Erscheinungsjahr
Datenquelle
Fach
- ‹ Alle Fächer
- Maschinenbau, Energietechnik (25.954)
- Physik (13.446)
- Elektrotechnik (5.123)
- Chemie (2.524)
- Werkstoffkunde (1.955)
- Informatik (1.661)
- Erziehungswissenschaften (601)
- Verkehrstechnik, Verkehrswesen (457)
- Wirtschaftswissenschaften (241)
- Chemische und Umwelttechnik (231)
- Mathematik (179)
- Medizintechnik (160)
- Technik (156)
- Bautechnik (141)
- Biowissenschaften, Biologie (51)
- Medizin (40)
- Geowissenschaften, Geographie (29)
- Gartenbau (13)
- Bergbau (8)
- Architektur (3)
Sprache
Synonyme wurden verwendet für: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Suche ohne Synonyme: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Verwendete Synonyme:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Verwendete Synonyme:
- fur
Verwendete Synonyme:
- angewandte optik
- optische technik
- technische optik
Verwendete Synonyme:
- gesellschaft
-
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Experimental verification of on-product overlay improvement by intra-lot overlay control using metrology based grouping [10147-38]
British Library Conference Proceedings | 2017 -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Application of optical similarity in OPC model calibration [10147-62]
British Library Conference Proceedings | 2017 -
Layout independent leveling (LIL) on NXT:1980Di immersion scanners for enhanced productivity [10147-45]
British Library Conference Proceedings | 2017 -
Reducing the impact of etch-induced pattern shift on overlay by using lithography and etch tool corrections [10147-16]
British Library Conference Proceedings | 2017 -
Optimal structure sampling for etch model calibration [10147-17]
British Library Conference Proceedings | 2017 -
FinFET-induced anisotropy in printing of implantation shapes [10147-40]
British Library Conference Proceedings | 2017 -
Research on flight stability performance of rotor aircraft based on visual servo control method [10141-67]
British Library Conference Proceedings | 2016 -
Lithocell availability improvement through light source maintenance cycle improvement and optimization and its availability impact analysis for cutting-edge ArFi light source
British Library Conference Proceedings | 2021| -
Silicon nitride thin film for optofluidic sensor application
British Library Conference Proceedings | 2023| -
Study of aging behaviour on 193nm phase-shift masks [10147-74]
British Library Conference Proceedings | 2017 -
Alignment solutions on FBEOL layers using ASML scanners [10147-65]
British Library Conference Proceedings | 2017 -
Enhanced OPC recipe coverage and early hotspot detection through automated layout generation and analysis [10147-26]
British Library Conference Proceedings | 2017 -
Process of opto-mechanical design and assembly for reflective mirror subsystem of lithographic projection lens [10147-68]
British Library Conference Proceedings | 2017 -
The thermal aberration analysis of a lithography projection lens [10147-61]
British Library Conference Proceedings | 2017 -
Neuroelectronic device process development and challenge [10147-31]
British Library Conference Proceedings | 2017 -
Excimer laser gas usage reduction technology for semiconductor manufacturing [10147-60]
British Library Conference Proceedings | 2017 -
Metal coated fiber sensor for laser power measurements with enhanced sensitivity
British Library Conference Proceedings | 2019| -
Fast prediction of process variation band through machine learning models
British Library Conference Proceedings | 2021| -
Thermostatic system of sensor in NIR spectrometer based on PID control [10141-19]
British Library Conference Proceedings | 2016 -
Lithography tool improvement at productivity and performance with data analysis and machine learning
British Library Conference Proceedings | 2021| -
Effective data sampling techniques for machine learning OPC in full chip production
British Library Conference Proceedings | 2021| -
An OPC approach to improve logic gate features corner fidelity
British Library Conference Proceedings | 2019| -
Adaptive optical system for laser beam formation [10712-39]
British Library Conference Proceedings | 2018 -
Thread scheduling for GPU-based OPC simulation on multi-thread [10587-26]
British Library Conference Proceedings | 2018 -
Advanced ILT solutions to manufacture photonics designs
British Library Conference Proceedings | 2021| -
Experimental study on SPDT machining of Gallium Phosphide [8884-92]
British Library Conference Proceedings | 2013| -
4D phase profile measurements using a single-shot phase shifting technique [8884-77]
British Library Conference Proceedings | 2013| -
Off-axis mirror fabrication from spherical surfaces under mechanical stress [8884-72]
British Library Conference Proceedings | 2013| -
Effect of polishing plane vibration on large-size optical workpieces in continuous polishing [8884-60]
British Library Conference Proceedings | 2013| -
Precision interferometric measurements of refractive index of polymers in air and liquid [8884-53]
British Library Conference Proceedings | 2013| -
Rapid design of LED optical elements with two free-form surfaces generating uniformly illuminated rectangular area [8884-48]
British Library Conference Proceedings | 2013| -
Comparison of contact and non-contact asphere surface metrology devices [8884-26]
British Library Conference Proceedings | 2013| -
Deterministic polishing process for aspheric lenses in a production environment [8884-13]
British Library Conference Proceedings | 2013| -
NASA funding opportunities for optical fabrication and testing technology development (Plenary Paper) [8884-501]
British Library Conference Proceedings | 2013| -
SEM contour based metrology for microlens process studies in CMOS image sensor technologies [10587-30]
British Library Conference Proceedings | 2018 -
Freeform mask optimization using advanced image based M3D inverse lithography and 3D-NAND full chip OPC application [10587-16]
British Library Conference Proceedings | 2018 -
Improved MRF spot characterization with QIS metrology [8884-94]
British Library Conference Proceedings | 2013| -
Development of a calibration standard for spherical aberration [8884-51]
British Library Conference Proceedings | 2013| -
Using Microsoft Excel as a pre-processor for CODE V optimization of air spaces when building camera lenses [8884-46]
British Library Conference Proceedings | 2013| -
Worthwhile optical method for free-form mirrors qualification [8884-37]
British Library Conference Proceedings | 2013| -
Non-contact metrology of aspheric surfaces based on MWLI technology [8884-27]
British Library Conference Proceedings | 2013| -
Integrated manufacturing of complex freeform surfaces [8884-23]
British Library Conference Proceedings | 2013|
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