Fabrication of Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O~3 Thin Films on Epitaxial gamma-Al~2O~3/Si Substrates for Smart Sensors (S & M 0640) (English)
- New search for: Akai, D.
- New search for: Oba, Y.
- New search for: Okada, N.
- New search for: Ito, M.
- New search for: Sawada, K.
- New search for: Takao, H.
- New search for: Ishida, M.
- New search for: Akai, D.
- New search for: Oba, Y.
- New search for: Okada, N.
- New search for: Ito, M.
- New search for: Sawada, K.
- New search for: Takao, H.
- New search for: Ishida, M.
- New search for: Kang, S. W.
In:
International Conference on Electrical Engineering 2005
3
;
165-170
;
2006
-
ISSN:
- Article (Journal) / Print
-
Title:Fabrication of Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O~3 Thin Films on Epitaxial gamma-Al~2O~3/Si Substrates for Smart Sensors (S & M 0640)
-
Contributors:Akai, D. ( author ) / Oba, Y. ( author ) / Okada, N. ( author ) / Ito, M. ( author ) / Sawada, K. ( author ) / Takao, H. ( author ) / Ishida, M. ( author ) / Kang, S. W.
-
Published in:International Conference on Electrical Engineering 2005 , 3 ; 165-170SENSORS AND MATERIALS ; 18, 3 ; 165-170
-
Publisher:
- New search for: SCIENTIFIC PUBLISHING DIVISION MYU
-
Publication date:2006-01-01
-
Size:6 pages
-
ISSN:
-
Type of media:Article (Journal)
-
Type of material:Print
-
Language:English
- New search for: 530
- Further information on Dewey Decimal Classification
-
Classification:
DDC: 530 -
Source:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Table of contents – Volume 18, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 103
-
Fabrication of Microcylinder on Silicon (S & M 0634)Eun, D.-S. / Bae, C.-H. / Kong, D.-Y. / Yu, I.-S. / Kong, S.-H. / Shin, J.-K. / Lee, J.-H. et al. | 2006
- 115
-
High-Sensitivity Membranes of Light Addressable Potentiometric Sensor for Penicillin Detection (S & M 0635)Jang, S. W. / Lee, S. Y. / Yuan, H. / Kim, D. E. / Kwon, D. H. / Kang, S. W. et al. | 2006
- 125
-
Fabrication of Silicon Master Using Dry and Wet Etching for Optical Waveguide by Thermal Embossing Technique (S & M 0636)Kim, J.-H. / Jung, Y.-M. / Cho, Y.-J. / Kim, J.-W. / Kim, Y.-C. / Seo, H.-I. / Kim, K.-H. / Ishida, M. et al. | 2006
- 131
-
Stabilized Pulse Tube Cryocooler System with Infrared Lamp Heater for SQUID Magnetic Sensor (S & M 0637)Tanaka, S. / Iwao, S. / Hatsukade, Y. et al. | 2006
- 139
-
Silicon-on-Insulator Complementary Metal Oxide Semiconductor Image Sensor Using a Nanowire Metal Oxide Semiconductor Field-Effect Transistor-Structure Photodetector (S & M 0638)Do, M.-Y. / Lee, S.-H. / Seo, S.-H. / Shin, J.-K. / Choi, P. / Park, J.-H. / Kim, H. et al. | 2006
- 151
-
Improving Bias Stability of Micromachined Accelerometer by Increasing Mechanical Stability (S & M 0639)Jung, H.-K. / Sung, W.-T. / Chang, H.-K. / Lee, J. G. / Kim, Y.-K. et al. | 2006
- 165
-
Fabrication of Ultrasonic Transducers Using Epitaxial Pb(Zr,Ti)O~3 Thin Films on Epitaxial gamma-Al~2O~3/Si Substrates for Smart Sensors (S & M 0640)Akai, D. / Oba, Y. / Okada, N. / Ito, M. / Sawada, K. / Takao, H. / Ishida, M. et al. | 2006