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Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology : May 8th - May 11th 2005, Montpellier, France / ed.: F. Chevrier ... ; Vol. 1 (English)

2005
  • ISBN:
    9299003505
  • Conference Proceedings  /  Print

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  • Title:
    Proceedings of the 5th international conference of the European Society for Precision Engineering and Nanotechnology : May 8th - May 11th 2005, Montpellier, France / ed.: F. Chevrier ... ; Vol. 1
  • Contributors:
    Chevrier, F. / European Society for Precision Engineering and Nanotechnology
  • Conference:
    International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN) ; 5; 2005; Montpellier
    Annual general meeting of the European Society for Precision Engineering and Nanotechnology ; 7; 2005; Montpellier
  • Place of publication:
    Montpellier
  • Publication date:
    2005
  • Size:
    XVIII, 358 S
  • Remarks:
    Ill., graph. Darst
  • ISBN:
    9299003505
  • Type of media:
    Conference Proceedings
  • Type of material:
    Print
  • Language:
    English
  • Keywords:
    Nanotechnologie, Mikrosystemtechnik, Feinwerktechnik
  • Classification:
    BKL:    52.88 Feinwerktechnik, Mechatronik / 50.94 Mikrosystemtechnik, Nanotechnologie
  • Source:
    TIBKAT

Table of contents conference proceedings

The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.

3
S1O1 Status of the thirty Meter Telescope Projet
Nelson, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
5
S1O2 Large Optics at REOSC-From VLT to GTC and the ELT's
Geyl, R. / Cayrel, M. / Tarreau, M. / Ruch, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
9
S1O3 Manufacturing of Optical Structures
Knaapen, R. J. W. / Krastev, K. T. / Swinkels, J. M. M. / van de Ven, W. T. M. / van de Ven, J. C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
13
S1O4 Design and Manufacture of Large and Nano Optics
Dumas, M. T. P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
17
S1O5 From tetrahedral to box: design philosophy behind the Cranfield Big OptiX system
Morantz, P. / Shore, P. / Stephenson, D. / May-Miller, R. / Read, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
21
S1P1 Novel Designs of Measuring Mirrors For Ultra High Precision Machines
Lotz, M. / Frank, T. / Hackel, T. / Theska, R. / Hohne, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
25
High speed fringe reflection technique for nm resolution topometry of diamond turned free form mirrors
Gläbe, Ralf / Flucke, Christian / Bothe, Thorsten / Brinksmeier, Ekkard et al. | 2005
25
S1P2 High Speed Fringe Reflection Technique for nm Resolution Topometry of Diamond Turned Free Form Mirrors
Glabe, R. / Flucke, C. / Bothe, T. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
29
S1P3 Study on shape measurement of large glass substrates for FPD
Ito, Y. / Natsu, W. / Kunieda, M. / Maruya, N. / Iguchi, N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
33
S1P4 A study on the characteristic of ultra-precision grinding machining considering ultra-fine surface and 3D contour accuracy of aspherical surface micro lens
Baek, S. Y. / Lee, E. S. / Lee, H. D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
37
S1P5 A Comparison between the Errors in Simulated and Experimental Data in Non-contact Surface Measurement Systems
Sun, W. / McBride, J. W. / Hill, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
41
Precision moulding of micro aspherical glass lenses
Suzuki, H. / Muramatsu, A. / Yamamoto, Y. / Okino, T. / Hijikata, Y. / Moriwaki, T. et al. | 2005
41
S1P6 Precision Moulding of Micro Aspherical Glass Lenses
Suzuki, H. / Muramatsu, A. / Yamamoto, Y. / Okino, T. / Hijikata, Y. / Moriwaki, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
45
S1P7 Plane mirror interferometer for precision length measurements
Buchner, H. J. / Jager, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
45
Plane mirror interferometer for precision length measurements
Büchner, Hans-Joachim / Jäger, Gerd et al. | 2005
49
Nanometric characterization of aspheric optical surfaces in calcium fluoride by multi-wavelength image processing
Gras, S. / Feraud, B. / Fillit, R.Y. / Pinoli, J.C. et al. | 2005
49
S1P8 Nanometric characterization of aspheric optical surfaces InCalcium fluoride by multi-wavelength image processing
Gras, S. / Feraud, B. / Fillit, R. Y. / Pinoli, J. C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
53
Precision contour grinding of optical glasses using coarse-grained diamond wheels
Zhao, Q. / Brinksmeier, E. / Preuss, W. / Riemer, O. et al. | 2005
53
S1P12 Precision Contour Grinding of Optical Glasses Using Coarse-Grained Diamond Wheels
Zhao, Q. / Brinksmeier, E. / Preuss, W. / Riemer, O. / European Society for Precision Engineering and Nanotechnology et al. | 2005
57
S1P13 Ultra-High Precision Gimbal-Mount for Optical Elements
Zelenika, S. / Rohrer, M. / Rossetti, D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
61
S1P14 Micro-Optical Fabrication Using Dynamic Gray Mask based on the Digital Light Processing Technique
Jenq-Shyong, C. / Ming-Ping, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
61
Micro-optic fabrication using dynamic gray mask based on the digital light processing technique
Chen, Jenq-Shyong / Lai, Ming-Ping et al. | 2005
65
S1P17 Optical near-field microscopy for biological samples: collection and transmission mode
Nativel, E. L. / Mailfert, S. / Falgayrettes, P. / Salehzada, T. / Gall-Borrut, P. / Bisbal, C. / Castagne, M. / Chat, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
69
S1P18 Scattering type near-field optical microscopy for integrated optics: complex field mapping and analysis
Bruyant, A. / Stefanon, I. / Lerondel, G. / Aubert, S. / Blaize, S. / Royer, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
73
S2O1 Fracture Fabrication of Single Crystal Silicon Nanosurfaces
Sprunt, A. / Slocum, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
77
S2O2 Fabrication of electrical contacts to nanometer-sized materials using electron and ion-assisted deposition in a focused ion beam machine
Romano-Rodriguez, A. / Hernandez-Ramirez, F. / Rodriguez, J. / Casals, O. / Vila, A. / Morante, J. R. / Abid, M. / Abid, J. P. / Valizadeh, S. / Hjort, K. et al. | 2005
81
Design and fabrication of microchannel arrays for combinatorial studies of nanomaterials growth
Hart, Anastasios John / Slocum, Alexander H. et al. | 2005
81
S2O3- Design and Fabrication of Microchannel Arrays for Combinatorial Studies of Nanomaterials Growth
Hart, A. J. / Slocum, A. H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
85
S2O4 Computer Simulation of Nano-void Inspection in Low-k Dielectric Materials
Usuki, S. / Nakao, T. / Takahashi, S. / Takamasu, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
89
S2P1 Nanopatterning of Diamond Films in Diamond Mold Room Temperature Nanoimprint Lithography Using Polysiloxane
Kiyohara, S. / Matsubayashi, F. / Fujiwara, M. / Mori, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
93
S2P2 Development of a universal calibration system for the depth measuring system in a nanoindentation instrument
Li, Z. / Herrmann, K. / Pohlenz, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
93
Development of a universal calibration device for the depth measuring system in a nanoindentation instrument
Li, Zhi / Herrmann, Konrad / Pohlenz, Frank et al. | 2005
97
S2P3 Geometrical Characterisation of MST and Microfluidic Devices Using Novel Surface Metrology Techniques
Blunt, L. / Xiao, S. / Jiang, X. / Scott, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
101
S2P4 Investigation on the micro-nano mechanical properties of anodised aluminium by TPM
Liu, X. / Chan, M. K. / Warrender, T. / Stange, A. / Hotz, W. / European Society for Precision Engineering and Nanotechnology et al. | 2005
105
Precision assembly of tips for scanning probe microscopes
Meeß, R. / Kempe, M. / Danzebrink, H.U. / Löffler, F. et al. | 2005
105
S2P5 Precision Assembly of Tips for Scanning Probe Microscopes
Meess, R. / Kempe, M. / Danzebrink, H.-U. / Loffler, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
109
Synthesis of gold nanodots by ultrasound assisted electrodeposition. Characterisation by TEM, EDAX, XRD and disk centrifuge
Canet, L. / Delplankce, J.L. et al. | 2005
109
S2P Synthesis of gold nanodots by ultrasound assisted electrodeposition. Caracterisation by TEM, EDAX XRD and Disk Centrifuge
Canet, L. / Deplancke, J. L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
113
S2P7 Highly Flexible Fabrication of mu-Sensor Parts by UV-Laser Direct Write thin-film Structuring with High Repetition 4w-Diode Pumpe Solid State Lasers
Ostendorf, A. / Meyer, F. / Stute, U. / European Society for Precision Engineering and Nanotechnology et al. | 2005
113
Highly flexible fabrication of micro-sensor parts by UV-laser direct write thin-film structuring with high repetition 4omega-diode pumped solid state lasers
Ostendorf, Andreas / Stute, Uwe / Meyer, Frank et al. | 2005
117
Discussion about the reliable dimensioning of micro components and potentials for stress decrease
Albers, A. / Metz, D. et al. | 2005
117
S2P8 Discussion about the reliable Dimensioning of Micro Components and Potentials for Stress Decrease
Albers, A. / Metz, D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
121
S2P9 Investigation on gas bearings operable in high vacuum environment for engineering at nano-scale
Schenk, C. / Risse, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
121
Investigation on gas bearings operable in high vacuum environment for engineering at nanoscale
Schenk, C. / Risse, S. et al. | 2005
125
S2P10 Nanostructuring with an Electrolytical STM: Localized deposition of Pt on HOPG
Lal, A. / Bleuler, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
131
S3O1 The LNE's nanometrology research and development program
Lahousse, L. / Larsonnier, F. / Ducourtieux, S. / Duhem, S. / David, J. / Salgado, J. / Vailleau, G. P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
135
New precision dimensional metrology using femtosecond pulse lasers
Kim, Seung-Woo / Oh, Jung-Seok / Jin, Jonghan / Joo, Ki-Nam / Kim, Young-Jin et al. | 2005
135
S3O2 New Precision Dimensional Metrology using Femtosecond Pulse Lasers
Kim, S. W. / Oh, J. S. / Jin, J. H. / Joo, K. N. / Khim, Y. S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
139
S3O3 A Study of the vicinity of a crack tip at nanometer scale: enhanced nano migration-of ions in silicate glasses
Celarie, F. / Ciccotti, M. / Marliere, C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
141
Accurate and traceable 3D calibration of nanoscale standards
Dai, Gaoliang / Dziomba, Thorsten / Min Xu / Koenders, Ludger / Wilkening, Günter et al. | 2005
141
S3O4 Accurate and traceable 3D calibration of nanoscale standards
Dai, G. / Dziomba, T. / Xu, M. / Koenders, L. / Wilkening, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
145
S3O5 Video rate atomic force microscopy
Humphris, A. / Atherton, P. / Catto, D. / Vasilev, C. / Hobbs, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
149
Development of an optical stylus displacement sensor having a Speckle noise reduction capability
Fukatsu, H. / Yanagi, K. et al. | 2005
149
S3P1 Development of an optical stylus displacement sensor with a speckle noise reduction capability
Fukatsu, H. / Yanagi, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
153
S3P2 Fast optical roughness characterization of engineered surfaces
Patzelt, S. / Goch, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
153
Fast optical roughness characterization of engineered surfaces
Patzelt, S. / Goch, G. et al. | 2005
157
S3P3 A Micromachined Displacement Sensor with High Accuracy and Long Range
Kim, M. / Moon, W. / Yoon, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
161
S3P4 Measurement of an Aspherical Surface Profile on a Precision Grinding Machine
Shibuya, A. / Arai, Y. / Gao, W. / Shimizu, H. / Kiyono, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
165
S3P5 Universal Interferometer for the calibration of gauge blocks, end bars, Step gauges and graduated line scales
Calvo, R. / Gutierrez, A. / Prieto, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
169
The use of the GPS-standard in nanometrology
Weckenmann, A. / Wiedenhoefer, T. et al. | 2005
169
S3P6 The use of the GPS-Standard in Nanometrology
Weckenmann, A. / Wiedenhoefer, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
173
S3P7 Self-Calibration of CMM with redundant degree of freedom
Furutani, R. / Shimojima, K. / Takamasu, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
177
S3P8 Development of "softgauges" for surface profile metrology
Blunt, L. / Leach, R. K. / Jiang, X. / Scott, P. / Harris, P. / Xiao, S. / Li, T. / Parkin, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
181
A correction method for the non-linear behaviour of the height measuring system in an SPM
Min Xu / Pohlenz, Frank / Dai, Gaoliang et al. | 2005
181
S3P10- A correction method for the nonlinear behaviour of the height measuring system in a SPM
Xu, M. / Pohlenz, F. / Dai, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
185
S3P11- Prototypes of new nanoscale CD-standards for high resolution optical microscopy and AFM
Huebner, U. / Morgenroth, W. / Boucher, R. / Meyer, H. G. / Sulzbach, T. / Brendel, B. / Mirande, W. / Buhr, E. / Ehret, G. / Fries, T. et al. | 2005
185
Prototypes of new nanoscale CD-standards for high resolution optical microscopy and AFM
Huebner, U. / Morgenroth, W. / Boucher, R. / Meyer, H.G. / Sulzbach, T. / Brendel, B. / Mirande, W. / Buhr, E. / Ehret, G. / Fries, T. et al. | 2005
189
S3P12 Simulation based analysis of workshop influences on machine-integrated form testing interferometers
Doerner, D. / Mangalasseril, P. / Pfeifer, T. / Schmitt, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
189
Simulation based analysis of workshop influences on machine-integrated form testing interferometers
Doerner, D. / Mangalasseril, P. / Pfeifer, T. / Schmitt, R. et al. | 2005
193
S3P13 Self calibration method for 3D roundness of spheres using an ultraprecision coordinate measuring machine
Kung, A. / Meli, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
197
S3P14 Towards a nano CMM for bridging the nano and micro world of surface measurements
Dai, G. / Pohlenz, F. / Danzebrink, H. U. / Wilkening, G. / Hasche, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
197
Towards a nano CMM for bridging the nano and micro world of surface measurements
Dai, Gaoliang / Pohlenz, Frank / Danzebrink, Hans-Ulrich / Wilkening, Günter et al. | 2005
201
S3P15 A new micro-artefact for testing of optical and tactile sensors
Neugebauer, M. / Neuschaefer-Rube, U. / European Society for Precision Engineering and Nanotechnology et al. | 2005
201
A new micro artefact for testing of optical and tactile sensors
Neugebauer, M. / Neuschaefer-Rube, U. et al. | 2005
205
S3P16 MIKES' facility for calibration of commercial laser interferometers
Esala, V. P. / Hemming, B. / Nyholm, K. / Lassila, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
209
S3P17 Straightness measuring method for large objects by using high precision water level gauges
Horiuchi, O. / Yamaguchi, Y. / Kosaka, Y. / Kato, T. / Mizukami, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
213
S3P18 High resolution two-dimensional zero reference marks design with optimization algorithms
Saez-Landete, J. / Bernabeu, E. / Alonso, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
217
S3P19 Verification of optical coordinate measuring machines along the vertical measurement axis
Morace, R. E. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
221
S3P20 Three dimensional Metrology on LIGA parts using the Werth Fibre Probe: Methods and Models to reduce optical Effects influencing the Precision
Thelen, R. / Meyer, P. / Janssen, A. / Schulz, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
221
Three dimensional metrology on LIGA parts using the Werth fibre probe: methods and models to reduce optical effects influencing the precision
Thelen, Richard / Meyer, Pascal / Janssen, Achim / Schulz, Joachim et al. | 2005
225
Particulate nano-defects detection for patterned wafers using evanescent light illumination method
Yoshioka, T. / Miyoshi, T. / Takaya, Y. / Shirai, K. et al. | 2005
225
S3P21 Particulate Nano-defects Detection for Patterned Wafers using Evanescent Light Illumination method
Yoshioka, T. / Miyoshi, T. / Takaya, Y. / Shiral, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
229
S3P23 Roughness measurement with an AFM-CMM instrument
Marinello, F. / Bariani, P. / De Chiffre, L. / Hansen, H. N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
233
S3P24 Control system for guiding deviations on the PTB nanometer comparator
Flugge, J. / Koning, R. / Bosse, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
233
Control system for guiding deviations on the PTB nanometer comparator
Flügge, J. / König, R. / Bosse, H. et al. | 2005
237
S3P25 Multiplexed fibre interferometer and its application on surface measurement
Lin, D. / Jiang, X. / Zhang, W. / Zhang, L. / Blunt, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
241
S3P26 Construction of an Ultrahigh Vacuum Scanning Tunnelling Microscope (UHVSTM) for Atomic-Level Characterization of Magnetic Systems
Pong, W. T. / Durkan, C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
245
S3P28 Metrological Characteristics of Complex Wavelet Transform for Surface Topography Analysis
Zeng, W. / Jiang, X. / Scott, P. / Blunt, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
249
S3P29 An Extended Auto-Collimation Method Combined with a Deflect Optical System for Non-Contact Profile Measurement
Shimizu, H. / Watanabe, Y. / Gao, W. / Kliyono, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
253
S3P30 Tackling the challenge of traceable surface texture measurement in three dimensions
Haycocks, J. / Jackson, K. / Leach, R. / Garratt, J. / McDonnell, I. / Rubert, P. / Lamb, J. / Wheeler, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
257
S3P31 Reconstruction of continuous surface profiles from discretely sampled data
Brennan, J. K. / Crampton, A. / Jiang, X. / Leach, R. / Harris, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
261
S3P33 New generation of wireless high resolution optical encoders
Jourlin, Y. / Parriaux, O. / Johnson, M. / Reynaud, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
265
Nano-structuring of SiO2 layers on Si substrates using irradiation damage
Carlotti, J.F. / Touboui, A.D. / Rotaru, C.C. / Lebius, H. / Schieberger, M. / Bruguier, G. / Guasch, C. / Bonnet, J. et al. | 2005
265
S3P34 Nano-structuring of SiO2 layers on Si substrates using irradiation damage
Carlotti, J.-F. / Touboul, A. D. / Rotaru, C. C. / Lebius, H. / Schleberger, M. / Bruguier, G. / Guasch, C. / Bonnet, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
269
S3P35 A Compact Metrological Atomic Force Microscope using Laser Interferometer
Eom, T. B. / Lee, J. Y. / Kim, J. A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
273
S3P36 Low Cost and Rapid Precision Measurement at Mesoscale Using Sub-Pixel Edge Detection Technique
Ryu, H. S. / Mekid, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
277
S3P37 Diamond turning properties of the intermetallic, single-crystalline NiAl
Rentsch, R. / Zhang, C. / Gumbsch, P. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
277
Diamond turning of intermetallic, single-crystalline NiAl
Rentsch, R. / Zhang, C. / Gumbsch, P. / Brinksmeier, E. et al. | 2005
283
Device for harvesting hydropower with piezoelectric bimorph cantilevers
Pobering, S. / Schwesinger, N. et al. | 2005
283
S4O1 Device for harvesting hydropower with piezoelectric bimorph cantilevers
Pobering, S. / Schwesinger, N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
287
S4O2 Design of a high resolution MEMS-based CMOS magnetometer
Dumas, N. / Latorre, L. / Nouet, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
291
S4O3 Micromachined hight sensitive inclinometer based on thermal micro-convection
Courteaud, J. / Giani, A. / Combette, P. / Boyer, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
295
S4O4 2 DOF deflection mirror intended for closed loop control
van Lierop, D. / Soemers, H. M. J. R. / Meuwese, M. / Asjes, R. J. / Jansen, G. L. M. / Kuijpers, P. E. M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
299
S4O5 Angle-Controlled Assembly of Inclination Sensors
Schubert, A. / Koriath, H. J. / Bottcher, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
299
Angle-controlled assembly of inclination sensors
Schubert, Andreas / Koriath, Hans-Joachim / Böttcher, Ralf et al. | 2005
303
S4P1 In Process Visualization of Micro Manufacturing Operations
Lehman, J. / Wulfsberg, J. P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
303
In process visualization of micro manufacturing operations
Lehmann, J. / Wulfsbberg, J.P. et al. | 2005
307
S4P2 Wireless power supply systems, specific for Nano/Micro Technology
Giraudo, V. / European Society for Precision Engineering and Nanotechnology et al. | 2005
311
S4P3 Trends in MEMS- and nano-related technologies: an analysis on the basis of patent application data
Polesello, P. / Meister, M. / Foussier, P. / McGinley, C. / Meister, C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
315
Why use LIGA technology to produce MEMS?
Meyer, P. / Janssen, A. / Schulz, J. / Guttmann, M. / Thelen, R. / Arendt, M. / Fichtner, H.J. / Hesse, P. / Ritter, V. et al. | 2005
315
S4P4 Why use LIGA technology to produce MEMS
Meyer, P. / Janssen, A. / Schulz, J. / Guttmann, M. / Thelen, R. / Arendt, M. / Fichtner, H. J. / Hesse, P. / Ritter, V. / European Society for Precision Engineering and Nanotechnology et al. | 2005
319
S4P5 A Novel Non-linear Beam Method to Extend the Working Range of Electrostatic Parallel-Plate Micro Actuator
Qiao, D. Y. / Yuan, W. Z. / European Society for Precision Engineering and Nanotechnology et al. | 2005
323
S4P6 Mechatronic Actuators for Precise Positioning Systems
Slatter, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
325
S4P7 Fabrication of Differential SMA Driven Micro Grippers in Batch-Technology
Hoxhold, B. / Leester-Schadel, M. / Buttgenbach, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
325
Fabrication of differential SMA driven micro grippers in batch-technology
Hoxhold, B. / Leester-Schädel, M. / Büttgenbach, S. et al. | 2005
329
S4P8 Solid Hinge Guide Made by Silicon Bulk Microtechnology
Fruehauf, J. / Gaertner, E. / Seifert, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
329
Solid hinge guide made by silicon bulk microtechnology
Fruehauf, J. / Gaertner, E. / Seifert, M. et al. | 2005
333
S4P10 SPM-based probing systems for nano-coordinate metrology
Danzebrink, H. U. / Sokolov, D. V. / Savio, C. D. / Dai, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
333
SPM-hased probing systems for nano-coordinate metrology
Danzenbrink, Hans U. / Sokolov, Dimitri V. / Savio, Claudio dal / Dai, Gaoliang et al. | 2005
337
S4P12 Embedded programmable devices using Magnetic RAM cells
Bruchon, N. / Saint-Jean, N. / Torres, L. / Sassatelli, G. / Cambon, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
337
Embedded programmable devices using magnetic RAM cells
Bruchon, N. / Saint-Jean, N. / Torres, L. / Sassatelli, G. / Cambon, G. et al. | 2005
341
S4P13 Design of CMOS Cantilevers for Inertial Sensing
Chaehoi, A. / Latorre, L. / Nouet, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
345
S4P15 Tool wear for micro-ultrasonic machining (MUSM)
Andrey, E. / Boy, J. J. / Malek, C. K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
349
S4P16 Characterization of measurement effects in an MST Characterization of measurement effects in an MST based nano probe
Bos, E. J. C. / Delbressine, F. L. M. / Dietzel, A. H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
353
S4P17 Deep Reactive Ion Etching for MEMS and Microsystems a market and technologies overview
Mounier, E. / Roussel, P. / Eloy, J. C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
355
S4P18 Design and manufacturing of a bi-stable MEMS
Fleury, G. / Charvet, P. L. / Drapier, S. / Fortunier, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
361
S5O1 Automated tool exchange for large surface ultraprecision diamond milling and turning applications
Brecher, C. / Wenzel, C. / Niehaus, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
361
Automated tool exchange for large surface ultraprecision diamond milling and turning applications
Brecher, Christian / Wenzel, Christian / Niehaus, Frank et al. | 2005
365
A new approach for precision positioning mechanisms
Noll, T. et al. | 2005
365
S5O2 A new Approach for Precision Positioning Mechanisms
Noll, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
369
S5O3 Achieving Active Structural Damping in high precision equipment. An exploratory study of a novel approach
Vervoordeldonk, M. J. / van Eijk, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
373
S5O4 Design and performance evaluation of a coarse/fine precision motion control system
Yang, H. / Buice, E. / Smith, S. / Hocken, R. / Fagan, T. / Trumper, D. / Otten, D. / Seugling, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
377
S5O5 An analysis of the discontinuity in the modeling of sinusoidal excitation for piezoelectric actuator based micro-positioning system for surface grinding control
Gao, Y. / Tse, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
381
S5P1 Teaching the Next Generation of Precision Engineers
Slocum, D. / Long, P. / Slocum, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
385
S5P2 Error Budget for Micro-Milling Operations
Uriarte, L. / Herrero, A. / Azcarate, S. / Santiso, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
389
S5P3 Active disturbance rejection control of fast tool servo for noncircular turning process
Dan, W. / Xiankui, W. / Tong, Z. / European Society for Precision Engineering and Nanotechnology et al. | 2005
393
S5P4 Torsional Error Motion of Simple Leaf-Spring Flexure Mechanisms
Chetwynd, D. G. / Alemohammed, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
397
S5P5 A methodology for characterization and categorization of solutions for micro handling
Gegeckaite, A. / Hansen, H. N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
401
S5P6 An XY scanner with minimized coupling motions for the high speed AFM
Park, J. / Moon, W. / European Society for Precision Engineering and Nanotechnology et al. | 2005
405
S5P7 Double focusing three face neutron monochromator
Zatarain, M. / Carrera, M. A. / de la Maza, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
409
S5P8 Design of an adjustable intuitive toolholder for Philips' Lifrel
van den Bedem, L. J. M. / Rosielle, P. C. J. N. / Knaapen, R. J. W. / Steinbuch, M. / Vermeulen, M. M. P. A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
413
S5P9 Six degrees of freedom Table for nanometric displacement by means of magnetic actuators
Etxaniz, I. / Izpizua, A. / Arana, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
417
S5P10 CoM-SiM - Conceptual Machine Design Simplification Modeler
Bamberg, E. / Hoskere, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
421
S5P11 Motion Error Compensation of Hydrostatic Bearing Table Using the Active Controlled Capillary
Park, C. H. / Oh, Y. J. / Lee, D. W. / European Society for Precision Engineering and Nanotechnology et al. | 2005
425
S5P13 Integrability of handling facilities into micro machining centers
Wulfsberg, J. P. / Kuhn, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
425
Integrability of handling facilities into micro machining centers
Wulfsberg, J.P. / Kuhn, A. et al. | 2005
429
S5P14 Weight Compensation Mechanisms for Ultra High Precision Vertical Positioning
Frank, T. / Theska, R. / Lotz, M. / Hackel, T. / Hohne, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
429
Weight compensation mechanisms for precision vertical positioning
Frank, T. / Theska, R. / Lotz, M. / Hackel, T. / Höhne, G. et al. | 2005
433
Automatic coarse and fine alignment system based on Moire interference phenomena
Uchida, Yoshihisa et al. | 2005
433
S5P15 Automatic Coarse and Fine Alignment System Based on Moire Interference Phenomena
Uchida, Y. / Liu, J. N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
437
S5P16 Macro/micro position measurement system for a mobile robot using moving marks
Torii, A. / Inoue, T. / Doki, K. / Ueda, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
441
Investigations on a magnetically guided high-precision multi- coordinate drive operated in a hardware-in-the-loop test rig
Volkert, Ralf / Kireev, Vladimir / Zentner, Johannes / Bertram, Torsten et al. | 2005
441
S5P18 Investigations on a Magnetically Guided High-Precision Multi-Coordinate Drive Operated in a Hardware-in-the-Loop - Test Rig
Volkert, R. / Kireev, V. / Zentner, J. / Bertram, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
445
S5P19 Dual Servo System Using VCM and Halbach Linear Motor
Kim, K. H. / Choi, Y. M. / Nam, B. U. / Lee, M. G. / Gweon, D. G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
449
S5P20 Principles and Applications of the Slow Slide Servo
Tohme, Y. / Murray, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
453
S5P21 Precision testing of a low cost high precision Automotive Valve
Freeman, D. / Slocum, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
457
S5P22 Microscopic Behavior of Positioning Mechanism Using Ball Screw And Rolling Guide Way
Fukada, S. / Nakai, S. / Wakuta, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
461
S5P23 Complex quality control algorithm for production of ultra precision photonic and bioengineering articles from polymers
Lavrynenko, S. N. / Mamalis, A. G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
465
S5P24 Development of Gearless Polishing Machine for High Removal Rate and Ultra-Smoothness Double Side Surface Polishing
Yasui, H. / Yamaguchi, K. / Kuribayashi, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
465
Development of gearless polishing machine for high removal rate and ultra-smoothness double side surface polishing
Yasui, Heiji / Yamaguchi, Kanta / Kuribayashi, Shouji et al. | 2005
469
S5P25 Reduction in thermally induced displacements in an XY contouring stage through FEA analysis inspired design
Wemyss, T. / Phelan, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
473
S5P27 Calibration issues in line scale based 3D nano- and micro CMMs
Bergmans, R. / Kotte, G. / van Seggelen, J. / Rosielle, N. / Schellekens, P. / Spaan, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
475
S5P29 Experimental Method and Device for Spherical Joint Accuracy Evaluation
Olea, G. / Sato, O. / Kiyosawa, H. / Takahashi, S. / Takamasu, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
479
S5P30 European Scale Training in Microhandling and Microassembly
Brenner, W. / Andrijasevic, D. / Suemecz, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
483
S5P31 Modeling and Simulation study for a mini actuator using a giant magnetostrictive material
Yang, B. / Bonis, M. / Tao, H. / Prelle, C. / Lamarque, F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
487
Investigation of the microscopic performance of an aerostatic precision positioning stage with an air-lubricated capstan drive system
Neou, J. / Chao, C.W. / Chao, C.L. et al. | 2005
487
S5P32 Investigation of the Microscopic Performance of an Aerostatic Precision Positioning Stage with an Air-lubricated Capstan Drive System
Neou, J. / Chao, C. W. / Chao, C. L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
491
S5P33 A large range XY flexure stage for Nanopositioning
Awtar, S. / Slocum, A. H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
495
S5P34 A two-axis Tri-mode Positioning System for Picometer Positioning
Mizumoto, H. / Yabuta, Y. / Arii, S. / Tazoe, Y. / Kami, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
495
A two-axis tri-mode ultraprecision positioning system for picometer positioning
Mizumoto, Hiroshi / Yabuta, Yoshito / Arii, Shiroh / Tazoe, Yoichi / Kami, Yoshihiro et al. | 2005
499
Grinding of ultrasmall milling tools
Haberland, R. / Schmidt, K. et al. | 2005
499
S5P35 Grinding of Ultrasmall Milling Tools
Haberland, R. / Schmidt, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
505
S6O1 Manufacturing of an injection moulding mould insert with three-dimensional micro features by micromilling
Bissacco, G. / Hansen, H. N. / Fugl, J. / Tang, P. T. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
509
S6O2 Study on ultra precision cutting of free form surface with diamond fly cutting
Suzuki, H. / Yuuki, M. / Yamamoto, Y. / Nakagawa, A. / Moriwaki, T. / Okino, T. / Hijikata, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
509
Study on ultra precision cutting of free form surface with diamond fly cutting
Suzuki, H. / Yuuki, M. / Yamamoto, Y. / Nakagawa, A. / Moriwaki, T. / Okino, T. / Hijikata, Y. et al. | 2005
513
Machining properties of mono-crystalline diamond end mills
Uhlmann, E. / Oberschmidt, D. / Feuchter, P. et al. | 2005
513
S6O3 Machining Properties of Mono-crystalline Diamond End Mills
Uhlmann, E. / Oberschmidt, D. / Feuchter, P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
517
Ultrasonic assisted diamond turning of hardened steel alloys
Klocke, F. / Heselhaus, M. / Puellen, J. et al. | 2005
517
S6O4 Ultrasonic Assisted Diamond Turning of Hardened Steel Alloys
Klocke, F. / Heselhaus, M. / Puellen, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
521
S6O5 Control stability issues while applying rules of precision engineering on an ultra-precise five-axis grinding machine
Hemschoote, D. / Qian, J. / Van Brussel, H. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
525
S6P1 Ultra-precision Cutting of Oxygen-free Copper for Cells in the Linear Collider -Using Ultra-high quality Diamond Tools in Nitrogen Gas Atmosphere
Kaneeda, T. / Yamaguchi, S. / Yokomizo, S. / Shimada, S. / Higuchi, M. / Anthony, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
529
Alternative methods for manufacturing milling tools
Kotschenreuther, J. / Schmidt, J. / Knoll, M. et al. | 2005
529
S6P2 Alternative methods for manufacturing milling tools
Schmidt, J. / Kotschenreuther, J. / Knoll, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
533
Detection of cutting forces in micro machining operations
Wulfsberg, J.P. / Brudek, G. et al. | 2005
533
S6P3 Detection of Cutting Forces in Micro Machining Operations
Wulfsberg, J. P. / Brudek, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
537
S6P4 Effects and Possible Roles of Atmospheric Molecules in Ultra-micro Cutting of Monocrystalline Silicon
Liu, Y. J. / Inamura, T. / Takezawa, N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
541
S6P5 Grinding characteristics and surface modifying effects on ELID ground biocompatible Co-Cr alloy for artificial joint
Katahira, K. / Mizutani, M. / Akinou, Y. / Komotori, J. / Ohmori, H. / Uehara, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
545
S6P6 Internal Grinding for Center Hole of Zirconia Ferrules Utilizing An Electroplated Diamond Taper Wire
Kamimura, Y. / Tani, Y. / Nukui, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
549
Fabrication of Ni-W electroplated micro diamond tools with carbide substrate and their application to the grooving of silicon without/with ultrasonic vibration
Onikura, H. / Ohnishi, O. / Nishihara, K. / Mori, Y. et al. | 2005
549
S6P7 Fabrication of Ni-W Electroplated Micro Diamond Tools with Carbide Substrate and Their Application to the Grooving of Silicon without/with Ultrasonic Vibration
Onikura, H. / Ohnishi, O. / Nishihara, K. / Mori, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
553
S6P8 The Effect of Oil-Mist Application on the Machinability in High Speed Turning of Nickel-Based Super Alloy Inconel 718
Yatsuzaki, T. / Onikura, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
557
S6P9 Investigation on a procedure for optimal axial depth of cut accuracy in micromilling
Bissacco, G. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
561
S6P10 Wear of micro end mills
Bissacco, G. / Hansen, H. N. / De Chiffre, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
565
Microstructuring of embossing rollers with profiled diamond tools
Brinksmeier, E. / Riemer, O. / Rickens, K. et al. | 2005
565
S6P11 Microstructuring of Embossing Rollers with Profiled Diamond Tools
Brinksmeier, E. / Riemer, O. / Rickens, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
569
Dynamic behavior of ELID-processes
Brinksmeier, E. / Preuß, W. / Ricikens, K. / Grimme, D. et al. | 2005
569
S6P12 Dynamic Behavior of ELID-processes
Brinksmeier, E. / Preuss, W. / Rickens, K. / Grimme, D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
573
S6P13 Control of Tool Wear in Single Crystal Diamond Cutting of Steelby intermittent cutting method
Song, Y. / Nezu, K. / Shibasaka, T. / Moriwaki, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
577
Micro milling of hard material with micro milling tool
Suzuki, H. / Kimura, T. / Yamamoto, Y. / Moriwaki, T. / Okino, T. / Hijikata, Y. / Goto, I. / Goto, T. / Ono, T. / Goto, Y. et al. | 2005
577
S6P14 Micro Milling of Hard Material with Micro Milling Tool
Suzuki, H. / Kimura, T. / Yamamoto, Y. / Moriwaki, T. / Okino, T. / Hijikata, Y. / Goto, I. / Goto, T. / Ono, T. / Goto, Y. et al. | 2005
581
Innovative manufacturing process chains for micro milling tools
Uhlmann, E. / Schauer, K. et al. | 2005
581
S6P15 Innovative Manufacturing Process Chains for Micro Milling Tools
Uhlmann, E. / Schauer, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
585
S6P16 Fabrication of Micro Flat Drills Composed of 90 nm WC Grain with a Diameter Less Than 10 micrometers and Their Drilling Performance
Ohnishi, O. / Onikura, H. / Min, S.-K. / Aziz, M. / Wahdi, A. / Koga, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
589
S6P17 Investigations on the influence of the substrate's thickness on the cut quality during dicing of thin silicon wafers
Gatzen, H. H. / Gunzel, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
591
S6P18 Process analysis during micro cutting of high-strength materials
Schubert, A. / Schneider, J. / Eckert, U. / European Society for Precision Engineering and Nanotechnology et al. | 2005
595
S6P19 Cutting Characteristics in Edge Moving Type of Long Life Precision Cutting Method
Yasui, H. / Hoda, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
599
S6P20 Ultra-smoothness Grinding of Silicon Carbide in Depth of Cut of 1mm
Yasui, H. / Yamamoto, Y. / Sawa, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
603
S6P21 Manufacturing of the aspheric stainless steel die by ultraprecision turning using coated-cemented-carbide tool
Sakamoto, S. / Yasui, H. / Shinozaki, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
607
S6P22 Ultraprecision Straight Microgrooving with Pattern by Means of a High Speed Shuttle Unit
Kawai, T. / Ebihara, K. / Takeuchi, Y. / European Society for Precision Engineering and Nanotechnology et al. | 2005
611
Drilling of microholes in titanium alloy Ti-6Al-4V
Kudla, L. et al. | 2005
611
S6P23 Drilling of microholes in Titanium Alloy Ti-6-Al-4V
Kudla, L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
615
S6P24 Modeling and computer simulation of Rotating Electrical Discharge Machining (REDM
Kozak, J. / Gulbinowicz, Z. / European Society for Precision Engineering and Nanotechnology et al. | 2005
619
S6P26 In-Process-Measurement of Sample Thickness changes during Grinding
Stoebener, D. / Goch, G. / European Society for Precision Engineering and Nanotechnology et al. | 2005
619
In-process-measurement of sample thickness changes during grinding
Stoebener, D. / Goch, G. et al. | 2005
623
S6P27 Geometrical characterization of micro end milling tools
Borsetto, F. / Bariani, P. / Bissacco, G. / De Chiffre, L. / Hansen, H. N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
627
S6P28 Development of a new vacuum porous pin chuck for CMP Pin formation by abrasive-blasting a porous material
Une, A. / Yoshitomi, K. / Mochida, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
631
S6P29 Effect of rake angle of single crystal diamond tools during micro grooving on electroless nickel plated die materials
Biddut, A. Q. / Rahman, M. / Neo, K. S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
635
S6P30 Diamond Wire Polishing of Corrugated Micro-bores
Ramesh, K. / Lewis, W. G. / Yin, L. / Zhou, F. F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
639
S6P31 Material Removal Mechanisms Involved in Rotary Ultrasonic Machining of Brittle Materials
Chao, C. L. / Chen, T. T. / Neou, J. / Ma, K. J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
643
S6P32 Diamond turning properties of the intermetallic, single-crystalline NiAl
Rentsch, R. / Zhang, C. / Gumbsch, P. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
649
S7O1 Machining Complicated Patterns with Electrolyte Jet Machining
Natsu, W. / Ikeda, T. / Kunieda, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
653
S7O2 Super Finishing of Moulding Steel for Optical Replication Techniques
Klocke, F. / Dambon, O. / European Society for Precision Engineering and Nanotechnology et al. | 2005
653
Super finishing of moulding steel for optical replication techniques
Klocke, F. / Dambon, O. et al. | 2005
657
Force-feedback-assisted micromachining for spark assisted chemical engraving (SACE)
Spaelter, U. / Wüthrich, R. / Bleuler, H. et al. | 2005
657
S7O3 Force-Feedback-Assisted Micromachining for Spark Assisted Chemical Engraving (SACE)
Spaelter, U. / Wuthrich, R. / Bleuler, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
661
S7O4 Contouring of single-crystal silicon optics by use of wire electrical discharge machining
Takino, H. / Ichinohe, T. / Tanimoto, K. / Nomura, K. / Kunieda, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
665
S7O5 Flexible Master Structures Made of SU-8 for Double-Sided Moulding of PDMS
Lucas, N. / Sichler, P. / Buttgenbach, S. / Penache, C. / Bartels, V. / Klages, C. P. / European Society for Precision Engineering and Nanotechnology et al. | 2005
665
Flexible master structures made of SU-8 for double-sided moulding of PDMS
Lucas, N. / Sichler, P. / Büttgenbach, S. / Penache, C. / Bartels, V. / Klages, C.P. et al. | 2005
669
S7P1 Optimization of critical processes within an automated process chain for the Micro-Power-Injection-Molding Process
Fleischer, J. / Buchholz, C. / Weule, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
669
Optimization of critical processes within an automated process-chain for the Micro-PIM process
Fleischer, J. / Buchholz, C. / Weule, H. et al. | 2005
673
S7P2 Photoblasting with PDMS mask and fine abrasive for micromachining of metal and glass
Makino, E. / Mineta, T. / Takada, T. / Sato, H. / European Society for Precision Engineering and Nanotechnology et al. | 2005
677
S7P3 Discussion Of Thin-Wire Electro Discharge Machining Errors
Herrero, A. / Uriarte, L. / Azcarate, S. / Sanchez, J. A. / de Lacalle, L. N. L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
681
S7P4 Material micro-removal mechanisms in Laser Assisted Jet Electrochemical Machining
Pajak, P. T. / De Silva, A. K. M. / Harrison, D. K. / McGeough, J. A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
685
S7P5 Simulation of a Chemo-mechanical Polishing Process Using FEM-Modelling Techniques
Klocke, F. / Dambon, O. / Cardenas, D. / European Society for Precision Engineering and Nanotechnology et al. | 2005
687
S7P6 Quality Assurance in Micro Production - Chances and Challenges
Fleischer, J. / Behrens, I. / European Society for Precision Engineering and Nanotechnology et al. | 2005
691
S7P7 Investigations of Micro Electrochemical Machining with UltraShort Voltage Pulses
Gulbinowicz, D. / Gulbinowicz, Z. / Kozak, J. / European Society for Precision Engineering and Nanotechnology et al. | 2005
695
S7P8 Electrochemical Etching with High Etch Factor for Micromachining of Shape Memory Alloy
Mineta, T. / Makino, E. / European Society for Precision Engineering and Nanotechnology et al. | 2005
699
S7P9 Low-Temperature Synthesis of Hard coating Film on Plastic Substrates
Wang, C. C. / Yang, C. F. / Hsien, K. L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
699
Low-temperature synthesis of hard coating film on plastic substrates
Wang, Cheng-Chuan / Yang, Cheng-Feng / Hsien, Kun-Lung et al. | 2005
703
S7P10 Formation of insulating layer of the electrode for the electrode-contact discharge truing and its durability
Mizuno, M. / Iyama, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
707
S7P11 Manufacturing of micro structured rotational devices by electro discharge technologies
Uhlmann, E. / Piltz, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
711
S7P13 Microcoaxial probe for scanning microwave near field
Marchetti, M. / Castagne, M. / Gasquet, D. / Carbonero, J. L. / European Society for Precision Engineering and Nanotechnology et al. | 2005
715
Advanced ion beam and plasma jet technologies for ultra precision surface processing and finishing
Schindler, Axel / Hänsel, Thomas / Frost, Frank / Nickel, Andreas / Frank, Wilfried / Böhm, Georg / Fechner, Renate / Schwabe, Reinhard et al. | 2005
715
S7P14 Advanced ion beam and plasma jet technologies for ultra precision surface processing and finishing
Schindler, A. / Hansel, T. / Frost, F. / Nickel, A. / Frank, W. / Bohm, G. / Fechner, R. / Schwabe, R. / European Society for Precision Engineering and Nanotechnology et al. | 2005
719
S7P15 The Quality of Laser Assisted Micro-structured Sapphire Components and Occuring Damaging Effects
Ostendorf, A. / Temme, T. / Samm, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
721
S7P16 Nanostructural effects at KNbO~3 synthesis
Teslenko, P. / Kabirov, Y. / Kuprina, Y. / Kofanova, N. / Kupriyanov, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
727
S8O1 Low voltage thin film electroluminescent devices based on semiconductor nanocrystals
Bertoni, C. / Gallardo, D. E. / Dunn, S. / European Society for Precision Engineering and Nanotechnology et al. | 2005
731
S8O2 Influence of Micro Wire Erosion on Surface Biocompatibility
Uhlmann, E. / Piltz, S. / Doll, U. / European Society for Precision Engineering and Nanotechnology et al. | 2005
731
Influence of micro wire erosion on surface biocompatibility
Uhlmann, E. / Piltz, S. / Doll, U. et al. | 2005
735
Degradable implants made of magnesium alloys
Denkena, B. / Witte, F. / Podolsky, C. / Lucas, A. et al. | 2005
735
S8O3 Degradable implants made of magnesium alloys
Denkena, B. / Witte, F. / Podolsky, C. / Lucas, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
739
S8O4 Control of droplet profile with directional wettability on the textured surface
Kaneko, A. / Moronuki, N. / European Society for Precision Engineering and Nanotechnology et al. | 2005
743
S8O5 Terahertz generation and detection by plasma waves in nanometer gate high electron mobility transistors
Knap, W. / Lusakowski, J. / Teppe, F. / Daykonova, N. / Meziani, Y. / Varani, L. / Millithaler, J. F. / European Society for Precision Engineering and Nanotechnology et al. | 2005
747
S8P1 Manufacturing of microsurgery tools by micro-electrodischarge machining
Kawata / Domyo, T. / Sato, T. / Inoue, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
751
Fabrication of micro organic light-emitting devices in nanoimprint method using diamond molds
Kiyohara, S. / Fujiwara, M. / Matsubayashi, F. / Mori, K. et al. | 2005
751
S8P3 Fabrication of Micro Organic Light-Emitting Devices in Nanoimprint Method Using Diamond Molds
Kiyohara, S. / Fujiwara, M. / Matsubayashi, F. / Mori, K. / European Society for Precision Engineering and Nanotechnology et al. | 2005
755
S8P8 Synthesis of Carbon Nanostructures in Matrices Based on Fine Silica
Volkov, S. / Ogenko, V. / Dubrovina, L. / Holdun, O. / European Society for Precision Engineering and Nanotechnology et al. | 2005
759
S8P9 Production of complex medical implants with ceramic functional surfaces
Denkena, B. / Reichstein, M. / van der Meer, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
759
Production of complex medical implants with ceramic functional surfaces
Denkena, B. / Reichstein, M. / Meer, M. van der et al. | 2005
763
S8P10 Monte Carlo analysis of nano-scale schottky diodes for THz generation
Perez, S. / Gonzalez, T. / Varani, L. / Palermo, C. / Vaissiere, J. C. / Millithaler, J. F. / Starikov, E. / Shiktorov, P. / Gruizinskisand, V. / Reggiani, L. et al. | 2005
767
S8P11 Optical and Structural characteristics of electron beam ZnO thin films evaporated for sensors applications
Asmar, R. A. / Ferblantier, G. / Sauvajol, J. L. / Giani, A. / Delannoy, F. P. / Juillaguet, S. / Foucaran, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005
771
S8P12 Magnetic microspheres based on poly (vinyl alcohol). Synthesis and characterisation
Marian, C. M. / Stolnik-Trenkic, S. / Rusu, M. / European Society for Precision Engineering and Nanotechnology et al. | 2005
775
S8P13 Biological samples imaged by Atomic Force Microscopy: a previous study to a combination of an AFM / Fluorescence-Scanning Near-Field Optical Microscope
Mailfert, S. / Nativel, L. / Falgayrettes, P. / Gall-Borrut, P. / Salehzada, T. / Bisbal, C. / European Society for Precision Engineering and Nanotechnology et al. | 2005
777
S8P15 Development of Bio-microdevice actuated by piezoelectric thin film for cell culture
Shibata, T. / Makita, Y. / Masuzawa, T. / Kishidal, A. / Makino, E. / Mineta, T. / European Society for Precision Engineering and Nanotechnology et al. | 2005
781
Piezoelectric zinc oxide thin films for bulk acoustic wave resonator. Application to humidity detection.
Ferblantier, G. / Asmar, R. al / Mailly, F. / Pascal-Delannoy, F. / Foucaran, A. et al. | 2005
781
S8P16 Piezoelectric zinc oxide thin films for bulk acoustic wave resonator. Application to humidity detection
Ferblantier, G. / Asmar, R. A. / Mailly, F. / Pascal-Delannoy, F. / Foucaran, A. / European Society for Precision Engineering and Nanotechnology et al. | 2005

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