Monte Carlo simulation of the thermalization of sputtered atoms and reflected atoms in the magnetron sputtering discharge (Englisch)
- Neue Suche nach: Yamamura, Y.
- Neue Suche nach: Ishida, M.
- Neue Suche nach: Yamamura, Y.
- Neue Suche nach: Ishida, M.
In:
Journal of Vacuum Science and Technology, Part A (Vacuums, Surfaces, and Films)
;
13
, 1
;
101-112
;
1995
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Monte Carlo simulation of the thermalization of sputtered atoms and reflected atoms in the magnetron sputtering discharge
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Weitere Titelangaben:Monte-Carlo-Simulation der Thermalisierung von zerstäubten und reflektierten Atomen bei der Magnetron-Zerstäubungsentladung
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Beteiligte:Yamamura, Y. ( Autor:in ) / Ishida, M. ( Autor:in )
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Erschienen in:
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Verlag:
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Erscheinungsdatum:1995
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Format / Umfang:12 Seiten, 31 Quellen
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ISSN:
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Coden:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 13, Ausgabe 1
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