Proceedings of the 10th anniversary international conference of the European Society for Precision Engineering and Nanotechnology : May 18th - May 22nd 2008, Zürich, Switzerland / ed.: H. Van Brussel ... ; Vol. 1 (English)

Anniversary international conference of the European Society for Precision Engineering and Nanotechnology ; 10; 2008; Zürich
Euspen , Bedford; 2008
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  • Title:
    Proceedings of the 10th anniversary international conference of the European Society for Precision Engineering and Nanotechnology : May 18th - May 22nd 2008, Zürich, Switzerland / ed.: H. Van Brussel ... ; Vol. 1
  • Contributors:
  • Conference:
    Anniversary international conference of the European Society for Precision Engineering and Nanotechnology ; 10; 2008; Zürich
    Annual general meeting of the European Society for Precision Engineering and Nanotechnology ; 10; 2008; Zürich
    International conference of the European Society for Precision Engineering and Nanotechnology ; 8; 2008; Zürich
    EUSPEN international conference ; 8; 2008; Zürich
  • Publisher:
    Euspen
  • Place of publication:
    Bedford
  • Year of publication:
    2008
  • Size:
    536 S.
  • Remarks:
    Ill., graph. Darst
  • ISBN:
  • Type of media:
    Conference Proceedings
  • Type of material:
    Print
  • Language:
    English
  • Keywords:
  • Classification:
    BKL:    52.88 Feinwerktechnik, Mechatronik / 50.94 Mikrosystemtechnik, Nanotechnologie

Table of contents conference proceedings

The table of contents of the conference proceedings is generated automatically, so it can be incomplete, although all articles are available in the TIB.

2
Session Keynote: Investigations to the Molding Accuracy of Complex Shaped Glass Components
Klocke, F. / Dambon, O. / Sarikaya, H. / Hollstegge, D. / Pongs, G. | 2008
7
FEM-based Prevention of Process-related Local Shape Deviation during Polishing of Micro Structures
Schulte, H. / Riemer, O. / Brinksmeier, E. | 2008
11
Fabricating Diamond Microtools with Focused Ion Beam Machining
Evans, R.W. / Allen, D.M. | 2008
16
5-Axis Control Ultraprecision Machining of Micro Inducer in Micro Axial-flow Pump
Takeuchi, Y. / Kitamura, N. / Ishida, T. | 2008
20
Cryogenic Micromachining of PDMS for Microfluidic Chips
Kakinuma, Y. / Yasuda, N. / Aoyama, T. | 2008
24
Generation of regularly alligned micro dimples by using a patch division milling
Sasahara, H. / Fukuda, M. / Matsuda, H. / Tsutsumi, M. | 2008
29
A Flexure Guided Stage with Piezo Electric Transducers for Laser Micro/Nano Machining
Kim, J.-Y. / Hwang, D. / Lee, K.-I. / Kim, S.-I. / Kim, H.-S. / Lee, K.-D. / Jeong, J. / Lee, M.G. | 2008
34
Heat Management Concepts for a Precision Assembly of Micro Components Using Hot Melt Joining
Rathmann, S. / Raatz, A. / Hesselbach, J. | 2008
39
The application of single grains for microcutting tools
Kudla, L. | 2008
44
Method for the compensation of process inherent form deviation in hot embossing of glass
Schubert, A. / Edelmann, J. | 2008
49
High precision laser structuring of micro forming tools
Schubert, A. / Schneider, J. / Edelmann, J. / Burkhardt, T. / Gross, S. | 2008
53
Ultra Precision Machining of Free-Form Surfaces and Tool Path Generation
Osmer, J. / Riemer, O. / Brinksmeier, E. | 2008
57
Hybrid Micro Tri-Point Gripper with Integrated Alignment Functionality
Freundt, M. / Brecher, C. / Klar, R. | 2008
62
Ultra Precision Machine-Integrated Approach to Measuring Aspheres Interferometrically
Uhlmann, E. / Kurz, M. / Bosse, M. / Neubert, R. / Bluemel, T. / Oberschmidt, D. | 2008
66
Magnetorheological Finishing of silicon nitride moulds
Geiss, A. / Schinhaerl, M. / Rascher, R. / Sperber, P. / Slabeycius, J. / Kader, F. / Vogt, C. | 2008
68
Micro-Burr Formation in Ultra-Precision Cutting
Okuda, K. / Shibahara, H. / Miyoshi, M. | 2008
72
Investigation of multi-sensor signals for tool condition monitoring in micro-milling processes
Yen, C. / Lu, M. / Chen, T. | 2008
77
Precision Cutting of Tungsten Carbide Using a Mono-Crystal-Diamond Tool - Measurement of Cutting Temperature
Yui, A. / Matsuoka, H. / Okuyama, S. / Kitajima, T. | 2008
81
The automatic feeding of micro parts with flexible oscillating conveyors
Fleischer, J. / Munzinger, C. / Dieckmann, A.-M. / Prause, P.-J. / Buhner, K. / Trondle, M. | 2008
86
Finte Element Simulation of the Cutting Process in SPDT
Wang, H. / To, S. / Cheung, C.F. / Lee, W.B. | 2008
90
The influences of process parameters on residual stress of injection moulded microlens array
Weng, C. / Lee, W.B. / To, S. | 2008
94
Precision Polishing of Micro Aspherical Surface by Rotational Polishing Tool
Suzuki, H. / Noguchi, S. / Inagaki, A. / Okino, T. / Hijikata, Y. / Moriwaki, T. | 2008
98
Automated Feeding of Micro Parts into a Measuring Machine
Fleischer, J. / Trondle, M. / Ruprecht, E. / Dieckmann, A.-M. | 2008
102
Discussion of Forces acting on Thin-Wire EDM
Herrero, A. / Azcarate, S. / Sanchez, J.A. | 2008
106
Torque measurements for microscrews
Gegeckaite, A. / Hansen, H.N. | 2008
111
Manufacturing of freeform optics by 3D ruling
Gebhardt, A. / Steinkopf, R. | 2008
116
A cutting tool with micro/nanometer-scale texture for improvement of friction behavior
Kawasegi, N. / Sugimori, H. / Morimoto, H. / Morita, N. / Hori, I. | 2008
121
Ultraprecision Manufacturing of Freefom Optical Surfaces for Astronomical Applications
Rickens, K. / Riemer, O. / Brinksmeier, E. / Dreischer, T. / Voland, C. / Ries, H. / Armengol, J.M.P. | 2008
125
Manufacturing of diffractive microstructures using an open loop nanometerstroke Fast Tool Servo system
Brinksmeier, E. / Glabe, R. / Lunemann, B. | 2008
129
Focused Ion Beam Fiber Turning Lathe for Fabricating a Strain Gauge for Carbon Fibers
Belski, A. / Kammrath, W. / Gatzen, H.H. | 2008
134
Investigation of Chip Formation during Microstructuring by Means of Cutting
Denkena, B. / Boehnke, D. / Kastner, J. | 2008
138
Tribological Investigation of CMP for Electroplated NiFe Microstructures
Miletic, D. / Cvetkovic, S. / Weber, C.-T. / Gatzen, H.H. | 2008
143
Fabrication and Assembly of a Magnetic Write Head
Wu, K.-H. / Gatzen, H.H. | 2008
148
A new production technology for aerostatic bearings
Jaumann, S. / Weikert, S. | 2008
152
In-Situ Interferometric Form Testing for Adaptive Mold Finishing
Schmitt, R. / Brecher, C. / Vielhaber, K. / Tucks, R. / Merz, M. | 2008
157
Improvement of micro endmill geometry for micro hard milling application
Li, P. / Oosterling, J.A.J. / Hoogstrate, A.M. / Langen, H.H. | 2008
161
Improved method for the cutting coefficients calculation in micromilling force modeling
Li, P. / Oosterling, J.A.J. / Hoogstrate, A.M. / Langen, H.H. | 2008
165
Ultrasonic assisted diamond turning of hardened steel with mono-crystalline diamond
Klocke, F. / Dambon, O. / Bulla, B. | 2008
170
Setup of a micro milling force knowledge database - a 4M cross divisional project
Bissacco, G. / Gietzelt, T. | 2008
174
Investigation of Electrostatic Self-alignment for Batch Micro-Assembly
Kurniawan, I. / Tichem, M. | 2008
179
Statistical analysis on the quality of precision parts in ceramic injection moulding
Beck, M. / Piotter, V. / Ritzhaupt-Kleissl, H.J. / Hausselt, J. | 2008
184
Machining Conditions for Fabrication of Wire Saw by Electrical Discharge Machining by Using Green Compact Electrode
Furutani, K. / Suzuki, K. | 2008
188
CAD/CAM enhancements in order to increase the quality of final free form machined surfaces
Korosec, M. / Duhovnik, J. | 2008
193
Precision manufacturing of the ultra miniature gas turbine in ceramic composite for the micro power generation system
Liu, K. / Ferraris, E. / Peirs, J. / Lauwers, B. / Reynaerts, D. | 2008
197
A Simulation Study on Tool Wear in Ultra Precision Diamond Turning of Silicon
Luo, X. / Sun, J. | 2008
202
Study of the work hardening of Titanium Alloys under fine cutting conditions
Colafemina, J.P. / Duduch, J.G. / Jasinevicius, R.G. / Porto, A.J.V. | 2008
207
Development of DLC Coated Tool for Cutting of Aluminum Alloy
Minaki, K. / Kitajima, K. / Ohnishi, M. / Sugimoto, T. | 2008
212
An Experimental Investigation of Surface Roughness Effect on Microlens Arrays Fabricated by Thermal Reflow Process
Tsai, J.-C. / Chang, K.-R. / Yang, H. | 2008
217
Simulation of surface microtopography in comparison to experimental results in ultraprecision milling
Vollmer, M.H.A. / Autschbach, L. | 2008
222
Effect of Electrostatic Cleaning of Dielectric Working Fluid on Electrical Discharge Machining Characteristics
Okada, A. / Uno, Y. / Kimura, H. / Iwasaki, S. | 2008
226
Sub-μm structured surfaces manufacturing using e-beam machining, X-Ray lithography, electroforming and polymer replication for micro fluidics applications
Heckele, M. / Worgull, M. / Mappes, T. / Tosello, G. / Metz, T. / Gavillet, J. / Koltay, P. / Hansen, H.N. | 2008
231
The lubricant applying effect in difficult-to-cut material cutting
Kaneeda, T. / Kinugawa, K. / Anthony, L. | 2008
236
Thermal Micro-Sinter-Joining for Realizing a Shaft to Collar Connection of μPIM Bevel Gears
Fleischer, J. / Munzinger, C. / Dieckmann, A.-M. | 2008
240
In-Process Measurement and Positioning of Precisionforged Gear Shafts in 4 DOF
Denkena, B. / Immel, J. / Gillhaus, R. / Seewig, J. / Reithmeier, E. | 2008
245
Measurement of glass relaxation property on commercial glass molding machine for process simulation
Klocke, F. / Dambon, O. / Pongs, G. / Wang, F. / Yi, A.Y. | 2008
249
Mechanism of material removal in magnetorheological finishing (MRF) process
Shi, F. / Dai, Y. / Peng, X. | 2008
253
Work affected layer of the finished surface in precision cutting of austenitic stainless steel
Sakamoto, S. / Kajiwara, Y. / Matsutori, T. | 2008
258
High-precision machining of optics by ultraprecision milling with compensated feeding mechanisms
Takino, H. / Yamamoto, A. / Nomura, K. / Kawai, T. / Takeuchi, Y. | 2008
263
Session Keynote: Traceability of a Linescale Based Micro-CMM
van Veghel, M.G.A. / Bergmans, R.H. / Nieuwenkamp, H.J. | 2008
268
Absolute Distance Measurement using the Frequency Comb of a Femtosecond Laser
Jin, J. / Kim, Y.-J. / Kim, Y. / Hyun, S. / Kim, S.-W. | 2008
273
Design, Fabrication and Calibration of a Silicon Micro Force-Torque Sensor
Beyeler / Muntwyler / Nelson | 2008
277
Characterization of Ultra-precision Freeform Surfaces Using an Intrinsic Feature-based Pattern Analysis
Lee, W.B. / Cheung, C.F. / Kong, L.B. / To, S. | 2008
282
Measurement of Thin Film Thickness and Interfacial Surface Roughness by Interferometry
Conroy, M. / Mansfield, D. | 2008
287
Limitations and Innovations in Scanning White Light Interferometry
Lobera, J. / Gao, F. / Petzing, J. / Coupland, J. / Leach, R. | 2008
292
Measurement of Reflectance Factor for non-contact measurement(2nd Report)- Optical Roughness Dependent on the Projection and Observation Angles
Furutani, R. / Osawa, S. / Sato, O. / Takatsuji, T. | 2008
297
Effect of Native Oxide Layer on Nanoindentation Test of High Purity Aluminum
Sumomogi, T. / Yoshida, M. / Nakamura, M. | 2008
302
A novel facility to realize a measurement standard of nanonewton forces
Nesterov, V. / Mueller, M. / Belai, O. / Popadic, R. / Brand, U. | 2008
307
Improving lateral resolution in interferometry by the Traceable Multi Sensor technique
Schulz, M. / Wiegmann, A. / Elster, C. | 2008
312
Nanometrology of fine Si patterns having a rectangular profile using AFM carbon nanotube probes
Ichida, Y. / Sato, R. / Ko, D. | 2008
317
Tolerancing issues in micro manufacturing
Hansen, H.N. / De Chiffre, L. / Fugl, J. | 2008
321
Development of an Internal Profile Measurement Sensor for Small-diameter Holes
Fukatsu, H. / Yanagi, K. / Shimamoto, A. | 2008
325
Development of On-Machine Non-Contact Type Aspherical Measurement System
Suzuki, H. / Kinoshita, T. / Onishi, T. / Moriwaki, T. / Miura, K. / Okino, T. | 2008
329
Wear of silicon AFM tips during the approach process
Carli, L. / Marinello, F. / Savio, E. / De Chiffre, L. | 2008
334
Traceability of optical roughness measurements on polymers
De Chiffre, L. / Gasparin, S. / Carli, L. / Andreasen, J.L. | 2008
338
Versatile probes for the METAS 3D Micro-CMM
Kung, A. / Meli, F. | 2008
343
Facet Formation During Silicon Selective Epitaxial Growth
Pengpad, P. / Bagnall, D.M. | 2008
348
Z calibration of the LNE ultra precision coordinate measuring machine
Boripatkosol, S. / Lahousse, L. / Leleu, S. / David, J. / Ducourtieux, S. / Coorevits, T. / Gibaru, O. | 2008
354
In-Process Characterization of Diamond Cut Prismatic Microcavities
Patzelt, S. / Flucke, C. / Tausendfreund, A. / Goch, G. / Brinksmeier, E. | 2008
358
Identification of Nonlinear Distortions in MST Based Inertial Sensors
Spiewak, S. / Hauer, G. / Lawrence, E. | 2008
362
On-machine Tool Measurement of Tool Tip Position using Laser Diffraction
Khajornrungruang, P. / Kimura, K. | 2008
366
Measurements of micro gears using a nano CMM
Dai, G. / Pohlenz, F. / Butefisch, S. / Hartig, F. / Danzebrink, H.-U. | 2008
371
Alignment procedure for pallet and robot coordinate system in micro assembly operations
Gegeckaite, A. / Hansen, H.N. | 2008
375
Development of a new XY flexure translation stage with high guidance quality for the LNE metrological AFM
Poyet, B. / Ducourtieux, S. / David, J. / Lahousse, L. / Leleu, S. | 2008
380
Use of production related metrology in respect of costs
Blumel, T. / Kafka, R. / Boeck, W.H. | 2008
384
A spiral scanning-type AFM for high-speed and large-area measurement
Cui, Y. / He, G. / Arai, Y. / Asai, T. / Gao, W. | 2008
389
A Highly Repetable MEMS Based Electrical Contact Test System
Read, M.B. / Weber, A.C. / Martens, R. / Yaglioglu, O. / Lang, J.H. / Slocum, A.H. | 2008
395
Session Keynote: Al-Si Thermal Linear Motor for High Thermal Bandwidth
Paalvast, S.L. / Pham, H.T.M. / Spronck, J.W. / Schmidt, R.H.M. / Sarro, P.M. | 2008
400
AFM-Based Machining Technique of Three Dimensional Curved Microstructures
Yan, Y.D. / Hu, Z.J. / Sun, T. / Zhao, X.S. / Dong, S. | 2008
405
Optical Encoder for Ultra Precision Metrology Systems
Carr, J. / Desmulliez, M.Y.P. / Weston, N. / McKendrick, D. / Cunningham, G. / McFarland, G. / Meredith, W. / McKee, A. / Langton, C. | 2008
410
Sub-Micron Palletizing System for Micro- and Ultraprecision Machining
Brecher, C. / Weinzierl, M. / Rashid, A. | 2008
415
Micro Powder Injection Moulding - Recent Developments
Piotter, V. / Beck, M. / Ritzhaupt-Kleissl, H.-J. / Hausselt, J. | 2008
420
Generating Micro Geometries with Air assisted Jet Electrochemical Machining
Hackert, M. / Meichsner, G. / Schubert, A. | 2008
425
Definition and Design of an Automated Multiscale Measuring System
Zimmermann, J. / Regin, J. / Lyda, W. / Wiesendanger, T. / Sawodny, O. / Westkamper, E. / Osten, W. | 2008
431
Investigation on Polisher Linear Movement Type of Ultra-Smoothness Double Side Surface Polishing Method
Yasui, H. / Takagi, M. / Nagata, T. / Kusaba, K. / Yamaguchi, K. / Kubota, H. | 2008
435
Electro-Chemical and Laser-Dressing of Micro-Grinding Wheels
Hoffmeister, H.-W. / Hlavac, M. | 2008
439
Development of novel CVD-Diamond Grinding Wheels
Hoffmeister, H.-W. / Hlavac, M. | 2008
443
New Fabrication Techniques Utilizing Electrostatic Inkjet Phenomena
Umezu, S. / Katahira, K. / Ohmori, H. / Kawamoto, H. | 2008
448
Figuring of ultraprecision aspherical focusing mirror using numerically controlled local wet etching
Yamamura, K. / Takai, H. | 2008
452
Assessment of Surface Residual Stresses Generated during Machining of Metastable Austenitic Stainless Steel using Acoustic Emission
Ward, C.R. / Lamb, J. / Reuben, R. / Wilkinson, P. | 2008
456
A novel cylindrical ultrasonic linear microactuator
Wang, S. / Sun, D. / Hata, S. / Shimokohbe, A. | 2008
460
A novel CMP process using the size-controllable polyhydroxylated fullerene cluster
Tachika, H. / Takaya, Y. / Hayashi, T. / Kokubo, K. / Suzuki, K. / Shirai, K. | 2008
465
Micro Drilling into Brittle Materials by Chemically Plated Diamond Tools
Park, H.K. / Onikura, H. / Ohnishi, O. / Sajima, T. / Sharifuddin, A. | 2008
469
Large-scale antireflective surface produced by the combination of self-assembled mask and etching
Moronuki, N. / Kobayashi, H. / Kaneko, A. | 2008
473
Integrated Dynamic Mechanical Testing of Polymer Micro Structures
Schmid, S. / Leimbacher, A. / Hierold, C. | 2008
478
Investigations on Micro Electrical Discharge Machining using Diamond based Tool Electrodes
Uhlmann, E. / Rohner, M. | 2008
483
Fabrication of ITO conductive tracks on flexible substrate by UV roll nano imprinting
Han, J. / Lee, B.S.W. / Kang, S. | 2008
488
A Novel Approach to Efficiency Determination in Micro Electro Discharge Machining
Schubert, A. / Zeidler, H. | 2008
493
Double-Polysilicon Self-Aligned SiGe:C Lateral Heterojunction Bipolar Transistors: Design and Simulation
Pengpad, P. / Bagnall, D.M. | 2008
498
Efficient Quality Improvement of Micro Hole by Compound Tool Consisting of Drill and Electroplated Parts
Ohnishi, O. / Onikura, H. / Aziz, M. / Eguchi, T. | 2008
502
EDM-polishing for precision mould and die industry
Klocke, F. / Garzon, M. | 2008
506
A Novel Method for Synthesis of Metallic Nanoparticles by Electrochemical Discharges
Jalali, M. / Lal, A. / Wuthrich, R. | 2008
511
Polishing-Grinding - An Innovation For High Precision Optics
Klocke, F. / Gruentzig, A. / Hollstegge, D. / Dambon, O. / Riegel, J. / Herben, M. | 2008
516
Combined optimization and hybrid scalar-vector diffraction method for grating topography parameters determination
Hansen, P.-E. / Nielsen, L. | 2008
521
Image Sensor Wafer Level Package using Laser Drilling
Jeung, W.-K. / Lim, C.-H. / Yuan, J. / Park, S.-W. / Kim, D.-J. / Choi, S.-M. / Yi, S. | 2008
526
Micro-milling with Active Magnetic Bearing Spindles
Blom, R.S. / Li, P. / Langen, H.H. / Van den Hof, P.M.J. / Schmidt, R.H.M. | 2008
530
Micro-orthogonal Cutting of Metals
Kremer, D. / Fromentin, G. / Loutan, O. / Agbebiade, K. / Giovanola, J. | 2008
535
Fabrication and Characterisation of Miniature McKibben Actuators
De Volder, M. / Moers, A.J.M. / Reynaerts, D. | 2008
540
Square Foot Manufacturing - An Innovative Production Concept for Micromachining
Wulfsberg, J.P. / Scotti, F.v. / Kohrs, P. | 2008
545
The Micromagnetoflowcell: a Novel Microsystem for Viscosity Measurement
Lo, C.S. / Prewett, P.D. / Davies, G.J. / Bowen, J. / Vanner, K. | 2008
550
The use of plasma in micro assembly injection moulding
Michaeli, W. / Kamps, T. | 2008
555
Introduction of a new pair of thermoplastic materials for precision manufacturing of moulded interconnect devices
Islam, A. / Hansen, H.N. / Tang, P.T. / Sun, J. | 2008
560
MEMS-based Micro Coriolis mass flow sensor
Haneveld, J. / Brouwer, D.M. / Mehendale, A. / Zwikker, R. / Lammerink, T.S.J. / de Boer, M.J. / Wiegerink, R.J. | 2008
566
Training for Coordinate Metrology - CMTrain
Waterworth, A. | 2008
571
Multidisciplinary graduate course and PhD summerschool in micromechanical system design and manufacture
Hansen, H.N. / De Grave, A. / Bissacco, G. | 2008
576
Calibration and measurement reconstruction of a precision positioning stage
Balemi, S. | 2008
582
Design of Mechanical Clutch-based Catheter Insertion Device
Bassett, E.K. / Slocum, A.H. / Karp, J.M. / Farokhzad, O. | 2008
587
Biological sensor for cell monitoring via micro injection moulding technology
Salk, N. / Haack, J. / Kaiser, J.-P. / Bruinink, A. / Rota, A. | 2008
592
Measurement of thin film coatings for medical implants
Brice, L. / Morris, S. / Motely, J. / Leach, R. | 2008
597
The Obtaining and Characterization of Nanocomposite Films Based on SnO2 and ZrO2 in Organic Matrix
Trif, M. / Moldovan, M. / Prodan, D. / Stanulet, L. / Prejmerean, C. | 2008
602
Peculiarities of Making of Sapphire-on-Sapphire Bearings New Generation for Bipolar Femoral Endoprostheses
Lytvynov, L.A. / Rucki, M. / Mamalis, A.G. / Lavrynenko, S.N. | 2008
607
Machining Method of Small Optical Mirror for Medical ODV Using Ultraprecision Lathe
Katsuta, T. / Uno, Y. / Yokomizo, S. / Takeya, A. / Takiguchi, J.-I. / Hashizume, T. | 2008
611
Development of Trial Manufacturing Process for Co-Cr Alloy Stent with YAG Laser
Kubota, S. / Yokomizo, S. / Asahara, M. / Kishimoto, S. / Yamashita, S. | 2008
616
Precise bipolar micro dissection means of an adjustable virtual loop
Wenzel, R. / Wulfsberg, J.P. | 2008
620
Study of blood flow behaviour in microchannels
Marson, S. / Benade, M. / Attia, U.M. / Allen, D.M. / Kerhoasi, M.K. / Hedge, J. / Morganii, S. / Larcombeii, L. / Alcock, J.R. | 2008
624
Micro structure surface functionalisation for tissue engineering applications - a systematic integrated approach towards high volume production
Brecher, C. / Wenzel, C. / Klar, R. / Pretzsch, F. | 2008
P3.11 A Design of Shutter Device for Small Camera Module
Seo, J.M. / Choi, J.H. / Rhyu, S.H. | 2008
P5.4 A High-speed Air Spindle employing Active Aerodynamic Bearing System
Mizumoto, H. / Tanaka / Yabuta, Y. / Arii, S. / Tazoe, Y. / Yokouchi, Y. | 2008
P3.21 A generic modelling approach for studying the contact mechanism and dynamic behavior of bimodal standing wave piezomotors
Houben, M. / Van de Vijver, W. / Al-Bender, F. / Reynaerts, D. | 2008
P4.7 Accuracy of surface roughness parameters determination
Kumermanis, M. / Rudzitis, J. | 2008
P5.10 A new concept for direct precision alignment of a workpiece
Qian, J. / Sempels, S. / Balabanava, N. / Reynaerts, D. | 2008
Academic Responsibility and Our Future
Ernst, R. | 2008
O3.1 Session Keynote: Test Results of an Adaptive Deformable Mirror for Future Large Telescopes
Hamelinck, R.F.M.M. / Rosielle, P.C.J.N. / Steinbuch, M. / Ellenbroek, R.M.L. / Verhaegen, M. / Doelman, N. | 2008
O3.2 Actuator for Contactless Transport and Positioning of Large Flat Substrates
Wesselingh, J. / van Ostayen, R.A.J. / Spronck, J.W. / Schmidt, R.H.M. / van Eijk, J. | 2008
P5.23 Dual Plane Balancing in Ultraprecision Diamond Machining
Brinksmeier, E. / Krause, A. | 2008
P4.24 Measurement of Spherical Head of Hip Joint Endoprosthesis with Acceptable Tolerance of Form in 1 μm
Mamalis, A.G. / Rucki, M. / Lavrynenko, S.N. | 2008
P4.12 Characterisation and error correction of 2D low-cost optoelectronic sensors and application to a six degree-of-freedom probe
Yague, J.A. / Albajez, J.A. / Lope, M.A. / Velazquez, J. / Aguilar, J.J. | 2008
P5.16 Shack-Hartmann Profilometer
Floriot, J. / Levecq, X. / Bucourt, S. / Thomasset, M. / Polack, F. / Idir, M. / Mercere, P. / Moreno, T. / Brochet, S. | 2008
P2.1 Investigation into High Removal Rate Ultra-Smoothness Grinding of Cemented Carbide using a New Vertical Grinder
Sakamoto, R. / Yasui, H. / Yoshimura, T. / Tanaka, Y. | 2008
P3.4 Mechatronic reamer with wireless control
Kuhfuss, B. / Allers, S. | 2008
P4.26 Introduction of Inspection Method of Gear Checker Using Virtual Gear Checker (VGC)
Takeoka, F. / Komori, M. / Takahashi, M. / Kubo, A. / Takatsuji, T. / Osawa, S. / Sato, O. | 2008
P5.7 High speed and quick response precise linear stage system using V-shape transducer ultrasonic motors
Asumi, K. / Fujimura, T. / Kurosawa, M.K. | 2008
P5.33 Design, Dynamic Modeling, Simulation and Pressure Feedback Control of a Hydrostatic Thrust Bearing
Rothenhofer, G. / Slocum, A. / Yui, A. | 2008
O4.4 Thermal Property Measurement: A New Feature on the Multi-Functional Tribological Probe Microscope
Cai, Z. / Yue, Z. / Liu, X. | 2008
P5.5 A Study on the High Aspect Ratio Pattern Roll Mold Fabricaion Technologies
Choi, D.S. / Je, T.J. / Yoo, Y.E. / Yoon, J.S. | 2008
O4.3 Investigation of Mechanical Properties of Thin Films Based on SPM and MEMS Device
Gao, S. / Herrmann, K. / Li, Z. | 2008
O4.5 Development of Quality Assurance for Micro Gear Wheels by Dimensional Metrology and Functional Testing
Albers, A. / Fleischer, J. / Ellmer, C. / Hauser, S. / Viering, B. / Buchholz, I. / Schlipf, M. | 2008
P3.14 A coarse/fine microactuator for three-dimensional positioning
Torii, A. / Kusunoki, S. / Ueda, A. / Doki, K. | 2008
P5.8 Vibration Reduction in nano-range in Precision Grinding Machine
Hoffmeister, H.-W. / Loeis, K. | 2008
P2.2 Development of a Wheel-Approach-Control System for a Surface-Grinding Machine using an Accelerometer
Okuyama, S. / Yui, A. / Kitajima, T. | 2008
P5.25 Active compensation of dynamic stability for an air bearing stage with active magnetic preloads
Ro, S.-K. / Kim, S. / Kwak, Y. / Park, C.-H. | 2008
P4.25 Pitch measurement of a new multi-ball artifact
Kondo, Y. / Sasajima, K. / Osawa, S. / Sato, O. / Komori, M. | 2008
P5.6 Integration of cutting tool dynamics with variable feedrate NURBS interpolators
Sekar, M. / Lee, D.-M. / Yang, S.-H. | 2008
O2.3 High-Efficiency Mirror Grinding Using Ultrafine-Crystalline CBN Grains
Ichida, Y. / Sato, R. / Ueno, H. / Nagao, S. | 2008
P3.22 Exploring the spectrum of the acoustic emission signal during microdrilling
O Donnell, G. / Kelly, K. / Geraghty, D. | 2008
P5.37 Resolution Considerations in Interferometer Based Ultra-Precision Machines
Overcash, J.L. / Stroup, C.G. / Hocken, R.J. | 2008
O5.3 Experimental Evaluation of a Dual-Axis Ultra-Precision Positioning Stage for Probe Studies
Buice, E.S. / Smith, S.T. / Hocken, R.J. | 2008
P5.17 High-speed Air Bearing Spindles for Using Ultra-small Cutting Tools in Micro-milling and Micro-grinding Processes
Haberland, R. / Aurich, J.C. / Schueler, G.M. / Engmann, J. / Schmidt, K.H. | 2008
O1.3 Optimised Piezoelectric Energy Scavengers for Elder Care
Benasciutti, D. / Brusa, E. / Moro, L. / Zelenika, S. | 2008
O5.6 Nforcer Technology Single-Motor Solution for 2D Motion Control
Angelis, G. / Rankers, A. | 2008
Modeling Of Surface Finish And Tool Wear in Microturning - Ann Approach
kumar, P.R. / Gowri, S. | 2008
P5.2 Active control of a machine tool cooling system
Barta, P. / Hornych, J. / Horejs, O. | 2008
P5.30 An innovative tool-monitoring system (MICROM) to detect drastic tool failures in micro-milling
Gandarias, E. / Ivanov, A. / Gallego, I. / Popov, K. / Aristimuno, P. / Aperribay, J. / Arrazola, P.J. | 2008
O2.4 Meso-Scale Kinematical Simulation of the Rotational Grinding Process
Ahearne, E. / Byrne, G. | 2008
O4.2 Optimized Probing System for SPM Applications
Koops, K.R. / van Veghel, M.G.A. | 2008
O4.1 Session Keynote: Size and Shape Measurements of Nanoparticles
Boyd, R. / Pichaimuthu, S.K. / Cuenat, A. | 2008
O1.1 Microtarget Requirements for HiPER
Tolley, M. / Dunne, M. | 2008
P4.1 Annealing time dependence of Au agglomerates observed in the out-diffusion process of supersaturated hightemperature substitutional Au in Si
Morooka, M. | 2008
P5.28 Machine Tool for Combined Micro Milling and Laser Ablation Processes
Essmann, J. / Uhlmann, E. / Wissner, R. / Pauli, A. | 2008
O5.2 Dynamic Error Budgeting - An Integral System Design Approach for High Precision Machines
Jabben, L. / Trumper, D.L. / van Eijk, J. | 2008
O2.2 High Accuracy and High Efficiency Form Compensation System in Aspherical Grinding
Suzuki, H. / Roblee, J. / Miyashita, T. / Moriwaki, T. | 2008
O5.4 Vertical Nano-Positioning System for Precision Machine
Yoshioka, H. / Takahashi, M. / Shinno, H. | 2008
P2.5 High-Accuracy Polishing of a Glass Wafer with a Soft Chuck
Une, A. / Yoshitomi, K. / Mochida, M. | 2008
P4.27 Development of the coaxial optical system for ultra compact high performance angular sensor
Musha, T. / Oka, T. / Nakajima, H. / Nakashima, T. / Okamuro, T. / Omura, Y. / Satone, T. | 2008
P4.19 Analysis of Optical Surface Characteristics of Artifact Applied to Non-Contact Probe CMM
Wago, T. / Iyama, T. | 2008
P5.19 Vacuum-Compatible Rotation Stage using Air Bearings for Electron Beam Mastering
Khim, G. / Park, C.H. | 2008
P5.11 Design and development of a linear motor driven ultraprecision machine tool with vibration suppression mechanism
Wang, Z.G. / Nakamoto, K. / Sugai, M. / Matsumoto, S. / Cheng, X. / Yamazaki, K. | 2008
P3.7 3 DOF Scanning Probe using Parallel Link Mechanism
Harada, T. / Adachi, N. | 2008
O3.5 A Flexure-based Planar Parallel Nanopositioner with Partially Decoupled Kinematic Architecture
Yang, G.L. / Lin, W. / Teo, T.J. / Kiew, C.M. / Ho, H.L. | 2008
P2.22 Development of an Abrasive-Free CMP Method of Cu Utilizing Vacuum Ultra-Violet Light
Kirino, O. / Enomoto, T. | 2008
P5.13 Experimental analysis and simulation of nonlinear microscopic behavior of preloaded ball screw for ultraprecision positioning
Fukada, S. / Fang, B. / Shigeno, A. | 2008
O1.2 Fielding the NIF Cryogenic Ignition Target
Malsbury, T. / Haid, B. / Gibson, C. / Atkinson, D. / Skulina, K. / Klingmann, J. / Atherton, J. / Mapoles, E. / Kozioziemski, B. / Dzenitis, E. | 2008
O1.5 Amorphous Diamond as Thermionic Energy Converters
Sung, J.C. / Hsiao, T.J. / Kan, M.C. / Sung, M. | 2008
P3.6 Dynamic Modelling and Testing of Air Bearing Interfaces
Lim, C.W. / Shore, P. / Morantz, P. / Lin, W. / Wills-Moren, W.J. | 2008
P4.2 Prediction of Functionality and Long-term Performance of Microgears
Albers, A. / Fleischer, J. / Lanza, G. / Deigendesch, T. / Enkler, H.-G. / Leslabay, P. / Oerding, J. / Viering, B. / Schlipf, M. | 2008
P4.4 Application of statistical resampling techniques on CMM point clouds
Fleischer, J. / Lanza, G. / Peters, J. / Viering, B. | 2008
P4.10 Development of residual layer thickness measurement system for nano-imprint lithography based on near-field optics
Takahashi, S. / Nagao, T. / Minamiguchi, S. / Usuki, S. / Takamasu, K. | 2008
P5.15 Development of a dynamic high precision compact milling machine
Klar, R. / Brecher, C. / Wenzel, C. | 2008
P4.17 An Error Correction Approach to Lateral Force Calibration by Wedges
Chetwynd, D.G. / Dejima, S. | 2008
P3.3 Robust design of the high power & high precision ultrasonic motor in the vacuum environment
Kim, W.-S. / Yun, C.-H. / Lee, S.-K. | 2008
P4.11 Virtual instruments for surface topography measurements
van Veghel, M.G.A. / Koops, K.R. | 2008
P2.3 An Investigation on In-Process Dressing Method of Super Abrasive Wheel for Newly Developed Ultra-Smoothness Grinding Method
Tanaka, Y. / Yasui, H. / Matsuda, K. / Sakamoto, R. | 2008
P5.29 Direct dynamic calibration of dynamometers for micro milling applications
Bissacco, G. / Bau, A. / Hansen, H.N. | 2008
P3.8 Optimized Design of Active Aerostatic Thrust Bearings for High Precision Positioning and Disturbance Rejection
Aguirre, G. / Al-Bender, F. / Van Brussel, H. | 2008
O5.5 Acceleration Feedback for Direct Drives by Using High-Resolution Optical Encoders
Kummetz, J. / Hermann, M. / Sandig, K. / Holzapfel, W. | 2008
P5.20 Outgassing effects during the movement of high-vacuum compatible gas-bearing pads
Schenk, C. / Bauer, R. / Risse, S. / Schubert, G. / Kirschstein, U.-C. | 2008
O3.3 Planar Motor Concept for Positioning with Nanometer Position Uncertainty
Hesse, S. / Schaffel, C. / Katzschmann, M. / Maass, T. / Mohr, H.-U. | 2008
P5.39 The Next Spindle Generation for Ultra-High Precision Cutting
Walter, R. | 2008
P3.1 Design and Manufacturing of small actuator structure that have outer diameter below 4 mm
Kim, J.-H. / Chung, I.S. / Rhyu, S.-H. | 2008
P4.21 Multi-axis angle sensor based on laser autocollimation
Saito, Y. / Arai, Y. / Gao, W. | 2008
P2.4 A Study on Nano-precision Combined Process of ELID Grinding and Magnetic Assisted Polishing on Optics Glass Material
Lee, Y.-C. / Kwak, T.-S. / Kim, G.-N. / Ohmori, H. | 2008
Parametric Optimization Of Micro Wedm Using Artificial Neural Network Model
Vijayaraja, R. / Gowri, S. | 2008
P4.18 Investigation and results on a new out-of-squareness calibration method for an ultra high precision measuring machine
Larsonnier, F. / Ducourtieux, S. / David, J. | 2008
P2.15 Application of High Precision Machining for Glass Lens Pressing Molds using ELID Grinding
Kwak, T. / Kim, K. / Ohmori, H. / Yoshida, K. / Seo, W. | 2008
P5.34 Chatter stability evaluation of a miniaturized machine tool using receptance coupling method
Kweon, S.-H. / Lee, S.-M. / Lee, J.-H. / Yang, S.-H. | 2008
O2.5 Precision Grinding with CVD Diamond Coated Grinding Tools
Gabler, J. / Schafer, L. / Pleger, S. | 2008
P3.13 Integral Design for a High Precision Rotary-Axis System
Brecher, C. / Utsch, P. | 2008
P3.5 Linear ball bearings as a safety clutch for micro-tactile sensors
Meess, R. / Butefisch, S. / Loffler, F. | 2008
P4.20 Novel Method for Measuring Decentration of Aspherical Optics
Negishi, M. / Maruyama, T. / Iino, M. | 2008
P5.36 Optimising Form Accuracy in Machining Arrays of Optically Functional Surfaces
Brecher, C. / Merz, M. / Niehaus, F. / Wenzel, C. | 2008
P4.22 Realized positioning accuracy in pick and place machines with one single camera for board and component alignment
Verstegen, P.P.H. / Goede, P.A.H. / Spronck, J.W. / van Gastel, J.M.M. / van Eijk, J. | 2008
P3.10 Hybrid Position/Force Control of a Flexural-Based Electromagnetic Linear Actuator
Teo, T.J. / Kiew, C.M. / Yang, G.L. / Chen, I.-M. / Lin, W. | 2008
P3.12 Machine Tools with an Enhanced Ball Screw Drive in Vertical Axis for Shaping of Micro Textures
Kono, D. / Fujita, T. / Matsubara, A. / Yamaji, I. | 2008
P5.12 Investigation of Cogging Effect in Bisymmetric Dual Iron Core Linear Motor Stage
Oh, J.S. / Park, C.H. | 2008
P2.10 Development of Characteristic Topographical Surface Parameters for Engineered Diamond Wheels for Deterministic Grinding Processes
Rickens, K. / Riemer, O. / Brinksmeier, E. | 2008
P4.13 An Instrument for Three-Dimensional Edge Profile Measurement of Micro-Cutting Tools
Asai, T. / Arai, Y. / Cui, Y. / Gao, W. | 2008
O1.4 Vibration Power Generator for Aeronautics Applications
Hadas, Z. / Ondrusek, C. / Singule, V. / Kluge, M. | 2008
P5.9 Design of Multi-scale Alignment and Positioning System
Ozturk, O. / Fesperman, R.R. / Hocken, R.J. | 2008
P5.26 Further development of the nanometer comparator for straightness measurements at the nanometer level
Flugge, J. / Koning, R. / Wiegmann, A. / Weichert, C. / Schulz, M. / Elster, C. / Hassler-Grohne, W. / Bosse, H. / Geckeler, R.D. | 2008
P4.3 Morphological Component Analysis based Detection of Transient Behaviour in Environmental Vibration for the Watt Balance
Zeng, W. / Jiang, X. / Scott, P. / Blunt, L. | 2008
P2.11 Development of the micro-texture to the CVT pulley's sheave surface for generated high friction coefficient
Segawa, T. / Ito, Y. / Katou, Y. / Yamazaki, M. / Yoshida, M. / Matsubara, M. | 2008
Challenges and Innovations in the High Precision Engineering of Flat Panel Displays
Kim, Y.D. | 2008
P2.9 An Experimental Investigation on the Effect of Passivants for Abrasive-Free Polishing of Copper Film on Wafers
Tsai, J.-C. / Lin, W.-C. | 2008
P5.14 Development of a force controlled polishing tool
Brecher, C. / Wenzel, C. / Tuecks, R. | 2008
P5.24 In-cavity pressure and injection time measurements during the micro injection moulding process
Tosello, G. / Schoth, A. / Hansen, H.N. | 2008
P2.19 An Experimental Approach for Grain Wear for Improving Kinematic-Geometrical Simulation
Wegener, K. / Vargas, G.E. / Wunder, S. / Kuster, F. / Pinto, F.W. | 2008
P3.23 Verification of Input to Output ratio of a flexure based Nanoconverter
Japichino, E. / Stampanoni, M. / Pfeiffer, F. / Frommherz, U. / Thermer, R. | 2008
P5.22 Application of a Kalman Filter for Nano-Precision Air Gap Control of Electromagnets
Volkert, R. / Chilian, A. / Bertram, T. | 2008
P5.3 Comparison of reversal and multiprobe error separation
Marsh, E.R. / Arneson, D.A. / Martin, D.L. | 2008
P4.9 A micro-SPM (scanning probe microscope) capable of operation with exchangeable cantilevers
Gao, S. / Li, Z. / Herrmann, K. | 2008
P2.13 Dicing Process Optimization for Sapphire and Altic
Wu, K.-H. / Cvetkovic, S. / Gatzen, H.H. | 2008
P5.35 Microstructuring of Free-Form Surfaces by the Use of a Hybrid Fast-Tool-Servo System
Brecher, C. / Merz, M. / Niehaus, F. / Wenzel, C. | 2008
Feynman's Challenge: Building Things From Atoms - One by One
Teague, E.C. | 2008
Online Monitoring Of Microturning Process Through Acoustic Emission Signals
Balan, A.S.S. / Gowri, S. | 2008
O2.1 Session Keynote: Precision Machines and Processes for Fine Abrasives Machining of Hard and Brittle Materials
Hoffmeister, H.-W. / Hlavac, M. / Hahmann, W.-C. | 2008
O3.4 Effect of Miniaturization of Magnetic Bearing Spindles for Micro-milling on Actuation and Sensing Bandwidths
Blom, R.S. / Kimman, M.H. / Langen, H.H. / Van den Hof, P.M.J. / Schmidt, R.H.M. | 2008
P2.8 Effects of Material Properties on Ultra-precision Grinding of Lithium Niobate
Nakamura, M. / Sumomogi, T. / Yoshida, M. | 2008
P3.19 Generation of Accurate Translational Motion for Testing Inertial Sensors
Spiewak, S. / Ludwick, S. / Hauer, G. / Mozaryn, J. | 2008
P5.27 High-performance amplifier for stick-slip piezoelectric motors
Montu, G. / Dozio, G. / Mrad, R. / Balemi, S. | 2008

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