High Throughput Grating Qualification for Rating Directed Self-Assembly Pattern Performance using Optical Metrology (English)
- New search for: Gronheid, R.
- New search for: Van Look, L.
- New search for: Delgadillo, P.R.
- New search for: Pollentier, I.
- New search for: Cao, Y.
- New search for: Lin, G.
- New search for: Nealey, P.F.
- New search for: Gronheid, R.
- New search for: Van Look, L.
- New search for: Delgadillo, P.R.
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In:
JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY
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26
, 2
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147-152
;
2013
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ISSN:
- Article (Journal) / Print
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Title:High Throughput Grating Qualification for Rating Directed Self-Assembly Pattern Performance using Optical Metrology
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Contributors:Gronheid, R. ( author ) / Van Look, L. ( author ) / Delgadillo, P.R. ( author ) / Pollentier, I. ( author ) / Cao, Y. ( author ) / Lin, G. ( author ) / Nealey, P.F. ( author )
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Published in:JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY ; 26, 2 ; 147-152
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Publisher:
- New search for: TECHNICAL ASSOC OF PHOTOPOLYMERS JAPAN
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Publication date:2013-01-01
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Size:6 pages
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ISSN:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 620
- Further information on Dewey Decimal Classification
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Classification:
DDC: 620 -
Source:
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Table of contents – Volume 26, Issue 2
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 147
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High Throughput Grating Qualification for Rating Directed Self-Assembly Pattern Performance using Optical MetrologyGronheid, R. / Van Look, L. / Delgadillo, P.R. / Pollentier, I. / Cao, Y. / Lin, G. / Nealey, P.F. et al. | 2013
- 153
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Filterability of Block Copolymer Solutions used for Directed Self Assembly LithographyUmeda, T. / Tsuzuki, S. et al. | 2013
- 159
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Photoactivatable Substrates for Analyzing Cell MigrationNakanishi, J. et al. | 2013
- 161
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pH-Sensitive Polymeric Micelles for Enhanced Intracellular Anti-cancer Drug DeliveryKamimura, M. / Nagasaki, Y. et al. | 2013
- 165
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Cell analysis using Photodegradable NanoparticlesKato, M. et al. | 2013
- 171
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Study of the Interaction between a Water-Soluble Cationic Poly(heteroarylene methine) and DNAKato, A. / Fukushima, Y. et al. | 2013
- 175
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Development of Polymer Blend Solar Cells Composed of Conjugated Donor and Acceptor PolymersIto, S. / Hirata, T. / Mori, D. / Benten, H. / Lee, L.-T. / Ohkita, H. et al. | 2013
- 181
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Donor/Acceptor Interface Modifications in Organic Solar CellsZhong, Y. / Tada, A. / Geng, Y. / Wei, Q. / Hashimoto, K. / Tajima, K. et al. | 2013
- 185
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Synthesis of New Thiadiazole-Containing Polythiophene Derivatives and Their Application to Organic Solar CellsHigashihara, T. / Mizobe, T. / Lu, C. / Chen, W.-C. / Ueda, M. et al. | 2013
- 193
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Fullerene Nanowires Produced by Single Particle Nanofabrication Technique and Their Photovoltaic ApplicationsSuwa, S. / Maeyoshi, Y. / Tsukuda, S. / Sugimoto, M. / Saeki, A. / Seki, S. et al. | 2013
- 199
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Laser Sintering of Metal Nanoparticle FilmWatanabe, A. et al. | 2013
- 207
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Fabrication and Photochemical Characterization of Organic Dye-Metal Oxide Hybrid Langmuir Blodgett FilmUsami, H. / Sasaki, S. et al. | 2013
- 213
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Synthesis and Crystal Structures of 5,15-bis(triisopropylsilylethynyl)-tetrabenzoporphyrinsTakahashi, K. / Kuzuhara, D. / Aratani, N. / Yamada, H. et al. | 2013
- 217
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Ambipolar Low-bandgap Copolymers Consisting of Dithienoketopyrrole for All-Polymer Solar CellsIde, M. / Koizumi, Y. / Saeki, A. / Seki, S. et al. | 2013
- 223
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Polarity-switching Top Coats for Silicon-containing Block Copolymer Orientation ControlBates, C.M. / Maher, M.J. / Thio, A. / Dean, L.M. / Cushen, J.D. / Durand, W.J. / Blachut, G. / Li, L. / Ellison, C.J. / Willson, C.G. et al. | 2013
- 225
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Material development for ArR immersion extension towards sub-20nm nodeFurukawa, Tsuyoshi / Terayama, Kousuke / Shioya, Takeo / Shima, Motoyuki et al. | 2013
- 225
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Material Development for ArF Immersion Extension towards Sub-20nm NodeFurukawa, T. / Terayama, K. / Shioya, T. / Shima, M. et al. | 2013
- 231
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Functional Properties of Novel Metallic Hard MasksPadmanaban, M. / Cho, J. / Yao, H. / McKenzie, D. / Dioses, A. / Mullen, S. / Wolfer, E. / Kurosawa, K. et al. | 2013
- 239
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Precise Synthesis of Acrylic Block Copolymers and Application to On-demand Dismantlable Adhesion Systems in Response to Photoirradiation and PostbakingYamanishi, K. / Sato, E. / Matsumoto, A. et al. | 2013
- 245
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Hybrid UV Curing System Using Methacrylates Having a Chalcone MoietyOkamura, H. / Ueda, Y. / Shirai, M. et al. | 2013
- 249
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High Sensitive Photopolymerization Initiator System using Violet Laser and Its Application to Photopolymer CTP PlateShibuya, A. / Kunita, K. / Koizumi, S. et al. | 2013
- 255
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Phase Separation of Mixed Films of Amorphous Molecular Materials with Quaternary Ammonium Salts: 4,4',4"-Tri(phenothiazinyl)triphenylamine-Tetrabutylammonium Tetrafluoroborate SystemIchikawa, R. / Nakano, H. et al. | 2013
- 257
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Large Scale Synthesis of Novel Dendritic Polyenes to Apply to High Sensitive Thiol-ene Photopolymer SystemsAoki, K. / Yamada, M. / Ichimura, K. et al. | 2013
- 259
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Effect of Alkyl Group on the Photocrosslinking of Alkyl Methacrylate Based CopolymersKaratsu, T. / Narusawa, M. / Yagai, S. / Kitamura, A. / Suzuki, H. / Okamoto, H. et al. | 2013
- 271
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Photomechanic Behavior of Main-chain Type of PolycoumaratesYasaki, K. / Tateyama, S. / Kaneko, D. / Kaneko, T. et al. | 2013
- 277
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Two-step Radical Grafting onto Polypropylene Fiber Initiated by Active Species Prepared through the Irradiation of Electron BeamHisada, K. / Matsuoka, M. / Tabata, I. / Hirogaki, K. / Hori, T. et al. | 2013