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- Maschinenbau, Energietechnik (25.951)
- Physik (19.317)
- Mathematik (15.339)
- Elektrotechnik (8.643)
- Informatik (7.672)
- Medizin (4.046)
- Medizintechnik (3.664)
- Technik (3.129)
- Chemie (2.866)
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- Verkehrstechnik, Verkehrswesen (606)
- Erziehungswissenschaften (601)
- Wirtschaftswissenschaften (328)
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Format
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Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
1–20 von 41.434 Ergebnissen
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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017