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Sprache
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Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Stokes polarimeter using vector diffractive optical elements
British Library Conference Proceedings | 2023| -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Permeable diffractive optical elements for real-time sensing of running fluids
British Library Conference Proceedings | 2023| -
Research of UV radiometer based on fiber spectroradiometer
British Library Conference Proceedings | 2021| -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Functionalization of nanostructured surfaces for optical sensor platforms
British Library Conference Proceedings | 2023| -
Optimal snapshot full-Stokes imaging polarimeter in the visible band based on division-of-aperture
British Library Conference Proceedings | 2023| -
Simulation of a film of random particulate medium containing aggregates of metal nanospheres [9170-22]
British Library Conference Proceedings | 2014| -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
An ultra-broadband frequency response fiber vibration sensor based on single-mode-few-mode fiber coupler
British Library Conference Proceedings | 2021| -
Pore size assessment of nanoporous alumina using absorption of laser light
British Library Conference Proceedings | 2021| -
Nanometer-scale cavities for mid-infrared light based on graphene plasmons
British Library Conference Proceedings | 2021| -
Processing and characterization of monodisperse phosphine-free CdSe colloidal quantum dots [9170-58]
British Library Conference Proceedings | 2014| -
Surface-enhanced sensitivity from tunable plasmonic nanostructures arrays
British Library Conference Proceedings | 2021| -
Fibre Bragg grating inscription into a seven core fibre and its application as a vector bending sensor
British Library Conference Proceedings | 2021| -
Determination of Stokes velocities and sedimentation rate by a photonic resonant surface signal
British Library Conference Proceedings | 2021| -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Plasmonic biosensor detected human chorionic gonadotropin with naked eye
British Library Conference Proceedings | 2019| -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Random matrix theory based distributed acoustic sensing
British Library Conference Proceedings | 2019| -
New design and improvements of an MR-compatible respiratory fiber-optic sensor
British Library Conference Proceedings | 2023| -
Optical sensor for NO2 gas detection using an external cavity diode laser
British Library Conference Proceedings | 2023| -
Perimetric monitoring: A comparison of a classical seismic sensor and fiber-optic interferometric sensor
British Library Conference Proceedings | 2019| -
Optical readout of acoustic responses of an external-cavity diode laser
British Library Conference Proceedings | 2019| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Fabrication of high aspect ratio silicon gratings by interference lithography and potassium hydroxide anisotropic etch technique [9170-47]
British Library Conference Proceedings | 2014| -
Tracking of the organic species during the synthesis of cobalt-based nanoparticles in non-aqueous solution (Invited Paper) [9170-13]
British Library Conference Proceedings | 2014| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Reflectance biosensor platform using residual-layer-free nanoimprint lithography
British Library Conference Proceedings | 2023| -
Deep UV microsphere nanolifhography to achieve sub-100 nm feature size [9170-44]
British Library Conference Proceedings | 2014| -
Optical characterization of CMOS compatible micro optics fabricated by mask-based and mask-less hybrid lithography [9170-14]
British Library Conference Proceedings | 2014| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018
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