Erscheinungsjahr
Datenquelle
Format
Lizenz
Sprache
Synonyme wurden verwendet für: Elektronenstrahllithografie
Suche ohne Synonyme: keywords:(Elektronenstrahllithografie)
Verwendete Synonyme:
- e beam lithography
- electron beam lithography
- elektronenlithografie
- elektronenlithographie
- elektronenstrahllithographie
1–20 von 32 Ergebnissen
Sortieren:
Sortieren:
-
Semiconductor on glass photocathodes for high throughput maskless electron beam lithography
Tema Archiv | 1997|Schlagwörter: Elektronenstrahllithographie -
Semiconductor on glass photocathodes as high-performance sources for parallel electron beam lithography
Tema Archiv | 1996|Schlagwörter: Elektronenstrahllithographie, parallel electron beam lithography -
Effect of oxygen adsorption on the efficiency of magnesium photocathodes
Tema Archiv | 2003|Schlagwörter: Elektronenstrahllithographie -
IGFET inverter circuits made with electron lithography
Tema Archiv | 1973|Schlagwörter: ELEKTRONENLITHOGRAPHIE -
Schottky barrier diodes fabricated on epitaxial GaAs using electron beam litography
Tema Archiv | 1975|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE -
Distributed axis electron-beam system for lithography and inspection-preliminary experimental results
Tema Archiv | 2002|Schlagwörter: Elektronenstrahllithographie -
Fabrication of Si nanostructures for light emission study
Tema Archiv | 1993|Schlagwörter: Elektronenstrahllithographie -
Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope
Tema Archiv | 1988|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE, ULTRALOW VOLTAGE ELECTRON BEAM LITHOGRAPHY -
Analysis of the performance limitations from Coulomb interaction in maskless parallel electron beam lithography systems
Tema Archiv | 1998|Schlagwörter: Elektronenstrahllithographie -
Resist charging in electron-beam lithography
Tema Archiv | 1998|Schlagwörter: Elektronenstrahllithographie -
Blanked aperture array for parallel electron beam lithography
Tema Archiv | 1997|Schlagwörter: Elektronenstrahllithographie -
Performance investigation of Coulomb interaction-limited high throughput electron beam lithography based on empirical modeling
Tema Archiv | 1998|Schlagwörter: Elektronenstrahllithographie -
Can nanolithography ever be a manufacturing technology?
Tema Archiv | 1995|Schlagwörter: Elektronenstrahllithographie -
Lithographically patterned single-domain cobalt islands for high-density magnetic recording
Tema Archiv | 1996|Schlagwörter: Elektronenstrahllithographie, direct write electron beam lithography -
Sub-100 nm gate length GaAs MESFETs fabrication by molecular beam epitaxy and electron beam lithography
Tema Archiv | 1987|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE -
Submicron patterning of thin cobalt films for magnetic storage
Tema Archiv | 1994|Schlagwörter: Elektronenstrahllithographie, direct write electron-beam lithography -
Generation and applications of finely focused beams of low-energy electrons
Tema Archiv | 1981|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE -
Exposure of calcium fluoride resist with the scanning tunneling microscope
Tema Archiv | 1987|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE -
Applications of the electron beam exposure system (EBES)
Tema Archiv | 1975|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE -
Quantum interference devices fabricated using molecular-beam epitaxy and ultra-high-resolution electron-beam lithography
Tema Archiv | 1989|Schlagwörter: ELEKTRONENSTRAHLLITHOGRAPHIE, ULTRA-HIGH-RESOLUTION ELECTRON-BEAM LITHOGRAPHY