Integrated system and control design of a one DoF nano-metrology platform (Englisch)
- Neue Suche nach: Saathof, Rudolf
- Neue Suche nach: Thier, Markus
- Neue Suche nach: Hainisch, Reinhard
- Neue Suche nach: Schitter, Georg
- Neue Suche nach: Saathof, Rudolf
- Neue Suche nach: Thier, Markus
- Neue Suche nach: Hainisch, Reinhard
- Neue Suche nach: Schitter, Georg
In:
Mechatronics
;
47
;
88-96
;
2017
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Integrated system and control design of a one DoF nano-metrology platform
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Beteiligte:Saathof, Rudolf ( Autor:in ) / Thier, Markus ( Autor:in ) / Hainisch, Reinhard ( Autor:in ) / Schitter, Georg ( Autor:in )
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Erschienen in:Mechatronics ; 47 ; 88-96
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Verlag:
- Neue Suche nach: Elsevier Ltd
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Erscheinungsdatum:24.08.2017
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Format / Umfang:9 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 47
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