``Analysis of EDM instability when machining Silicon Carbide'' (English)

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Table of contents conference proceedings

The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.

1
From Nanotechnology to New Production Systems: The EU Perspective
Pero, H. | 2004
2
Commercialising Nanotechnology
Atherton, P. | 2004
3
Dimensional Metrology for Components of Microsystem Technology
Brand, U. / Doering, L. / Nesterov, V. / Neuschaefer-Rube, U. | 2004
5
High-resistant Micro Components made by Injection Moulding
Piotter, V. / Oerlygsson, G. / Ruprecht, R. / Hausselt, J. | 2004
7
Microsystems Industrial Infrastructure
van Heeren, H. / Salomon, P. / Paschalidou, L. / El-Fatatry, A. | 2004
9
2-DOF thin film metallic glass microactuator
Hata, S. / Jeong, H.W. / Shimokohbe, A. | 2003
9
2-DOF thin film metallic glass actuator
Hata, S. / Jeong, H.W. / Shimokohbe, A. | 2004
11
Design, modeling and simulation of high-Q Micro-Inductors
Pang, A.J. / Wang, C.H. / Sangster, A.J. | 2004
13
The Micro Harmonic Drive: A high precision gear system miniaturized by Direct-LIG
Slatter, R. / Degen, R. | 2004
15
A New Driving Method for Electrostatic MEMS Actuators to Prevent Sticking
Fukushige, T. / Hata, S. / Shimokohbe, A. | 2004
17
Calibration and redesign of a nano probe based on MST technology
Bos, E.J.C. / Widdershoven, I. / Haitjema, H. | 2004
19
Fabrication of Long-period Fiber Grating Optical Biosensor
Chen, P.J. / Lin, H.Y. / Chen, D.T. / Liu, I.M. / Ma, K.J. / Chien, H.H. / Chao, C.L. | 2004
21
Nanostructured surfaces for the selective capture of biological objects
Yeh, Y.-P. / Ramsden, J.J. | 2004
23
Determination of failure mechanisms in MEMS
Lavu, S. / Desmulliez, M. / Bell, G. / Begbie, M. | 2004
25
Simulation, Fabrication and Testing of a microturbine using fluid-assisted levitation
Kanteres, A. / Dhariwal, R. / Leonard, M. | 2004
27
Design, Modeling and Simulation of a Microfan
Chowti, P. / Pang, A.J. / Dhariwal, R.S. / Desmulliez, M. / Reuben, R.L. | 2004
29
Microengineered dynamometer for Microfan thrust measurement
Chowti, P. / Armstrong, J. / Dhariwal, R.S. / Desmulliez, M. / Reuben, R.L. | 2004
31
Stencil printing at sub-100 micron pitch using microengineered stencils
Desmulliez, M.P.Y. / Kay, R.W. | 2004
33
UV-Laser Assisted Microforming of Sapphire for Industrial Applications
Ostendorf, A. / Temme, T. / Samm, K. | 2004
35
Submicron holes on GaN formed by Photo Electrochemical wet etching
Gall-Borrut, P. / Weyher, L. / Lazar, S. / Falgayrettes, P. / Nativel, L. / Castagne, M. | 2004
37
Laserpolishing of hard materials
Bullema, J.E. / Haitjema, H. / Krugers, J.P. / van den Hurk, M. | 2004
39
Laser-Assisted Fabrication of Highly Precise 2D Fiber Collimator Arrays
Esser, G. / Stark, M. / Lamott, A. / Schmidt, M. | 2004
41
Investigation of material removal mechanisms involved in ICP etching of InGaN/GaN
Chao, C.L. / Shi, C.Y. / Huang, S.B. / Ma, K.J. / Chen, T.T. / Liu, Y.M. | 2004
43
New Applications for Micro-EDM
Fleischer, J. / Masuzawa, T. / Schmidt, J. / Knoll, M. | 2004
45
``Analysis of EDM instability when machining Silicon Carbide''
Mahdavinejad, R.A. | 2004
47
Nano-Scale Fracture Properties of Glasses as Studied by IN-SITU and REAL-TIME A.F.M. Experiments
Marliere, C. / Celarie, F. | 2004
49
Forming processes of metal nanoislands thin films under vacuum and in air
Bertoni, C. / Gallardo, D.E. / Dunn, S. | 2004
51
Study on Key Technique of Micro-EDM Equipments
Wang, Z. / Zhang, Y. / Zhao, W. | 2004
53
Semiconductor nanoparticles-based light emitting devices
Gallardo, D.E. / Bertoni, C. / Dunn, S. | 2004
55
Investigations on Effects of External Parameters and Inherent Properties on the Natural Response of Piezoelectric Actuators dedicated to Ultra Positioning
Mekid, S. / Lim, B. | 2004
57
Rapid fabrication of various-shape plastic microlens by laser-induced deformation
Yamada, K. / Mochtady, H. / Ueda, T. / Hosokawa, A. / Tanaka, R. | 2004
59
Application of Electro-rheological Fluids to Precision Clamping Devices
Tsuruizumi, R. / Aoyama, T. / Anzai, H. / Sakurai, H. / Isobe, K. / Hino, K. / Tanaka, K. | 2004
61
Electrochemical Micromachining of Steel and Nickel-Base Super alloys
Schubert, A. / Hollitschke, L. / Schneider, J. | 2004
63
Micromachining of steel using ECM with vibrating tool electrode
Forster, R. / Schoth, A. / Menz, W. | 2004
65
Laser Assisted Jet Electrochemical Machining investigations in micro applications
Pajak, P.T. / De Silva, A.K.M. / McGeough, J.A. / Harrison, D.K. | 2004
67
Cone shaped micro drillings with a UV laser system
Siewert, C. | 2004
69
Complex contour features in silicon by modified deep reactive ion etching processes for large MEMS applications
Landi, S. / Shaw, C.P. / Kirby, P.B. / Whatmore, R.W. | 2004
71
High Precision and Economic Micromachining Technique for the Fabrication and Integration of High Frequency Waveguide Structures
Chow, W.H. / Champion, A. / Steenson, D.P. | 2004
73
Micro Process Chain: Wire Electro Discharge Machining and Micro Sinking Machining
Klocke, F. / Lung, D. / Antonoglou, G. / Thomaidis, D. | 2004
75
Development of a non-contact precision tool setting system
Chao, C.W. / Neou, J. / Cheng, T.A. / Chen, T.T. / Chao, C.L. | 2004
79
The investigation of anodic polarization characteristics of NiTi thin films for fabricating vascular stents using electrolytic photo etching technique
Allen, D.M. / Chen, T.T. | 2004
81
Direct Patterning of Photosensitive Solutions for Thick PZT Micro-Features
Marson, S. / Dorey, R.A. / Zhang, Q. / Whatmore, R.W. | 2004
83
Bi-direction controllable AFM head driven by VCM with flexure hinge
Lee, S.-Q. / Kim, E.-K. / Youm, W.-S. / Park, K.-H. | 2004
85
Deposition of thin layers of zinc oxide and characterization of resonators
Ferblantier, G. / Mailly, F. / Combette, P. / Boyer, A. / Foucaran, A. | 2004
87
Optimisation of my-sink edm by highly dynamic machine axis
Brecher, Christian / Weck, Manfred / Klitzing, Andreas von | 2003
87
Optimisation of μ-Sink EDM by highly dynamic machine axis
Brecher, C. / Weck, M. / von Klitzing, A. | 2004
89
3D Micro structuring of glass with an AFM
Hof, L.A. / Lal, A. / Fujisaki, K. / Wuthrich, R. / Langen, H.H. / Bleuler, H. | 2004
91
Chemo-mechanical polishing with a deterministic variation of the removal function
Brecher, C. / Weck, M. / Wenzel, C. | 2004
93
Hot Embossing of Opto-Fluidic Structures with Ultra-Precision Milled Dies
Kilgus, E. / Bauer, J. / Ebling, F. / Schroder, H. / Reichl, H. | 2004
95
Micromachining Center based on the Integration of various Technologies in one coordinate System
Wulfsberg, J.-P. / Hilpert, S.-E. / Kuhn, A. / Lehmann, J. | 2004
97
Electrostatic tool wear in diamond turning of amorphous polymers
Gubbels, G.P.H. / van der Beek, G.J.F.T. / Delbressine, F.L.M. / Schellekens, P.H.J. | 2004
99
The Wave-Printer: Towards Large-Area, Multilayer Micro contact-Printing
Schneider, R.M. / Decre, M.M.J. / Dona, M.J.J. / Schellekens, J. | 2004
101
Investigation into Quality of Microholes Machined with Drilling
Kudla, L. | 2004
103
Production of round profiled microgrooves in monocrystalline silicon
Loffler, F. / Meess, R. / Heyne, H.P. / Hinzmann, G. / Rother, J. | 2004
107
A Fiber-based Fringe Projection System
Pfeifer, T. / Driessen, S. | 2004
109
Achievement of high flatness of work piece by polishing method utilizing polymer particles
Kawata, K. / Enomoto, T. / Tani, Y. / Lu, Y. / Suzuki, M. | 2004
111
Prevention against adhesion of contamination to end surface of optical fiber connectors in lapping film finishing
Takenouchi, K. / Ukawa, A. / Tani, Y. / Enomoto, T. / Kawata, K. | 2004
113
Simulation on Effect of Ultra High-Frequency Vibration for Nanomachining
Shimizu, J. / Tanaka, H. / Zhou, L. / Eda, H. | 2004
115
``ASSEMIC advanced methods and tools for handling and assembly in micro technology'' - An FP6 Marie Curie Research Training Network
Brenner, W. / Almansa, A. / Suemecz, F. | 2004
117
Material Removal Mechanisms in Abrasive Polishing of Structured Surfaces
Brinksmeier, E. / Riemer, O. / Gessenharter, A. | 2004
119
Modelling and Simulation of Scaled Milling Processes
Weinert, K. / Kahnis, P. / Koehler, W. | 2004
121
Construction of Gripper Type Nano Object Manipulation System
Yao, B.C. / Wu, C.C. / Lin, T.Y. | 2004
123
Precision-Tilt-Gripper with Rigid 3D-Structure (Part 2)
Schubert, A. / Koriath, H.-J. / Schulz, B. / Bottcher, R. | 2004
125
Development of Diamond Array Tool using Silicon Mold and Applications
Takano, N. / Morita, N. / Yamada, S. / Oyama, T. / Kanda, K. / Takano, S. / Obata, T. | 2004
127
Ultrasonic assisted lapping of complex microstructures using chemically active slurries
Zhang, C. / Rentsch, R. / Brinksmeier, E. | 2004
129
Influence of Grinding Fluid Supply on Ultra-Smoothness Grinding of Al2O3 - TiC Ceramic
Yasui, H. / Sawa, T. / Sakamoto, S. / Odaki, T. | 2004
131
New micro diamond milling tools
Wulfsberg, J.P. / Brudek, G. / Lehmann, J. | 2004
133
Ultra precision milling of mechanical components and functionality systems for optical and electro optical modules
Uhlmann, E. / Oberschmidt, D. / Doll, U. / Krissler, J. / Lang, G. / Schroder, H. / Lang, K.D. / Reichl, H. / Chaloux, L. | 2004
135
Dressing of Micro-Grinding Wheels
Hoffmeister, H.-W. / Hlavac, M. | 2004
137
Precision Multi-point Grinding of Commercial PZT Wafers for Piezoelectric Micro-actuators
Jourdain, R. / Wilson, S.A. / Whatmore, R.W. / Morantz, P. / Corbett, J. / Hucker, M.J. / Warsop, C. | 2004
139
Molecular dynamics simulation of micromachining of pre-machined surfaces
Rentsch, R. | 2004
141
Ultra precision diamond cutting of plastic materials by applying elliptical vibration cutting
Moriwaki, T. / Song, Y. / Suzuki, H. | 2004
143
Improved Dicing Method for Thin Silicon Wafers
Gatzen, H.H. / Guenzel, G. | 2004
145
Nanogrinding of Substrate Materials by Submicron Fixed Abrasive Tools
Ahearne, E. / Byrne, G. / O Ceallaigh, M. | 2004
147
Micro Grooving on Single-Crystal Germanium for Infrared Diffraction Optical Elements
Yan, J. / Maekawa, K. / Tamaki, J. / Kubo, A. | 2004
149
Technology Trends in Optical Lithography
Loopstra, E. / Butler, H. | 2004
151
Precision Turning on a Desk - Micro Turning System
Ito, S. / Iijima, D. / Hayashi, A. | 2004
153
Fabrication of 10-20 micron diameter micro flat drills by precision grinding and their application to drilling of duralumin and titanium alloy with ultrasonic vibration
Onikura, H. / Ohnishi, O. / Yamamoto, K. / Koga, T. | 2003
153
Fabrication of 10-20 μm Diameter Micro Flat Drills by Precision Grinding and Their Application to Drilling of Duralumin and Titanium Alloy with Ultrasonic Vibration
Onikura, H. / Ohnishi, O. / Yamamoto, K. / Koga, T. | 2004
155
Diamond Turning of Steel Molds for Optical Applications
Brinksmeier, E. / Dong, J. / Glabe, R. | 2004
157
Nanoscale Fabrication in Aqueous KOH Solution by Atomic Force Microscope
Park, J.W. / Kawasegi, N. / Morita, N. / Lee, D.W. / Yamada, S. / Takano, N. / Oyama, T. | 2004
159
Mathematical Modelling of Temperature Propagation in Cutting Zone for Ultra precision Processes of Polymers
Lavrynenko, S. | 2004
161
Determinism in Hard Turning - Predicting Hard Turned Surface Roughnesses to 10nanometers and Below
Knuefermann, M.M.W. | 2004
163
Parallel Molecular Dynamics Simulation of Nanoscale Grinding
Chen, H. / Zhang, D. / Hagiwara, I. | 2004
165
Development of Micro Manipulation System for Bio-applications
Zhou, L. / Nishida, K. / Qiu, Z. / Shimizu, J. / Eda, H. / Ishikawa, T. | 2004
167
Active control of the component surface functionality in precision machining
Luo, X. / Cheng, K. / Ward, R. | 2004
169
Surface Integrity Evaluation of Diamond Turned Single Crystal Silicon Component
Jasinevicius, R.G. / Duduch, J.G. / Lanciotti, F. / Pizani, P.S. | 2004
171
On the Possibility of Produce Microstructures in Soft Semiconductors by Diamond Turning Based Upon Transition Pressure Value Concept
Jasinevicius, R.G. | 2004
173
Influences of Process Scaling in Metal Cutting with Geometrically Defined Cutting Edges
Kotschenreuther, J. / Delonnoy, L. / Hochrainer, T. / Schmidt, J. / Fleischer, J. / Schulze, V. / Lohe, D. / Gumbsch, P. | 2004
175
An optical fibre sensor based system approach for the inspection and measurement of engineering surfaces
Hussin, Z.M. / Cheng, K. / Crispin, A. / Ward, R. | 2004
177
Adaptive tools with integrated piezoelectric actuators and sensors
Herold, V. / Weber, C.-T. | 2004
179
ELID Grinding Characteristics of Aluminium Nitride (AlN) Ceramics
Katahira, K. / Ohmori, H. / Uehara, Y. / Azuma, M. / Aimoto, Y. / Sasaki, T. / Mizutani, M. / Komotori, J. / Ito, N. | 2004
181
Thin film UHMWPE bearings for precision slideways
Yang, H. / Seugling, R.M. / Buice, E. / Smith, S.T. / Hocken, R.J. | 2004
183
A CCD Camera-Based System for Slit Width Measurement of a Long Precision Slot Die
Furukawa, M. / Gao, W. / Shimizu, H. / Kiyono, S. / Yasutake, M. / Takahashi, K. | 2004
185
Influence of cutting conditions on surface roughness of ultra-precision face-turned titanium alloys
Sakamoto, S. / Yasui, H. / Shinozaki, A. | 2004
187
Ultra precision Machining of Sintered Tungsten Carbide by Applying Ultrasonic Elliptical Vibration Cutting
Suzuki, N. / Masuda, S. / Shamoto, E. | 2004
189
Study on Silver Lapping using Brittle Materials
Fujimoto, T. / Tomoda, S. | 2004
191
Developments in micro-ultrasonic machining (Micro-USM)
Andrey, E. / Boy, J.J. / Petrini, V. / Malek, C.K. | 2004
193
Fabrication of surfaces in optical quality on pretentious tool steels by ultra precision machining
Grimm, U. / Muller, C. / Menz, W. / Wolfle, M. | 2004
195
Manufacturing of High-Quality Endoprosthesises for Totla Hip Joint Replacement: Problems and Solutions
Rozenberg, O.A. / Voznyi, V.V. / Sohan, S.V. / Mamalis, A.G. / Lavrynenko, S.N. | 2004
197
Diamond turning of cylindrical structures for Micro optics
Gebhardt, A. / Steinkopf, R. | 2004
199
Advanced strategies for the ductile machining of difficult-to-cut hard and brittle materials
Brinksmeier, E. / Preuss, W. / Grimme, D. / Rickens, K. | 2004
201
Surface Integrity Control of Piezoelectric Materials in Ultra Precision Grinding - Based on Tooling Design Analysis
Arai, S. / Corbett, J. / Whatmore, R.W. / Wilson, S.A. / Hedge, J. | 2004
203
Investigations on self-acting air bearings made of glass-ceramic and manufacturing processes
Risse, S. | 2004
205
Grinding and Honing Micro Bores in Hardened Steel with CVD-Diamond Pencils
Hoffmeister, H.-W. / Menze, B. | 2004
207
Micro-Drilling of Bores Using Miniature Twist Drills
Hoffmeister, H.-W. / Illenseer, S. | 2004
209
Precision Moulds for Glass Moulding of Optical Components
Klocke, F. / Dambon, O. / Pongs, G. | 2004
211
Precision Finishing for Biomaterials (Ti-6Al-4V alloy) by ELID (Electrolytic In-process Dressing) Grinding
Mizutani, M. / Komotori, J. / Katahira, K. / Ohmori, H. | 2004
213
Ultra precision Finishing of Micro Aspherical Surface by Ultrasonic Assisted Polishing
Suzuki, H. / Kawamori, R. / Okino, T. / Moriwaki, T. | 2004
215
Closed Loop Manufacturing of Optical Moulds using an Integrated Simulation Interface
Brinksmeier, E. / Autschbach, L. / Weck, M. / Winterschladen, M. | 2004
217
Reachable precision of silicon dimensional standards
Fruehauf, J. / Kroenert, S. / Brand, U. / Krueger-Sehm, R. | 2004
219
Study on Nanometric Machining Mechanism of Monocrystalline Silicon by Molecular Dynamics
Yu-lan, T. / Ying-chun, L. / De-hong, H. / Kai, C. | 2004
221
Nanotechnology Keynote - Metrology at the extremes
Peggs, G. | 2004
222
Design and Optimization of a Magnetic Gravity Compensator
Hol, S.A.J. / Compter, J.C. / Vandenput, A.J.A. / Vreugdewater, P. | 2004
224
Guides with Nanometer Repeatability for a 3D CMM
Seggelen, J.K.v. / Rosielle, P.C.J.N. / Schellekens, P.H.J. / Spaan, H.A.M. / Bergmans, R.H. / Kotte, G.J.W.L. | 2004
226
Self calibration of sensors in software datum methods
Kiyono, S. / Arai, Y. / Chetwynd, D.G. | 2004
228
A novel metrological large range scanning probe microscope applicable for versatile traceable topography measurements
Dai, G. / Pohlenz, F. / Danzebrink, H.-U. / Xu, M. / Hasche, K. / Wilkening, G. | 2004
230
The design of a co-ordinate measuring probe for characterising truly three-dimensional micro-structures
Leach, R.K. / Murphy, J. | 2004
232
Nanometer-scale miniature interferometers developed for nano measurements in micro- and nanotechnology
Jager, G. / Fussl, R. / Manske, E. / Grunwald, R. / Buchner, H.-J. | 2004
234
Volumetric Interferometer for 3-D Coordinate Measurement
Kim, S.-W. / Chu, J. / Rhee, H.-G. | 2004
236
Design of a calibration machine of optical two-dimensional length standards
Palosuo, I. / Hemming, B. / Lassila, A. | 2004
238
Nanometric Positioning with Three Degrees of Freedom over a One-Millimeter Stroke Using Flexure Guide and Electromagnetic Linear Motor
Fukada, S. / Hirano, S. | 2004
240
High-precision automatic machine vision-based calibration of micrometers
Hemming, B. / Tanninen, A. | 2004
242
The Nonlinear Mechanical and Electrical Properties of Silicon 3D Micro Probes
Nesterov, V. / Brand, U. | 2004
244
Probing System for Rapid Measurement in Manufacturing Environments
Bauza, M. / Woody, S.C. / Jain, P. | 2004
246
An Optical Probe for Alignment of AFM Tip to Diamond Cutting Tool Edge
Motoki, T. / Gao, W. / Aoki, J. / Kiyono, S. | 2004
248
Pitch measurement of one-dimensional gratings using a metrological atomic force microscope
Kim, J.-A. / Kim, J.W. / Park, B.C. / Eom, T.B. / Kang, C.-S. | 2004
250
High precision gauge block comparator with 100 mm measuring range
Eom, T. / Kim, J.-W. | 2004
252
Development of Multiple Small Linear Planar Motor System
Chen, X. / Kotani, K. / Takahashi, S. / Takamasu, K. | 2004
254
A Precision AFM Probe-Unit for Measurement of High Aspect Ratio Micro-Structured Surfaces
Aoki, J. / Gao, W. / Kiyono, S. | 2004
256
Self-calibration of non-linearities of laser interferometer and capacitive sensor combination for an interferometrically traceable AFM device
Korpelainen, V. / Lassila, A. | 2004
258
Updated performance and uncertainty budget of MIKES' line scale interferometer
Lassila, A. | 2004
260
Realization of the NMi VSL traceable atomic force microscope
Kotte, G. / Koops, R. / Dirscherl, K. / Nieuwenkamp, J. | 2004
262
A Modular Auto focus/AFM-System with Subnanometer Capability for Application in a Nanopositioning- und Nanomeasuring Machine
Manske, E. / Mastylo, R. / Hausotte, T. / Hofmann, N. / Jager, G. | 2004
262
A modular auto focus/AFM-system with subnanometer capability for application in a nanopositioning- and nanomeasuring machine
Manske, E. / Mastylo, R. / Hausotte, T. / Hofmann, N. / Jäger, G. | 2003
264
Development of a fibre fed heterodyne laser interferometer with nanometre uncertainty
Knarren, B.A.W.H. / Haitjema, H. / Schellekens, P.H.J. | 2004
266
Development of a combined interference and scanning probe microscope
Danzebrink, H.-U. / Tyrrell, J.W.G. / Savio, C.D. / Kruger-Sehm, R. | 2004
268
Experimental assessment of optical uncertainty components in the measurement of an optomechanical hole plate
Morace, R.E. / Hansen, H.N. / De Chiffre, L. | 2004
270
Performance of a low force 3D touch probe on an ultra precision CMM for small parts
Meli, F. / Kung, A. | 2004
272
Angle metrology and measurement of high resolution linear encoders on the PTB Nanometre Comparator
Flugge, J. / Koning, R. / Bosse, H. | 2004
274
Results of the international line scale comparison Nano3
Bosse, H. / Hassler-Grohne, W. / Flugge, J. / Koning, R. | 2004
276
Optical pressure gauge used on a micro-mixer module with laminar flow regime
Pfeifer, T. / Aleriano, U. / Depiereux, F. | 2004
278
Recent development in absolute interferometry using two diode lasers
Wu, J. / Meiners-Hagen, K. / Burgarth, V. / Abou-Zeid, A. | 2004
280
Development of a Sensitive Probe for Coordinate Measuring Machine
Furutani, R. / Watanabe, M. | 2004
282
Precision Measurement of Large Step Height Using Confocal Differential Heterodyne Interferometry (CDHI)
Kim, T.J. / Lee, S.W. / Gweon, D.G. / Kim, K.S. | 2004
284
Measurement Uncertainty in Nanometrology - an exemplary application on Nanoscratches
Weckenmann, A. / Wiedenhoefer, T. | 2004
286
Design and Performance Test of 6-DOF Fine Positioner for Alignment of Condenser in Soft X-ray Microscope Using Stewart Platform and Cylindrical Flexure
Kang, S.-h. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, J.Y. | 2004
288
Precision Position Control for a Self-moving Stage Utilizing Spring-mounted Piezoelectric Actuators
Liu, Y.-T. / Wang, C.-W. | 2004
290
A Fibre-Optic Device for Micro Dozes Characterization
Korposh, S.O. / Sakalosh, I.I. / Sharkany, J.P. / Sichka, M.Y. | 2004
292
Approximation of Surface Texture Profiles and Parameters
Brennan, J.K. / Mason, J.C. / Jiang, X. / Leach, R.K. / Harris, P.M. | 2004
294
Metrology for Microsystems - Characterisation of a new broadband interferometer
Lee-Bennett, I. / Leach, R. | 2004
296
The Role of Metrology in Nanotechnology and Precision Engineering
Carneiro, K. | 2004
298
A Device for Rapid Measurement of 6-DOF Dynamic Motion Errors
Spiewak, S. | 2004
300
Nonlinearity Measurement and Correction of Metrology Data from an Interferometer System
Chu, D.C. / Ray, A.B. | 2004
302
In-Situ measurement of large microstructured surfaces for optical applications
Pfeifer, T. / Schneefuss, K. / Dorner, D. | 2004
304
Measurement of mechanical properties of materials at the nanoscale: directions and limitations
Mendels, D.-A. / Evanno, N.M.P. / Cuenat, A. | 2004
306
Mapping micro-mechanical properties of carbon-filled polymer composites by TPM
Liu, X. / Zhang, J. / Piotter, V. | 2004
308
A new instrument for measuring crystal orientation with extreme accuracy
Becker, P. / Drosemeyer, H. / Jager, V. | 2004
310
Microscopic Friction Force Measuring System for the Investigation of Micro Components
Phataralaoha, A. / Buttgenbach, S. | 2004
312
Optimized selection of indirect methods of measure
Sevilla, L. / Sebastian, M.A. | 2004
314
Simultaneous measurement and compensation of 5-DOF motion errors using extended Twyman-Green interferometry
Oh, J.S. / Bae, E.D. / Kim, S.-W. | 2004
316
Development of calibration methods for spherical indenters used in the nanoindentation test
Dai, G. / Herrmann, K. / Pohlenz, F. | 2004
318
Dynamic goniometers based on ring laser and optical encoder
Bournachev, M. / Filatov, Y. / Goncharov, N. / Loukianov, D. / Pavlov, P. | 2004
320
Micro litre-scale flow measurement for Microsystems studies
Howell, G.P. / Tamadoni, R. / Chetwynd, D.G. | 2004
322
A simple microtensometer for polymeric micro-parts
Sun, M.-C. / Chetwynd, D.G. / Gardner, J.W. | 2004
324
Traceability of Dimensional Measurements using the Scanning Electron Microscope
De Chiffre, L. / Bariani, P. / Hansen, H.N. / Horsewell, A. | 2004
326
Surface Mapping with an AFM-CMM Integrated System and Stitching Software
De Chiffre, L. / Marinello, F. / Bariani, P. / Hansen, H.N. | 2004
328
Improving the accuracy of 3D displacement measurement using ring-shaped laser beam and high resolution CCD
Usuki, S. / Enami, K. / Sato, O. / Takahashi, S. / Takamasu, K. | 2004
330
Precision measurement of carriage straightness and tilt error motions of an ultra-precision aspheric grinding machine
Arai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. | 2004
330
Precision measurement of carnage straightness and tilt error motions of an ultra-precision asphenc grinding machine
Arai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / Kuriyagawa, T. | 2003
332
Shape measurement of long microbores applying photon counting method
Jablonski, R. / Orzechowski, P. | 2004
334
A Precision Sensor for Detecting Foreign Bodies in Soft Tissue
Shimizu, H. / Gao, W. / Nakashima, S. / Kiyono, S. | 2004
336
An Abbe-compliant 3D-measurement concept based on linear scales
Hemschoote, D. / Vleugels, P. / Qian, J. / Van Brussel, H. / Reynaerts, D. | 2004
338
Study on Particle Detection for Patterned Wafers by Evanescent Light Illumination
Yoshioka, T. / Miyoshi, T. / Takaya, Y. / Takahashi, S. | 2004
340
Investigation and evaluation of mechanical properties of ZrO~2 micro-bending specimens produced by different micro-moulding techniques
Auhorn, M. / Beck, T. / Schulze, V. / Lohe, D. | 2004
342
The characteristics of force-deformation curves in fast mapping mode by TPM
Zhang, J. / Liu, X. | 2004
344
Measurement and Simulation of Heat Development during the Micro-Grinding Process of Hardened Steels
Hoffmeister, H.-W. / Hlavac, M. | 2004
346
Nonlinear error compensation for optical profiler
Guo, J. / Gao, Y. / Wang, X. / Xie, T. | 2004
348
Wave Front Metrology Errors
Johnstone, E. / Schluchter, C. / Ray, A.B. | 2004
350
Complex wavelet transform for extraction of morphological features on surface topography
Ma, J.W. / Jiang, X. / Blunt, L. | 2004
352
Development of Tolerances for Microsystems on the Example of Plasma Deposited Surfaces
Westkaemper, E. / Schoebel, J. / Gottwald, B. / Sommadossi, S. | 2004
354
Position measurement of a miniature robot using position sensitive detectors
Torii, A. / Inoue, T. / Doki, K. / Ueda, A. | 2004
356
Development of a Virtual Standard for Nanoindentation Instruments
Li, Z. / Herrmann, K. / Pohlenz, F. / Menelao, F. | 2004
358
Alignment measurement of two-dimensional zero-reference marks
Chenggang, Z. / Yingnan, W. / Yuhang, C. / Wenhao, H. | 2004
360
A Miniatre PH Meter on an Optical Monofibre
Sharkany, J.P. / Korposh, S.A. / Sichka, M.Y. / Zhitov, N.B. | 2004
362
Silicon springs for the calibration of the force of hardness testing instruments and tactile profilometers
Fruehauf, J. / Gaertner, E. / Brand, U. / Doering, L. | 2004
364
The 3D Measurement and Analysis of Aspheric Surfaces
McBride, J.W. / Sun, W. / Maul, C. | 2004
366
Assessing thermally induced errors of machine tools using a telescopic double ball bar
Delbressine, F.L.M. / Florussen, G.H.J. / Schijvenaars, L.A. / Schellekens, P.H.J. | 2004
368
Magnetically Preloaded Wheels
Slocum, A. / Lang, J. / Awtar, S. / Hart, A.J. / Mukaddam, K. | 2004
370
Design, Simulation and Testing of a Precision Alignment Frame for the Next Linear Collider
Fitsos, P. | 2004
372
A novel design for a high precision freeform ELID grinding machine
Qian, J. / Vleugels, P. / Hemschoote, D. / Reynaerts, D. / van Brussel, H. | 2004
374
High Speed Creation of Ultraprecision Straight Microgrooves by Means of a Shuttle Unit
Ebihara, K. / Kawai, T. / Sawada, K. | 2004
376
Development of a Hydrostatic Linear Guidance based on the Design of Ball Bearing Guidance
Brecher, C. / Weck, M. / Winterschladen, M. / Paepenmuller, F. | 2004
378
An Ultraprecision Positioning System using Twist-roller Friction Drive with Fine Adjustment
Mizumoto, H. / Shimizu, Y. / Yabuta, Y. / Arii, S. / Kami, Y. | 2004
380
Long Distance Microscope for Measurement of Tool Shape in High Precision X-Y Tuming
Haberland, R. | 2004
382
Investigation of the noise behaviour of aerostatic bearings for ultra-precisions stages
Schaeffel, C. / Hesse, S. / Mohr, H.-U. | 2004
384
Planar Motion System for a Nanopositioning- and Nanomeasuring Machine (NPM/NMM) with 200x200mm^2 operating range
Hesse, S. / Schaeffel, C. / Mohr, H.-U. | 2004
386
Improving axial depth of cut accuracy in micro milling
Bissacco, G. / Hansen, H.N. / De Chiffre, L. | 2004
388
The Abbe principle, self-calibration and the design of co-ordinate measuring systems
Forbes, A.B. / Leach, R.K. / Brill, N. | 2004
390
Six Degrees of Freedom Planar Motors
Compter, J.C. | 2004
392
Characterization of a scanning microscopy tuning fork and optical fiber assembly with an application to biotechnology
Woody, S. / Jain, P. | 2004
394
Flexible Support For Cantilever Load
Leow, Y.P. | 2004
396
Full parameter calibration of parallel mechanism
Sato, O. / Shimojima, K. / Olea, G. / Furutani, R. / Takamasu, K. | 2004
398
Flexure Hinge Load Capacity and Optimisation
Haberland, R. | 2004
400
Performance of machining table with feed driver made of PZT actuators
Inoue, M. / Ohta, A. / Tochigi, M. | 2004
402
Development of a laser-guided deep-hole grinding tool
Katsuki, A. / Onikura, H. / Sajima, T. / Mohri, A. / Park, H.K. / Hamano, Y. | 2004
404
Preliminary design of an ultraprecision mother machine supported by active mounts
Horiuchi, O. / Yamaguchi, Y. / Shibutani, H. | 2004
406
A predictive 3D grinding method for large cylinders
Kuosmanen, P. / Juhanko, J. | 2004
408
A Low Cost- High Precision Variable Stiffness Flexure Valve Element System
Freeman, D. / Slocum, A. | 2004
410
Understanding the dynamic response of a machine tool structure by finite element analysis
Xu, Q. / Barrans, S. / Holmes, A. / Ford, D. | 2004
412
Force Ripple Compensation and High Speed Tracking Control of a High Precision Linear Motor System using a Multi-Segment Magnet Array
Choi, Y.-M. / Lee, M.G. / Gweon, D.-G. / Suk-Won, L. / Jong-Hwan, O. | 2004
414
A planar piezoelectric drive with a stepping and a resonant operation mode
Devos, S. / Van de Vijver, W. / Decoster, K. / Reynaerts, D. / Van Brussel, H. | 2004
416
Tolerance Allocation and Alignment of Focusing Unit for Near Field Recording System
Lee, J.H. / Yoon, H.K. / Jeong, J. / Kim, T.J. / Gweon, D.G. | 2004
418
Optimal design of ultra precision X-Y-Theta stage with flexure mechanism
Kang, D.W. / Kim, K.H. / Gweon, D.G. / Lee, S.W. / Song, S.K. | 2004
420
Analysis of Flexure Mechanisms: a New Semi-Analytical Technique
Venanzi, S. / Giesen, P. | 2004
422
Finite Element Analysis: precision of principles
Folgering, H.T.E. | 2004
424
Design of a PoliGrind Machine
Knaapen, R.J.W. / Krastev, K.T. / Dona, M.J.J. | 2004
426
Additional imaging optics for soft x-ray microscope
Yoo, H.K. / Kang, D.W. / Gweon, D.G. / Yoon, G.H. / Min, H.J. | 2004
428
Design approach of a magnetostrictive actuator
Yang, B. / Bonis, M. / Tao, H. / Prelle, C. | 2004
430
Manufacturing of Free-Form Surfaces using a Fast Tool Servo (FTS)
Brecher, C. / Weck, M. / Winterschladen, M. / Wetter, O. / Hennig, J. | 2004
432
Thrust Balance for Ground Testing of Electric Thrusters
Hughes, E.B. / Oldfield, S. | 2004
434
Development of Externally Pressurised Foil bearings
Al-Bender, F. / Smets, K. | 2004
436
Development of Ultra-High Speed Rotating Device
Al-bender, F. / Gregoir, C. | 2004
438
The design of high precision X-Y-Theta stage using VCM
Kim, D. / Kim, K. / Gweon, D. / Lee, S.-W. / Choi, W. | 2004
440
Advanced Design Principles to Develop Nanopositioning Machines
Theska, R. / Frank, T. / Lotz, M. / Hackel, T. / Hohne, G. / Frank, S. | 2004
445
The Micro/Nano Interface
Davies, G.J. / Ward, M. | 2004
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