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Method of and apparatus for in-situ repair of reflective optic
Free accessEuropean Patent Office | 2022| -
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
Free accessEuropean Patent Office | 2021| -
APPARATUS AND METHOD OF ACTIVE CLEANING OF EUV OPTICS WITH RF PLASMA ELECTRIC FIELD
Free accessEuropean Patent Office | 2020| -
Apparatus for and method of active cleaning of EUV optic with RF plasma field
Free accessEuropean Patent Office | 2019| -
EUV LPP SOURCE WITH IMPROVED DOSE CONTROL BY TRACKING DOSE OVER SPECIFIED WINDOW
Free accessEuropean Patent Office | 2017| -
Method of temperature compensation in high power focusing system for EUV LPP source
Free accessEuropean Patent Office | 2017| -
Apparatus for and method of active cleaning of EUV optic with RF plasma field
Free accessEuropean Patent Office | 2017| -
EUV LPP source with improved dose control by tracking dose over specified window
Free accessEuropean Patent Office | 2017| -
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PLASMA FIELD
Free accessEuropean Patent Office | 2017| -
APPARATUS FOR AND METHOD OF TEMPERATURE COMPENSATION IN HIGH POWER FOCUSING SYSTEM FOR EUV LPP SOURCE
Free accessEuropean Patent Office | 2016| -
Apparatus for and method of temperature compensation in high power focusing system for EUV LPP source
Free accessEuropean Patent Office | 2016| -
METHOD OF AND APPARATUS FOR IN-SITU REPAIR OF REFLECTIVE OPTIC
Free accessEuropean Patent Office | 2016| -
RF EUV APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PLASMA FIELD
Free accessEuropean Patent Office | 2016| -
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PLASMA FIELD
Free accessEuropean Patent Office | 2015| -
APPARATUS FOR AND METHOD OF ACTIVE CLEANING OF EUV OPTIC WITH RF PLASMA FIELD
Free accessEuropean Patent Office | 2015|