Synonyme wurden verwendet für: Elektronenstrahllithografie
Suche ohne Synonyme: keywords:(Elektronenstrahllithografie)
Verwendete Synonyme:
- e beam lithography
- electron beam lithography
- elektronenlithografie
- elektronenlithographie
- elektronenstrahllithographie
1–10 von 6.252 Ergebnissen
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Resolution Limits of Electron-Beam Lithography toward the Atomic Scale
American Chemical Society | 2013|Schlagwörter: electron beam lithography, high voltage electron beam lithography -
Optimized marker definition for high overlay accuracy e-beam lithography
Elsevier | 2012|Schlagwörter: E-beam-lithography -
Nanofabrication by electron beam lithography and its applications: A review
Elsevier | 2015|Schlagwörter: Electron beam lithography -
Electron Beam Lithography on Irregular Surfaces Using an Evaporated Resist
American Chemical Society | 2014|Schlagwörter: electron beam lithography -
Fabrication of phononic crystals on free-standing silicon membranes
Elsevier | 2015|Schlagwörter: E-beam lithography -
Alignment verification for electron beam lithography
Elsevier | 2014|Schlagwörter: Electron beam lithography -
High aspect ratio deep UV wire grid polarizer fabricated by double patterning
Elsevier | 2012|Schlagwörter: E-beam lithography -
Acceleration of e-beam lithography by minimized resist exposure for large scale nanofabrication
Elsevier | 2016|Schlagwörter: E-beam lithography -
Wide-Gamut Plasmonic Color Palettes with Constant Subwavelength Resolution
American Chemical Society | 2019|Schlagwörter: electron-beam lithography -
Stooped Nanohairs: Geometry‐Controllable, Unidirectional, Reversible, and Robust Gecko‐like Dry Adhesive
Wiley | 2009|Schlagwörter: Electron‐beam lithography