Design, Fabrication, Static Test and Uncertainty Analysis of a Resonant Microaccelerometer (S & M 0473) (English)
- New search for: Seo, Y. H.
- New search for: Cho, Y.-H.
- New search for: Seo, Y. H.
- New search for: Cho, Y.-H.
In:
SENSORS AND MATERIALS
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14
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91-108
;
2002
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ISSN:
- Article (Journal) / Print
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Title:Design, Fabrication, Static Test and Uncertainty Analysis of a Resonant Microaccelerometer (S & M 0473)
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Contributors:Seo, Y. H. ( author ) / Cho, Y.-H. ( author )
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Published in:SENSORS AND MATERIALS ; 14 ; 91-108
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Publisher:
- New search for: SCIENTIFIC PUBLISHING DIVISION MYU
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Publication date:2002-01-01
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Size:18 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 530
- Further information on Dewey Decimal Classification
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Classification:
DDC: 530 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 14
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 1
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A Novel Chemosensor System Using Surface Plasmon Resonance Taste Sensor and Metal Oxide Odor Sensor for Quality Control of Vinegar (S & M 0465)Nanto, H. / Hamaguchi, Y. / Komura, M. / Takayama, Y. / Kobayashi, T. / Sekikawa, Y. / Miyatake, T. / Kusano, E. / Oyabu, T. / Kinbara, A. et al. | 2002
- 11
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Measurement of Basic Taste Substances by a Fiber Optic Taste Sensor Using Evanescent Field Absorption (S & M 0466)Lee, S.-M. / Jang, S.-W. / Lee, S.-H. / Kim, J.-H. / Kim, S.-H. / Kang, S.-W. et al. | 2002
- 23
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The SOI-Like Method of Reducing the Die Size of Bulk-Micromachined Sensors (S & M 0467)Yang, L.-J. / Kang, S.-W. et al. | 2002
- 23
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The SOI-like method of reducing the die size of bulk-micromachined sensorsYang, Lung-Jieh / Kang, Shung-Wen et al. | 2002
- 35
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Tunable InP-Based Microcavity Devices for Optical Communication Systems (S & M 0468)Daleiden, J. / Chitica, N. / Strassner, M. et al. | 2002
- 35
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Tunable InP-based microcavity devices for optical communication systemsDaleiden, J. / Chitica, N. / Strassner, M. et al. | 2002
- 47
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Pt electrode-based sensor prepared by metal organic chemical vapor deposition for oxygen activity measurements in glass meltsVargas-Garcia, R. / Romero-Serrano, A. / Angeles-Hernandez, M. / Chavez-Alcala, F. / Gomez-Yanez, C. et al. | 2002
- 47
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Pt Electrode-Based Sensor Prepared by Metal Organic Chemical Vapor Deposition for Oxygen Activity Measurements in Glass Melts (S & M 0469)Vargas-Garcia, R. / Romero-Serrano, A. / Angeles-Hernandez, M. / Chavez-Alcala, F. / Gomez-Yanez, C. et al. | 2002
- 57
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On-Chip Near-Field Electromagnetic Shielding Effect of Electroplated Copper Layers (S & M 0470)Kang, T. G. / Cho, Y.-H. et al. | 2002
- 67
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Piezoresistive Thin-Film Germanium Strain Gauges with Improved Sensitivity (S & M 0471)Khakifirooz, A. / Haji, S. / Mohajerzadeh, S. / Shafiiha, R. / Soleimani, E. A. et al. | 2002
- 67
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Piezoresistive thin-film germanium strain gauges with improved sensitivityKhakifirooz, A. / Haji, S. / Mohajerzadeh, S. / Shafiiha, R. / Soleimani, E.A. et al. | 2002
- 77
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Highly Selective Optical Detection in a Lab-on-a-Chip for Biological Fluids Analysis (S & M 0472)Minas, G. / Martins, J. S. / Correia, J. H. et al. | 2002
- 91
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Design, Fabrication, Static Test and Uncertainty Analysis of a Resonant Microaccelerometer (S & M 0473)Seo, Y. H. / Cho, Y.-H. et al. | 2002
- 109
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Measurement of Aroma of Soup Using Potentiometric Gas Sensor (S & M 0474)Kaneki, N. / Tanaka, H. / Shimada, K. / Asano, Y. / Masadome, T. / Hachiya, H. / Hara, H. et al. | 2002
- 109
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Measurement of aroma of soup using potentiometric gas sensorKaneki, N. / Tanaka, H. / Shimada, K. / Asano, Y. / Masadome, T. / Hachiya, H. / Hara, H. et al. | 2002
- 119
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High-Density Plastic Microfluidic Platforms for Capillary Electrophoresis Separation and High-Throughput Screening (S & M 0475)Gerlach, A. / Knebel, G. / Guber, A. E. / Heckele, M. / Herrmann, D. / Muslija, A. / Schaller, T. et al. | 2002
- 129
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Development of Stimulus-Sensitive Hydrogels Suitable for Actuators and Sensors in Microanalytical Devices (S & M 0476)van der Linden, H. / Herber, S. / Olthuis, W. / Bergveld, P. et al. | 2002
- 129
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Development of stimulus-sensitive hydrogels suitable for actuators and sensors in microanalytical devicesLinden, H. van der / Herber, S. / Olthuis, W. / Bergveld, P. et al. | 2002
- 141
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Microfabrication of Microfluidic Cartridge for Isoelectric Focusing by Screen Printing (S & M 0477)Huang, T. / Ertl, P. / Wu, X.-Z. / Mikkelsen, S. / Pawliszyn, J. et al. | 2002
- 151
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Integration of LIGA structures with CMOS circuitryStadler, S. / Ajmera, P.K. et al. | 2002
- 151
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Integration of LIGA Structures with CMOS Circuitry (S & M 0478)Stadler, S. / Ajmera, P. K. et al. | 2002
- 167
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Rapid Micromold Tooling for Injection Molding Microfluidic Components (S & M 0479)Edwards, T. L. / Mohanty, S. K. / Edwards, R. K. / Thomas, C. L. / Frazier, A. B. et al. | 2002
- 167
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Rapid micromold tooling for injection molding microfluidic componentsEdwards, T.L. / Mohanty, S.K. / Edwards, R.K. / Thomas, C.L. / Frazier, A.B. et al. | 2002
- 179
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Use of laser scanning cytometry for analysis of endothelial cells attached to micropatterned silicon surfacesMoldovan, N.I. / Kulkarni, S.S. / Ferrari, M. et al. | 2002
- 179
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Use of Laser Scanning Cytometry for Analysis of Endothelial Cells Attached to Micropatterned Silicon Surfaces (S & M 0480)Moldovan, N. I. / Kulkarni, S. S. / Ferrari, M. et al. | 2002
- 189
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Optical Addressing of Polymer Beads in Microdevices (S & M 0481)Ozkan, M. / Bhatia, S. / Esener, S. C. et al. | 2002
- 199
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Real-Time Microchip Polymerase-Chain-Reaction System (S & M 0482)Lin, Y.-C. / Li, M. / Chung, M.-T. / Wu, C.-Y. / Young, K.-C. et al. | 2002
- 199
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Real-time microchip polymerase-chain-reaction systemLin, Yu-Cheng / Min Li / Chung, Ming-Ta / Wu, Ching-Yi / Young, Kung-Chia et al. | 2002
- 209
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A Multifunctional Sensor-Chip based on Micromachined Chamber Array (S & M 0483)Zhu, J. / Zhu, Z. / Lai, Z. / Wang, R. / Zhang, X. W. G. / Zhang, Z. et al. | 2002
- 219
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Side-Polished Fiber Optic Pressure Sensor based on Stress Optical Property of Polymer Planar Waveguides (S & M 0484)Yoon, J.-K. / Kim, S.-W. / Seo, G.-W. / Yu, Y.-S. / Kwon, D.-H. / Kang, S.-W. et al. | 2002
- 231
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Characteristics of Plasmaless Dry Etching of Silicon-Related Materials Using Chlorine Trifluoride Gas (S & M 0485)Saito, Y. et al. | 2002
- 239
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Silicon Dioxide Micropillars for Sieving Fabricated by Macroporous Silicon-Based Micromachining (S & M 0486)Izuo, S. / Ohji, H. / French, P. J. / Tsutsumi, K. / Kimata, M. et al. | 2002
- 239
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Silicon dioxide micropillars for sieving fabricated by macroporous silicon-based micromachiningIzuo, S. / Ohji, H. / French, P.J. / Tsutsumi, K. / Kimata, M. et al. | 2002
- 253
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High-Sensitivity Hybrid Hall Effect ICs with Thin Film Hall Elements (S & M 0487)Ishibashi, K. / Okada, I. / Shibasaki, I. et al. | 2002
- 263
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Heteroepitaxial growth of GaN on gamma -Al2O3/Si substrate by organometallic vapor phase epitaxyWakahara, A. / Kawamura, N. / Oishi, H. / Okada, H. / Yoshida, A. / Ishida, M. et al. | 2002
- 263
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Heteroepitaxial Growth of GaN on gamma-Al~2O~3/Si Substrate by Organometallic Vapor Phase Epitaxy (S & M 0488)Wakahara, A. / Kawamura, N. / Oishi, H. / Okada, H. / Yoshida, A. / Ishida, M. et al. | 2002
- 271
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Growth-mode control in sublimation epitaxy of AlNFurusho, T. / Nishino, S. et al. | 2002
- 271
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Growth-Mode Control in Sublimation Epitaxy of AlN (S & M 0489)Furusho, T. / Nishino, S. et al. | 2002
- 281
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Influence of initial layers on crystallinity of NiO(111) epitaxial film grown at room temperature by pulsed laser depositionKakehi, Y. / Nakao, S. / Satoh, K. / Kusaka, T. et al. | 2002
- 281
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Influence of Initial Layers on Crystallinity of NiO(111) Epitaxial Film Grown at Room Temperature by Pulsed Laser Deposition (S & M 0490)Kakehi, Y. / Nakao, S. / Satoh, K. / Kusaka, T. et al. | 2002
- 293
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Encapsulation and Stability Properties of Nanoengineered Polyelectrolyte Capsules for Use as Fluorescent Sensors (S & M 0491)Duchesne, T. A. / Brown, J. Q. / Guice, K. B. / Lvov, Y. M. / McShane, M. J. et al. | 2002
- 309
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Production, characteristics and applications of fluorescent PEBBLE nanosensors: potassium, oxygen, calcium and pH imaging inside live cellsBrasuel, M. / Kopelman, R. / Aylott, J.W. / Clark, H. / Xu, H. / Hoyer, M. / Miller, T.J. / Tjalkens, R. / Philbert, M.A. et al. | 2002
- 309
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Production, Characteristics and Applications of Fluorescent PEBBLE Nanosensors: Potassium, Oxygen, Calcium and pH Imaging inside Live Cells (S & M 0492)Brasuel, M. / Kopelman, R. / Aylott, J. W. / Clark, H. / Xu, H. / Hoyer, M. / Miller, T. J. / Tjalkens, R. / Philbert, M. A. et al. | 2002
- 339
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Fiber Optic Couplers for Protein Detection (S & M 0493)Henning, M. et al. | 2002
- 339
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Fiber optic couplers for protein detectionHenning, M. et al. | 2002
- 347
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Force Sensing in a Multilayered Ceramic Actuator Using a Piezoelectric Ceramic Plate (S & M 0494)Tanaka, H. / Matsuse, Y. / Fukami, T. et al. | 2002
- 347
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Force sensing in a multilayered ceramic actuator using a piezoelectric ceramic plateTanaka, H. / Matsuse, Y. / Fukami, T. et al. | 2002
- 353
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Dew point effects in the response of polyaniline to ammonia-water vapour mixturesJansen, M.L. et al. | 2002
- 353
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Dew Point Effects in the Response of Polyaniline to Ammonia-Water Vapour Mixtures (S & M 0495)Jansen, M. L. et al. | 2002
- 363
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Estimation of effective comfort index in a domicile using gas sensor outputNakamoto, Y. / Oyabu, T. / Ueda, Y. / Kimura, H. et al. | 2002
- 363
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Estimation of Effective Comfort Index in a Domicile Using Gas Sensor Output (S & M 0496)Nakamoto, Y. / Oyabu, T. / Ueda, Y. / Kimura, H. et al. | 2002
- 373
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Structural and ferroelectrical properties of (111) oriented lead zirconate titanate thick films for microultrasonic sensorsTanaka, T. / Li, Xin-Shan / Teeramongkonrasmee, A. / Suzuki, Y. et al. | 2002
- 373
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Structural and Ferroelectrical Properties of (111) Oriented Lead Zirconate Titanate Thick Films for Microultrasonic Sensors (S & M 0497)Tanaka, T. / Li, X.-S. / Teeramongkonrasmee, A. / Suzuki, Y. et al. | 2002
- 387
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Chalcogenide Glass Fibres for Contactless Temperature Sensing (S & M 0498)Kobelke, J. / Kirchhof, J. / Schuster, K. / Schwuchow, A. / Muller, J. / Fischer, H. et al. | 2002
- 395
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Sensing of chemical substances using gene expression patterns in Caenorhabditis elegansMatsuno, T. / Ura, K. / Sonoda, R. / Kohara, Y. / Uesugi, H. / Arizono, K. / Iguchi, T. / Tominaga, N. et al. | 2002
- 395
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Sensing of Chemical Substances Using Gene Expression Patterns in Caenorhabditis Elegans (S & M 0499)Matsuno, T. / Ura, K. / Sonoda, R. / Kohara, Y. / Uesugi, H. / Arizono, K. / Iguchi, T. / Tominaga, N. et al. | 2002
- 407
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Anisotropic Etching of <100> Silicon Using a Novel UV-HNA Technique (S & M 0500)Zandi, K. / Haji, S. / Mohajerzadeh, S. / Naeli, K. / Mozafari, M. / Soleiman, E. A. et al. | 2002
- 407
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Anisotropic etching of <100> silicon using a novel UV-HNA techniqueZandi, K. / Haji, S. / Mohajerzadeh, S. / Naeli, K. / Mozafari, M. / Soleiman, E.A. et al. | 2002
- 415
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Temperature Dependent Etching of (100) and (110) Silicon in NaOH and in Tetramethyl-Ammonium Hydroxide (S & M 0501)Kleptsyn, V. F. / Smits, J. G. et al. | 2002
- 429
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Computer Simulation of a Pin-Fin Heat Sink with Fluid Cooling for Power Semiconductor Modules (S & M 0502)Khorunzhii, I. / Gabor, H. / Job, R. / Fahrner, W. R. / Baumann, H. et al. | 2002
- 443
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Fabrication of a Flow Cell for Electrochemical Impedance Measurements (S & M 0503)Hayama, K. / Tanaka, H. / Ju, M.-J. / Hayashi, K. / Toko, K. et al. | 2002
- 455
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Bitterness prediction or bitterness suppression in human medicines using a taste sensorMiyanaga, Y. / Kobayashi, Y. / Ikezaki, H. / Taniguchi, A. / Uchida, T. et al. | 2002
- 455
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Bitterness Prediction or Bitterness Suppression in Human Medicines Using a Taste Sensor (S & M 0504)Miyanaga, Y. / Kobayashi, Y. / Ikezaki, H. / Taniguchi, A. / Uchida, T. et al. | 2002