Enhanced Segregation Gettering of Iron in Silicon by Boron Ion-Implantation (English)

In: Spring Meeting   ,  1  ;  475  ;  1995

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1
New High Voltage Cathode Materials for Rechargeable Lithium Batteries
Fey, G. T. K. / Wu, C. S. / Yang, S. M. / Dahn, J. R. / Electrochemical Society | 1995
2
Electrochemical Studies of Bare and Copper Coated LaNi~4~.~2~7Sn~0~.~2~4 Electrodes in Alkaline Solution
Popov, B. N. / Zheng, G. / White, R. E. / Electrochemical Society | 1995
4
Electrochemical Determination of the Diffusion Coefficient of Hydrogen Through a LaNi~4~.~2~5Al~0~.~7~5 Electrode in Alkaline Solution
Zheng, G. / Popov, B. N. / White, R. E. / Electrochemical Society | 1995
6
Effect of Cell Temperature on the Electrochemical Performance of Metal Hydride Electrodes
Zhang, W. / Kumar, M. P. S. / Srinivasan, S. / Electrochemical Society | 1995
8
A General Discharge Model for the Nickel/Metal Hydride Battery System
Paxton, B. / Newman, J. / Electrochemical Society | 1995
9
Synthesis and Electrochemical Studies of Spinel Phase LiMn~2O~4 and LiM~�Mn~2~-~�O~4 (M=Co, Ni) Prepared by the Pechini Process
Liu, W. / Davis, P. / Chaput, F. / Dunn, B. / Electrochemical Society | 1995
11
Testing of a Refuelable Zinc-Air Bus Battery
Cooper, J. F. / Fleming, D. / Koopman, R. / Hargrove, D. / Electrochemical Society | 1995
13
The Zero Emission Vehicle as Symbol - Evidence Suggesting an Organizational and Political Function of the California Air Resources Board's Electric Vehicle Regulation
Paxton, B. / Electrochemical Society | 1995
15
Conductivity in the Poly(ethylene oxide) Mixed Salt Complexes PEO~x[LiN(S~2CF~3)~2]~y [LiSO~3C~8F~1~7]~x
Nafshun, R. / Lerner, M. / Electrochemical Society | 1995
17
Study of the Li/Poly[oxymethylene-oligo(oxyethylene)] Interface: Comparison of Linear, Cross-Linked, and Cross-Linked/Methylated Electrolyte Films
Sloop, S. E. / Lerner, M. M. / Electrochemical Society | 1995
19
Electrochemical Impedance Spectroscopic Study in Proton Exchange Membrane Fuel Cells
Lee, S.-M. / Hirano, S. / Srinivasan, S. / Electrochemical Society | 1995
21
Water Profile Determination across a Polymer Electrolyte during the Operation of a Hydrogen/Oxygen Proton Exchange Membrane Fuel Cell
Mosdale, R. / Gebel, G. / Pineri, M. / Electrochemical Society | 1995
23
Effect of Platinum Concentration on Proton Exchange Membrane Fuel Cell Performance
Mosdale, R. / Srinivasan, S. / Electrochemical Society | 1995
25
Specific Surface Area Measurement of Lithium Anode in Lithium Secondary Batteries
Saito, K. / Arakawa, M. / Tobishima, S. / Yamaki, J. / Electrochemical Society | 1995
27
Lithium Anode Studies in a Tetrafluoroborate Molten Salt Electrolyte
Fuller, J. / Osteryoung, R. A. / Carlin, R. T. / Electrochemical Society | 1995
28
Corrosion Current Maps of AB~5 Electrode Surfaces
Zhang, W. / Kumar, M. P. S. / Srinivasan, S. / Mukerjee, S. / Electrochemical Society | 1995
30
Electrochemical Deposition of Bi~2Te~3 Thin Films for Thermoelectric Device Applications
Ryan, M. A. / Williams, R. M. / Electrochemical Society | 1995
31
A Simplified Two-Dimensional Model of Lead-Acid Cell Discharge
Semenko, M. G. / Semenenko, V. I. / Electrochemical Society | 1995
33
Electrochemical Applications of Carbonaceous Materials
Kinoshita, K. / Chu, X. / Electrochemical Society | 1995
34
Carbon Filaments for Electrochemical Applications
Chung, D. D. L. / Shui, X. / Frysz, C. A. / Electrochemical Society | 1995
35
Electrochemical and Physico-chemical Characterization of Randomly Oriented Graphite Electrodes
Lavoie, M.-A. / Regisseur, F. / Belanger, D. / Champagne, G. Y. / Electrochemical Society | 1995
37
Improving the Electrochemical Performance of Carbons by Surface Treatments
Chung, D. D. L. / Shui, X. / Frysz, C. A. / Electrochemical Society | 1995
38
Oxygen Reduction on Carbonaceous Materials in Alkaline Electrolyte
Chu, X. / Markovic, N. / Kinoshita, K. / Ross, P. / Electrochemical Society | 1995
40
Review of Processes for the Production of Mixtures of Caustic Soda and Hydrogen Peroxide via the Reduction of Oxygen
Foller, P. C. / Electrochemical Society | 1995
42
Bromine/Bromide Ion Redox Reaction on Carbon Electrodes with a High Surface Area
Shindo, K. / Hirai, T. / Electrochemical Society | 1995
44
Superior Corrosion Resistance of Diamond Thin Film Electrodes in Acidic Fluoride Media
Swain, G. M. / Alesham, S. / Chambers, F. / Granger, M. / Electrochemical Society | 1995
45
Synthesis and Characterization of New Carbon Electrodes for Secondary Lithium Batteries
Sandi, G. / Winans, R. E. / Carrado, K. A. / Electrochemical Society | 1995
46
Characterization of Lithium Intercalation-Deintercalation in Disordered Carbon Materials as Anodes for Lithium Ion Cells
Satoh, A. / Takami, N. / Hara, M. / Ohsaki, T. / Electrochemical Society | 1995
48
Electrochemical Intercalation of Lithium in Different Origin of Carbon Materials Use as Negative Electrode for Lithium-Ion Type Batteries
Zaghib, K. / Tatsumi, K. / Imamura, T. / Sawada, Y. / Electrochemical Society | 1995
50
Rate Effect on Lithium-Ion Graphite Electrode Performance
Tran, T. S. / Feikert, J. H. / Kinoshita, K. / Electrochemical Society | 1995
52
The Influence of Structural Parameters on Lithium Storage Capacity of Mesocarbon Microbeads at Several Current Densities
Tatsumi, K. / Imamura, T. / Zaghib, K. / Iwashita, N. / Electrochemical Society | 1995
53
Periodic Behavior in the Iron/Sulfuric Acid System
Rush, B. / Newman, J. / Electrochemical Society | 1995
55
Characterization of Corrosion Phenomena Using the Electrochemical Noise Resistance and the Pitting Index
Kelly, R. G. / Yuan, J. / Hudson, J. L. / Inman, M. E. / Electrochemical Society | 1995
56
Nonlinear Potential and Current Oscillations on Irradiated and Unirradiated Type 304SS in Chloride Solution
Sikora, J. / Sikora, E. / Macdonald, D. D. / Electrochemical Society | 1995
57
Aperiodic Oscillatory Behavior of Fe-Ni Alloys in Concentrated Chloride Solutions
Chen, L. / Shen, D. H. / Nobe, B. K. / Nobe, K. / Electrochemical Society | 1995
58
An In Situ Small Angle Neutron Scattering Investigation of Ag~0~.~7Au~0~.~3 Dealloying
Corcoran, S. G. / Wiesler, D. / Barker, J. / Sieradzki, K. / Electrochemical Society | 1995
59
Microstructure and De-Alloying Kinetics of Zinc-Nickel Alloy Electrodeposits
Nakamaru, H. / Newman, R. C. / Electrochemical Society | 1995
60
X-Ray Studies of Iron Dissolution Through Passive Films on Fe-Cr Alloys
Davenport, A. J. / Simmonds, M. P. / Ryan, M. P. / Newman, R. C. / Electrochemical Society | 1995
61
Effect of Grain Boundary Orientation on the Sensitization of Austenitic Stainless Steel
Devine, T. M. / Kavner, A. / Electrochemical Society | 1995
62
Propagation Behavior of Crevice Corrosion under Metal-Glass Crevice for High Purity 18Cr-14Ni Steel in 3% NaCl Solution
Shinohara, T. / Chen, P. / Tsujikawa, S. / Electrochemical Society | 1995
64
A Metastable Pit Growth Front on Heat-Tinted Stainless Steel
Pistorius, P. C. / Electrochemical Society | 1995
66
Corrosion in Supercritical Aqueous Systems and the Density of Solvent
Kriksunov, L. B. / Macdonald, D. D. / Electrochemical Society | 1995
68
Influence of a Corrosive Environment on the Fatigue Behavior of 2024 Aluminum Alloy Investigated by In Situ Atomic Force Microscopy
Kowal, K. / Deluccia, J. J. / Josefowicz, J. Y. / Laird, C. / Electrochemical Society | 1995
70
Influence of Alloying Elements on the Corrosion of Aluminum in Alkaline Solution
Koroleva, E. V. / Thompson, G. E. / Hollrigl, G. / Bloeck, M. / Electrochemical Society | 1995
72
Tunnel Shapes in DC Etching of Aluminum
Goad, D. / Electrochemical Society | 1995
73
Tunneling Corrosion of Aluminum: The Intelligent Pit
Newman, R. C. / Electrochemical Society | 1995
74
Synchrotron X-Ray Scattering Techniques for In Situ Studies of Corrosion-Passivation Phenomena in Metals
Melendres, C. A. / Electrochemical Society | 1995
76
Surface Enhanced Raman Spectroelectrochemical Studies of the Corrosion Films on Iron in Aqueous Carbonate Solutions
Simpson, L. J. / Melendres, C. A. / Electrochemical Society | 1995
78
Transient Behavior of Passive Film on Tungsten
Sikora, E. / Macdonald, D. D. / Sikora, J. / Electrochemical Society | 1995
79
XPS Analysis of Segregation of Alloying Elements in Passive Systems
Zhang, L. / Macdonald, D. D. / Electrochemical Society | 1995
80
Metal Oxide Film Formation/Reduction: A QCMB and Impedance Investigation
Birss, V. I. / Chan, M. / Phan, T. / Vanysek, P. / Electrochemical Society | 1995
81
On the Kinetics for Passive Film Growth: Comparison of the Modified High Field Model and the Point Defect Model
Zhang, L. / Macdonald, D. D. / Electrochemical Society | 1995
83
Breakdown and Reformation of Surface Films on Ti in Halide Solutions
Chen, L. / Williamson, J. J. / Nobe, K. / Electrochemical Society | 1995
84
Controlled Hydrodynamic Electrochemical Studies in High-Temperature Aqueous Systems
Bertuch, A. F. / Lvov, S. N. / Macdonald, D. D. / Electrochemical Society | 1995
85
Modeling the Electronic Structure of the Passive Film on Tungsten from Capacitance Measurements
Sikora, E. / Sikora, J. / Macdonald, D. D. / Electrochemical Society | 1995
86
About the Role of the Chemical Composition and the Structure of Surface Layers - Products Interaction of Metal with an Aggressive Media - in Electrochemical Corrosion of Carbon Steel
Enikeev, E. K. / Panov, M. K. / Feoktistov, A. K. / Krasheninnikova, I. M. / Electrochemical Society | 1995
88
The Influence of Surface States on the Electrochemical Behavior of Passive Zinc
Ismail, K. M. / Macdonald, D. D. / Electrochemical Society | 1995
90
The Transpassive Behavior of the Anodic Film of Fe-Cr Alloys in Acidic Aqueous Media
Brookes, H. C. / Tonkinson, C. / Electrochemical Society | 1995
91
Initiation of Corrosion Pits at Inclusions on Stainless Steel
Alkire, R. C. / Ke, R. / Electrochemical Society | 1995
93
Hydride Formation In Occluded Cells on a Magnesium Anode Surface
Nazarov, A. P. / Yurasova, T. A. / Electrochemical Society | 1995
94
STM Investigation of BTA on Cu(111) and (110) Surfaces
Pickering, H. W. / Cho, K. H. / Kishimoto, J. / Hashizume, T. / Electrochemical Society | 1995
95
SERS Study of Carbon Steel in CO~2-Saturated Brine with Comments on the Action of Inhibitors
Oblonsky, L. J. / Devine, T. M. / Chesnut, G. R. / Electrochemical Society | 1995
96
Resistance Corrosion of Zinc with Lead Chloride and Polyethylene Glycol
Zhang, S. T. / Huang, Z. Q. / Li, M. J. / Electrochemical Society | 1995
98
Reaction of Scandia with NaVO~3-V~2O~5 Melts
Jones, R. L. / Reidy, R. F. / Electrochemical Society | 1995
99
Pitting of Rapidly Solidified Neodymium-Iron-Boron (Nd-Fe-B) Permanent Magnets
Attanasio, S. A. / Latanision, R. M. / Electrochemical Society | 1995
101
Effect of Cold Work and Recrystallization Processes on Oxidation of Chromium Steel
Zimina, T. / Racoch, A. / Sirotkina, A. / Oshe, E. / Electrochemical Society | 1995
103
Electrochemical Measurements of Polymer Coatings under Pressure
MacQueen, R. C. / Miron, R. R. / Granata, R. D. / Electrochemical Society | 1995
105
Study of Cathodic Behavior of Iron Using Potential Pulse Technique
Chebotareva, N. / Mikhailovsky, U. / Electrochemical Society | 1995
106
Cathodic Reactions and Interactions Between Iron and Hydrogen in the Presence of Oxygen-Containing Oxidants
Maksaeva, L. B. / Marshakov, A. I. / Mikhailovski, Y. N. / Electrochemical Society | 1995
107
Effect of Organosilanes on Anticorrosion Properties and Cathodic Delamination Stability of Polymeric Coatings
Petrunin, M. A. / Nazarov, A. P. / Electrochemical Society | 1995
108
Evaluation of Nonchromate Inhibiting Pigments for Steel and Aluminum Alloys
Kendig, M. / Cunningham, M. / Jeanjaquet, S. / Electrochemical Society | 1995
110
The Application of Selected Nuclear-Based Methods for the Understanding of Hexavalent Chromium Protection in Aluminum Corrosion
Wieckowski, A. / Electrochemical Society | 1995
111
^2^7Al NMR Study of Porous Anodized Aluminum
Davenport, A. J. / Grey, C. P. / French, G. / Electrochemical Society | 1995
112
Corrosion Protection of Aluminum-Matrix Composites by Anodization
Chung, D. D. L. / Hou, J. / Electrochemical Society | 1995
113
A Review of Mechanisms of Chromate Treatment of Aluminum and Modeling of Related Interfacial Chemical Processes
Isaacs, H. S. / Feldberg, S. / Davenport, A. J. / Aldykiewicz, A. J. / Electrochemical Society | 1995
114
Nonchromate Transition Metal Conversion Coatings for Aluminum Alloys
Bailin, L. J. / Electrochemical Society | 1995
115
The Purpose of Hydrotalcite Coated Aluminum to Sealing with Transition Metal Salt Solutions
Buchheit, P. G. / Martinez, M. A. / Electrochemical Society | 1995
117
Corrosion Protection of High-Copper Aluminum Alloys Using Chromate-Free Processes
Mansfeld, F. / Wang, Y. / Electrochemical Society | 1995
119
Performance of Chromate Conversion Coating Alternatives over Aluminum Substrates in Nonaerospace Applications
Ault, J. P. / Cramer, K. / Evans, M. / Electrochemical Society | 1995
121
Critical Issues in Chromate Replacement
Macdonald, D. D. / Electrochemical Society | 1995
122
Issues Related to Chromium Replacement
Janata, J. / Baer, D. R. / Bierwagen, G. P. / Birnbaum, H. K. / Electrochemical Society | 1995
124
A Multistep Supervisory Controller for Photolithographic Operations
Spanos, C. J. / Ma, S.-Y. / Electrochemical Society | 1995
126
Nonlinear Run-to-Run Control for Rapid Thermal Processing with Unmeasured Variable Estimation
Zafiriou, E. / Chiou, H.-W. / Adomaitis, R. A. / Electrochemical Society | 1995
128
Artificial Neural Network Model-Based Run-to-Run Process Controller
Wang, X. A. / Mahajan, R. L. / Electrochemical Society | 1995
130
Demonstration of a Process-Independent Run-to-Run Controller
Telfeyan, R. / Moyne, J. / Hurwitz, A. / Taylor, J. / Electrochemical Society | 1995
132
Modeling of Plasma Etch Dynamics Using Linear and Nonlinear Models
Bushman, S. / Karjala, T. W. / Himmelblau, D. M. / Trachtenberg, I. / Electrochemical Society | 1995
133
Modeling of Transport Phenomena and Detailed Chemistry in Tungsten Chemical Vapor Deposition
Kleijn, C. R. / Kuylaars, K. J. / Van der Akker, H. E. A. / Electrochemical Society | 1995
134
Development of RTP-Control with Monte Carlo Simulation
Kersch, A. / Electrochemical Society | 1995
136
Process Models for Process Control in Semiconductor Processing
Meyyappan, M. / Govindan, T. R. / Buggeln, R. / DeJong, F. / Electrochemical Society | 1995
138
A Reduced Fluid-Dynamical Discharge Model for Applications in Technology-Oriented CAD
Brinkmann, R. P. / Furst, R. / Werner, C. / Hierlemann, M. / Electrochemical Society | 1995
140
CVD TiN Process Modeling for Contact/Via Barriers
Paranjpe, A. / IslamRaja, M. / Electrochemical Society | 1995
142
Thermophoretic Force on Particles in Low Pressure Processing Reactors
Chio, S. J. / Rader, D. J. / Geller, A. S. / Electrochemical Society | 1995
144
Charging of Microfeatures by Radio Frequency Sheaths
Dalvie, M. / Vahedi, V. / Hamaguchi, S. / Electrochemical Society | 1995
145
Grain Oriented Thin Film Microstructure Simulation
Friedrich, L. / Robbie, K. / Dew, S. / Brett, M. / Electrochemical Society | 1995
147
One Approach to Combining Equipment Scale and Feature Scale Models
Gobbert, M. / Cale, T. / Ringhofer, C. / Electrochemical Society | 1995
148
In Situ Real Time Diagnostics of Surfaces during Plasma Processing: A Review
Aydil, E. S. / Electrochemical Society | 1995
150
A Method to Determine the Infrared Optical Constants and Thickness of a Thin Film from a Single Reflectance Spectrum
Morrison, P. W. / Electrochemical Society | 1995
151
Normal Incidence Reflectance: A Robust Tool for In Situ Real-Time Measurement of Growth Rates and Optical Constants of CVD-Grown Semiconductor Thin Films
Breiland, W. C. / Brannan, T. M. / Chui, H. C. / Hammons, B. E. / Electrochemical Society | 1995
153
Characterizations of Metallic and Organic Contamination on Silicon Surfaces and the Influence of the Contaminants on Gate Oxide Quality
Liu, X. / Irene, E. A. / Electrochemical Society | 1995
154
A Neural Network Model of a Contact Plasma Etch Process
Rietman, E. A. / Electrochemical Society | 1995
155
Real-Time Optical Diagnostics for 0.25 �m Gate Etching Process Control: Optical Emission, Full Wafer Interferometry, and UV-Visible Ellipsometry
Lee, J. T. C. / Maynard, H. L. / Blayo, N. / Ibbatson, D. E. / Electrochemical Society | 1995
157
Application of Raman Spectroscopy for SC-1 Processing Bath Concentration Control
Pelletier, M. J. / Carpio, R. / Davis, K. L. / Electrochemical Society | 1995
159
The Dependence of Bulk Defects on the Axial Temperature Gradient of Silicon Crystals during Czochralski Growth
Ammon, W. V. / Dornberger, E. / Oelkrug, H. / Weidner, H. / Electrochemical Society | 1995
161
Temperature Control in RTP Using Reduction of Equipment Models
Schafbauer, T. / Kersch, A. / Electrochemical Society | 1995
163
Phenomenological Modeling for Real-Time Feedback Control of RTE
Chandhok, M. / Hanish, P. D. / Grizzle, J. W. / Electrochemical Society | 1995
165
Process Control for Design-Coupled Manufacturing
Lemnios, Z. J. / Electrochemical Society | 1995
166
Integrated Process Monitoring, Control, and Diagnostics of Semiconductor Manufacturing Wet Etch/Clean Spray Tools
Allen, M. / Luca, S. / Lee, P. / Seaton, J. / Electrochemical Society | 1995
168
Sensor Development and Process Control for Chemical-Mechanical Planarization of Multilevel Interconnect Devices
Hu, A. / Dun, H.-P. / Renteln, P. / Sachs, E. / Electrochemical Society | 1995
170
Optimal Control for LPCVD
Cale, T. S. / Crouch, P. E. / Song, L. / Tsakalis, K. S. / Electrochemical Society | 1995
171
Sensor Information from a Lam 9600 Metal Etch Process
Barna, G. G. / Buck, D. W. / Butler, S. W. / Splichal, M. / Electrochemical Society | 1995
173
Characteristics of ICP in Ar and Cl~2 Plasmas and Application to Cu Etching
Seo, S.-H. / Kim, J.-H. / Chang, H.-Y. / Electrochemical Society | 1995
174
Determination of F Radical Atom Distribution by Plasma Parameter Normalization in Electron Cyclotron Resonance SF~6 Plasma
Kim, Y.-J. / Lee, P.-W. / Chang, C. S. / Chang, H.-Y. / Electrochemical Society | 1995
176
Investigation of Plasma Etch Chemistry Using ICP Spectroscopy
Mautz, K. E. / Electrochemical Society | 1995
177
On In Situ Etch Rate Extraction from Interferometric Signals
Wong, K. S. / Boning, D. S. / Electrochemical Society | 1995
179
Molecular Beam Mass Spectrometry of the Thermal Decomposition of Tetraethoxysilane
Wierda, C. A. / Zachariah, M. R. / Burgess, D. R. F. / Electrochemical Society | 1995
180
Real-Time Equipment, Process and Wafer State Sensing of PolySi RTCVD from SiH~4 Using Mass Spectrometry
Tedder, L. L. / Rubloff, G. W. / Electrochemical Society | 1995
181
Mechanistic Investigations of Titanium Nitride CVD
Allendorf, M. D. / Larson, R. S. / Melius, C. F. / Outka, D. A. / Electrochemical Society | 1995
182
Spatiotemporal Structure of ICP Reactor in Two-Dimensional Model
Kamimura, K. / Makabe, T. / Nakagami, S. / Nakano, N. / Electrochemical Society | 1995
184
Simulation of Low Pressure Plasma Reactors on a Massively Parallel Supercomputer Using the Direct Simulation Monte Carlo (DSMC) Method
Bartel, T. / Johannes, J. E. / Lymberopoulos, D. P. / Wise, R. S. / Electrochemical Society | 1995
186
Modeling of Neutral Effects in a High Density Etching Plasma
Bukowski, J. D. / Stewart, R. A. / Vitelle, P. / Graves, D. B. / Electrochemical Society | 1995
187
Simulations of Real-Time Two-Coil Control of an Inductively Coupled Plasma Source for Etching Applications
Ventzek, P. L. G. / Yamada, N. / Kitamori, K. / Sakai, Y. / Electrochemical Society | 1995
189
Modeling and Simulation of Two-Dimensional Reactive Plasma Flow in Inductively Coupled Reactors
Economou, D. J. / Lymberopoulos, D. P. / Electrochemical Society | 1995
191
Modeling of a Two-Dimensional RF Discharge
Wilcoxson, M. / Manousiouthakis, V. / Electrochemical Society | 1995
193
SiO~2 Deposition on the Wafer in a High Density Plasma Deposition Reactor
Selitser, S. / Fry, H. W. / Electrochemical Society | 1995
195
Chemistry Modeling in Downstream Etch Systems from the Plasma Source to the Etch Chamber
Meeks, E. / Shon, J. W. / Vosen, S. R. / Larson, R. / Electrochemical Society | 1995
196
Modeling of BPSG Chemical Downstream Etch Process in the Batch Reactor: Taper Contact Etch Process
Mocala, K. J. / Electrochemical Society | 1995
198
Model-Based Control of Rapid Thermal Processes
Edgar, T. F. / Electrochemical Society | 1995
199
Improving RIE Process Robustness via Real-Time Feedback Control
Grizzle, J. W. / Elta, M. E. / Freudenberg, J. S. / Khargonekar, P. P. / Electrochemical Society | 1995
201
Application of Sampling Quadruple Mass Spectrometry to Multivariable Process Control
Greve, D. W. / Cheng, X. / Knight, T. J. / Krogh, B. H. / Electrochemical Society | 1995
203
Ellipsometry-Based Control of III-V MBE Growth
Celii, F. / Kao, Y.-C. / Katz, A. / Moise, T. / Electrochemical Society | 1995
205
Model Based Training of a Neural Network End-Point Detector for Plasma Etch Applications
Mundt, R. / Electrochemical Society | 1995
206
Finding Plasma Etching Endpoint by Monitoring RF Power Systems with an Artificial Neural Network
Maynard, H. / Rietman, E. / Lee, J. T. C. / Ibbotson, D. / Electrochemical Society | 1995
208
Real Time Intrusive Optical Emission Spectroscopy for Process Control
Lee, P.-W. / Kim, Y.-J. / Seo, S.-H. / Kim, J.-H. / Electrochemical Society | 1995
210
Characterization of Plasma Surface Charging Using a Real-Time On-Wafer Probe
Ma, S. / McVittie, J. P. / Electrochemical Society | 1995
211
Improved Within-Wafer Uniformity Through the Use of Maximum-Likelihood Estimation of the Mean and Covariance Surfaces
Davis, J. C. / Hughes-Oliver, J. / Gyurcsik, R. S. / Lu, J. C. / Electrochemical Society | 1995
213
Failure Analysis of 4-Kilo-Bit Polycrystalline-Silicon Gate Complementary Metal Oxide Semiconductor Field Effect Transistor Static Random Access Memory (TC5514AP) Silicon Die Chips Through the Observation of Digitally Expressed Fail Bit Pattern on a Cathode Ray Tube
Saito, Y. / Electrochemical Society | 1995
214
(BFH^+) Contamination of Phosphorus Ion Implants
Heden, C. / Ho, K. / Pong, R. / Weisenberger, W. / Electrochemical Society | 1995
216
Multivariate Classification of BPSG Thin Films Using Mahalanobis Distances
Zhang, S. / Franke, J. E. / Niemczyk, T. M. / Haaland, D. M. / Electrochemical Society | 1995
218
Effect of Hydroxylamine Chemistry on Polymer Removal for Submicron Via Resistance
Nguyen, T. T. / Kirk, S. J. / Electrochemical Society | 1995
220
Growth Kinetics of Silicon-Oxynitrides Formed by Furnace Oxidation of Si in N~2O Ambient
Bhat, M. / Jia, H. H. / Kwong, D. L. / Electrochemical Society | 1995
222
Diagnostics and Poly-Si Gate Process Development at New Microwave Coupled Plasma Source Etching System
Hoffman, P. J. / Heinrich, F. / Renner, S. / Deutschmann, L. / Electrochemical Society | 1995
224
Production of High Density Plasma on the Substrate in a Helicon Source and Application to the Deposition of SiFO Film with Low Dielectric Constant
Kim, J.-H. / Seo, S.-H. / Chang, H.-Y. / Electrochemical Society | 1995
226
Application of Laser Irradiation for Control of Cd~xHg~1~-~xTe Semiconductor Parameters
Gnatyuk, V. A. / Borshch, V. V. / Kopishinska, O. P. / Tarasevich, A. A. / Electrochemical Society | 1995
228
Reliability of Thin Oxide Films for Ultra-Large-Scale Integration
Kimura, M. / Electrochemical Society | 1995
230
Low Electric Field Time-Dependent Dielectric Breakdown for BEOL Capacitor Applications
Nguyen, D. B. / Wachnik, R. A. / Rathore, H. S. / Kane, T. / Electrochemical Society | 1995
232
Temperature Dependence of Breakdown in the Trap Creation Region for SiO~2 Thicknesses in the Range of 6-12 nm
Abadeer, B. / Larosa, G. / Hueckel, G. / Acovic, A. / Electrochemical Society | 1995
234
Optimization of Thin Oxide Process
Tai, S.-S. / Electrochemical Society | 1995
236
Accelerated Testing for Stress Voiding in Multilayered Metallization
Sullivan, T. / Bouldin, D. / Yao, D. / Electrochemical Society | 1995
237
Stress-Voiding and Electromigration Reliability of Interconnects in ULSI-Circuits
Korhonen, M. A. / Li, C.-Y. / Electrochemical Society | 1995
238
Microstructural Implications for Thermally Induced Effects and Electromigration in Thin Film Interconnects
Rajan, K. / Electrochemical Society | 1995
240
Corrosion Characteristics of Blanket, Stacked, and Patterned Al-Cu Thin Films Used for Submicron Metallization
Carpio, R. / Chan, T. / Von Meurs, R. / Electrochemical Society | 1995
242
Thermal Stress Characteristics and Void Formation in Al(Cu) Interconnects
Ho, P. S. / Yeo, I.-S. / Jawarani, D. / Anderson, S. G. / Electrochemical Society | 1995
243
The Design of a Test Chip for a Sematech Program to Standardize Electromigration Testing
Small, M. / Harward, M. / Zhao, B. / Electrochemical Society | 1995
245
The Importance of the Threshold Current For Electromigration Design Rules
Baerg, B. / Electrochemical Society | 1995
247
Roles of WSi and TiN on Via Electromigration Resistance in Aluminum-Based Interconnections
Yamaha, T. / Naito, M. / Hotta, T. / Electrochemical Society | 1995
249
Electromigration Performance in Al Layered Interconnects Using Ti and/or TiN Layers
Hashimoto, K. / Kageyama, M. / Touchi, K. / Onoda, H. / Electrochemical Society | 1995
251
The Effect of Test Structure and Stress Condition on Electromigration Failure
Kawasaki, H. / Lee, C. / Pintchovski, F. / Electrochemical Society | 1995
253
Behavior of Silver Coated Particles under Elevated Temperatures and Humid Conditions
Djokic, S. S. / Lepard, R. H. / Dubois, M. L. / Currie, J. C. / Electrochemical Society | 1995
254
Electromigration under AC Current Stress
Hu, C. / Cheung, N. / Tao, J. / Electrochemical Society | 1995
255
Electromigration Drift Velocity in Al and Cu Interconnections
Hu, C.-K. / Lee, K. Y. / Lee, K. L. / Cabral, C. / Electrochemical Society | 1995
257
Cu Atom Redistribution and Electromigration Resistance of AlCu Lines after Aging Treatment
Nogami, T. / Nemoto, T. / Electrochemical Society | 1995
259
Improvement in Electromigration of AlSiCu Reflowed on Recessed W-Plug
Kakuhara, Y. / Yamada, Y. / Kikkawa, T. / Huo, D. T.-C. / Electrochemical Society | 1995
261
Spectral Emissivity of Liquid Si
Takasuka, E. / Tokizaki, E. / Terashima, K. / Kimura, S. / Electrochemical Society | 1995
263
Scalar Transport Due to the Turbulent Effect in the Czochralski Silicon Melt
Chung, S.-I. / Izunome, K. / Togawa, S. / Kawanishi, S. / Electrochemical Society | 1995
265
Direct Observation of Oxygen Distribution in Quenched Si Melt near Solid-Liquid Interface during CZ Crystal Growth
Kawanishi, S. / Togawa, S. / Izunome, K. / Terashima, K. / Electrochemical Society | 1995
267
Photoluminescence D-Lines Spectra in Heat-Treated Czochralski Silicon Crystal
Cho, K. H. / Lee, J. Y. / Jeon, H. I. / Suh, E.-K. / Electrochemical Society | 1995
269
Competitive Analysis of 200 mm Epitaxial Silicon Wafers
Huff, H. R. / Goodall, R. K. / Bhat, V. / Electrochemical Society | 1995
271
Application of Chemical Mechanical Planarization for Mesa Isolation in Silicon on Insulator
Ali, I. / Joyner, K. / Roy, S. / Shinn, G. / Electrochemical Society | 1995
273
Effects of Substrate Oxygen Content on Leakage of Switching NPN Transistors and Diodes
Chiou, H.-D. / Shumate, J. / Holly, C. / Raslan, A. / Electrochemical Society | 1995
274
Growth of Lateral Limited SiGe Films on the Si(100) Mesa Substrate by RTP/VLP-CVD
Zhang, R. / Huang, H. B. / Shi, Y. / Gu, S. L. / Electrochemical Society | 1995
275
The Effect of Preannealing on Anodic Aluminum Oxide Formed on Al Thin Films
Chang, P.-H. / Chiu, R.-L. / Tung, C.-H. / Electrochemical Society | 1995
277
Agglomeration of TiSi~2 after Densification Process and Its Effects on Barrier Quality
Harel, O. / Electrochemical Society | 1995
278
Plasma Enhanced Chemical Vapor Deposition of Molybdenum, Molybdenum Carbide, and Oxide in Thin Films
Chen, B. / Selman, J. R. / Electrochemical Society | 1995
280
The Deposition of Noble Metals from Buffered Oxide Etchants onto Silicon Surfaces - A Morphological Study
Yoneshige, K. K. / Parks, H. G. / Helms, C. R. / Halepete, S. / Electrochemical Society | 1995
282
The Effects of Ion Beam Mixing on Titanium Silicide Formation in Submicron CMOS Devices
Chonko, M. A. / Sitaram, A. R. / Honcik, C. / Somero, B. M. / Electrochemical Society | 1995
284
Reduction of Surface Residues Seen after Metal Etch Processing
Mautz, K. E. / Electrochemical Society | 1995
285
Thermodynamics and Kinetics of Hydrogen Evolution in Hydrogenated Amorphous Silicon Films
Chung, D. D. L. / Sridhar, N. / Anderson, W. A. / Coleman, J. / Electrochemical Society | 1995
286
Polycrystalline Silicon Films of High Photoresponse, Obtained by Vacuum Annealing of Aluminum Capped Hydrogenated Amorphous Silicon Films
Chung, D. D. L. / Sridhar, N. / Anderson, W. A. / Coleman, J. / Electrochemical Society | 1995
287
Development of a Manufacturable MERIE Polysilicon Etch Process
Alzaben, T. / Mautz, K. E. / Electrochemical Society | 1995
289
The Ultimate Gate Oxide Thinness
Kar, S. / Electrochemical Society | 1995
291
BPSG Stability Layer for High Dopant BPSG Films
Fry, H. W. / Fernandes, N. I. / Electrochemical Society | 1995
293
Characterization of Oxygen-Enriched TEOS Films
DeCrosta, D. A. / Hackenberg, J. J. / Linn, J. H. / Electrochemical Society | 1995
294
Extending SOG Based Planarization to Sub-Half Micron Technology
Bothra, S. / Weling, M. / Electrochemical Society | 1995
296
An Application of Virtual Wafer Modeling to an Advanced 0.45 �m CMOS Technology
Gardner, M. / Kadoch, D. / Electrochemical Society | 1995
297
Role of Rapid Isothermal Processing as a Low Temperature Processing Technique in Silicon Integrated Circuits Manufacturing
Singh, R. / Sharangapani, R. / Gong, C. / Alamgir, S. / Electrochemical Society | 1995
298
A Statistical Analysis of High Tc Superconductors
Chow, C. C. / Electrochemical Society | 1995
299
On the Role of Surface Diffusion in Diamond Growth
Frenklach, M. / Skokov, S. / Weiner, B. / Electrochemical Society | 1995
300
Phase Diagram Calculations of Nonequilibrium Stationary States for CVD Diamond Growth
Wang, J.-T. / Zheng, P.-J. / Electrochemical Society | 1995
301
Variational Transition State Theory Rate Constants for Methyl Radical Recombination with Diamond Surfaces
Harrington, J. / Jeffries, J. B. / Smith, G. P. / Electrochemical Society | 1995
302
Molecular Dynamics Simulations of Ultrathin Amorphous Carbon Films
Philpott, M. R. / Glosli, J. N. / Belak, J. / Electrochemical Society | 1995
303
Models of Transport, Gas-Phase, and Surface Chemistry in Diamond Chemical Vapor Deposition
Coltrin, M. E. / Dandy, D. S. / Electrochemical Society | 1995
304
A Reverse Monte Carlo Modeling Study of Diamond-Like Carbon
Rigden, J. S. / Newport, R. J. / Electrochemical Society | 1995
305
Local Density Functional Modeling of Diamond Growth and Graphitization
Heggie, M. I. / Latham, C. D. / Jones, R. / Briddon, P. / Electrochemical Society | 1995
306
Studies of Heteroepitaxial Nucleation and Growth of Diamond on Silicon
Jiang, X. / Paul, M. / Klages, C.-P. / Jia, C. L. / Electrochemical Society | 1995
307
Crystallization of Diamond by the Chemical Transport Reaction
Spitsyn, B. V. / Electrochemical Society | 1995
308
Mechanisms for the Bias-Enhanced Nucleation of Diamond
McGinnis, S. P. / Kelly, M. A. / Hagstrom, S. B. / Electrochemical Society | 1995
309
From Crystals of Naphthalene to Crystals of Diamond: Kinetics and Mechanism
Voronov, O. A. / Rakhmanina, A. V. / Electrochemical Society | 1995
310
The Role of Carbonaceous Precursors during Diamond Nucleation
Sheldon, B. W. / Boekenhauer, R. E. / Nijhawan, S. / Electrochemical Society | 1995
311
Chemical Vapor Deposition of Diamond: Effect of Process Variables on Growth Rate and Quality
Angus, J. C. / Cassidy, W. D. / Kovach, C. S. / Roozbehani, G. / Electrochemical Society | 1995
312
Local Monitoring of Diamond Nucleation Density
Obraztsov, A. N. / Timoshenko, V. Y. / Electrochemical Society | 1995
313
Nucleation and Initial Growth Stages of Diamond in CVD: A Theoretical Approach
Liu, H. / Dandy, D. S. / Electrochemical Society | 1995
314
Homoepitaxial Growth of Diamond Thin Films on the Misoriented (001) Substrates
Lee, N. / Badzian, A. / Electrochemical Society | 1995
315
Titanium as a Potential Heteroepitaxial Substrate for Diamond
McClure, M. T. / Wolter, S. D. / Glass, J. T. / Stoner, B. R. / Electrochemical Society | 1995
317
Chemical Vapor Deposition of Diamond Using Fullerenes for Diamond Nucleation and Growth Precursors
Pan, C. / Withers, J. C. / Stoessel, C. H. / Loutfy, R. O. / Electrochemical Society | 1995
318
Effect of the Silicon Substrate Orientation and Pretreatment on the Nucleation and Adhesion of CVD Diamond Films
Borges, C. F. M. / Schelz, S. / Martinu, L. / Moisan, M. / Electrochemical Society | 1995
320
Process Parameter Dependence of the Morphology of Diamond Films on Graphite Fibers
Shah, S. I. / Waite, M. M. / Electrochemical Society | 1995
321
The Initial Stages of Diamond Growth on Si(100) Studied by Conventional and Cross-Sectional Micro-Raman Spectroscopy
Werninghaus, T. / Laufer, S. / Hinneberg, H.-J. / Zahn, D. R. T. / Electrochemical Society | 1995
322
Morphological Control of Homoepitaxial Diamond: Its Correlation to Texture in Polycrystalline Diamond Films
Yee, A. L. / Ong, H. / Chang, R. P. H. / Electrochemical Society | 1995
323
Deposition of Diamond-Like Carbon Cubic Boron Nitride and Bias-Enhanced Nucleation of Diamond as a Subplantation Process
Robertson, J. / Electrochemical Society | 1995
324
Laser-Based Synthesis of Diamond at Low Temperatures
Subramaniam, V. V. / Rebello, J. H. D. / Electrochemical Society | 1995
325
Optimization Techniques in DC Arcjet Diamond Chemical Vapor Deposition
Weimer, W. A. / Reeve, S. W. / Dandy, D. S. / Electrochemical Society | 1995
326
Enhanced Deposition Rate of CVD Diamond in a DC Arcjet with a Secondary Discharge
Baldwin, S. K. / Owano, T. G. / Kruger, C. H. / Electrochemical Society | 1995
327
Diamond Deposition from Acetylene-Oxygen Flames
Schermer, J. J. / Giling, L. J. / Electrochemical Society | 1995
329
Effects of Flame Speed and Stoichiometry on Low Pressure Combustion Diamond Growth
Kim, J. / Cappelli, M. A. / Electrochemical Society | 1995
330
Alternative Fuels for Combustion Synthesis of Diamond
Shin, H. S. / Goodwin, D. G. / Electrochemical Society | 1995
332
Effect of Oxygen on High Temperature Deposition of Diamond by Microwave Plasma
Chein, T. / Tzeng, Y. / Electrochemical Society | 1995
333
Deposition of Diamond from Plasma Jet Including Dichlorobenzene as Carbon Source
Kotaki, T. / Horii, N. / Isono, H. / Matsumoto, O. / Electrochemical Society | 1995
334
Impurity Effects in the Cyclic Deposition of Diamond Films
Howard, W. / Spear, K. / Frenklach, M. / Electrochemical Society | 1995
335
Diamond Deposition Using a Planar Radio Frequency Inductively Coupled Plasma
Bozeman, S. P. / Tucker, D. A. / Stoner, B. R. / Hooke, W. M. / Electrochemical Society | 1995
337
Preparation of Diamond Films by CVD Including the Use of Halogens and Interhalogens
Shamir, J. / Electrochemical Society | 1995
338
CVD Diamond Deposition on Ce-TZP Ceramics
Corat, E. J. / Do Carmo, M. / Nono, A. / Trava-Airoldi, V. J. / Electrochemical Society | 1995
339
The Role of Microwave Power in the Plasma-Chemical Vapor Deposition of Diamond
Fox, C. A. / McMaster, M. C. / Hsu, W. L. / Kelly, M. A. / Electrochemical Society | 1995
340
Diamond Shaping and Polishing by Chemical Reactions
Jin, S. / Zhu, W. / Tiefel, T. H. / Electrochemical Society | 1995
342
Electrochemical Formation and Surface Modification of Freestanding Homoepitaxial Diamond Films
Pehrsson, P. / Marchywka, M. / Butler, J. E. / Electrochemical Society | 1995
343
CVD Diamond Films Etching in ECR Discharge
Suetin, N. V. / Gulyaev, K. S. / Kovalev, A. S. / Rakhimov, A. T. / Electrochemical Society | 1995
344
Cubic Boron Nitride and Carbon Nitride Films: Recent Developments
Richter, F. / Electrochemical Society | 1995
346
Advances in Understanding How Cubic BN Films Form by Ion-Assisted Deposition
Mirkarimi, P. B. / Medlin, D. L. / McCarty, K. F. / Barbour, J. C. / Electrochemical Society | 1995
348
Mass Separated Ion Beam Deposition: A Unique Technique to Grow DLC, c-BN, and CN Films
Ronning, C. / Hofsass, H. / Electrochemical Society | 1995
349
Growth and Nucleation Mechanisms of c-BN Films Deposited with Inductively Coupled Plasma CVD
Kuhr, M. / Reinke, S. / Kulisch, W. / Electrochemical Society | 1995
350
Amorphous C-N and SiC-N Films: Properties and Applications
Ong, H. / Yee, A. L. / Xiong, F. / Chang, R. P. H. / Electrochemical Society | 1995
351
Intrinsic Strain and Flexural Strength of CVD Diamond
Klein, C. A. / Hallock, R. B. / Miller, R. P. / Electrochemical Society | 1995
353
Hypervelocity Impact Tests on Polycrystalline Diamond Deposited over Silicon Substrates
Ramesham, R. / Hill, D. / Best, S. / Rose, M. F. / Electrochemical Society | 1995
355
Carbon-Graphite-Like Friction Behavior of Polycrystalline Diamond Sliding Against Itself in Vacuum
Gardos, M. N. / Ravi, K. V. / Electrochemical Society | 1995
356
Mechanical Characterization of Diamond-Coated Metals
Drory, M. D. / Electrochemical Society | 1995
357
Aspects of Characterization of Diamond Coatings on Cutting Tools
Bhat, D. G. / Malshe, A. P. / Sung, C. / Electrochemical Society | 1995
358
Growth and Characterization of Microwave Plasma CVD Diamond Using CO+H~2, CH~4+H~2+O~2, CO+N~2, and CO
Ramesham, R. / Rose, M. F. / Askew, R. F. / Electrochemical Society | 1995
360
Cutting of Diamond Coated Molybdenum by Wire Electric Discharge Machine
Ramesham, R. / Askev, R. F. / Rose, M. F. / Sirois, D. L. / Electrochemical Society | 1995
362
Transformation of Monoatomic Step on (100) Diamond Surfaces
Skokov, S. / Weiner, B. / Frenklach, M. / Electrochemical Society | 1995
363
The Radiation Damage Inflicted on CVD Diamond by Doses of up to 6 X 10^1^4 High Energy Neutrons cm^-^2
Mainwood, A. / Allers, L. / Hassard, J. F. / Howard, A. S. / Electrochemical Society | 1995
364
HFCVD of Diamond at Low Substrate and Low Filament Temperatures
Li, Z. / Clausing, R. E. / Shaw, R. W. / Feigerle, C. / Electrochemical Society | 1995
366
Photo-Hall Effect and Photoconductivity of Polycrystalline Undoped CVD-Diamond
Ermakov, M. G. / Vedeneev, A. S. / Ermakova, O. N. / Sokolina, G. A. / Electrochemical Society | 1995
367
Controllable Electronic Properties of Diamond-Like Atomic-Scale Composite (DLASC) Films and DLASC/Si Interface
Dorfman, B. / Polyakov, V. / Rukovishnikov, A. / Abraizov, M. / Electrochemical Society | 1995
368
The Formation of Cubic Boron Nitride and Silicon Carbide Layers on Silicon
Friedrich, M. / Hahn, J. / Laufer, S. / Richter, F. / Electrochemical Society | 1995
369
The Effect of RF Power on the Growth of c-BN Films on Nickel Substrates
Chen, G. / Guo, Y. / Li, G. / Song, Z. / Electrochemical Society | 1995
371
HREELS of the Oxidized Diamond (100) Surface
Pehrsson, P. / Electrochemical Society | 1995
372
Chemistry and the Electronic Properties of Low-Index Diamond Surfaces
Pehrsson, P. / Potochnik, S. J. / Butler, J. E. / Electrochemical Society | 1995
373
Atomic Force Microscopic Characterization of Twinning Morphology in CVD Diamond Films
Wang, L. / Angus, J. C. / Argoitia, A. / Kump, K. / Electrochemical Society | 1995
375
Depth-Resolved Residual Stress Measurements in Homoepitaxial Diamond Films Grown by Chemical Vapor Deposition
Ager, J. W. / Plano, M. A. / Moyer, D. / Electrochemical Society | 1995
377
A Study of Diffusion Lengths on Diamond and Gallium Nitride Materials
Cropper, A. D. / Moore, D. J. / Scott, C. J. / Binari, S. / Electrochemical Society | 1995
378
Raman Spectroscopy of Annealed Amorphous Hydrogenated and Fluorinated Carbon Films
Muller, U. / Hauert, R. / Oral, B. / Tobler, M. / Electrochemical Society | 1995
379
Diamond for High Temperature Pressure Sensor
Davidson, J. L. / Wur, D. / Kang, W. P. / Beetz, C. / Electrochemical Society | 1995
380
Silicon-Based Contacts on Homoepitaxial Diamond Films
Vespan, A. / Ebert, W. / Borst, T. H. / Pitter, M. / Electrochemical Society | 1995
382
Relationship Between Raman Spectra and [H] and [CH~3] for Diamond Films
Prawer, S. / Harris, S. J. / Electrochemical Society | 1995
383
Effect of Additives and hBN Structure on the cBN Growth at HP/HT
Dinca, G. / Georgeoni, P. / Baluta, G. / Calu, G. / Electrochemical Society | 1995
384
Structure of Highly Oriented Polycrystalline Diamond Films Grown on Si(001)
Tachibana, T. / Hayashi, K. / Kobashi, K. / Electrochemical Society | 1995
386
Effects of Surface Treatments on the Current-Voltage Characteristics of Metal/Intrinsic Diamond/Semiconducting Diamond Diodes
Miyata, K. / Nishimura, K. / Kobashi, K. / Electrochemical Society | 1995
388
The Physical Properties of c-BN Films Obtained in RF-Plasma with Additional Ion Stimulation
Gerasimovich, S. S. / Sleptsov, V. V. / Teryoshin, S. A. / Electrochemical Society | 1995
389
Time-of-Flight Experiments for DLC Films
Strzelecki, W. / Staryga, E. / Mycielski, W. / Electrochemical Society | 1995
390
Low-Temperature Synthesis of Cubic Boron Nitride and Diamond Under High Pressure C~2B~1~0H~1~2 and CN~5H~3 as Species
Voronov, O. A. / Kashevarova, L. S. / Electrochemical Society | 1995
391
The Effect of Hydrogen on the Surface Electrical Conductivity of Diamond (110)
Mackey, B. L. / Russell, J. N. / Pehrsson, P. E. / Butler, J. E. / Electrochemical Society | 1995
392
In Situ Surface Roughness Measurements during PECVD Diamond Film Growth
Zuiker, C. D. / Gruen, D. M. / Krauss, A. R. / Electrochemical Society | 1995
393
Optical Diagnostics for Temperature Measurement in a Diamond CVD Reactor
Jeffries, J. B. / Brinkman, E. A. / Electrochemical Society | 1995
394
In Situ X-Ray Investigation of DLC Film Properties during Growth and Etching Processes
Baranov, A. M. / Sleptsov, V. V. / Teryoshin, S. A. / Mikhailov, I. F. / Electrochemical Society | 1995
395
Forced Diffusion of Boron and Lithium in Diamond
Popovici, G. / Sung, T. / Prelas, M. A. / Khasawinah, S. / Electrochemical Society | 1995
396
Etching of Diamond Wafers with Electron-Cyclotron-Resonance Plasmas
Chakraborty, R. N. / Reinhard, D. K. / Goldman, P. D. / Electrochemical Society | 1995
398
Surface and Bulk Effects in Ion Assisted Cubic Boron Nitride (c-BN) Growth
Reinke, S. / Kuhr, M. / Kulisch, W. / Electrochemical Society | 1995
399
Non-Maxwellian EEDF in a Microwave Plasma
Gordon, M. H. / Kelkar, U. / Electrochemical Society | 1995
400
Deposition and Stress Measurements of HFCVD Diamond Coating on Tool Inserts
Taher, M. / Schultz, J. / Malshe, A. P. / Nasrazadani, S. / Electrochemical Society | 1995
401
Large Area Diamond Film Deposition for Multichip Modules
Brown, W. D. / Beera, R. / Haque, S. / Naseem, H. A. / Electrochemical Society | 1995
402
Decomposition of Diborane and Ammonia on Ni(100) Surfaces
Greve, D. W. / Desrosiers, R. M. / Gellman, A. J. / McFadden, C. F. / Electrochemical Society | 1995
404
X-Ray Diffraction Imaging
Black, D. / Burdette, H. / Linares, R. / Doering, P. / Electrochemical Society | 1995
405
Shallow Angle X-Ray Diffraction from In Situ Diamond Thin Films
Rigden, J. S. / Newport, R. J. / Electrochemical Society | 1995
406
Two-Dimensional Model of HFCVD Reactor
Suetin, N. V. / Mankelevich, Y. A. / Rakhimov, A. T. / Vagin, V. P. / Electrochemical Society | 1995
407
Surface Characterization of Hexagonal and Cubic Boron Nitride Films
Sene, G. / Bouchier, D. / Ilias, S. / Djouadi, M. A. / Electrochemical Society | 1995
408
Cubic Lattice Parameter of Nitrogen Doped Diamond
Voronov, O. A. / Rakhamanina, A. V. / Khlybov, E. P. / Electrochemical Society | 1995
409
Study of Diamond Peculiarities and Production of the Monocrystal Instrument
Timofeev, V. E. / Popov, I. Y. / Zasimova, N. S. / Saparin, G. V. / Electrochemical Society | 1995
410
Properties of Hydrogenated Tetrahedral Amorphous Carbon
Weiler, M. / Robertson, J. / Sattel, S. / Jung, K. / Electrochemical Society | 1995
411
Field Induced Transformation of DLC Films Deposited by DC Plasma Technique
Yalamanchi, R. S. / Thutupalli, G. K. M. / Sankara Reddy, K. S. / Satyam, M. / Electrochemical Society | 1995
412
Equilibrium Constants of Naphthalene Decomposition Reactions
Yakovlev, E. N. / Voronov, O. A. / Electrochemical Society | 1995
413
Influence of Substrate Temperature on Diamond Synthesis in a Supersonic Hydrogen Arcjet
Loh, M. H. / Cappelli, M. A. / Electrochemical Society | 1995
414
Measurement Techniques and Results for the Thermal Conductivity of CVD Diamond
Graebner, J. E. / Electrochemical Society | 1995
416
Measurement of Electrical Properties of Undoped Diamond Films Between Room Temperature and 1000�C
Vandersande, J. W. / Zoltan, L. D. / Electrochemical Society | 1995
417
The Relationship of Voids and Hydrogen Content to the Thermal Conductivity of Polycrystalline Diamond
Gleason, K. K. / McNamara, K. M. / Scruggs, B. E. / Electrochemical Society | 1995
419
Measurement of the Change in Diamond's Refractive Index with Temperature and of the Etching Rate of Diamond by the KrF (248 nm) Excimer Laser
Hauge, R. H. / Patterson, M. J. / Margrave, J. L. / Ball, Z. / Electrochemical Society | 1995
420
Process of Epitaxial Joining to Fabricate Large-Area Diamond Single Crystal
Malta, D. P. / Posthill, J. B. / Hudson, G. C. / Thomas, R. E. / Electrochemical Society | 1995
421
Recent Observations of Microcavities in CVD Diamond: Their Effects on MCM Processing
Malshe, A. P. / Glezen, J. G. / Naseem, H. A. / Brown, W. D. / Electrochemical Society | 1995
422
Negative Electron Affinity Diamond
Pate, B. B. / Bandis, C. / Haggerty, D. / Electrochemical Society | 1995
423
Electron Field Emission Characteristics of CVD Diamond
Zhu, W. / Kochanski, G. P. / Jin, S. / Seibles, L. / Electrochemical Society | 1995
425
CVD Diamond: A Unique Dielectric, Semiconductor, and Thermal Conductor for Electronic Applications
Davidson, J. L. / Brown, W. D. / Dismukes, J. P. / Electrochemical Society | 1995
426
Diamond Electronics: Now or Never?
Buckley-Golder, I. M. / Chaliker, P. R. / Johnston, C. / Electrochemical Society | 1995
427
Silicon-Diamond Interface Band Structure
Obraztsov, A. N. / Guseva, M. B. / Petrukhin, A. G. / Petrov, A. V. / Electrochemical Society | 1995
428
Photoconductive Spectroscopy of CVD Diamond
Allers, L. / Collins, A. T. / Electrochemical Society | 1995
429
Strategies for CVD Diamond Cost Reduction
Singer, A. T. / Goodwin, D. G. / Electrochemical Society | 1995
430
Microwave Deposition Reactors for Commercial CVD Diamond Applications
Sevillano, E. / Casey, J. A. / Gat, R. / Jin, S. / Electrochemical Society | 1995
431
Device Simulations of Diamond FETs with MES, p^+ip^+ and "�-Doped" Structures in Comparison with SiC MESFET
Nishimura, K. / Miyata, K. / Kobashi, K. / Electrochemical Society | 1995
433
Thin Film Diamond Diode Chemical Gas Sensor
Gurbuz, Y. / Kang, W. P. / Davidson, J. L. / Wu, D. / Electrochemical Society | 1995
435
High Power Electron Beam Activated Diamond Switches
Lin, S.-H. / Sverdrup, L. H. / Electrochemical Society | 1995
437
Diamond-Like Carbon Films for High Temperature Electronic Applications
Kosel, P. B. / Wu, D. / Kosel, O. P. / Carr, S. F. / Electrochemical Society | 1995
438
The Use of Diamond and Diamond-Like Carbon Coatings for Corrosion Protection
Natishan, P. M. / McCafferty, E. / Glesener, J. / Morrish, A. A. / Electrochemical Society | 1995
440
Process Modeling and Process Control Needs for Process Synthesis for ULSI Devices
Hosack, H. H. / Electrochemical Society | 1995
442
Influence of Fluorine Implant on the Transient Enhanced Diffusion of Boron: Determination of Process Modeling Parameters
Vuong, H.-H. / Gossmann, H.-J. / Rafferty, C. S. / Luftman, H. S. / Electrochemical Society | 1995
444
Modeling of Low Thermal Budget Redistribution of Arsenic in Silicon: Dynamic Clustering
Mathiot, D. / Scheiblin, P. / Electrochemical Society | 1995
446
Computationally Efficient Model for Dopant Precipitating Kinetics
Clejan, I. / Dunham, S. T. / Electrochemical Society | 1995
448
A Two-Dimensional Model for Strain from Dislocation Loops in Ion-Implanted Silicon
Chaudhry, S. / Thompson, R. H. / Jones, K. S. / Law, M. E. / Electrochemical Society | 1995
450
Modeling of Notching Caused by Aspect Ratio Dependant Charging during HDP Etching
McVittie, J. / Hane, M. / Kinosita, T. / Electrochemical Society | 1995
452
Issues and Challenges in MOSFET Scaling below 0.6 Microns for ULSI Technology
Tasch, A. F. / Electrochemical Society | 1995
454
A 47 GHz f~� SiHBT with an Emitter of �c-Si/Very Thin a-SiCx Double Layer
Kondo, M. / Shiba, T. / Tamaki, Y. / Nakamura, T. / Electrochemical Society | 1995
456
A 0.25 �m MOSFET Technology Using In Situ Rapid Thermal Gate Dielectrics
Zhang, K. / Osburn, C. M. / Hames, G. / Parker, C. / Electrochemical Society | 1995
458
Practical Technology of Ta~2O~5 Stacked Capacitors for ULSI DRAMs
Suzuki, H. / Kamiyami, S. / Sakao, M. / Takaishi, Y. / Electrochemical Society | 1995
460
Spatial Variation in Point Defect Concentrations and Their Impact on Submicron Device Structure
Dunham, S. T. / Agarwal, A. M. / Electrochemical Society | 1995
462
Geometry Dependence of Void Formation in Deep Submicron Poly-Buffered LOCOS Isolation Structures: Experimental Evidence of the Stress-Relaxation Model
Smeys, P. / Griffin, P. B. / Saraswat, K. C. / Electrochemical Society | 1995
464
TEOS/Ozone APCVD Thin SiO~2 for Sub 0.5 �m LDD Spacer Applications
Moinpour, M. / Lu, W.-J. / Sadjadi, R. / Li, J. / Electrochemical Society | 1995
466
Materials Challenges for ULSI
Kimerling, L. C. / Electrochemical Society | 1995
467
Self-Limited Fractional Atomic-Layer Etching of Si
Matsuura, T. / Suzue, K. / Murota, J. / Sawada, Y. / Electrochemical Society | 1995
469
H-Passivation of Si(100) Surfaces: Correlation with Ion Beam Characterization (Elastic Recoil and Nuclear Resonance) and Atomic Force Microscopy
Atluri, V. / Herbots, N. / Whaley, S. / Bhagvat, S. / Electrochemical Society | 1995
471
Effects of the Chlorine Concentration in the Anneal Ambient on the Contamination and Surface Microroughness in SIMOX
Anc, M. J. / Krull, W. A. / Alles, M. A. / Electrochemical Society | 1995
473
Dopant Diffusion in Si(100) Delta-Doping Superlattices during Thermal Nitridation and Native Si Point Defect Properties
Mogi, T. K. / Thompson, M. O. / Gossmann, H.-J. / Eaglesham, D. J. / Electrochemical Society | 1995
475
Enhanced Segregation Gettering of Iron in Silicon by Boron Ion-Implantation
Benton, J. / Stolk, P. A. / Eaglesham, D. J. / Jacobson, D. C. / Electrochemical Society | 1995
476
Applications of Carrier Lifetime and Diffusion Length Measurements
Bullis, W. M. / Huff, H. R. / Electrochemical Society | 1995
477
Influence of Vacuum Annealing on Native Si Point Defects
Gossmann, H.-J. / Mogi, T. K. / Stolk, P. A. / Eaglesham, D. J. / Electrochemical Society | 1995
479
The Effect of Temperature on Electron Capture Cross Sections and Densities in X-Ray Irradiated Gate Field Effect Transistors
Kim, H. S. / Reisman, A. / Williams, C. K. / Brush, H. / Electrochemical Society | 1995
481
Analysis of Silicon Damage and Surface Contamination Caused by Oxide Etching
Reinhart, K. / Busch, E. / Kelso, S. / Electrochemical Society | 1995
483
TDS Study on the Corrosion Suppression Mechanism after Aluminum Etching by O~2+H~2O Downstream Ashing
Kojiri, H. / Nakamura, M. / Electrochemical Society | 1995
485
Silicon Oxidation Inhibition after NF~3/Ar RIE in the Presence of Photoresist
Tsuchiaki, M. / Ohiwa, T. / Takato, H. / Watanabe, T. / Electrochemical Society | 1995
487
Conditioning of Silicon Surface after RIE Using O~2 and NF~3 Remote Plasma
Hwang, D. / Ruzyllo, J. / Grant, R. / Mount, D. / Electrochemical Society | 1995
488
Reduction of Charge-Up Damage in Magnetron RIE
Yoshida, Y. / Electrochemical Society | 1995
490
Plasma Etch of Titanium and Titanium Oxide
Kuo, Y. / Electrochemical Society | 1995
492
Investigation of Undesirable Film Deposition in Contacts during Contact Etch
Weling, M. / Gabriel, C. / Electrochemical Society | 1995
494
Low Dielectric Dow Cyclotene 3022 (BCB) Etch for Multilevel Interconnection Integration
Lii, Y. T. / Wetzel, J. / Electrochemical Society | 1995
496
Highly Anisotropic Silicon RIE for Nanofabrication with Fluorine only Containing Gases
Grigoropoulos, S. / Gogolides, E. / Nassiopoulos, A. G. / Electrochemical Society | 1995
498
Selective Remote Plasma Etching of Si~3N~4 Over SiO~2 at Elevated Temperature
Staffa, J. / Luther, B. / Ruzyllo, J. / Grant, R. / Electrochemical Society | 1995
499
Process Integration of Chemical Mechanical Polishing
Perry, K. A. / Electrochemical Society | 1995
500
A One-Step Shallow Trench Global Planarization Process Using Chemical Mechanical Polishing
Boyd, J. M. / Ellul, J. P. / Electrochemical Society | 1995
502
Optimization of a Chemical Mechanical Polishing Process for Dielectric Planarization
Weling, M. / Drill, C. / Electrochemical Society | 1995
504
Prevention of Charging Damage to Gate Oxide during Intermetal Oxide Deposition by HDP CVD
Bothra, S. / Gabriel, C. / Electrochemical Society | 1995
506
Improved Gap-Filling Capability of Fluorine-Doped PECVD Silicon Oxide Thin Film
Mizuno, S. / Verma, A. / Lee, P. / Nguyen, B. / Electrochemical Society | 1995
508
Gap Fill and Film Reflow Capability of Subatmospheric Chemical Vapor Deposition (SACVD) Borophosphosilicate Glass
Robles, S. / Russel, K. / Galiano, M. / Siva, V. / Electrochemical Society | 1995
510
Integration of BPSG in a 0.25 �m DRAM Process
Gambino, J. / Jaso, M. / Aochi, H. / Tsunashima, Y. / Electrochemical Society | 1995
512
GCMS and FTIR Studies of By-Product Inhibited Growth and the Rate-Limiting Step in TEOS-Based SiO~2CVD
Bartram, M. E. / Moffat, H. K. / Electrochemical Society | 1995
514
Dielectric Constant and Stability of Fluorine Doped PECVD Silicon Oxide Thin Films
Mizuno, S. / Verma, A. / Tran, H. / Lee, P. / Electrochemical Society | 1995
516
Measurement of Silicon Particules Laser Surface Scanning and Angle-Resolved Light Scattering
Huff, H. R. / Goodall, R. K. / Williams, E. / Woo, K.-S. / Electrochemical Society | 1995
518
Copper Adsorption at a Silicon Surface from HF Solution
Turner, J. E. / Miyazaki, K. / Fukazawa, Y. / Muraoka, H. / Electrochemical Society | 1995
520
A Point-of-Use Purification Method of HF Chemicals for VLSI Manufacturing
Yamamoto, K. / Shimono, T. / Okada, T. / Kawazawa, Y. / Electrochemical Society | 1995
522
Comparison of Automated Testing Methods for Plasma Charging Induced Damage
Abdel-Ati, W. L. N. / Ma, S. / Yang, T.-C. / McVittie, J. P. / Electrochemical Society | 1995
524
Analysis of Within-Run Process Variations Using Automated Wafer-Position Tracking in Workstream
Ling, Z.-M. / Pak, J. / Beckage, P. / Lin, Y.-T. / Electrochemical Society | 1995
526
Thin Gate Dielectrics for ULSI: RTO or Furnace?
Green, M. L. / Electrochemical Society | 1995
527
The Effect of Carbon in Silicon on Oxidation Kinetics and Silicon Dioxide Integrity
Ridley, R. / Brozek, T. / Ruzyllo, J. / Electrochemical Society | 1995
528
Effect of H~2 Annealing on Oxide Integrity Improvement
Park, J.-G. / Rozgonyi, G. A. / Ushio, S. / Cho, K.-C. / Electrochemical Society | 1995
530
Gate Oxide Integrity in DRAM Devices: D-defect Effects in CZ Si
Park, J.-G. / Rozgonyi, G. A. / Lee, C.-S. / Choi, S.-P. / Electrochemical Society | 1995
532
Formation of High Quality Thin Stacked Oxynitride Gate Dielectrics by In Situ Rapid Thermal Multiprocessing
Bhat, M. / Cho, T. H. / Yan, J. / Han, L. K. / Electrochemical Society | 1995
534
High Quality Oxynitride Gate Dielectrics Prepared by Reoxidation of NH~3-Nitrided SiO~2 in N~2O Ambient
Han, L. K. / Kim, J. / Yoon, G. W. / Bhat, M. / Electrochemical Society | 1995
535
Process Dependence of MOSFET Performance and Reliability with N~2O-Based Furnace-Grown Gate Oxides
Han, L. K. / Wang, H. H. / Kim, J. / Yoon, G. W. / Electrochemical Society | 1995
536
Resistivity Reduction of Thin Polycrystalline Silicon Films Crystallized from In Situ Phosphorus-Doped Amorphous Silicon Deposited Using Silane or Disilane
Oguro, S. / Shishiguchi, S. / Arai, K. / Electrochemical Society | 1995
538
Super Self-Aligned Ultrashallow Junction Formation/Selective Si~1~-~xGe~x CVD in Deep-Submicron MOSFETs Fabrication
Goto, K. / Murota, J. / Honma, F. / Matsuura, T. / Electrochemical Society | 1995
540
Formation of Deep Submicrometer Cobalt Silicided Poly Gate Using Bilayer Processes
Wang, Q. F. / Lauwers, A. / Deweerdt, B. / Veerbeeck, R. / Electrochemical Society | 1995
542
Determination of Epitaxial Layer Growth Processes by In Situ Synchotron X-Ray Topography and Diffraction
Cullis, A. G. / Barnett, S. J. / Keir, A. M. / Johnson, A. D. / Electrochemical Society | 1995
544
Rapid, Routine, Nondestructive Screening of III-V Substrate Wafers Using X-Ray Topography
Bassignana, I. C. / Macquistan, D. A. / Young, M. C. / Electrochemical Society | 1995
546
Study of Residual Strains and Dislocation Density in Semiconducting Crystal Wafers by Means of Bragg Angle Mapping
Ferrari, C. / Electrochemical Society | 1995
547
X-Ray Diffraction Imaging of ZnSe
Black, D. / Burdette, H. / Cantwell, G. / Electrochemical Society | 1995
548
Nano-Scale Imaging of Compositional, Defect and Dopant Distributions in Semiconductor Laser Heterostructures
Hull, R. / Electrochemical Society | 1995
550
Nano and Micro Characterization of III-V-Compound Material by Dedicated Scanning Microscopy
Balk, L. J. / Electrochemical Society | 1995
551
Low Temperature Near Field Optical Spectroscopy Device Structures
Harris, T. D. / Electrochemical Society | 1995
552
Applications of Atomic Force Microscopy for Compared Semiconductor Materials
Luftman, H. S. / Electrochemical Society | 1995
553
GaAs Integrated Circuit Process Characterization and Nondestructive Process Monitoring by Atomic Force Microscopy
Baca, A. G. / Howard, A. J. / Shul, R. J. / Zolper, J. C. / Electrochemical Society | 1995
554
Cathodoluminescence Imaging and Spectroscopy of Low-Dimensional Structures
Gustafsson, A. / Samuelson, L. / Kapon, E. / Bonard, J.-M. / Electrochemical Society | 1995
556
Substrate and Epilayer Homogeneity: Their Role in Compound Semiconductor Device Production
Moore, C. / Hennessy, J. / Electrochemical Society | 1995
557
Use of Photoluminescence, Mesa Width, and Chip Test Mapping to Determine the Effect of Mesa Width on Laser Performance
Levkoff, J. / Palin, M. G. / Grim-Bogdan, K. A. / Electrochemical Society | 1995
559
Nondestructive Characterization of n-AlGaAs/GaAs Heterojunction Structures Using Photoellipsometry
Wong, C. C. / Saitoh, T. / Xiong, Y.-M. / Electrochemical Society | 1995
561
Photoellipsometry Analysis of Doped GaAs
Kobayashi, K. / Wong, C. C. / Saitoh, T. / Xiong, Y.-M. / Electrochemical Society | 1995
563
The Economics of SOI Material Choices
Craven, R. A. / Downey, W. P. / Electrochemical Society | 1995
564
SIMOX Technology and Applications to Wafer Bonding
Auberton-Herve, A. J. / Barge, T. / Aspar, B. / Electrochemical Society | 1995
566
High Volume Manufacturability of SOI Bonded Wafers
Easter, W. G. / Goodwin, C. A. / Hsieh, C. M. / Shanaman, R. H. / Electrochemical Society | 1995
568
Recent Advances in Thinning of Bonded SOI Wafers by Plasma Assisted Chemical Etching
Mumola, P. B. / Gardopee, G. J. / Electrochemical Society | 1995
569
SOI for Next Generation High Performance Microprocessors
Shahidi, G. G. / Electrochemical Society | 1995
570
High Performance Bipolar SOI Technology
Ikeda, T. / Watanabe, K. / Yamaguchi, H. / Nishizawa, H. / Electrochemical Society | 1995
571
A Fully Oxide Isolated Bipolar Transistor Integrated Circuit Process
Goody, S. B. / Saul, P. H. / Electrochemical Society | 1995
573
High Voltage SOI Technology
Nakagawa, A. / Funaki, H. / Omura, I. / Electrochemical Society | 1995
575
A Comparison of Bipolar Devices on Bonded and Trenched Wafers with Junction and Trench Isolated Bulk Wafers
DeCourcey, M. / Alderman, J. C. / Blackstone, S. / Gamble, H. / Electrochemical Society | 1995
577
High-Resolution Flat-Panel Displays Using Silicon-on-Insulator Materials Technology
Dolny, G. / Ipri, A. C. / Hsuch, F.-L. / Stewart, R. G. / Electrochemical Society | 1995
579
Epitaxial Layer Transfer by Bond and Etchback of Porous Si
Yonehara, T. / Sakaguchi, K. / Sato, N. / Electrochemical Society | 1995
581
Bonded SOI with Buried Silicide Layers
Wilson, R. / Quinn, C. / McDonnell, B. / Blackstone, S. / Electrochemical Society | 1995
583
High Temperature Metallic Joints Produced at Low Process Temperature for Stress Reduction
Lee, C. C. / Chen, Y.-C. / Matijasevic, G. / Electrochemical Society | 1995
584
Characterization of Thin SOI Layers
Bengtsson, S. / Electrochemical Society | 1995
586
Strain Sources in Bond and Etchback Silicon-on-Insulator
Egloff, R. / Letavic, T. / Merchant, S. / Greenberg, B. / Electrochemical Society | 1995
587
Investigation of the Electrical Properties of Bonded Silicon-on-Insulator Wafers
Bailey, P. T. / Jin, G. / Armstrong, B. M. / Gamble, H. S. / Electrochemical Society | 1995
589
Characterization of the Crystalline Quality of Silicon Layer in Bonded SOI Silicon Material
Wijaranakula, W. / Gupta, D. C. / Electrochemical Society | 1995
590
Microstructure of Bonded SOI Films
Nayar, V. / Keir, A. M. / Abe, T. / Electrochemical Society | 1995
592
Mechanical Thinning for SOI
Blackstone, S. / Hahn, P. / Electrochemical Society | 1995
593
Oxygen Precipitate Distribution in Bonded SOI Wafers
Okonogi, K. / Kikuchi, H. / Arai, K. / Electrochemical Society | 1995
595
Chemical Free Wafer Bonding of Silicon to Glass and Sapphire
Farrens, S. / Smith, J. / Electrochemical Society | 1995
596
Reduction of Flow Pattern Defect Density in the Wafer Bonding Process
Abe, T. / Electrochemical Society | 1995
597
Process Design of Low Temperature Wafer Bonding
Tong, Q.-Y. / Gosele, U. / Electrochemical Society | 1995
599
Probing the Interface of Bonded Silicon Wafers with Infrared Spectroscopy
Chabal, Y. J. / Feijoo, D. / Christman, S. B. / Goodwin, C. A. / Electrochemical Society | 1995
600
Boron Present in the Interface of Bonded SOI Wafers and Its Protection Method
Mitani, K. / Katayama, M. / Nakazawa, K. / Electrochemical Society | 1995
601
Mechanical Considerations for Direct Wafer Bonding
Bower, R. W. / Sundararaman, R. / Chan, W. / Watt, V. H. C. / Electrochemical Society | 1995
602
Effects of Different Prebonding Cleaning Procedures on the Buried Oxide in Bond and Etchback Silicon on Insulator Materials
Ericsson, P. / Bengtsson, S. / Electrochemical Society | 1995
604
The Influence of Surface Micro-Roughness on Bondability
Bergh, M. / Bengtsson, S. / Andersson, M. O. / Electrochemical Society | 1995
606
Monolithically Integrated Detector Arrays by Wafer Bonding
King, E. E. / Holland, S. / Wang, J. J. / Beuville, E. / Electrochemical Society | 1995
608
Silicon Wafer Bonding Via Designed Monolayers
Steinkirchner, J. / Martini, T. / Gosele, U. / Electrochemical Society | 1995
610
What Determines the Bonding Speed in Silicon Wafer Bonding?
Martini, T. / Schmidt, E. / Mack, S. / Stenzel, H. / Electrochemical Society | 1995
612
Thermally Induced Bend Change of Anodically Bonded Silicon and Pyrex Wafers
Harz, M. / Bruckner, W. / Electrochemical Society | 1995
614
Thick Wafer Bonding
Tong, Q.-Y. / Gosele, U. / Electrochemical Society | 1995
616
Modification of Silicon Surfaces with H~2SO~4:H~2O~2:HF for Wafer Bonding Applications
Ljungberg, K. / Jansson, U. / Bengtsson, S. / Soderbarg, A. / Electrochemical Society | 1995
618
Technical Challenges of Precision Production Wafer Bonding in Controlled Environments
Reyerse, C. C. A. / Electrochemical Society | 1995
619
A van der Waals Force Model of Bonded Substrates
Farrens, S. / Dekker, J. / Electrochemical Society | 1995
621
An AFM Study on the Roughness of Silicon Wafers Correlated with Direct Wafer Bonding
Roberds, B. / Farrens, S. / Electrochemical Society | 1995
623
Buried Metallic Layers with Silicon Direct Bonding
Goh, W. L. / Campbell, D. L. / Armstrong, B. M. / Gamble, H. S. / Electrochemical Society | 1995
625
Misorientation-Induced Defects at Bonded Si-Si Wafer Interfaces: Structural and Electrical Investigations
Laporte, A. / Sarrabayrouse, G. / Benamara, M. / Claverie, A. / Electrochemical Society | 1995
627
A Thin SOI Process Using a Bonding and Etchback Method Without Epitaxial Growth
Unno, H. / Imai, K. / Electrochemical Society | 1995
629
Characterization of PN Junction Leakage Current in Bonded SOI Wafers
Hasegawa, H. / Murakami, Y. / Kawai, Y. / Morita, E. / Electrochemical Society | 1995
631
SOI Wafers for Crystalline SiC and GaN Growth
Guarin, F. / Iyer, S. S. / Yang, Z. / Wang, W. / Electrochemical Society | 1995
633
Direct Bonding of LPCVD Silicon Oxide Thin Films Deposited from N~2O and SiH~4
Watt, V. H. C. / Bower, R. / Sundararaman, R. / Chan, W. / Electrochemical Society | 1995
634
Precision Pressure Sensors with Anodically Bonded Backing Plates
Horning, R. / Glenn, M. / Yeh, T. / Electrochemical Society | 1995
635
Analysis of Process-Induced Stresses in Lateral Trench Isolation Structures for High Voltage Devices in Bonded SOI Wafers
Baumgart, H. / Letavic, T. J. / De Wolf, I. / Maes, H. E. / Electrochemical Society | 1995
637
Low Temperature Adhesion Bonding Methods
Booth, D. / Hunt, C. E. / Brown, W. E. / Stover, R. J. / Electrochemical Society | 1995
638
A Commodity Analogue Process Based on Bonded Wafer
McStay, K. / Smoot, F. / Hariton, D. / Egan, K. / Electrochemical Society | 1995
639
"Lord Raleigh's Ghost" or a Short History of Wafer Bonding
Gosele, U. / Electrochemical Society | 1995
640
Bonding of Structured Wafers
Baumann, H. / Mack, S. / Munzel, H. / Electrochemical Society | 1995
641
Micromechanical Structures Fabricated by Silicon Fusion Bonding and Deep Negative Ion Etching
Logan, J. / Petersen, K. / Klassen, E. / Noworolski, M. / Electrochemical Society | 1995
642
Sacrificial Wafer Bonding: An Addition to the Micromachining Techniques
Spiering, V. L. / Berenschot, J. W. / Elwenspoek, M. / Fluitman, J. M. J. / Electrochemical Society | 1995
644
The Application of Silicon Wafer Bonding to Micromachined Devices
Schmidt, M. A. / Electrochemical Society | 1995
645
Fabrication of a High-Sensitivity Pressure Sensor with Nitride Membranes and Single Crystal Piezoresistors Using Wafer Bond and Etchback
Desmond, C. / Mlcak, R. / Franz, D. / Electrochemical Society | 1995
647
Selective Au-Si Eutectic Bonding for Si-Based MEMS Applications
Lee, A. P. / Lehew, S. / Yu, C. / Ciarlo, D. R. / Electrochemical Society | 1995
649
An Investigation of Corner Rounding to Strengthen Silicon Micromachining Pressure Sensor for Fusion Bonded Wafers
Chan, W. / Sooriakumar, K. / Bartholomew, K. / Savage, T. S. / Electrochemical Society | 1995
651
Direct Bonding of InP to Different Materials for Optical Devices
Wada, H. / Kamijoh, T. / Electrochemical Society | 1995
653
Bonding of InP to GaAs Substrate by Wafer Fusing and Its Applications to Long Wavelength Detectors
Tan, I.-H. / Murtaza, S. S. / Bowers, J. E. / Hu, E. L. / Electrochemical Society | 1995
655
Direct Wafer Bonding Technique of Ferroelectric Single Crystals
Tomita, Y. / Sugimoto, M. / Eda, K. / Electrochemical Society | 1995
657
Application of Direct Bonding to the Fabrication of Si/ZnS Composite Infrared Windows
Feng, T. / Tong, Q.-Y. / Askinazi, J. / Gosele, U. M. / Electrochemical Society | 1995
659
Anodic Wafer Bonding
Obermeier, E. / Electrochemical Society | 1995
661
Characterization of the Direct Bonding of Silicon Wafers after Treatment in Dilute HF Solutions
Okada, C. / Kawai, Y. / Morita, E. / Saitou, Y. / Electrochemical Society | 1995
663
Ion Drift Behavior in Borosilicate Glasses during Anodic Bonding to Silicon or Metals
Lange, K. / Grigull, S. / Harz, M. / Kreissig, U. / Electrochemical Society | 1995
665
Interface Strength Characterization of Bonded Wafers
Petzold, M. / Busch, M. / Abe, T. / Reiche, M. / Electrochemical Society | 1995
667
Surface Morphology and Electroluminescence of Porous Silicon Layer Prepared on P-Type Silicon with Electrochemical Etching in HF Aqueous Solutions
Shigyou, K. / Seo, M. / Azumi, K. / Takahashi, H. / Electrochemical Society | 1995
669
Photoluminescence Studies of Thermally Impurity Diffused Porous Silicon Layers
Sundaram, K. B. / Ali, S. A. / Peale, R. E. / McClintic, W. A. / Electrochemical Society | 1995
671
Luminescence from Silicon Nanostructures Fabricated by Conventional Lithographic and Reactive Ion Etching Techniques
Nassiopoulos, A. G. / Grigoropoulos, S. / Gogolides, E. / Papadimitriou, D. / Electrochemical Society | 1995
673
Porous Gallium Phosphide Photoelectrodes with Near-Unity Quantum Yield for Light Absorbed in the Indirect Optical Transition
Erne, B. H. / Vanmaekelbergh, D. / Kelly, J. J. / Electrochemical Society | 1995
674
Optoelectrochemistry and Nanocrystalline Semiconductor Electrodes
Fitzmaurice, D. / Enright, B. / Electrochemical Society | 1995
675
Charge Transport Nanoporous-Nanocrystalline TiO~2 Film Electrodes
Lindquist, S.-E. / Electrochemical Society | 1995
676
Photoinduced Charge Transfer Reactions at Nanocrystalline TiO~2 Films
Augustynski, J. / Carroy, A. / Wahl, A. / Electrochemical Society | 1995
678
Photoresponse and Stability of Pyrolytically Prepared n-TiO~2 Semiconductor
Khan, S. U. M. / Akikusa, J. / Electrochemical Society | 1995
680
Investigation of Nanocrystalline TiO/Ti Electrodes by Means of Impedance Spectroscopy
Kedzierzawski, P. / Dolata, M. / Augustynski, J. / Electrochemical Society | 1995
682
Surface Modification of Nanocrystalline TiO~2 Electrodes: Applications in Electrochromic Devices and Photoelectrocatalysis
Hagfeldt, A. / Walder, L. / Graetzel, M. / Electrochemical Society | 1995
683
Electron Injection Rates in Sensitized Nanostructured TiO~2 Photovoltaic Cells
Heimer, T. / Meyer, G. J. / Electrochemical Society | 1995
684
A Novel Dye Sensitized TiO~2 Photovoltaic Cell Using Polymer Gel Electrolyte
Cao, F. / Searson, P. C. / Electrochemical Society | 1995
686
Intensity Modulated Photocurrent Spectroscopy on Nanostructured TiO~2 Solar Cells
Oskam, G. / Cao, F. / Searson, P. C. / Electrochemical Society | 1995
687
Efficient Ruthenium Diimine Modified Nanocrystalline TiO~2 Photoanodes
Meyer, G. J. / Heimer, T. / Electrochemical Society | 1995
688
Nanocrystalline SnO~2 Films Modified with Thiazine and Oxazine Dye Aggregates
Kamat, P. V. / Liu, D. / Electrochemical Society | 1995
689
Relative Roles of Surface Area and Crystallite Size in Photocatalytic Ability of TiO~2
Kelly, S. / Tomkiewicz, M. / Shen, W. M. / Electrochemical Society | 1995
690
Li Insertion into Spin Coated V~2O~5 Xerogel Thin Films
Reynard, M. / Le, D. B. / Passerini, S. / Smyrl, W. H. / Electrochemical Society | 1995
691
Charge Injection into Small Semiconductor Particles
Meisel, D. / Lawless, D. / Luangdilok, C. / Cook, A. R. / Electrochemical Society | 1995
693
Overlayer Formation in the n-CdSe/[Fe(CN)~6]^4^-^/^3^- Photoelectrochemical System
De Tacconi, N. R. / Rajeshwar, K. / Myung, N. / Electrochemical Society | 1995
695
High Efficiency Photo-Hole Injection from Cyanine Dyes into CoSCNi: Prospective p-Type Material for a Dye-Sensitized p-n Heterojunction
O'Regan, B. / Schwartz, D. T. / Electrochemical Society | 1995
696
Preparation of Nanocomposites by Latex-Colloid Interaction
Oriakhi, C. / Lerner, M. / Electrochemical Society | 1995
698
Nanocomposition of PPV and Poly(p-phenoxyphenylene Sulfide)
Oriakhi, C. / Lerner, M. / Electrochemical Society | 1995
700
Electrodeposition of Cu-Ni Multilayers
Moffat, T. P. / Electrochemical Society | 1995
701
Processing and Properties of Electrodeposited Cu-Co Multilayered Nanowires
Nagodawithana, K. / Searson, P. C. / Liu, K. / Chien, C. L. / Electrochemical Society | 1995
702
Corrosion Evaluation of Electroplated Bulk Nanocrystalline Nickel
Wang, S. / Rofagha, R. / Roberge, P. R. / Erb, U. / Electrochemical Society | 1995
703
Processing and Mechanical Behavior of Electrodeposited Ni-Al~2O~3 Nanocomposite Thin Films
Cammarata, R. R. / Oberle, R. R. / Scanlon, M. R. / Searson, P. C. / Electrochemical Society | 1995
704
Electrochemical Fabrication of Metal and Semiconductor Nanowires
Moskovits, M. / Al Mawlawi, D. / Douketis, C. / Bigioni, T. / Electrochemical Society | 1995
706
Transport Applications of SOFCs
Yamazaki, Y. / Yamada, K. / Mizusaki, J. / Yokokawa, H. / Electrochemical Society | 1995
707
Oxygen Reduction at the Interface LaMnO~3/YSZ Prepared by Vapor Phase Processes
Takehara, Z. / Ioroi, T. / Uchimoto, Y. / Ogumi, Z. / Electrochemical Society | 1995
709
In Situ Oxidation of Nickel and Cobalt in Molten Li + K and Na + K Carbonate Eutectic
Tomczyk, P. / Sato, H. / Yamada, K. / Nishimi, T. / Electrochemical Society | 1995
711
Influence of CO~2 on Oxygen Reduction in Molten Li + Na Carbonate Eutectic
Tomczyk, P. / Electrochemical Society | 1995
713
The Fundamentals of Fuel Cell Modeling
Standaert, F. / Hemmes, K. / Woudstra, N. / Electrochemical Society | 1995
714
Microelectrode Investigation of the Oxygen Permeation in Different Proton Exchange Membranes
Buchi, F. N. / Wakizoe, M. / Srinivasan, S. / Electrochemical Society | 1995
716
Solid-State NMR Characterization of H~3PO~4-Doped Polybenzimidazole Polymer Electrolyte Fuel Cell Membranes
Wasmus, S. / Savinell, R. F. / Moaddel, H. / Litt, M. H. / Electrochemical Society | 1995
718
In Situ Membrane Resistance Measurements in PEFC as an Indication of Inhomogeneous Water Distribution in the Membrane
Rota, M. / Buchi, F. N. / Scherer, G. G. / Electrochemical Society | 1995
719
Membrane Development for PEFC at PSI
Rota, M. / Brack, H. P. / Buchi, F. N. / Scherer, G. G. / Electrochemical Society | 1995
720
Effect of Ethylene Carbonate on the Electrochemical Properties of Lithium Salt-Poly(Ethylene Oxide) Polymer Electrolyte
Do, J.-S. / Chang, C.-P. / Lee, T.-J. / Electrochemical Society | 1995
722
Direct Electro-Oxidation of Dimethoxymethane, Trimethoxymethane, and Trioxane and Their Application in Fuel Cells
Narayanan, S. R. / Vamos, E. / Surampudi, S. / Frank, H. / Electrochemical Society | 1995
724
New Results on the Electrocatalytic Oxidation of Small Organic Molecules on Dispersed Platinum-Modified Electrodes
Leger, J.-M. / Napporn, T. / Laborde, H. / Lamy, C. / Electrochemical Society | 1995
725
Electro-oxidation of H~2, CO, and H~2/CO Mixtures on Well-Characterized Pt-Ru and Pt-Sn Rotating Disk Electrodes at 62�C
Gasteiger, H. A. / Markovic, N. M. / Ross, P. N. / Electrochemical Society | 1995
727
CO and Methanol Oxidation on Smooth and High Area Pt, Pt-Ru, Pt-Sn Electrodes
Morimoto, Y. / Yeager, E. B. / Electrochemical Society | 1995
729
Ligand or Bifunctional Effect? Ru as a Promotor for the Electro-oxidation of Small Organic Molecules over Pt
Frelink, T. / Cox, A. P. / Visscher, W. / Van Veen, J. A. R. / Electrochemical Society | 1995
731
Macrocyclic Redox Promoters for Direct Methanol Fuel Cells. Part I
Sarangapani, S. / Electrochemical Society | 1995
733
Macrocyclic Redox Promoters for Direct Methanol Fuel Cells. Part II
Sarangapani, S. / Morriseau, B. / Electrochemical Society | 1995
735
Direct Methanol Fuel Cells with Polymeric Membrane Electrolytes
Wilson, M. / Bett, J. A. S. / Ren, X. / Uribe, F. / Electrochemical Society | 1995
736
DMFC Stack Test Results
Maricle, D. L. / Murach, B. L. / Electrochemical Society | 1995
738
Comparison of Electrolyte Materials for Use in Direct Methanol Oxidation Fuel Cells
Kosek, J. A. / Cropley, C. C. / Wilson, G. / LaConti, A. B. / Electrochemical Society | 1995
740
Methanol Oxidation on High Surface Area Pt-Ru Catalysts
Wilson, M. / Uribe, F. / Gottesfeld, S. / Bett, J. / Electrochemical Society | 1995
742
In Situ X-Ray Absorption Spectroscopy of Methanol Oxidation on Carbon-Supported Pt/Ru Clusters
Swider, K. E. / Pandya, K. I. / Kowalak, A. D. / Hagans, P. L. / Electrochemical Society | 1995
743
XAS Studies of Modified Pt Electrocatalysts for Methanol Oxidation
McBreen, J. / Mukerjee, S. / Electrochemical Society | 1995
744
Pt/Ru Alloys, Electrocatalytic Activity, and X-Ray Absorption Spectroscopic Structure Studies
O'Grady, W. E. / Swider, K. E. / Pandya, K. I. / Kowalak, A. D. / Electrochemical Society | 1995
746
Electrochemical Oxidation of Methanol on a Carbon Supported Quaternary Pt-Ru-Sn-W Catalyst
Arico, A. S. / Poltarzewski, Z. / Kim, H. / Giordano, N. / Electrochemical Society | 1995
748
Multipurpose Electrochemical Mass Spectrometry: A Powerful Method for the Study of Fuel Cell Reactions
Wasmus, S. / Savinell, R. F. / Electrochemical Society | 1995
750
Physicochemical Investigations of CO and Ch~3OH Oxidations on Various Platinum Ruthenium Electrodes
Kabbabi, A. / Durand, R. / Faure, R. / Leger, J. M. / Electrochemical Society | 1995
752
Reaction Kinetics for CO and CO~2 on Polycrystalline Platinum
Bellows, R. / Marucchi-Soos, E. / Electrochemical Society | 1995
753
Oxidation of Methanol on Platinum Without Interference by Chemisorbed CO
Wieckowski, A. / Chrzanowski, W. / Herrero, E. / Electrochemical Society | 1995
755
Quartz Crystal Microbalance Studies of Methanol Oxidation at Platinum
Cheek, G. T. / O'Grady, W. E. / Electrochemical Society | 1995
756
The Importance of Surface Heterogeneity in Electrocatalytic Systems
Burke, L. D. / Electrochemical Society | 1995
757
Electrode Development for a Low Temperature Direct Methanol Solid Oxide Fuel Cell
Doshi, R. / Krumpelt, M. / Electrochemical Society | 1995
758
Microwave Subsystems Developed Through the Consortium for Superconducting Electronics
Ralston, R. W. / Electrochemical Society | 1995
760
High Temperature Superconducting Microwave Filters and Antennas
Nagai, Y. / Suzuki, N. / Electrochemical Society | 1995
762
HTS Coils for Magnetic-Resonance Instruments
Withers, R. S. / Kotsubo, V. / Brey, W. / Wong, W.-H. / Electrochemical Society | 1995
764
Tuneable Microwave Resonators Based on Sputtered Tl-Ba-Ca-Cu-O and Ba-Sr-Ti-O Thin Films
Hermann, A. M. / Naziripour, A. / Mueller, C. / Electrochemical Society | 1995
765
Recent Progress in Low-T~c Circuit Fabrication Technology and Future Prospects
Bhushan, M. / Electrochemical Society | 1995
766
SQUIDs for Magnetometry
Ketchen, M. B. / Kirtley, J. R. / Electrochemical Society | 1995
768
New Ultrafast Superconductor Digital Electronics
Likharev, K. K. / Electrochemical Society | 1995
769
Space Qualified Hybrid Superconductor/Semiconductor Planar Oscillator Circuit
Miranda, F. A. / Chorey, C. M. / Bhasin, K. B. / Electrochemical Society | 1995
771
The High Temperature Superconductivity Space Experiment: A Status Report
Nisenoff, M. / Gubser, G. U. / Wolf, S. A. / Ritter, R. C. / Electrochemical Society | 1995
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