Erscheinungsjahr
Datenquelle
Fach
- ‹ Alle Fächer
- Physik (29.369)
- Maschinenbau, Energietechnik (23.763)
- Verkehrstechnik, Verkehrswesen (20.275)
- Elektrotechnik (6.309)
- Chemie (2.588)
- Werkstoffkunde (2.145)
- Informatik (1.994)
- Erziehungswissenschaften (539)
- Sozialwissenschaften (300)
- Mathematik (293)
- Wirtschaftswissenschaften (293)
- Geowissenschaften, Geographie (246)
- Chemische und Umwelttechnik (225)
- Technik (202)
- Medizintechnik (176)
- Bautechnik (158)
- Biowissenschaften, Biologie (57)
- Medizin (35)
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Sprache
Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
-
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Vehicular visible light communication in a traffic controlled intersection
British Library Conference Proceedings | 2021| -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018 -
Experimental study on SPDT machining of Gallium Phosphide [8884-92]
British Library Conference Proceedings | 2013| -
4D phase profile measurements using a single-shot phase shifting technique [8884-77]
British Library Conference Proceedings | 2013| -
Off-axis mirror fabrication from spherical surfaces under mechanical stress [8884-72]
British Library Conference Proceedings | 2013| -
Effect of polishing plane vibration on large-size optical workpieces in continuous polishing [8884-60]
British Library Conference Proceedings | 2013| -
Precision interferometric measurements of refractive index of polymers in air and liquid [8884-53]
British Library Conference Proceedings | 2013| -
Rapid design of LED optical elements with two free-form surfaces generating uniformly illuminated rectangular area [8884-48]
British Library Conference Proceedings | 2013| -
Comparison of contact and non-contact asphere surface metrology devices [8884-26]
British Library Conference Proceedings | 2013| -
Deterministic polishing process for aspheric lenses in a production environment [8884-13]
British Library Conference Proceedings | 2013| -
NASA funding opportunities for optical fabrication and testing technology development (Plenary Paper) [8884-501]
British Library Conference Proceedings | 2013| -
Fabrication of cadmium selenide quantum dots with laser ablation in superfluid helium [10712-17]
British Library Conference Proceedings | 2018 -
Hydrodynamic micro-manipulation using optically actuated flow control [10712-7]
British Library Conference Proceedings | 2018 -
Hot spot variability and lithography process window investigation by CDU improvement using CDC technique [10587-14]
British Library Conference Proceedings | 2018 -
Intra-satellite optical interconnect space market and technical challenges
British Library Conference Proceedings | 2020| -
Hexapods with fieldbus interfaces for automated manufacturing of opto-mechanical components [8884-95]
British Library Conference Proceedings | 2013| -
Fabrication of solid immersion lens applied to infrared microscopy to improve the spatial resolution over its diffraction limit [8884-84]
British Library Conference Proceedings | 2013| -
Shaping of thin glass foils for the fabrication of mirrors with pronounced asphericity [8884-66]
British Library Conference Proceedings | 2013| -
Chalcogenide-mold interactions during precision glass molding (PGM) of GeAsSe glasses [8884-62]
British Library Conference Proceedings | 2013| -
Integration of measurement data in the comprehensive modelling approach [8884-47]
British Library Conference Proceedings | 2013|
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