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    Proceedings of the 6th international conference // European Society for Precision Engineering and Nanotechnology : May 28th - June 1st, 2006, Baden bei Wien, Vienna [Austria] / ed.: H. Zervos ... ; Vol. 1 (English)

    2006

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    Table of contents conference proceedings

    The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.

    4
    Strategies to increase the aspect ratio of micro structures in abrasive blasting
    Achtsnick, M. / Förster, R. / Wardenaar, R.P.S. / Hoogstrate, A.M. et al. | 2006
    8
    Tools for polishing of micro structures
    Schulte, H. / Riemer, O. / Brinksmeier, E. et al. | 2006
    12
    Alignment techniques for the high precision assembly of hybrid microsystems
    Brecher, C. / Freundt, M. / Lange, S. / Weinzierl, M. et al. | 2006
    24
    Flexible handling system for an electron beam based microsystem production centre
    Zäh, M.F. / Franzkowiak, M. et al. | 2006
    24
    Deterministic ion beam figuring of surface errors in the sub-millimeter spatial wavelength range
    Hänsel, T. / Seidel, P. / Schindler, A. / Rauschenbach, B. et al. | 2006
    28
    Hot embossing of large area microfluidic devices with through holes
    Mehne, C. / Heckele, M. / Steger, R. / Koltay, P. / Zengerle, R. / Warkentin, D. et al. | 2006
    32
    Compression moulding of precision diffractive glass. Optical components
    Klocke, F. / Yi, A.Y. / Demmer, A. / Pongs, G. / Chen, Y. et al. | 2006
    32
    Ceramic micro needle array for painless drug delivery and biological sensing
    Gatzen, H.H. / Halalo, K. et al. | 2006
    36
    Abrasive flow machining for microhole processing
    Uhlmann, E. / Mihotovic, V. et al. | 2006
    44
    Study of different nickel platings in ultra precision diamond turning
    Osmer, J. / Autschbach, L. / Brinksmeier, E. et al. | 2006
    56
    A novel micro-machining technology based on the magnetorheological effect of abrasive slurry
    Lu, J.B. / Yan, Q.S. / Yu, J. / Gao, W.Q. et al. | 2006
    60
    3-D overlay assembly of mechanical components with submicron accuracy
    Mohaupt, M. / Eberhardt, R. / Beckert, E. / Damm, C. / Peschel, T. / Tünnermann, A. et al. | 2006
    62
    Tests and artefacts for determining the structural resolution of optical distance sensors for coordinate measurement
    Carmignato, S. / Neuschaefer-Rube, U. / Schwenke, H. / Wendt, K. et al. | 2006
    64
    Design of a precision micro-assembly device with 6 degree of freedom
    Meeß, R. / Löffler, F. et al. | 2006
    66
    Measurement of charging under DUV laser by a test chip for MOEMS and the mechanism of charging
    Trabzon, L. / Lukat, K. / Jankowski, I. / Duerr, P. / Schenk, H. et al. | 2006
    68
    In-process monitoring of contact zone forces during rotational grinding of silicon wafers
    Pähler, D. / Klocke, F. / Beegen, L. / Herben, M. / Jakob, A. et al. | 2006
    72
    Micro injection moulding using polymeric, metal and ceramic materials
    Piotter, V. / Beck, M. / Zeep, B. / Ruprecht, R. / Hausselt, J. et al. | 2006
    76
    Modular system concept for ultra-precision assembly
    Schubert, A. / Schulz, B. / Freitag, H. et al. | 2006
    80
    Development of a dynamic linear axis for machining of groove structures
    Brecher, C. / Winterschladen, M. / Lange, S. / Merz, M. / Klar, R. et al. | 2006
    92
    Electro contact discharge dressing for micro-grinding
    Denkena, B. / Reichstein, M. / Hahmann, D. et al. | 2006
    96
    Efficient micromachining of hardened steels by using laser ablation and EDM
    Fleischer, J. / Schmidt, J. / Haupt, S. et al. | 2006
    103
    Design of a magnetically levitated nm-resolution linear slider
    Laro, D. / Porck, T. / Spronck, J. / Eijk, J. van / Lebedev, A. et al. | 2006
    107
    Recent developments of AIMS, a novel active isolation concept
    Vervoordeldonk, Michiel J. / Stoutjesdijk, Henry et al. | 2006
    112
    Thermal micro-sinter-joining as a potential enhancement for an automated process chain for microPIM bevel gears
    Fleischer, Jürgen / Dieckmann, Adam-Mwanga et al. | 2006
    115
    Development of a three axis fast tool servo for ultra precision machining
    Wada, T. / Takahashi, M. / Tashiro, I. / Moriwaki, T. / Nakamoto, K. et al. | 2006
    124
    Micro-milling of titanium- and nickel-base alloys
    Hoffmeister, H.W. / Hlavac, M. et al. | 2006
    128
    Analysis of tool influences on high-precision-micromilling of steel workpieces
    Kahnis, P. / Weinert, K. et al. | 2006
    131
    The design and fabrication of a small Brushless DC Motor with integrated drive circuit
    Choi, Jun-Hyuk / Rhyu, Se-Hyun / Sung, Ha-Gyeung et al. | 2006
    132
    A newly developed polishing method by large-area electron beam irradiation
    Uno, Y. / Okada, A. / Uemura, K. / Raharjo, P. et al. | 2006
    139
    Development of an optical alignment control module with high speed and accuracy for the spectrum inspection of optical filters in WDM
    Kim, G.B. / Kim, S.C. et al. | 2006
    144
    High temperature micro forming of inorganic glass - an effective replication method
    Schubert, Andreas / Edelmann, Jan / Burkhardt, Thomas et al. | 2006
    168
    Development of microimprint technology with electroformed nickel mold
    Shibata, T. / Takahashi, Y. / Horiuchi, O. / Masuzawa, T. / Mineta, T. / Makino, E. et al. | 2006
    176
    Controller strategy for a 6 DOF piezoelectric translation stage
    Buice, Eric S. / Yang, Hua / Smith, Stuart T. / Hocken, Robert J. / Trumper, David L. / Otten, David / Seugling, Richard M. et al. | 2006
    180
    Flexible platform for the production of micro-mechatronical products
    Fleischer, J. / Volkmann, T. / Krahtov, L. et al. | 2006
    180
    Using high-resolution encoders in nanometer applications
    Holzapfel, W. et al. | 2006
    184
    Real-time hysteresis compensation for electromagnetic actuators applied in high-precision multi-coordinate drives
    Volkert, R. / Kireev, V. / Radler, O. / Ströhla, T. / Zöppig, V. et al. | 2006
    192
    Calibration of v-shaped cantilever for micro force metrology in biomedical engineering
    Doering, L. / Brand, U. et al. | 2006
    204
    Investigations to reduce positioning uncertainty of direct drive systems with aerostatic guiding
    Hesse, S. / Schäffel, C. / Mohr, H.U. / Maass, T. et al. | 2006
    208
    Development of novel multi-axis silicon gyroscope with piezoelectric PZT thin film
    Miho, Takuya / Ishida, Kouji / Mineta, Takashi / Makino, Eiji / Shibata, Takayuki / Watanabe, Yoshiyuki et al. | 2006
    216
    Deterministic machining of brittle materials applying engineered diamond wheels
    Rickens, K. / Grimme, D. / Brinksmeier, E. et al. | 2006
    220
    Influence of cutting fluids on the performance of the micro milling process of tool steel
    Klocke, F. / Arntz, K. / Bodenhausen, J. von / Avila-Robinson, A. et al. | 2006
    228
    High - precise micro bonding process using a focused stream of hot air
    Andrijasevic, D. / Bissacco, G. / Giouroudi, I. / Smetana, W. / Brenner, W. et al. | 2006
    241
    Development of fine alignment system using moire interference phenomena
    Uchida, Yoshihisa et al. | 2006
    245
    A new hydrostatic rotary table with angled surface self compensation
    Roblee, Jeff / Walter, Mark / Walter, Jason / Kane, Nathan / Sihler, Joachim / Slocum, Alexander et al. | 2006
    256
    New drilling tools for the manufacturing of micro-holes in hard and brittle materials
    Hoffmeister, H.W. / Hlavac, M. et al. | 2006
    264
    Wire EDM technology with a focus on enhanced micro precision fabrication
    Alam, Sadiq M. / Rahman, M. / Lim, H.S. et al. | 2006
    272
    Laser-based surface modification - micro structures on macro areas
    Siegel, Frank / Ostendorf, Andreas / Stute, Uwe et al. | 2006
    285
    A novel piezoelectric drive module for application in a stiff and accurate multi-DOF positioning system
    Vijver, W. Van de / Reynaerts, D. / Brussel, H. van et al. | 2006
    288
    An application of dip-coating technique for the fabrication of a self-assembled microstructure on a hydrophilic/hydrophobic-patterned substrate
    Kaneko, A. / Moronuki, N. / Shibata, T. / Kogiso, J. / Uchida, K. / Kubo, T. et al. | 2006
    289
    Linear encoders used for investigations of length comparator capabilities and as length transfer standards
    Flügge, J. / Köning, R. / Bosse, H. et al. | 2006
    292
    Micro CMM spherical stylus machining by one pulse electro discharge - discharge energy distribution and dimension of spherical stylus -
    Sheu, Dong-Yea et al. | 2006
    300
    High performance drilling of monocrystalline silicon using monocrystalline diamond drill
    Yokomizo, Seiichi / Kubota, Shinichirou / Uno, Yoshiyuki et al. | 2006
    305
    A novel linear motor driven aerostatic planar positioning table system for nano-machining
    Yoshioka, H. / Taniguchi, K. / Shinno, H. et al. | 2006
    309
    High precision alignment in multi-layer Nanolmprint lithography
    Mühlberger, M. / Schwinger, W. / Gmainer, M. / Schöftner, R. / Glinsner, T. / Hasenfuß, C. / Hingerl, K. / Kley, E.B. et al. | 2006
    317
    Development of an ultrasonic vibration spindle with an aerostatic bearing for micro drilling
    Onikura, H. / Ohnishi, O. / Sajima, T. / Koga, T. / Moriya, M. et al. | 2006
    320
    Investigation of the effect of atmospheric pressure airplasma surface pretreatment on the ICP etching of CVD diamond film
    Chao, C.L. / Chou, W.C. / Chien, C.Y. / Ma, K.J. / Lin, H.Y. et al. | 2006
    325
    Ultra-precise positioning over a one-millimeter stroke by using differential ball screw
    Fukada, S. / Motohashi, S. / Fukuoka, K. / Fukui, D. / Ishibe, A. et al. | 2006
    329
    Surface integrated thin film sensors for high precision measurement of temperature, wear, pressure and displacement in tribological contacts
    Luethje, H. / Biehl, S. / Bandorf, R. et al. | 2006
    336
    Development of fixed abrasive tools utilizing sol-gel method
    Tani, Yasuhiro / Miyata, Yasuhiro / Shibata, Junji / Kamimura, Yasuyuki et al. | 2006
    344
    Formation of nanocrystalline structure on the surface layer by friction stir burnishing
    Sasahara, H. / Yata, T. / Segawa, T. / Tsutsumi, M. et al. | 2006
    349
    Ultrasonic vibration assisted electro-discharge machining of deep micro holes
    Liu, K. / Yasutomo, K. / Ding, X. / Lim, G.C. / Zhou, L.B. et al. | 2006
    369
    Development of micro Shack Hartmann wave-front sensor for non-invasive mapping of fluid temperature and flow in microsystems
    Cyca, M.J. / Spiewak, S.A. et al. | 2006
    373
    Development of DNA manipulator using dielectrophoresis
    Koshimizu, S. / Onda, H. / Tsuneyoshi, T. / Shimamoto, N. et al. | 2006
    374
    Current developments in linewidth metrology at the PTB
    Häßler-Grohne, W. / Frase, C.G. / Czerkas, S. / Dirscherl, K. / Bodermann, B. / Buhr, E. / Ehret, G. / Wurm, M. / Bosse, H. et al. | 2006
    377
    Precision structured surfaces as functional carriers for in-vitro cultures of living cells
    Wanzenboeck, Heinz / Dominizi, Karl / Erdösi, Daniel / Bertagnolli, Emmerich / Bogner, Elisabeth / Wirth, Michael / Gabor, Franz et al. | 2006
    378
    Use of optical fiber sections for AFM lateral calibration
    Marinello, F. / Savio, E. et al. | 2006
    381
    Design of a suspended silicon substrate heater and its application to novel studies of carbon nanotube growth
    Laake, L.C. van / Hart, A.J. / Slocum, A.H. et al. | 2006
    389
    The fabrication of carbon nanotube cartridges
    Choi, J.S. / Kwak, Y.K. / Kim, S.H. et al. | 2006
    394
    An in-situ imaging system for the investigation of interlayer deformation during nanoindentation testing
    Li, Zhi / Herrmann, Konrad / Pohlenz, Frank et al. | 2006
    397
    Rapid nanopatterning of metallic glass surface using etching enhancement induced by focused ion beam irradiation
    Kawasegi, N. / Morita, N. / Yamada, S. / Takano, N. / Oyama, T. / Ashida, K. / Taniguchi, J. / Miyamoto, I. / Momota, S. / Ofune, H. et al. | 2006
    401
    A new approach to the measurement of free form surfaces for micro optical applications
    Kurz, M. / Oberschmidt, D. / Uhlmann, E. / Blümel, T. / Kafka, R. / Osten, S. / Krüger, S. et al. | 2006
    417
    Fabrication and mechanical properties of air core polymer photonic crystal fibers
    Ma, K.J. / Chien, H.H. / Yang, S.C. / Chao, C.L. et al. | 2006
    421
    Metrological long-range scanning probe microscope
    Dorozhovets, N. / Hausotte, T. / Hofmann, N. / Manske, E. / Jäger, G. et al. | 2006
    426
    A method for line edge and sidewall roughness characterization
    Marinello, F. / Savio, E. et al. | 2006
    433
    Fabrication of superhydrophobic surface on ePTFE materials
    Chien, H.H. / Ma, K.J. / Wu, W.S. / Yeh, Y.P. / Chao, C.L. et al. | 2006
    437
    Diamond micro chiselling of micro structured moulds
    Flucke, C. / Gläbe, R. / Brinksmeier, E. et al. | 2006
    438
    New depth-setting standards with grooves up to 5 mm depth
    Brand, U. / Schnädelbach, H. / Schödel, R. / Feist, C. / Hinzmann, G. et al. | 2006
    441
    Capillary tool electrode with fluid removal medium for wear compensation in EDM
    Fleischer, J. / Schmidt, J. / Halvadjiysky, G. et al. | 2006
    453
    Combining mechanical micromachining and glass bonding to fabricate robust micro structures
    Gatzen, H.H. / Halalo, K. et al. | 2006
    454
    DUV pulse laser wavelength meter in a laser diffractometry system for an absolute calibration of 100 nanometer pitch standards
    Gonda, S. / Yoshizaki, K. / Misumi, I. / Kurosawa, T. / Takatsuji, T. / Kitta, J. / Kubota, F. / Mine, H. et al. | 2006
    469
    3D microstructures with undercuts and their replication
    Zajadacz, J. / Zimmer, K. / Bogdanski, N. / Scheer, H.C. et al. | 2006
    470
    Nanometrology: high accuracy measuring procedures in large areas with a nanopositioning and nanomeasuring machine
    Manske, E. / Büchner, H.J. / Hausotte, T. / Schmidt, I. / Mastylo, R. / Machleidt, T. / Jäger, G. et al. | 2006
    504
    A novel probe module for true 3D measurements of micro- and nanoscale structures
    Dai, Gaoliang / Wolff, Helmut / Pohlenz, Frank / Danzebrink, Hans-Ulrich / Wilkening, Günter et al. | 2006
    524
    Development of a laser-guided deep-hole evaluating probe: An exchangeable measuring unit for a counter-boring head
    Katsuki, A. / Onikura, H. / Sajima, T. / Zhen, J.G. / Park, H.K. / Murakami, H. et al. | 2006

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