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1–20 von 25.951 Ergebnissen
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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017