A High-Yield Drying Process for Surface-Micromachined Structures Using Magnetostatic Forces (S & M 0357) (English)
- New search for: Liu, C.
- New search for: Tsao, T.
- New search for: Tai, Y.-C.
- New search for: Liu, C.
- New search for: Tsao, T.
- New search for: Tai, Y.-C.
In:
SENSORS AND MATERIALS
;
11
, 2
;
71-86
;
1999
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ISSN:
- Article (Journal) / Print
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Title:A High-Yield Drying Process for Surface-Micromachined Structures Using Magnetostatic Forces (S & M 0357)
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Contributors:
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Published in:SENSORS AND MATERIALS ; 11, 2 ; 71-86
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Publisher:
- New search for: SCIENTIFIC PUBLISHING DIVISION MYU
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Publication date:1999-01-01
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Size:16 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 530
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530 -
Source:
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Table of contents – Volume 11, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 71
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A High-Yield Drying Process for Surface-Micromachined Structures Using Magnetostatic Forces (S & M 0357)Liu, C. / Tsao, T. / Tai, Y.-C. et al. | 1999
- 87
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Investigation of MEMS Packaging Using Multichip Module Foundries (S & M 0358)Butler, J. T. / Bright, V. M. / Saia, R. J. et al. | 1999
- 105
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Use of liquid rubber in micromachining focused on flexible large-area biocompatible membranesVerhaegen, K. / Baert, K. / Puers, B. / Sansen, W. / Hermans, L. / Mertens, R. et al. | 1999
- 105
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Use of Liquid Rubber in Micromachining Focused on Flexible Large-Area Biocompatible Membranes (S & M 0359)Verhaegen, K. / Baert, K. / Puers, B. / Sansen, W. / Hermans, L. / Mertens, R. et al. | 1999
- 111
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Thin Film Shear Modulus Determination with Quartz Crystal Resonators (S & M 0360)Lucklum, R. / Behling, C. / Hauptmann, P. et al. | 1999