Proceedings of the 6th international conference // European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna [Austria] / ed.: H. Zervos ... ; Vol. 2 (Englisch)

2006

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  • Titel:
    Proceedings of the 6th international conference // European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna [Austria] / ed.: H. Zervos ... ; Vol. 2
  • Sonstige Beteiligte:
  • Kongress:
    International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN) ; 6; 2006; Baden bei Wien
    Annual general meeting of the European Society for Precision Engineering and Nanotechnology ; 8; 2006; Baden bei Wien
  • Verlag:
    Euspen
  • Erscheinungsort:
    Bedford
  • Erscheinungsjahr:
    2006
  • Format / Umfang:
    483 S.
  • Anmerkungen:
    Ill., graph. Darst.
  • ISBN:
  • Medientyp:
    Konferenzband
  • Format:
    Print
  • Sprache:
    Englisch
  • Schlagwörter:
  • Klassifikation:
    BKL:    52.88 Feinwerktechnik, Mechatronik / 50.94 Mikrosystemtechnik, Nanotechnologie
  • Datenquelle:
  • Exportieren:

Inhaltsverzeichnis Konferenzband

Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.

4
Strategies to increase the aspect ratio of micro structures in abrasive blasting
Achtsnick, M. / Förster, R. / Wardenaar, R.P.S. / Hoogstrate, A.M. | 2006
8
Tools for polishing of micro structures
Schulte, H. / Riemer, O. / Brinksmeier, E. | 2006
12
Alignment techniques for the high precision assembly of hybrid microsystems
Brecher, C. / Freundt, M. / Lange, S. / Weinzierl, M. | 2006
24
Flexible handling system for an electron beam based microsystem production centre
Zäh, M.F. / Franzkowiak, M. | 2006
24
Deterministic ion beam figuring of surface errors in the sub-millimeter spatial wavelength range
Hänsel, T. / Seidel, P. / Schindler, A. / Rauschenbach, B. | 2006
28
Hot embossing of large area microfluidic devices with through holes
Mehne, C. / Heckele, M. / Steger, R. / Koltay, P. / Zengerle, R. / Warkentin, D. | 2006
32
Compression moulding of precision diffractive glass. Optical components
Klocke, F. / Yi, A.Y. / Demmer, A. / Pongs, G. / Chen, Y. | 2006
32
Ceramic micro needle array for painless drug delivery and biological sensing
Gatzen, H.H. / Halalo, K. | 2006
36
Abrasive flow machining for microhole processing
Uhlmann, E. / Mihotovic, V. | 2006
44
Study of different nickel platings in ultra precision diamond turning
Osmer, J. / Autschbach, L. / Brinksmeier, E. | 2006
56
A novel micro-machining technology based on the magnetorheological effect of abrasive slurry
Lu, J.B. / Yan, Q.S. / Yu, J. / Gao, W.Q. | 2006
60
3-D overlay assembly of mechanical components with submicron accuracy
Mohaupt, M. / Eberhardt, R. / Beckert, E. / Damm, C. / Peschel, T. / Tünnermann, A. | 2006
62
Tests and artefacts for determining the structural resolution of optical distance sensors for coordinate measurement
Carmignato, S. / Neuschaefer-Rube, U. / Schwenke, H. / Wendt, K. | 2006
64
Design of a precision micro-assembly device with 6 degree of freedom
Meeß, R. / Löffler, F. | 2006
66
Measurement of charging under DUV laser by a test chip for MOEMS and the mechanism of charging
Trabzon, L. / Lukat, K. / Jankowski, I. / Duerr, P. / Schenk, H. | 2006
68
In-process monitoring of contact zone forces during rotational grinding of silicon wafers
Pähler, D. / Klocke, F. / Beegen, L. / Herben, M. / Jakob, A. | 2006
72
Micro injection moulding using polymeric, metal and ceramic materials
Piotter, V. / Beck, M. / Zeep, B. / Ruprecht, R. / Hausselt, J. | 2006
76
Modular system concept for ultra-precision assembly
Schubert, A. / Schulz, B. / Freitag, H. | 2006
80
Development of a dynamic linear axis for machining of groove structures
Brecher, C. / Winterschladen, M. / Lange, S. / Merz, M. / Klar, R. | 2006
92
Electro contact discharge dressing for micro-grinding
Denkena, B. / Reichstein, M. / Hahmann, D. | 2006
96
Efficient micromachining of hardened steels by using laser ablation and EDM
Fleischer, J. / Schmidt, J. / Haupt, S. | 2006
103
Design of a magnetically levitated nm-resolution linear slider
Laro, D. / Porck, T. / Spronck, J. / Eijk, J. van / Lebedev, A. | 2006
107
Recent developments of AIMS, a novel active isolation concept
Vervoordeldonk, Michiel J. / Stoutjesdijk, Henry | 2006
112
Thermal micro-sinter-joining as a potential enhancement for an automated process chain for microPIM bevel gears
Fleischer, Jürgen / Dieckmann, Adam-Mwanga | 2006
115
Development of a three axis fast tool servo for ultra precision machining
Wada, T. / Takahashi, M. / Tashiro, I. / Moriwaki, T. / Nakamoto, K. | 2006
124
Micro-milling of titanium- and nickel-base alloys
Hoffmeister, H.W. / Hlavac, M. | 2006
128
Analysis of tool influences on high-precision-micromilling of steel workpieces
Kahnis, P. / Weinert, K. | 2006
131
The design and fabrication of a small Brushless DC Motor with integrated drive circuit
Choi, Jun-Hyuk / Rhyu, Se-Hyun / Sung, Ha-Gyeung | 2006
132
A newly developed polishing method by large-area electron beam irradiation
Uno, Y. / Okada, A. / Uemura, K. / Raharjo, P. | 2006
139
Development of an optical alignment control module with high speed and accuracy for the spectrum inspection of optical filters in WDM
Kim, G.B. / Kim, S.C. | 2006
144
High temperature micro forming of inorganic glass - an effective replication method
Schubert, Andreas / Edelmann, Jan / Burkhardt, Thomas | 2006
168
Development of microimprint technology with electroformed nickel mold
Shibata, T. / Takahashi, Y. / Horiuchi, O. / Masuzawa, T. / Mineta, T. / Makino, E. | 2006
176
Controller strategy for a 6 DOF piezoelectric translation stage
Buice, Eric S. / Yang, Hua / Smith, Stuart T. / Hocken, Robert J. / Trumper, David L. / Otten, David / Seugling, Richard M. | 2006
180
Flexible platform for the production of micro-mechatronical products
Fleischer, J. / Volkmann, T. / Krahtov, L. | 2006
180
Using high-resolution encoders in nanometer applications
Holzapfel, W. | 2006
184
Real-time hysteresis compensation for electromagnetic actuators applied in high-precision multi-coordinate drives
Volkert, R. / Kireev, V. / Radler, O. / Ströhla, T. / Zöppig, V. | 2006
192
Calibration of v-shaped cantilever for micro force metrology in biomedical engineering
Doering, L. / Brand, U. | 2006
204
Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding
Hesse, S. / Schäffel, C. / Mohr, H.U. / Maass, T. | 2006
208
Development of novel multi-axis silicon gyroscope with piezoelectric PZT thin film
Miho, Takuya / Ishida, Kouji / Mineta, Takashi / Makino, Eiji / Shibata, Takayuki / Watanabe, Yoshiyuki | 2006
216
Deterministic machining of brittle materials applying engineered diamond wheels
Rickens, K. / Grimme, D. / Brinksmeier, E. | 2006
220
Influence of cutting fluids on the performance of the micro milling process of tool steel
Klocke, F. / Arntz, K. / Bodenhausen, J. von / Avila-Robinson, A. | 2006
228
High - precise micro bonding process using a focused stream of hot air
Andrijasevic, D. / Bissacco, G. / Giouroudi, I. / Smetana, W. / Brenner, W. | 2006
241
Development of fine alignment system using moire interference phenomena
Uchida, Yoshihisa | 2006
245
A new hydrostatic rotary table with angled surface self compensation
Roblee, Jeff / Walter, Mark / Walter, Jason / Kane, Nathan / Sihler, Joachim / Slocum, Alexander | 2006
256
New drilling tools for the manufacturing of micro-holes in hard and brittle materials
Hoffmeister, H.W. / Hlavac, M. | 2006
264
Wire EDM technology with a focus on enhanced micro precision fabrication
Alam, Sadiq M. / Rahman, M. / Lim, H.S. | 2006
272
Laser-based surface modification - micro structures on macro areas
Siegel, Frank / Ostendorf, Andreas / Stute, Uwe | 2006
285
A novel piezoelectric drive module for application in a stiff and accurate multi-DOF positioning system
Vijver, W. Van de / Reynaerts, D. / Brussel, H. van | 2006
288
An application of dip-coating technique for the fabrication of a self-assembled microstructure on a hydrophilic/hydrophobic-patterned substrate
Kaneko, A. / Moronuki, N. / Shibata, T. / Kogiso, J. / Uchida, K. / Kubo, T. | 2006
289
Linear encoders used for investigations of length comparator capabilities and as length transfer standards
Flügge, J. / Köning, R. / Bosse, H. | 2006
292
Micro CMM spherical stylus machining by one pulse electro discharge - discharge energy distribution and dimension of spherical stylus -
Sheu, Dong-Yea | 2006
300
High performance drilling of monocrystalline silicon using monocrystalline diamond drill
Yokomizo, Seiichi / Kubota, Shinichirou / Uno, Yoshiyuki | 2006
305
A novel linear motor driven aerostatic planar positioning table system for nano-machining
Yoshioka, H. / Taniguchi, K. / Shinno, H. | 2006
309
High precision alignment in multi-layer Nanolmprint lithography
Mühlberger, M. / Schwinger, W. / Gmainer, M. / Schöftner, R. / Glinsner, T. / Hasenfuß, C. / Hingerl, K. / Kley, E.B. | 2006
317
Development of an ultrasonic vibration spindle with an aerostatic bearing for micro drilling
Onikura, H. / Ohnishi, O. / Sajima, T. / Koga, T. / Moriya, M. | 2006
320
Investigation of the effect of atmospheric pressure airplasma surface pretreatment on the ICP etching of CVD diamond film
Chao, C.L. / Chou, W.C. / Chien, C.Y. / Ma, K.J. / Lin, H.Y. | 2006
325
Ultra-precise positioning over a one-millimeter stroke by using differential ball screw
Fukada, S. / Motohashi, S. / Fukuoka, K. / Fukui, D. / Ishibe, A. | 2006
329
Surface integrated thin film sensors for high precision measurement of temperature, wear, pressure and displacement in tribological contacts
Luethje, H. / Biehl, S. / Bandorf, R. | 2006
336
Development of fixed abrasive tools utilizing sol-gel method
Tani, Yasuhiro / Miyata, Yasuhiro / Shibata, Junji / Kamimura, Yasuyuki | 2006
344
Formation of nanocrystalline structure on the surface layer by friction stir burnishing
Sasahara, H. / Yata, T. / Segawa, T. / Tsutsumi, M. | 2006
349
Ultrasonic vibration assisted electro-discharge machining of deep micro holes
Liu, K. / Yasutomo, K. / Ding, X. / Lim, G.C. / Zhou, L.B. | 2006
369
Development of micro Shack Hartmann wave-front sensor for non-invasive mapping of fluid temperature and flow in microsystems
Cyca, M.J. / Spiewak, S.A. | 2006
373
Development of DNA manipulator using dielectrophoresis
Koshimizu, S. / Onda, H. / Tsuneyoshi, T. / Shimamoto, N. | 2006
374
Current developments in linewidth metrology at the PTB
Häßler-Grohne, W. / Frase, C.G. / Czerkas, S. / Dirscherl, K. / Bodermann, B. / Buhr, E. / Ehret, G. / Wurm, M. / Bosse, H. | 2006
377
Precision structured surfaces as functional carriers for in-vitro cultures of living cells
Wanzenboeck, Heinz / Dominizi, Karl / Erdösi, Daniel / Bertagnolli, Emmerich / Bogner, Elisabeth / Wirth, Michael / Gabor, Franz | 2006
378
Use of optical fiber sections for AFM lateral calibration
Marinello, F. / Savio, E. | 2006
381
Design of a suspended silicon substrate heater and its application to novel studies of carbon nanotube growth
Laake, L.C. van / Hart, A.J. / Slocum, A.H. | 2006
389
The fabrication of carbon nanotube cartridges
Choi, J.S. / Kwak, Y.K. / Kim, S.H. | 2006
394
An in-situ imaging system for the investigation of interlayer deformation during nanoindentation testing
Li, Zhi / Herrmann, Konrad / Pohlenz, Frank | 2006
397
Rapid nanopatterning of metallic glass surface using etching enhancement induced by focused ion beam irradiation
Kawasegi, N. / Morita, N. / Yamada, S. / Takano, N. / Oyama, T. / Ashida, K. / Taniguchi, J. / Miyamoto, I. / Momota, S. / Ofune, H. | 2006
401
A new approach to the measurement of free form surfaces for micro optical applications
Kurz, M. / Oberschmidt, D. / Uhlmann, E. / Blümel, T. / Kafka, R. / Osten, S. / Krüger, S. | 2006
417
Fabrication and mechanical properties of air core polymer photonic crystal fibers
Ma, K.J. / Chien, H.H. / Yang, S.C. / Chao, C.L. | 2006
421
Metrological long-range scanning probe microscope
Dorozhovets, N. / Hausotte, T. / Hofmann, N. / Manske, E. / Jäger, G. | 2006
426
A method for line edge and sidewall roughness characterization
Marinello, F. / Savio, E. | 2006
433
Fabrication of superhydrophobic surface on ePTFE materials
Chien, H.H. / Ma, K.J. / Wu, W.S. / Yeh, Y.P. / Chao, C.L. | 2006
437
Diamond micro chiselling of micro structured moulds
Flucke, C. / Gläbe, R. / Brinksmeier, E. | 2006
438
New depth-setting standards with grooves up to 5 mm depth
Brand, U. / Schnädelbach, H. / Schödel, R. / Feist, C. / Hinzmann, G. | 2006
441
Capillary tool electrode with fluid removal medium for wear compensation in EDM
Fleischer, J. / Schmidt, J. / Halvadjiysky, G. | 2006
453
Combining mechanical micromachining and glass bonding to fabricate robust micro structures
Gatzen, H.H. / Halalo, K. | 2006
454
DUV pulse laser wavelength meter in a laser diffractometry system for an absolute calibration of 100 nanometer pitch standards
Gonda, S. / Yoshizaki, K. / Misumi, I. / Kurosawa, T. / Takatsuji, T. / Kitta, J. / Kubota, F. / Mine, H. | 2006
469
3D microstructures with undercuts and their replication
Zajadacz, J. / Zimmer, K. / Bogdanski, N. / Scheer, H.C. | 2006
470
Nanometrology: high accuracy measuring procedures in large areas with a nanopositioning and nanomeasuring machine
Manske, E. / Büchner, H.J. / Hausotte, T. / Schmidt, I. / Mastylo, R. / Machleidt, T. / Jäger, G. | 2006
504
A novel probe module for true 3D measurements of micro- and nanoscale structures
Dai, Gaoliang / Wolff, Helmut / Pohlenz, Frank / Danzebrink, Hans-Ulrich / Wilkening, Günter | 2006
524
Development of a laser-guided deep-hole evaluating probe: An exchangeable measuring unit for a counter-boring head
Katsuki, A. / Onikura, H. / Sajima, T. / Zhen, J.G. / Park, H.K. / Murakami, H. | 2006