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KrF excimer laser-based patterning system for dual applications in both lithography and ablation

Santillan, Julius Joseph / Uemori, Nobutaka / Yamaoka, Hiroshi et al. | British Library Conference Proceedings
Imaging performance enhancement by improvements of spectral performance stability and controllability on the cutting-edge

Igarashi, Miwa / Miyamoto, Hirotaka / Katou, Masahide et al. | British Library Conference Proceedings
Resist shrinkage during development: rigorous simulations and first compact model for OPC

Granik, Yuri / Khaira, Daman | British Library Conference Proceedings
An OPC approach to improve logic gate features corner fidelity

Lin, Ping-Hung / Chao, Tzu-Chi / Yeh, Shin-Shing et al. | British Library Conference Proceedings
Metrology and deep learning integrated solution to drive OPC model accuracy improvement

Yuan, Wei / Lu, Yifei / Zhao, Yuhang et al. | British Library Conference Proceedings
Through-the-mask (TTM) optical alignment for high volume manufacturing nanoimprint lithography systems

Komaki, Takamitsu / Unno, Yasuyuki / Matsumoto, Takahiro et al. | British Library Conference Proceedings
Fast all-angle Mask 3D for ILT patterning

Pearman, Ryan / Meyer, Mike / Ungar, Jeff et al. | British Library Conference Proceedings
Improvements of the PLD (Pulsed Laser Deposition) method for fabricating photocathodes in ICMOS (Intensified CMOS) sensors

Lee, Dae-Hee / Park, Youngsik / Moon, Bongkon et al. | British Library Conference Proceedings
Humidity sensor based on optical fiber coated with agarose gel

Novais, Susana / Ferreira, Marta S. / Pinto, João L. | British Library Conference Proceedings
Improving ORC methods and hotspot detection with the usage of aerial images metrology

Weisbuch, Francois / Thaler, Thomas / Buttgereit, Ute et al. | British Library Conference Proceedings
Accurate etch modeling with massive metrology and deep-learning technology

Lu, Yifei / Zhao, Yuhang / Li, Ming et al. | British Library Conference Proceedings
Metal coated fiber sensor for laser power measurements with enhanced sensitivity

Khramov, Ivan / Shaidullin, Renat / Ryabushkin, Oleg | British Library Conference Proceedings
Predictable etch model using machine learning

Kim, Youngchang / Jung, Sunwook / Kwak, DooHwan et al. | British Library Conference Proceedings
Improvement of SADP CD control in 7nm BEOL application

Lin, Qi / Hisamura, Toshiyuki / Chong, Nui et al. | British Library Conference Proceedings
Automatic parameter setting for lens aberration control during product lot exposure

Kanakutsu, Yutaka / Koizumi, Yukio / Ikezawa, Hironori et al. | British Library Conference Proceedings
Scaling-up freeform manufacturing: challenges and solutions

Coniglio, Jen / Brunelle, Matt / Ferralli, Ian et al. | British Library Conference Proceedings
Development of novel integrated in-line inspection techniques for pipeline inspection

Sampath, Santhakumar / Sohn, Hoon / Bhattacharya, Bishakh | British Library Conference Proceedings
Advances in freeform manufacturing

Wolfs, Franciscus / Ross, James / DeFisher, Scott | British Library Conference Proceedings
Multi-functional immersion grating by homemade freeform cutting machine

Sukegawa, Takashi / Okura, Yukinobu | British Library Conference Proceedings
Definitions of criteria for assessing feasibility and measurability of freeform surfaces

du Jeu, Christian / Fourez, Julien / El Handrioui, Hassan et al. | British Library Conference Proceedings

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