation - Part 1: system idenfitication and contouring evaluation
Mueler, U. / Nogi, S. / Liu, J. | 2003
93
Laser planar encoder with high head-to-scale alignment tolerance
Wu, C.C. / Chang, C.C. / Kao, C.F. | 2003
97
Development of a practical high-performance laser-guided deep-hole boring tool - improvement of guiding strategy
Katsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Moriyama, T. / Hamano, Y. | 2003
101
Enhancement of Operator and System Precision in Micromanipulation
Shacklock, A. P. / Pickering, J. P. / Spowage, A. C. / European Society for Precision Engineering and Nanotechnology | 2003
105
Linear displacement of a miniature robot using on/off controlled piezoelectric elements
Torii, A. / Fukaya, Y. / Doki, K. / Ueda, A. | 2003
109
A piezoelectric drive combining a resonant and a stepping positioning mode
Devos, S. / Volder, M. de / Reynaerts, D. / Brussel, H. van | 2003
113
Kinematics and application of simultaneous double-disk grinding in silicon wafer planarization
Pietsch, G.J. / Kerstan, M. | 2003
117
Coupled simulation of structural dynamics and control loops for the development of machine tools
Weck, M. / Queins, M. / Witt, S. | 2003
121
Investigations on the Limitations of the FE-Analysis of Micro-Devices
Albers, A. / Metz, D. / European Society for Precision Engineering and Nanotechnology | 2003
125
Accuracy Improvement of Parallel Kinematic Machine -Compensation Method for Elastic and Thermal Deformation of Machine Frame-
Oiwa, T. / European Society for Precision Engineering and Nanotechnology | 2003
129
Study of Friction on Miniature Robot Driven by On/Off Controlled Piezo Elements
Torii, A. / Ueda, A. / Liu, X. / Chetwynd, D. G. / European Society for Precision Engineering and Nanotechnology | 2003
133
Modular OD/ID grinding machine with bearings preloaded by inclined iron core linear electric motor
Slocum, A. / Basaran, M. / Cortesi, R. / Marsh, E. | 2003
137
Improving machine tool accuracy by a direct position measurement using a new approach of laser goniometry
Schröder, K. / Ament, C. / Patzelt, S. / Goch, G. | 2003
141
Long stroke fast tool servo with dynamic mass compensation and hydrostatic bearings
Weck, M. / Hennig, J. / Wetter, O. | 2003
145
High dynamic intelligence - boring tool with local integrated control system
Weck, M. / Zimmerschitt-Halbig, P. | 2003
149
Highly dynamic turning machine with PC-based control system using FireWire bus
Weck, M. / Wetter, O. / Börner, U. | 2003
153
Adaptable module for five-axis polishing
Weck, M. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology | 2003
157
Direct drive NC rotary tilt unit for the micro technology
Korischem, B. / Hölter, H. | 2003
165
Combined In-Process Monitoring and Post-Process Measurement Technique for Micro-Machining Applications
Morantz, P. / Shore, P. / European Society for Precision Engineering and Nanotechnology | 2003
169
Micro machining of cemented carbide and polycrystalline diamond using wire-EDM
Klocke, F. / Lung, D. / Antonoglou, G. | 2003
173
Polishing of Structured Surfaces
Brinksmeier, E. / Riemer, O. / Gessenharter, A. / European Society for Precision Engineering and Nanotechnology | 2003
177
Electrodes for Micro-EDM
Schmidt, J. / Fleischer, J. / Knoll, M. / European Society for Precision Engineering and Nanotechnology | 2003
181
Prediction and compensation of machining error in ball-end milling for microscale curved surfaces
Liu, X.W. / Cheng, K. / Webb, D. / Longstaff, A.P. / Widiyarto, M.H. / Jiang, X.Q. / Blunt, L. / Ford, D. | 2003
185
Joining of a micro converter by MS-PVD-deposited solder systems
Lugscheider, E. / Bobzin, K. / Erdle, A. | 2003
189
Diamond Contour Boring and Raster-Milling of Molds for an Ultraprecision Open Ring Light System
Brinksmeier, E. / Autschbach, L. / European Society for Precision Engineering and Nanotechnology | 2003
193
Development of ultraprecise milling techniques for the manufacture of optical quality molds with continuous and microstructured surfaces
Brinksmeier, E. / Autschbach, L. | 2003
197
Cost - effective fabrication of reflection optical gratings for displacement sensor
Blanc, D. / Barbier, A. / Saoudi, R. / Jourlin, Y. | 2003
201
Connection Between Pessure Dstribution and Shape Formation in the Polishing Process of Plane Surfaces
Bergner, D. / Herold, V. / Hoyer, K. / Leopold, J. / European Society for Precision Engineering and Nanotechnology | 2003
205
Prediction of contact between grinding wheel and workpiece - clearance prediction by using hydrophone
Yui, A. / Mototani, S. / Okuyama, S. / Kitajima, T. | 2003
209
Tool Design for End Milling of Micro Structures in Steel
Schmidt, J. / Tritschler, H. / European Society for Precision Engineering and Nanotechnology | 2003
213
Mechanical drilling of microholes in Al/Al2O3 composites
Kudla, L. | 2003
217
Inspections of Micro Systems in the Field of Micro Assembly
Pfeifer, T. / Dussler, G. / Driessen, S. / European Society for Precision Engineering and Nanotechnology | 2003
221
Diamond turning compatible nickel coating
Peeters, P.G.J.M. / Hoorn, G. van der / Broek, D.A.A. van den / Kurowski, A. / Staikov, G. | 2003
225
Industrial Microsystem Electro Plating
Peeters, P. G. J. M. / van den Broek, D. A. A. / de Kubber, D. L. / European Society for Precision Engineering and Nanotechnology | 2003
229
Dynamic Tool Behaviour During Micro Milling of Metallic Composite Materials Measured with a Laser Vibrometer
Uhlmann, E. / Doll, U. / Schauer, K. / European Society for Precision Engineering and Nanotechnology | 2003
233
Germanium Immersion Grating by Using the Ultraprecision Machine Tool by Micro-ELID Grinding
Suzuki, T. / Ohmori, H. / Uehara, Y. / Lin, W. / Dai, Y. / Makinouchi, A. / European Society for Precision Engineering and Nanotechnology | 2003
237
Analysis of Cutting Process in Cutting off Composite Materials with Sawblade
Mizuno, M. / Iyama, T. / European Society for Precision Engineering and Nanotechnology | 2003
241
Cutting Tool Wear Mechanism in Precision Single-Point Diamond Machining of Optical and Bioengineering Polymers
Lavrynenko, S. / European Society for Precision Engineering and Nanotechnology | 2003
245
Development Desktop Machine Tool Applying ELID Grinding System with Constant Pressure Table
Uehara, Y. / Ohmori, H. / Susuki, T. / Mitsuishi, N. / Miura, T. / European Society for Precision Engineering and Nanotechnology | 2003
249
Ultraprecision processing of solid immersion mirror by ELID grinding
Ohmori, H. / Suzuki, T. / Uehara, Y. / Shimizu, T. / Ueyanagi, K. / Adashi, Y. / Wakabayashi, K. | 2003
253
Precision of Etched Bulk Silicon Structures with Dimensions up to the mm-Range
Fruhauf, J. / Kronert, S. / Kruger-Sehm, R. / European Society for Precision Engineering and Nanotechnology | 2003
257
Ultra-precision cutting of titanium alloy with the formed coated-cemented-carbide cutting tool
Sakamoto, S. / Yasui, H. | 2003
261
Research on fine structure of the micro groove cut into sputtered thin film
Nakamura, I. / Horii, N. / Sato, Y. / Seki, H. / Sato, M. | 2003
265
Modelling of Cutting Tool and Work Material Interface Process in Ultraprecision Single-Point Diamond Machining
Mamalis, A. G. / Lavrynenko, S. N. / European Society for Precision Engineering and Nanotechnology | 2003
269
Influences of Crystallographic Orientations in Microcutting of Single Crystalline Copper
Zhang, C. / Rentsch, R. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2003
273
Development of a 3D Packaging Concept for MEMS and Micro Electronics
Veninga, E. P. / Meuwissen, M. H. H. / Bullema, J. E. / European Society for Precision Engineering and Nanotechnology | 2003
277
Best Simultaneous Clamping for Multi Micro-Elements
Balon, S. A. P. / European Society for Precision Engineering and Nanotechnology | 2003
281
2D and 3D Micro-Engraving of Polymer Foils for Laser Targets Applications
Legaie, O. / Bednarczyk, S. / Faese, F. / Perron, G. / European Society for Precision Engineering and Nanotechnology | 2003
285
Discussion of the Ability of Statistical Signal Processing Methods for the Use in Predictive Tool Break Monitoring in Micro Milling
Fleischer, J. / Schmidt, J. / Ruoff, E. / European Society for Precision Engineering and Nanotechnology | 2003
289
Mechanical model and simulation of the ultrasonic vibration assisted turning process
Chen, Jeng-Shyong / Jang, Winn-Chin / Jean, Gwo-Yuh | 2003
293
Optimization of chemical mechanical polishing of thin silicon wafers
Gatzen, H.H. / Guenzel, G. | 2003
297
Effect of ELID (electrolytic in-process dressing) grinding method on corrosion resistance and micro-hardness of metallic biomaterials (Ti-6Al-4V alloy)
Mizutani, M. / Komotori, J. / Katahira, K. / Ohmori, H. / Watanabe, Y. | 2003
301
Development of on-machine profile measuring system with non-contact laser-probe and its properties
Watanabe, Y. / Ohmori, H. / Lin, W. / Katahira, K. / Makinouchi, A. | 2003
305
Development of metal-free electro-conductive resin bonded wheel for ELID grinding
Itoh, N. / Komazawa, R. / Ohmori, H. | 2003
309
Micro-removal mechanism of engineered tool
Imai, K. / Hashimoto, H. | 2003
313
Ultraprecision fabrication of glass ceramic mirror by ELID-grinding with hydrostatic driving machine
Shimizu, T. / Ohmori, H. / Suzuki, T. / Uehara, Y. / Lin, W. | 2003
317
ELID Grinding Characteristics for the Machining of Optical Surface Quality for Ceramic Spherical Lens Molds
Katahira, K. / Schmidt, C. / Dambon, O. / Schneider, U. / Klocke, F. / Ohmori, H. / European Society for Precision Engineering and Nanotechnology | 2003
321
Ultraprecision Diamond Cutting of Dies for Micro-Lens Array by Shaping
Moriwaki, T. / Iguchi, Y. / Hino, R. / Matsuo, M. / European Society for Precision Engineering and Nanotechnology | 2003
325
Non-Contact Handling in Microfabrication
Zah, M. F. / Zimmermann, J. / Zitzmann, A. / Schilp, M. / European Society for Precision Engineering and Nanotechnology | 2003
329
High-Precision Hard Turning of Cemented Carbides
Klocke, F. / Bertalan, C. / European Society for Precision Engineering and Nanotechnology | 2003
333
Advanced Multi Wire Slicing According the "Both Direction" Machinig Cinematic
Klocke, F. / Huttenhuis, S. / Pahler, D. / Themis, V. / European Society for Precision Engineering and Nanotechnology | 2003
337
Grinding of Microstructures in Hardend Steel with CBN Tools
Hoffmeister, H.-W. / Hlavac, M. / European Society for Precision Engineering and Nanotechnology | 2003
341
Design Issues for the Development of Microformed Parts
Antonelli, D. / European Society for Precision Engineering and Nanotechnology | 2003
345
ELID grinding of neutron Fresnel lens with forming wheel
Lin, W. / Ohmori, H. / Guo, J. / Moriyasu, S. / Iwaki, M. | 2003
349
Precision profile grinding of high aspect ratio microstructures
Gatzen, H.H. / Morsbach, C. | 2003
355
Ultrasonic plastification concepts in micro injection moulding
Michaeli, W. / Opfermann, D. / Gärtner, R. | 2003
359
Mass Production of Small Parts Made from Photosensitive Resin
Kobayashi, Y. / Shirai, K. / European Society for Precision Engineering and Nanotechnology | 2003
363
Microstructuring Glass via Hot Embossing
Burkhardt, T. / Ebeling, P. / Schubert, A. / Semar, W. / European Society for Precision Engineering and Nanotechnology | 2003
367
Metal micro parts made by electroforming on two-component lost polymer moulds
Piotter, V. / Holstein, N. / Oskotski, E. / Ruprecht, R. / Hausselt, J. | 2003
371
Powder Injection Molding for Production of Micro Parts
Ruprecht, R. / Merz, L. / Orlygsson, G. / Piotter, V. / Rath, S. / Hausselt, J. / European Society for Precision Engineering and Nanotechnology | 2003
379
A Milestone in Nanometrology: Large Area AFM-Scans with the Nanometre Coordinate Measuring Machine (NCMM)
Petersen, R. / Rothe, H. / European Society for Precision Engineering and Nanotechnology | 2003
383
High accuracy absolute distance measurement within 2 m using two diode lasers
Zhang, C. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. | 2003
387
Standing wave interferometer for length measurements
Büchner, H.J. / Mandryka, V. / Jäger, G. / Bunte, E. / Stiebig, H. | 2003
391
Metrological characterization of a new three-axis piezoresistive micro probe
Nesterov, V. / Pornnopaddol, P. / Brand, U. | 2003
395
Development and Investigation of a Calibration Method for the Depth Measuring System of a Nanoindentation Instrument
Herrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. / European Society for Precision Engineering and Nanotechnology | 2003
395
Development and investigation of a calibration method for the depth measuring system of a nanoindentation intstrument
Herrmann, K. / Li, Z. / Pohlenz, F. / Menelao, F. | 2003
399
Alternative Measuring Modes for Scanning Probe Instrumentation
Koops, K. R. / Dirscherl, K. / European Society for Precision Engineering and Nanotechnology | 2003
403
Developments on the NMi-VSL traceable scanning probe microscope
Dirscherl, K. / Koops, K.R. | 2003
407
Development of micro force setting standards for stylus instruments
Doering, L. / Brand, U. / Peiner, E. / Frühauf, J. / Gärtner, E. | 2003
411
High precision, low force 3D touch probe for measurements on small objects
Meli, F. / Fracheboud, M. / Bottinelli, S. / Bieri, M. / Thalmann, R. / Breguet, J.M. / Clavel, R. | 2003
415
Uncertainty Evaluation of Squareness Measurement by Reversal Technique
Lui, P. K. W. / Huang, H. / Peng, G. S. / Lin, V. T. Y. / European Society for Precision Engineering and Nanotechnology | 2003
419
Real-time control for two-dimensional positioning and scanning with nanometer precision
Su, Y.Y. / Yeh, H.C. / Pan, S.S. / Peng, G.S. | 2003
423
Self-Calibration of Coordinate Measuring Machines
Yoo, S. / Kim, S.-W. / European Society for Precision Engineering and Nanotechnology | 2003
427
Design and manufacture of a tensile testing machine for in-situ atomic force microscope (AFM) mechanical testing
Bamberg, E. / Grippo, C. / Slocum, A. / Boyce, M.C. | 2003
431
A new acoustic method for determination of the effective air temperature for length interferometers
Korpelainen, V. / Hemming, B. / Lehto, H. / Lassila, A. | 2003
435
Measurement of 3D Surface Topography Using Non Contact Sensors - Identification of the Macro- and Micro-Geometric Parameters
Lartigue, C. / Bourdet, P. / Deleuze, S. / European Society for Precision Engineering and Nanotechnology | 2003
439
Homodyne Fiber Coupled Laser Vibrometer
Dontsov, D. / Jager, G. / Buchner, H.-J. / Gerhard, U. / European Society for Precision Engineering and Nanotechnology | 2003
443
Estimation of work damaged layer using magnetic force microscopy
Ichida, Y. / Morimoto, Y. / Sato, R. | 2003
447
Remote calibration of frequency-stabilized lasers in CMS-NML
Lin, T.Y. / Cheng, K.Y. / Lu, S.H. | 2003
451
Precision Plane Angle Measurements in Dynamic Mode by Means of Optical Encoder
Goncharov, N. V. / Filatov, Y. V. / European Society for Precision Engineering and Nanotechnology | 2003
455
Comparative investigation of optical techniques for topography measurement of rough plastic surfaces
Bariani, P. / Hansen, H.N. / Theilade, U.R.A. / Chiffre, L. de | 2003
459
Quality of topographical micro replication in injection moulding
Theilade, U.R.A. / Hansen, H.N. / Bariani, P. / Chiffre, L. de / Kjaer, E. | 2003
463
Novel Edge Profile Measurement for Micro Cutting Tool by Laser Diffraction
Khajornrungruang, P. / Miyoshi, T. / Takaya, Y. / Takahashi, S. / Harada, T. / Isago, S. / European Society for Precision Engineering and Nanotechnology | 2003
467
Further improvement of the measurement capability of the metrological scanning probe microscope Veritekt C
Dai, D. / Pohlenz, F. / Hasche, K. | 2003
471
Development and Validation of a Novel Approach to the Calibration of Internal and External Threads on Coordinate Measuring Machines
Carmignato, S. / De Chiffre, L. / Savio, E. / Tosello, G. / European Society for Precision Engineering and Nanotechnology | 2003
475
International Comparison in the Field of Nanometrology: Step Height (NANO2)
Koenders, L. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology | 2003
479
Heterodyne laser interferometry using a single polarisation-preserving optical fibre
Knarren, B.A.W.H. / Haitjema, H. / Schellekens, P.H.J. | 2003
483
CAD-Based Measurements in Profile Tolerances Verification
Meneghello, R. / Concheri, G. / Savio, E. / European Society for Precision Engineering and Nanotechnology | 2003
487
Surface property mapping and characterisation
Liu, X. / Zhang, J. / Sun, T. | 2003
491
Influence of Nanostandard Properties on Calibration Procedures of SPMs
Dziomba, T. / Hassler-Grohne, W. / Bosse, H. / Danzebrink, H. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology | 2003
495
Nano-Roughness Standards With a Very Low Roughness Value
Gatzen, H. H. / Kourouklis, C. / European Society for Precision Engineering and Nanotechnology | 2003
499
Measurement of line scales and linear encoders on the PTB Nanometer Comparator
Flugge, J. / Koning, R. / Bosse, H. / European Society for Precision Engineering and Nanotechnology | 2003
503
New approaches in interferometric analysis of microstructured surfaces
Pfeifer, T. / Schneefuß, K. | 2003
507
Development of a simulation tool for the analysis of workshop influences on interferometrical measurements
Dörner, D. / Bai, A. / Pfeifer, T. | 2003
511
Development of a Ultra-Fast Confocal Scanner for High Quality 3D-Inspection
Schick, A. / Neubauer, S. / European Society for Precision Engineering and Nanotechnology | 2003
515
Photogrammetric 3D-Measurement of Microstructures from SEM images
Molnar, G. / Tutsch, R. / Fischer, G. / European Society for Precision Engineering and Nanotechnology | 2003
519
Laser optical surface characterization of complex optical elements in the nanometric range
Patzelt, S. / Bosse, S. / Goch, G. | 2003
523
Uncertainty Contributions Due to Different Measurement Strategies Applied to Optomechanical Hole Plate
Morace, R. E. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology | 2003
527
Retrieval of the Spatial Frequency Profile of a Laser Written Grating Scale
Jourlin, Y. / Tishchenko, A. V. / Pigeon, F. / Bouchet, G. / Parriaux, O. / Schimansky, C. / Buchner, C. / European Society for Precision Engineering and Nanotechnology | 2003
531
Optical metrology for MEMS characterization
Pasop, F. / Novak, E. / Browne, T. | 2003
535
Calibration of Rings Using Multi-Step and Reversal Techniques on CMMs
Savio, E. / Tosello, G. / De Chiffre, L. / Zeleny, V. / Skalnik, P. / European Society for Precision Engineering and Nanotechnology | 2003
539
Validation of Calibration Procedures for Freeform Parts on CMMs
Savio, E. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology | 2003
543
Improved Accuracy with Fibre Optic Laser Scale System and Real Time Compensation for Refractive Index
Krug, R. / European Society for Precision Engineering and Nanotechnology | 2003

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