The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Volume 132,
Issue 12
Volume 132,
Issue 11
Volume 132,
Issue 10
Volume 132,
Issue 9
Volume 132,
Issue 8
Volume 132,
Issue 7
Volume 132,
Issue 6
Volume 132,
Issue 5
Volume 132,
Issue 4
Volume 132,
Issue 3
Volume 132,
Issue 2
Volume 132,
Issue 1
Volume 131,
Issue 12
Volume 131,
Issue 11
Volume 131,
Issue 10
Volume 131,
Issue 9
Volume 131,
Issue 8
Volume 131,
Issue 7
Volume 131,
Issue 6
Volume 131,
Issue 5
Volume 131,
Issue 4
Volume 131,
Issue 3
Volume 131,
Issue 2
Volume 131,
Issue 1
Volume 130,
Issue 12
Volume 130,
Issue 11
Volume 130,
Issue 10
Volume 130,
Issue 9
Volume 130,
Issue 8
Volume 130,
Issue 7
Volume 130,
Issue 6
Volume 130,
Issue 5
Volume 130,
Issue 4
Volume 130,
Issue 3
Volume 130,
Issue 2
Volume 130,
Issue 1
Volume 129,
Issue 12
Volume 129,
Issue 11
Volume 129,
Issue 10
Volume 129,
Issue 9
Volume 129,
Issue 8
Volume 129,
Issue 7
Volume 129,
Issue 6
Volume 129,
Issue 5
Volume 129,
Issue 4
Volume 129,
Issue 3
Volume 129,
Issue 2
Volume 129,
Issue 1
Volume 128,
Issue 12
Volume 128,
Issue 11
Volume 128,
Issue 10
Volume 128,
Issue 9
Volume 128,
Issue 8
Volume 128,
Issue 7
Volume 128,
Issue 6
Volume 128,
Issue 5
Volume 128,
Issue 4
Volume 128,
Issue 3
Volume 128,
Issue 2
Volume 128,
Issue 1
Volume 127,
Issue 12
Volume 127,
Issue 11
Volume 127,
Issue 10
Volume 127,
Issue 9
Volume 127,
Issue 8
Volume 127,
Issue 7
Volume 127,
Issue 6
Volume 127,
Issue 5
Volume 127,
Issue 4
Volume 127,
Issue 3
Volume 127,
Issue 2
Volume 127,
Issue 1
Volume 126,
Issue 12
Volume 126,
Issue 11
Volume 126,
Issue 10
Volume 126,
Issue 9
Volume 126,
Issue 8
Volume 126,
Issue 7
Volume 126,
Issue 6
Volume 126,
Issue 5
Volume 126,
Issue 4
Volume 126,
Issue 3
Volume 126,
Issue 2
Volume 126,
Issue 1
Volume 125,
Issue 12
Volume 125,
Issue 11
Volume 125,
Issue 10
Volume 125,
Issue 9
Volume 125,
Issue 8
Volume 125,
Issue 7
Volume 125,
Issue 6
Volume 125,
Issue 5
Volume 125,
Issue 4
Volume 125,
Issue 3
Volume 125,
Issue 2
Volume 125,
Issue 1
Volume 124,
Issue 2
Volume 124,
Issue 1
Volume 123,
Issue 2
Volume 123,
Issue 1
Volume 122,
Issue 2
Volume 122,
Issue 1
Volume 121,
Issue 2
Volume 121,
Issue 1
Volume 120,
Issue 2
Volume 120,
Issue 1
Volume 119,
Issue 2
Volume 119,
Issue 1
Volume 118,
Issue 2
Volume 118,
Issue 1
Volume 117,
Issue 2
Volume 117,
Issue 1
Volume 116,
Issue 2
Volume 116,
Issue 1
Volume 115,
Issue 2
Volume 115,
Issue 1
Volume 114,
Issue 2
Volume 114,
Issue 1
Volume 113,
Issue 2
Volume 113,
Issue 1
Volume 112,
Issue 2
Volume 112,
Issue 1
Volume 111,
Issue 2
Volume 111,
Issue 1
Volume 110,
Issue 2
Volume 110,
Issue 1
Volume 109,
Issue 2
Volume 109,
Issue 1
Volume 108,
Issue 2
Volume 108,
Issue 1
Volume 107,
Issue 2
Volume 107,
Issue 1
Volume 106,
Issue 2
Volume 106,
Issue 1
Volume 105,
Issue 2
Volume 105,
Issue 1
Volume 104,
Issue 2
Volume 104,
Issue 1
Volume 103,
Issue 2
Volume 103,
Issue 1
Volume 102,
Issue 2
Volume 102,
Issue 1
Volume 101,
Issue 2
Volume 101,
Issue 1
Volume 100,
Issue 2
Volume 100,
Issue 1
Volume 99,
Issue 2
Volume 99,
Issue 1
Volume 98,
Issue 2
Volume 98,
Issue 1
Volume 97,
Issue 2
Volume 97,
Issue 1
Volume 96,
Issue 2
Volume 96,
Issue 1
Volume 95,
Issue 3
Volume 95,
Issue 2
Volume 95,
Issue 1
Volume 94,
Issue 2
Volume 94,
Issue 1
Volume 93,
Issue 2
Volume 93,
Issue 1
Volume 92,
Issue 2
Volume 92,
Issue 1
Volume 91,
Issue 2
Volume 91,
Issue 1
Volume 90,
Issue 2
Volume 90,
Issue 1
Volume 89,
Issue 2
Volume 89,
Issue 1
Volume 88,
Issue 2
Volume 88,
Issue 1
Volume 87,
Issue 2
Volume 87,
Issue 1
Volume 86,
Issue 2
Volume 86,
Issue 1
Volume 85,
Issue 2
Volume 85,
Issue 1
Volume 84,
Issue 2
Volume 84,
Issue 1
Volume 83,
Issue 2
Volume 83,
Issue 1
Volume 82,
Issue 2
Volume 82,
Issue 1
Volume 81,
Issue 2
Volume 81,
Issue 1
Volume 80,
Issue 2
Volume 80,
Issue 1
Volume 79,
Issue 2
Volume 79,
Issue 1
Volume 78,
Issue 2
Volume 78,
Issue 1
Volume 77,
Issue 2
Volume 77,
Issue 1
Volume 76,
Issue 2
Volume 76,
Issue 1
Volume 75,
Issue 2
Volume 75,
Issue 1
Volume 74,
Issue 2
Volume 74,
Issue 1
Volume 73,
Issue 2
Volume 73,
Issue 1
Volume 72,
Issue 2
Volume 72,
Issue 1
Volume 71,
Issue 2
Volume 71,
Issue 1
Volume 70,
Issue 2
Volume 70,
Issue 1
Volume 69,
Issue 3
Volume 69,
Issue 2
Volume 69,
Issue 1
Volume 68,
Issue 3
Volume 68,
Issue 2
Volume 68,
Issue 1
Volume 67,
Issue 3
Volume 67,
Issue 2
Volume 67,
Issue 1
Volume 66,
Issue 3
Volume 66,
Issue 2
Volume 66,
Issue 1
Volume 65,
Issue 3
Volume 65,
Issue 2
Volume 65,
Issue 1
Volume 64,
Issue 3
Volume 64,
Issue 2
Volume 64,
Issue 1
Volume 63,
Issue 3
Volume 63,
Issue 2
Volume 63,
Issue 1
Volume 62,
Issue 3
Volume 62,
Issue 2
Volume 62,
Issue 1
Volume 61,
Issue 3
Volume 61,
Issue 2
Volume 61,
Issue 1
Volume 60,
Issue 3
Volume 60,
Issue 2
Volume 60,
Issue 1
Volume 59,
Issue 3
Volume 59,
Issue 2
Volume 59,
Issue 1
Volume 58,
Issue 3
Volume 58,
Issue 2
Volume 58,
Issue 1
Volume 57,
Issue 3
Volume 57,
Issue 1
Volume 56,
Issue 3
Volume 56,
Issue 2
Volume 56,
Issue 1
Volume 55,
Issue 3
Volume 55,
Issue 2
Volume 55,
Issue 1
Volume 54,
Issue 3
Volume 54,
Issue 1
Volume 53,
Issue 3
Volume 53,
Issue 2
Volume 52,
Issue 3
Volume 52,
Issue 2
Volume 52,
Issue 1
Volume 51,
Issue 3
Volume 51,
Issue 2
Volume 51,
Issue 1
Volume 50,
Issue 2
Volume 50,
Issue 1
Volume 49,
Issue 3
Volume 49,
Issue 2
Volume 49,
Issue 1
Volume 48,
Issue 3
Volume 48,
Issue 2
Volume 48,
Issue 1
Volume 47,
Issue 3
Volume 47,
Issue 2
Volume 47,
Issue 1
Volume 46,
Issue 2
Volume 46,
Issue 1
Volume 45,
Issue 3
Volume 45,
Issue 2
Volume 45,
Issue 1
Volume 44,
Issue 3
Volume 44,
Issue 2
Volume 44,
Issue 1
Volume 43,
Issue 3
Volume 43,
Issue 2
Volume 43,
Issue 1
Volume 42,
Issue 3
Volume 42,
Issue 2
Volume 42,
Issue 1
Volume 41,
Issue 3
Volume 41,
Issue 2
Volume 41,
Issue 1
Volume 40,
Issue 3
Volume 40,
Issue 2
Volume 39,
Issue 2
Volume 39,
Issue 1
Volume 38,
Issue 3
Volume 38,
Issue 2
Volume 38,
Issue 1
Volume 37,
Issue 3
Volume 37,
Issue 2
Volume 37,
Issue 1
Volume 36,
Issue 4
Volume 36,
Issue 3
Volume 36,
Issue 2
Volume 36,
Issue 1
Volume 35,
Issue 4
Volume 35,
Issue 3
Volume 35,
Issue 2
Volume 35,
Issue 1
Volume 34,
Issue 4
Volume 34,
Issue 3
Volume 34,
Issue 2
Volume 34,
Issue 1
Volume 33,
Issue 4
Volume 33,
Issue 1
Volume 32,
Issue 4
Volume 32,
Issue 3
Volume 32,
Issue 2
Volume 32,
Issue 1
Volume 31,
Issue 4
Volume 31,
Issue 3
Volume 31,
Issue 2
Volume 31,
Issue 1
Volume 30,
Issue 4
Volume 30,
Issue 3
Volume 30,
Issue 2
Volume 30,
Issue 1
Volume 29,
Issue 4
Volume 29,
Issue 3
Volume 29,
Issue 2
Volume 29,
Issue 1
Volume 28,
Issue 4
Volume 28,
Issue 3
Volume 28,
Issue 2
Volume 28,
Issue 1
Volume 27,
Issue 4
Volume 27,
Issue 3
Volume 27,
Issue 2
Volume 27,
Issue 1
Volume 26,
Issue 4
Volume 26,
Issue 3
Volume 26,
Issue 2
Volume 26,
Issue 1
Volume 25,
Issue 4
Volume 25,
Issue 3
Volume 25,
Issue 2
Volume 25,
Issue 1
Volume 24,
Issue 4
Volume 24,
Issue 3
Volume 24,
Issue 2
Volume 24,
Issue 1
Volume 23,
Issue 6
Volume 23,
Issue 5
Volume 23,
Issue 4
Volume 23,
Issue 3
Volume 23,
Issue 2
Volume 23,
Issue 1
Volume 22,
Issue 6
Volume 22,
Issue 5
Volume 22,
Issue 4
Volume 22,
Issue 3
Volume 22,
Issue 2
Volume 22,
Issue 1
Volume 21,
Issue 4
Volume 21,
Issue 3
Volume 21,
Issue 2
Volume 21,
Issue 1
Volume 20,
Issue 6
Volume 20,
Issue 5
Volume 20,
Issue 4
Volume 20,
Issue 3
Volume 20,
Issue 2
Volume 20,
Issue 1
Volume 19,
Issue 6
Volume 19,
Issue 3
Volume 19,
Issue 2
Volume 19,
Issue 1
Volume 18,
Issue 4
Volume 18,
Issue 3
Volume 18,
Issue 2
Volume 18,
Issue 1
Volume 17,
Issue 6
Volume 17,
Issue 5
Volume 17,
Issue 4
Volume 17,
Issue 3
Volume 17,
Issue 2
Volume 17,
Issue 1
Volume 16,
Issue 6
Volume 16,
Issue 5
Volume 16,
Issue 4
Volume 16,
Issue 3
Volume 16,
Issue 2
Volume 16,
Issue 1
Volume 15,
Issue 6
Volume 15,
Issue 5
Volume 15,
Issue 4
Volume 15,
Issue 3
Volume 15,
Issue 2
Volume 15,
Issue 1
Volume 14,
Issue 6
Volume 14,
Issue 5
Volume 14,
Issue 4
Volume 14,
Issue 3
Volume 14,
Issue 2
Volume 14,
Issue 1
Volume 13,
Issue 6
Volume 13,
Issue 5
Volume 13,
Issue 4
Volume 13,
Issue 3
Volume 13,
Issue 2
Volume 13,
Issue 1
Volume 12,
Issue 6
Volume 12,
Issue 5
Volume 12,
Issue 4
Volume 12,
Issue 3
Volume 12,
Issue 2
Volume 12,
Issue 1
Volume 11,
Issue 6
Volume 11,
Issue 5
Volume 11,
Issue 4
Volume 11,
Issue 3
Volume 11,
Issue 2
Volume 11,
Issue 1
Volume 10,
Issue 6
Volume 10,
Issue 5
Volume 10,
Issue 4
Volume 10,
Issue 3
Volume 10,
Issue 2
Volume 10,
Issue 1
Volume 9,
Issue 6
Volume 9,
Issue 5
Volume 9,
Issue 4
Volume 9,
Issue 3
Volume 9,
Issue 2
Volume 9,
Issue 1
Volume 8,
Issue 6
Volume 8,
Issue 5
Volume 8,
Issue 4
Volume 8,
Issue 3
Volume 8,
Issue 2
Volume 8,
Issue 1
Volume 7,
Issue 6
Volume 7,
Issue 5
Volume 7,
Issue 4
Volume 7,
Issue 3
Volume 7,
Issue 1
Volume 6,
Issue 6
Volume 6,
Issue 5
Volume 6,
Issue 4
Volume 6,
Issue 3
Volume 6,
Issue 2
Volume 6,
Issue 1
Volume 5,
Issue 6
Volume 5,
Issue 5
Volume 5,
Issue 4
Volume 5,
Issue 3
Volume 5,
Issue 2
Volume 5,
Issue 1
Volume 4,
Issue 4
Volume 4,
Issue 3
Volume 4,
Issue 2
Volume 4,
Issue 1
Volume 3,
Issue 1
Volume 2,
Issue 4
Volume 2,
Issue 3
Volume 2,
Issue 2
Volume 2,
Issue 1
Volume 1,
Issue 3
Volume 1,
Issue 2
Volume 1,
Issue 1
>
Table of contents
1
Preface
Smart, Bruce E.
et al.
| 2003
3
Fluorine—an enabler in advanced photolithography
Rothschild, M.
/ Bloomstein, T.M.
/ Fedynyshyn, T.H.
et al.
| 2003
11
Design of very transparent fluoropolymer resists for semiconductor manufacture at 157 nm
Feiring, A.E.
/ Crawford, M.K.
/ Farnham, W.B.
et al.
| 2003
17
Vacuum-UV influenced design of polymers and dissolution inhibitors for next generation photolithography
Trinque, Brian C.
/ Chambers, Charles R.
/ Osborn, Brian P.
et al.
| 2003
27
Time-dependent density functional theory calculations of the photoabsorption of fluorinated alkanes
Zhan, Chang-Guo
/ Dixon, David A.
/ Matsuzawa, Nobuyuki N.
et al.
| 2003
37
Quantum chemical modeling for 157 nm photolithography
Waterland, Robert L
/ Dobbs, Kerwin D
/ Rinehart, Amy M
et al.
| 2003
47
Retrospective of work at Bell Laboratories on the effect of fluorine substitution on the properties of photoacid generators
Houlihan, F.M.
/ Nalamasu, O.
/ Reichmanis, E.
et al.
| 2003
57
Iodonium zwitterions
DesMarteau, Darryl D.
/ Pennington, William T.
/ Montanari, Vittorio
et al.
| 2003
63
Novel hydrofluorocarbon polymers for use as pellicles in 157 nm semiconductor photolithography: fundamentals of transparency
French, Roger H
/ Wheland, Robert C
/ Qiu, Weiming
et al.
| 2003
81
Properties and production of F-doped silica glass
Smith, Charlene M.
/ Moore, Lisa A.
et al.
| 2003
87
Fluorinated compounds for advanced IC interconnect applications: a survey of chemistries and processes
Mocella, Michael T.
et al.
| 2003
93
Fluorocarbon dielectrics via hot filament chemical vapor deposition
Lau, Kenneth K.S.
/ Murthy, Shashi K.
/ Lewis, Hilton G.Pryce
et al.
| 2003
97
Parylene-AF4: a polymer with exceptional dielectric and thermal properties
Dolbier, William R. Jr.
/ Beach, William F.
et al.
| 2003
105
Fluorinated gases for semiconductor manufacture: process advances in chemical vapor deposition chamber cleaning
Allgood, Charles C.
et al.
| 2003
113
Perfluoroelastomer and fluoroelastomer seals for semiconductor wafer processing equipment
Wang, Shuhong
/ Legare, John M.
et al.
| 2003
121
The use of fluoropolymers to protect semiconductor materials
Extrand, C.W.
et al.
| 2003
CO2
IFC
| 2003
v
Graphical Abstracts
| 2003