Proceedings of the 6th international conference // European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna [Austria] / ed.: H. Zervos ... ; Vol. 1 (English)

2006

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  • Title:
    Proceedings of the 6th international conference // European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna [Austria] / ed.: H. Zervos ... ; Vol. 1
  • Author / Creator:
  • Contributors:
  • Conference:
    International Conference of the European Society for Precision Engineering and Nanotechnology (EUSPEN) ; 6; 2006; Baden bei Wien
    Annual general meeting of the European Society for Precision Engineering and Nanotechnology ; 8; 2006; Baden bei Wien
  • Publisher:
    Euspen
  • Place of publication:
    Bedford
  • Year of publication:
    2006
  • Size:
    535 S.
  • Remarks:
    Ill., graph. Darst.
  • ISBN:
  • Type of media:
    Conference Proceedings
  • Type of material:
    Print
  • Language:
    English
  • Keywords:
  • Classification:
    BKL:    50.94 Mikrosystemtechnik, Nanotechnologie / 52.88 Feinwerktechnik, Mechatronik
  • Source:
  • Export:

Table of contents conference proceedings

The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.

4
Strategies to increase the aspect ratio of micro structures in abrasive blasting
Achtsnick, M. / Förster, R. / Wardenaar, R.P.S. / Hoogstrate, A.M. | 2006
8
Tools for polishing of micro structures
Schulte, H. / Riemer, O. / Brinksmeier, E. | 2006
12
Alignment techniques for the high precision assembly of hybrid microsystems
Brecher, C. / Freundt, M. / Lange, S. / Weinzierl, M. | 2006
24
Deterministic ion beam figuring of surface errors in the sub-millimeter spatial wavelength range
Hänsel, T. / Seidel, P. / Schindler, A. / Rauschenbach, B. | 2006
24
Flexible handling system for an electron beam based microsystem production centre
Zäh, M.F. / Franzkowiak, M. | 2006
28
Hot embossing of large area microfluidic devices with through holes
Mehne, C. / Heckele, M. / Steger, R. / Koltay, P. / Zengerle, R. / Warkentin, D. | 2006
32
Compression moulding of precision diffractive glass. Optical components
Klocke, F. / Yi, A.Y. / Demmer, A. / Pongs, G. / Chen, Y. | 2006
32
Ceramic micro needle array for painless drug delivery and biological sensing
Gatzen, H.H. / Halalo, K. | 2006
36
Abrasive flow machining for microhole processing
Uhlmann, E. / Mihotovic, V. | 2006
44
Study of different nickel platings in ultra precision diamond turning
Osmer, J. / Autschbach, L. / Brinksmeier, E. | 2006
56
A novel micro-machining technology based on the magnetorheological effect of abrasive slurry
Lu, J.B. / Yan, Q.S. / Yu, J. / Gao, W.Q. | 2006
60
3-D overlay assembly of mechanical components with submicron accuracy
Mohaupt, M. / Eberhardt, R. / Beckert, E. / Damm, C. / Peschel, T. / Tünnermann, A. | 2006
62
Tests and artefacts for determining the structural resolution of optical distance sensors for coordinate measurement
Carmignato, S. / Neuschaefer-Rube, U. / Schwenke, H. / Wendt, K. | 2006
64
Design of a precision micro-assembly device with 6 degree of freedom
Meeß, R. / Löffler, F. | 2006
66
Measurement of charging under DUV laser by a test chip for MOEMS and the mechanism of charging
Trabzon, L. / Lukat, K. / Jankowski, I. / Duerr, P. / Schenk, H. | 2006
68
In-process monitoring of contact zone forces during rotational grinding of silicon wafers
Pähler, D. / Klocke, F. / Beegen, L. / Herben, M. / Jakob, A. | 2006
72
Micro injection moulding using polymeric, metal and ceramic materials
Piotter, V. / Beck, M. / Zeep, B. / Ruprecht, R. / Hausselt, J. | 2006
76
Modular system concept for ultra-precision assembly
Schubert, A. / Schulz, B. / Freitag, H. | 2006
80
Development of a dynamic linear axis for machining of groove structures
Brecher, C. / Winterschladen, M. / Lange, S. / Merz, M. / Klar, R. | 2006
92
Electro contact discharge dressing for micro-grinding
Denkena, B. / Reichstein, M. / Hahmann, D. | 2006
96
Efficient micromachining of hardened steels by using laser ablation and EDM
Fleischer, J. / Schmidt, J. / Haupt, S. | 2006
103
Design of a magnetically levitated nm-resolution linear slider
Laro, D. / Porck, T. / Spronck, J. / Eijk, J. van / Lebedev, A. | 2006
107
Recent developments of AIMS, a novel active isolation concept
Vervoordeldonk, Michiel J. / Stoutjesdijk, Henry | 2006
112
Thermal micro-sinter-joining as a potential enhancement for an automated process chain for microPIM bevel gears
Fleischer, Jürgen / Dieckmann, Adam-Mwanga | 2006
115
Development of a three axis fast tool servo for ultra precision machining
Wada, T. / Takahashi, M. / Tashiro, I. / Moriwaki, T. / Nakamoto, K. | 2006
124
Micro-milling of titanium- and nickel-base alloys
Hoffmeister, H.W. / Hlavac, M. | 2006
128
Analysis of tool influences on high-precision-micromilling of steel workpieces
Kahnis, P. / Weinert, K. | 2006
131
The design and fabrication of a small Brushless DC Motor with integrated drive circuit
Choi, Jun-Hyuk / Rhyu, Se-Hyun / Sung, Ha-Gyeung | 2006
132
A newly developed polishing method by large-area electron beam irradiation
Uno, Y. / Okada, A. / Uemura, K. / Raharjo, P. | 2006
139
Development of an optical alignment control module with high speed and accuracy for the spectrum inspection of optical filters in WDM
Kim, G.B. / Kim, S.C. | 2006
144
High temperature micro forming of inorganic glass - an effective replication method
Schubert, Andreas / Edelmann, Jan / Burkhardt, Thomas | 2006
168
Development of microimprint technology with electroformed nickel mold
Shibata, T. / Takahashi, Y. / Horiuchi, O. / Masuzawa, T. / Mineta, T. / Makino, E. | 2006
176
Controller strategy for a 6 DOF piezoelectric translation stage
Buice, Eric S. / Yang, Hua / Smith, Stuart T. / Hocken, Robert J. / Trumper, David L. / Otten, David / Seugling, Richard M. | 2006
180
Using high-resolution encoders in nanometer applications
Holzapfel, W. | 2006
180
Flexible platform for the production of micro-mechatronical products
Fleischer, J. / Volkmann, T. / Krahtov, L. | 2006
184
Real-time hysteresis compensation for electromagnetic actuators applied in high-precision multi-coordinate drives
Volkert, R. / Kireev, V. / Radler, O. / Ströhla, T. / Zöppig, V. | 2006
192
Calibration of v-shaped cantilever for micro force metrology in biomedical engineering
Doering, L. / Brand, U. | 2006
204
Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding
Hesse, S. / Schäffel, C. / Mohr, H.U. / Maass, T. | 2006
208
Development of novel multi-axis silicon gyroscope with piezoelectric PZT thin film
Miho, Takuya / Ishida, Kouji / Mineta, Takashi / Makino, Eiji / Shibata, Takayuki / Watanabe, Yoshiyuki | 2006
216
Deterministic machining of brittle materials applying engineered diamond wheels
Rickens, K. / Grimme, D. / Brinksmeier, E. | 2006
220
Influence of cutting fluids on the performance of the micro milling process of tool steel
Klocke, F. / Arntz, K. / Bodenhausen, J. von / Avila-Robinson, A. | 2006
228
High - precise micro bonding process using a focused stream of hot air
Andrijasevic, D. / Bissacco, G. / Giouroudi, I. / Smetana, W. / Brenner, W. | 2006
241
Development of fine alignment system using moire interference phenomena
Uchida, Yoshihisa | 2006
245
A new hydrostatic rotary table with angled surface self compensation
Roblee, Jeff / Walter, Mark / Walter, Jason / Kane, Nathan / Sihler, Joachim / Slocum, Alexander | 2006
256
New drilling tools for the manufacturing of micro-holes in hard and brittle materials
Hoffmeister, H.W. / Hlavac, M. | 2006
264
Wire EDM technology with a focus on enhanced micro precision fabrication
Alam, Sadiq M. / Rahman, M. / Lim, H.S. | 2006
272
Laser-based surface modification - micro structures on macro areas
Siegel, Frank / Ostendorf, Andreas / Stute, Uwe | 2006
285
A novel piezoelectric drive module for application in a stiff and accurate multi-DOF positioning system
Vijver, W. Van de / Reynaerts, D. / Brussel, H. van | 2006
288
An application of dip-coating technique for the fabrication of a self-assembled microstructure on a hydrophilic/hydrophobic-patterned substrate
Kaneko, A. / Moronuki, N. / Shibata, T. / Kogiso, J. / Uchida, K. / Kubo, T. | 2006
289
Linear encoders used for investigations of length comparator capabilities and as length transfer standards
Flügge, J. / Köning, R. / Bosse, H. | 2006
292
Micro CMM spherical stylus machining by one pulse electro discharge - discharge energy distribution and dimension of spherical stylus -
Sheu, Dong-Yea | 2006
300
High performance drilling of monocrystalline silicon using monocrystalline diamond drill
Yokomizo, Seiichi / Kubota, Shinichirou / Uno, Yoshiyuki | 2006
305
A novel linear motor driven aerostatic planar positioning table system for nano-machining
Yoshioka, H. / Taniguchi, K. / Shinno, H. | 2006
309
High precision alignment in multi-layer Nanolmprint lithography
Mühlberger, M. / Schwinger, W. / Gmainer, M. / Schöftner, R. / Glinsner, T. / Hasenfuß, C. / Hingerl, K. / Kley, E.B. | 2006
317
Development of an ultrasonic vibration spindle with an aerostatic bearing for micro drilling
Onikura, H. / Ohnishi, O. / Sajima, T. / Koga, T. / Moriya, M. | 2006
320
Investigation of the effect of atmospheric pressure airplasma surface pretreatment on the ICP etching of CVD diamond film
Chao, C.L. / Chou, W.C. / Chien, C.Y. / Ma, K.J. / Lin, H.Y. | 2006
325
Ultra-precise positioning over a one-millimeter stroke by using differential ball screw
Fukada, S. / Motohashi, S. / Fukuoka, K. / Fukui, D. / Ishibe, A. | 2006
329
Surface integrated thin film sensors for high precision measurement of temperature, wear, pressure and displacement in tribological contacts
Luethje, H. / Biehl, S. / Bandorf, R. | 2006
336
Development of fixed abrasive tools utilizing sol-gel method
Tani, Yasuhiro / Miyata, Yasuhiro / Shibata, Junji / Kamimura, Yasuyuki | 2006
344
Formation of nanocrystalline structure on the surface layer by friction stir burnishing
Sasahara, H. / Yata, T. / Segawa, T. / Tsutsumi, M. | 2006
349
Ultrasonic vibration assisted electro-discharge machining of deep micro holes
Liu, K. / Yasutomo, K. / Ding, X. / Lim, G.C. / Zhou, L.B. | 2006
369
Development of micro Shack Hartmann wave-front sensor for non-invasive mapping of fluid temperature and flow in microsystems
Cyca, M.J. / Spiewak, S.A. | 2006
373
Development of DNA manipulator using dielectrophoresis
Koshimizu, S. / Onda, H. / Tsuneyoshi, T. / Shimamoto, N. | 2006
374
Current developments in linewidth metrology at the PTB
Häßler-Grohne, W. / Frase, C.G. / Czerkas, S. / Dirscherl, K. / Bodermann, B. / Buhr, E. / Ehret, G. / Wurm, M. / Bosse, H. | 2006
377
Precision structured surfaces as functional carriers for in-vitro cultures of living cells
Wanzenboeck, Heinz / Dominizi, Karl / Erdösi, Daniel / Bertagnolli, Emmerich / Bogner, Elisabeth / Wirth, Michael / Gabor, Franz | 2006
378
Use of optical fiber sections for AFM lateral calibration
Marinello, F. / Savio, E. | 2006
381
Design of a suspended silicon substrate heater and its application to novel studies of carbon nanotube growth
Laake, L.C. van / Hart, A.J. / Slocum, A.H. | 2006
389
The fabrication of carbon nanotube cartridges
Choi, J.S. / Kwak, Y.K. / Kim, S.H. | 2006
394
An in-situ imaging system for the investigation of interlayer deformation during nanoindentation testing
Li, Zhi / Herrmann, Konrad / Pohlenz, Frank | 2006
397
Rapid nanopatterning of metallic glass surface using etching enhancement induced by focused ion beam irradiation
Kawasegi, N. / Morita, N. / Yamada, S. / Takano, N. / Oyama, T. / Ashida, K. / Taniguchi, J. / Miyamoto, I. / Momota, S. / Ofune, H. | 2006
401
A new approach to the measurement of free form surfaces for micro optical applications
Kurz, M. / Oberschmidt, D. / Uhlmann, E. / Blümel, T. / Kafka, R. / Osten, S. / Krüger, S. | 2006
417
Fabrication and mechanical properties of air core polymer photonic crystal fibers
Ma, K.J. / Chien, H.H. / Yang, S.C. / Chao, C.L. | 2006
421
Metrological long-range scanning probe microscope
Dorozhovets, N. / Hausotte, T. / Hofmann, N. / Manske, E. / Jäger, G. | 2006
426
A method for line edge and sidewall roughness characterization
Marinello, F. / Savio, E. | 2006
433
Fabrication of superhydrophobic surface on ePTFE materials
Chien, H.H. / Ma, K.J. / Wu, W.S. / Yeh, Y.P. / Chao, C.L. | 2006
437
Diamond micro chiselling of micro structured moulds
Flucke, C. / Gläbe, R. / Brinksmeier, E. | 2006
438
New depth-setting standards with grooves up to 5 mm depth
Brand, U. / Schnädelbach, H. / Schödel, R. / Feist, C. / Hinzmann, G. | 2006
441
Capillary tool electrode with fluid removal medium for wear compensation in EDM
Fleischer, J. / Schmidt, J. / Halvadjiysky, G. | 2006
453
Combining mechanical micromachining and glass bonding to fabricate robust micro structures
Gatzen, H.H. / Halalo, K. | 2006
454
DUV pulse laser wavelength meter in a laser diffractometry system for an absolute calibration of 100 nanometer pitch standards
Gonda, S. / Yoshizaki, K. / Misumi, I. / Kurosawa, T. / Takatsuji, T. / Kitta, J. / Kubota, F. / Mine, H. | 2006
469
3D microstructures with undercuts and their replication
Zajadacz, J. / Zimmer, K. / Bogdanski, N. / Scheer, H.C. | 2006
470
Nanometrology: high accuracy measuring procedures in large areas with a nanopositioning and nanomeasuring machine
Manske, E. / Büchner, H.J. / Hausotte, T. / Schmidt, I. / Mastylo, R. / Machleidt, T. / Jäger, G. | 2006
504
A novel probe module for true 3D measurements of micro- and nanoscale structures
Dai, Gaoliang / Wolff, Helmut / Pohlenz, Frank / Danzebrink, Hans-Ulrich / Wilkening, Günter | 2006
524
Development of a laser-guided deep-hole evaluating probe: An exchangeable measuring unit for a counter-boring head
Katsuki, A. / Onikura, H. / Sajima, T. / Zhen, J.G. / Park, H.K. / Murakami, H. | 2006
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