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1–50 von 44.384 Ergebnissen
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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Humidity sensor based on optical fiber coated with agarose gel
British Library Conference Proceedings | 2019| -
Samarium-doped TiO2 photoanodes for the molecular devices for solar energy conversion
British Library Conference Proceedings | 2021| -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018 -
Experimental study on SPDT machining of Gallium Phosphide [8884-92]
British Library Conference Proceedings | 2013| -
4D phase profile measurements using a single-shot phase shifting technique [8884-77]
British Library Conference Proceedings | 2013| -
Off-axis mirror fabrication from spherical surfaces under mechanical stress [8884-72]
British Library Conference Proceedings | 2013| -
Effect of polishing plane vibration on large-size optical workpieces in continuous polishing [8884-60]
British Library Conference Proceedings | 2013| -
Precision interferometric measurements of refractive index of polymers in air and liquid [8884-53]
British Library Conference Proceedings | 2013| -
Rapid design of LED optical elements with two free-form surfaces generating uniformly illuminated rectangular area [8884-48]
British Library Conference Proceedings | 2013| -
Comparison of contact and non-contact asphere surface metrology devices [8884-26]
British Library Conference Proceedings | 2013| -
Deterministic polishing process for aspheric lenses in a production environment [8884-13]
British Library Conference Proceedings | 2013| -
NASA funding opportunities for optical fabrication and testing technology development (Plenary Paper) [8884-501]
British Library Conference Proceedings | 2013| -
Line edge roughness reduction for 7nm metals [10587-7]
British Library Conference Proceedings | 2018 -
Fabrication of cadmium selenide quantum dots with laser ablation in superfluid helium [10712-17]
British Library Conference Proceedings | 2018 -
Hydrodynamic micro-manipulation using optically actuated flow control [10712-7]
British Library Conference Proceedings | 2018 -
Hot spot variability and lithography process window investigation by CDU improvement using CDC technique [10587-14]
British Library Conference Proceedings | 2018 -
Optical characterization of window materials for aerospace applications [8884-50]
British Library Conference Proceedings | 2013| -
Design of systems involving easily measurable aspheres [8884-45]
British Library Conference Proceedings | 2013| -
Optical design with orthogonal surface descriptions [8884-44]
British Library Conference Proceedings | 2013| -
Determination of a suitable parameter field for the active fluid jet polishing process [8884-3]
British Library Conference Proceedings | 2013| -
Simulations and first manufacturing steps of a fully integrated WDM-element in the visible spectrum [8884-71]
British Library Conference Proceedings | 2013| -
Development of a high specification coating [8884-42]
British Library Conference Proceedings | 2013| -
Conformal window manufacturing process development and demonstration for polycrystalline materials [8884-24]
British Library Conference Proceedings | 2013| -
Hexapods with fieldbus interfaces for automated manufacturing of opto-mechanical components [8884-95]
British Library Conference Proceedings | 2013| -
Fabrication of solid immersion lens applied to infrared microscopy to improve the spatial resolution over its diffraction limit [8884-84]
British Library Conference Proceedings | 2013| -
Shaping of thin glass foils for the fabrication of mirrors with pronounced asphericity [8884-66]
British Library Conference Proceedings | 2013| -
Chalcogenide-mold interactions during precision glass molding (PGM) of GeAsSe glasses [8884-62]
British Library Conference Proceedings | 2013| -
Integration of measurement data in the comprehensive modelling approach [8884-47]
British Library Conference Proceedings | 2013| -
Fabrication and metrology of high-precision freeform surfaces [8884-34]
British Library Conference Proceedings | 2013|