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By using high resolution electron beam lithography, we fabricated MSM photodetectors with sub-100-nm finger spacing and width, which are, to our knowledge, the smallest ever reported. DC measurement showed low dark current and high sensitivity. An autocorrelation technique is being used to study the high-speed performance. The Monte-Carlo simulation showed that the sub-picosecond response time can be achieved as the finger spacing shrinks below 100 nm. The parasitic elements will become very important to high speed operation. By optimizing the device structure, however, one can minimize the effects caused by parasitic elements to achieve the sub-picosecond response time. For the 30 nm finger spacing and finger width MSM photo-detector, the simulated intrinsic response time is 0.3 ps, but and the actual time can be even shorter, because of velocity overshoot. The external response time of the 30 nm spacing device is 0.4 ps, and the cut-off frequency is over 1 THz.