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journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Improving the topography performance of ion implantation resist [10147-48]
British Library Conference Proceedings | 2017 -
Full chip hierarchical inverse lithography: a solution with perfect symmetry [10147-20]
British Library Conference Proceedings | 2017 -
Adjusting the transmission bands of the negative curvature hollow-core fibers
British Library Conference Proceedings | 2023| -
Design and fabrication of special photonic crystal fibers for sensing applications
British Library Conference Proceedings | 2023| -
Numerical optimization of tunable Dy-doped ZBLAN fiber lasers for yellow emission
British Library Conference Proceedings | 2023| -
Direct measurement of the maximum detection range of an automotive lidar with a table-top setup for series production
British Library Conference Proceedings | 2023| -
Tailored gas-absorbing materials for packaged opto-electronic devices
British Library Conference Proceedings | 2023| -
Fiber optical coupling with engineered scattering elements
British Library Conference Proceedings | 2023| -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Development of the next-generation ArF excimer laser with ultra-narrow stable spectral bandwidth for multiple patterning immersion lithography [10147-59]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
Accurate characterization of 2D etch bias by capturing surrounding effects from resist and trench areas [10147-34]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
FSO link attenuation measurement in extreme winter conditions for secure 5G applications
British Library Conference Proceedings | 2023| -
Few-mode fibers as optical dendrites for 40 Gbps computing
British Library Conference Proceedings | 2023| -
Heterogeneous integration of VCSELs on 3 μm SOI silicon photonics platform with up-reflecting mirrors
British Library Conference Proceedings | 2022| -
Single-mode polymer waveguide for fan-in/fan-out of multicore fiber by the mosquito method
British Library Conference Proceedings | 2022|