Erscheinungsjahr
Datenquelle
Fach
- ‹ Alle Fächer
- Physik (36.852)
- Maschinenbau, Energietechnik (25.954)
- Verkehrstechnik, Verkehrswesen (22.149)
- Biowissenschaften, Biologie (10.160)
- Elektrotechnik (8.435)
- Medizintechnik (4.717)
- Medizin (3.811)
- Chemie (3.434)
- Informatik (3.412)
- Werkstoffkunde (3.210)
- Mathematik (2.535)
- Technik (1.365)
- Erziehungswissenschaften (601)
- Chemische und Umwelttechnik (327)
- Wirtschaftswissenschaften (310)
- Geowissenschaften, Geographie (288)
- Bautechnik (175)
- Gartenbau (58)
- Bergbau (8)
- Architektur (5)
Sprache
-
Lens aberration measurement technique using attentuated phase-shifting mask [4000-139]
British Library Conference Proceedings | 2000| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Modeling of dynamic image performance for lithographic projection lens
British Library Conference Proceedings | 2019| -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018 -
Properties of Kummer beams in the structure of metamaterials [8884-69]
British Library Conference Proceedings | 2013| -
Slumping technique for the manufacturing of a representative x-ray grazing incidence mirror module for future space missions [8884-58]
British Library Conference Proceedings | 2013| -
Characterization of structural relaxation in As~2Se~3 for analysis of lens shape change in glass press mold cooling and post-process annealing [8884-38]
British Library Conference Proceedings | 2013| -
Relationships between subsurface damage depth and surface roughness of grinded glass optics [8884-9]
British Library Conference Proceedings | 2013| -
Efficiency of magnetorheological fluid finishing on the elimination of defects in fused silica optics [8884-7]
British Library Conference Proceedings | 2013| -
Experimental study on SPDT machining of Gallium Phosphide [8884-92]
British Library Conference Proceedings | 2013| -
4D phase profile measurements using a single-shot phase shifting technique [8884-77]
British Library Conference Proceedings | 2013| -
Off-axis mirror fabrication from spherical surfaces under mechanical stress [8884-72]
British Library Conference Proceedings | 2013| -
Effect of polishing plane vibration on large-size optical workpieces in continuous polishing [8884-60]
British Library Conference Proceedings | 2013| -
Precision interferometric measurements of refractive index of polymers in air and liquid [8884-53]
British Library Conference Proceedings | 2013| -
Rapid design of LED optical elements with two free-form surfaces generating uniformly illuminated rectangular area [8884-48]
British Library Conference Proceedings | 2013| -
Comparison of contact and non-contact asphere surface metrology devices [8884-26]
British Library Conference Proceedings | 2013| -
Deterministic polishing process for aspheric lenses in a production environment [8884-13]
British Library Conference Proceedings | 2013| -
NASA funding opportunities for optical fabrication and testing technology development (Plenary Paper) [8884-501]
British Library Conference Proceedings | 2013| -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Intra-satellite optical interconnect space market and technical challenges
British Library Conference Proceedings | 2020| -
Optical characterization of window materials for aerospace applications [8884-50]
British Library Conference Proceedings | 2013| -
Design of systems involving easily measurable aspheres [8884-45]
British Library Conference Proceedings | 2013|
Meine Suche schicken an (beta)
Schicken Sie ihre Suchanfrage (Suchterm ohne Filter) an andere Datenbanken, Portale und Kataloge, um ggf. weitere interessante Treffer zu finden:
Dimensions ist eine Datenbank für Abstracts und Zitate, die Informationen zu Forschungsförderungen mit daraus resultierenden Veröffentlichungen, Studien und Patenten verknüpft.
Im TIB AV-Portal können audiovisuelle Medien aus Wissenschaft und Lehre recherchiert und eigene wissenschaftliche Videos publiziert werden.
Im FID move kann nach fachspezifischer Literatur, Forschungsdaten und weitere Informationen aus der Mobilitäts- und Verkehrsforschung gesucht werden.
Der Open Research Knowledge Graph liefert strukturiert beschriebene Forschungsinhalte und macht diese vergleichbar.
Frei zugänglicher Ausschnitt der Verbunddatenbank K10plus des GBV und des SWB mit für die Fernleihe und Direktlieferdienste relevanten Materialien.