Proceedings of the 9th international conference of the European Society for Precision Engineering and Nanotechnology : June 2nd - June 5th 2009, San Sebastian, Spain / ed.: H. Van Brussel ... ; Vol. 2 (English)

International conference of the European Society for Precision Engineering and Nanotechnology ; 9; 2009; San Sebastian
Euspen , Bedford; 2009
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  • Title:
    Proceedings of the 9th international conference of the European Society for Precision Engineering and Nanotechnology : June 2nd - June 5th 2009, San Sebastian, Spain / ed.: H. Van Brussel ... ; Vol. 2
  • Contributors:
  • Conference:
    International conference of the European Society for Precision Engineering and Nanotechnology ; 9; 2009; San Sebastian
    EUSPEN international conference ; 9; 2009; San Sebastian
  • Publisher:
    Euspen
  • Place of publication:
    Bedford
  • Year of publication:
    2009
  • Size:
    564 S.
  • Remarks:
    Ill., graph. Darst
  • ISBN:
  • Type of media:
    Conference Proceedings
  • Type of material:
    Print
  • Language:
    English
  • Keywords:
  • Classification:
    BKL:    52.88 Feinwerktechnik, Mechatronik / 50.94 Mikrosystemtechnik, Nanotechnologie

Table of contents conference proceedings

The table of contents of the conference proceedings is generated automatically, so it can be incomplete, although all articles are available in the TIB.

2
Electron Microscopy - Challenges for Imaging at Atomic Resolution
de Jong, A.F. / European Society for Precision Engineering and Nanotechnology | 2009
2
Rapid Fabrication of Precision Surfaces - A New Paradigm
Subrahmanyan, P. / European Society for Precision Engineering and Nanotechnology | 2009
3
Development and Present Status of Ultra-Precision Machining in Japan
Tanaka, K. / European Society for Precision Engineering and Nanotechnology | 2009
6
Machining of Nonconductive ZrO~2 Ceramics with Micro-EDM
Zeidler, H. / Schubert, A. / European Society for Precision Engineering and Nanotechnology | 2009
10
Apparatus for Continuous Growth of Vertically Aligned Carbon Nanotubes
Figueredo, S. / Hart, A. / Slocum, A. / Wardle, B. / European Society for Precision Engineering and Nanotechnology | 2009
11
Future Challenges of Optomechanics in the Medical Industry
Nahm, W. / European Society for Precision Engineering and Nanotechnology | 2009
14
Design and Production Technique of Painless Microneedle for Blood Extraction System
Tsuchiya, K. / Inoue, T. / Isobata, K. / Sato, M. / Uetsuji, Y. / Nakamachi, E. / Kajiwara, K. / Kimura, M. / European Society for Precision Engineering and Nanotechnology | 2009
17
Scaling in Machining of Optics with Reflective to Diffractive Function
Flucke, C. / Osmer, J. / Lunemann, B. / Schonemann, L. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
18
Finishing of Hardened Steel by Fine Grinding with Lapping Kinematics Using Foil Tools
Hoffmeister, H.-W. / Hahmann, W.-C. / European Society for Precision Engineering and Nanotechnology | 2009
21
Guideline for Ultra Smooth Finishing of Diamond Based on Molecular Dynamics Analysis
Tanaka, H. / Shimada, S. / European Society for Precision Engineering and Nanotechnology | 2009
22
Physical Masking Process for Integrating Micro Metallic Structures on Polymer Substrate
Islam, A. / Hansen, H.N. / Rindorf, L. / European Society for Precision Engineering and Nanotechnology | 2009
25
Precision Micromachining of Carbon Nanotubes Composites
Jasinevicius, R.G. / Duduch, J.G. / Porto, A.J.V. / Andreeta, M.R.B. / Hernandes, A.C. / European Society for Precision Engineering and Nanotechnology | 2009
26
Square Foot Manufacturing - A Progress Report
Kohrs, P. / Wulfsberg, J.P. / European Society for Precision Engineering and Nanotechnology | 2009
29
Fabrication and Measurement Development for Precise Test Masses for the MICROSCOPE Space Project
Hagedorn, D. / Heyne, H.-P. / Reimann, H. / Neugebauer, M. / Gruner, S. / Loffler, F. / European Society for Precision Engineering and Nanotechnology | 2009
30
Two-Stage Figuring Using Numerically Controlled Local Wet Etching for High-Efficiency Fabrication of Plano-Aspherical Mirror
Yamamua, K. / Nagano, M. / Takai, H. / Yamazaki, D. / Maruyama, R. / Soyama, K. / European Society for Precision Engineering and Nanotechnology | 2009
33
Reducing Diamond Tool Wear in Oxygen-free Copper Precision Cutting using Synthetic Tool Materials and a N~2 Atmosphere
Kaneeda, T. / Nakayama, T. / Anthony, L. / European Society for Precision Engineering and Nanotechnology | 2009
34
A New Multisegmented Magnetic Array for a Rotary-type Voice Coil Motor
Choi, Y.-M. / Ahn, D. / Chun, S.-J. / Sung, Y.-W. / Lee, M.G. / Jeong, J. / European Society for Precision Engineering and Nanotechnology | 2009
37
Critical Parameters in Ultrasonic Assisted Diamond Turning of Hardened Steel Alloys
Klocke, F. / Dambon, O. / Bulla, B. / Heselhaus, M. / European Society for Precision Engineering and Nanotechnology | 2009
38
Micro Structuring of Large Surfaces by Means of Step and Repeat Hot Embossing
Brecher, C. / Baum, C. / Schauerte, G. / Pretzsch, F. / Tucks, R. / European Society for Precision Engineering and Nanotechnology | 2009
41
3D Microfabrication of Silver Nanoparticle Composite with Mesoporous Structure
Hayashi, T. / Takaya, Y. / Shirai, K. / European Society for Precision Engineering and Nanotechnology | 2009
42
Tool Setting Error Compensation for 5-Axis Control Ultraprecision Machining
Takeuchi, Y. / Sono, M. / Ishida, T. / Nakamoto, K. / European Society for Precision Engineering and Nanotechnology | 2009
45
Robotic Assembly Process of Automotive Engine Parts
Park, K.T. / Park, C.H. / Je, T.J. / European Society for Precision Engineering and Nanotechnology | 2009
46
Fabrication of Metallic Nanoparticles through Waste of Micro-EDM
Jalali, M. / Terpstra, A.G. / Wuthrich, R. / European Society for Precision Engineering and Nanotechnology | 2009
49
Deformation of Metal Inserts in Micro Injection Moulding
Michaeli, W. / Kamps, T. / European Society for Precision Engineering and Nanotechnology | 2009
50
Transmitted Diffraction Grating Utilizing High Diffraction Order for a Spectrometer
Woo, D.-K. / Hane, K. / Lee, S.-K. / European Society for Precision Engineering and Nanotechnology | 2009
53
Bump Patterning for NCA (Non Conductive Adhesive) Bonding
Lee, C. / Ha, T. / Song, J. / European Society for Precision Engineering and Nanotechnology | 2009
54
Aluminum Thermal Motor for High Bandwidth Positioning Stages
Paalvast, S.L. / Pham, H.T.M. / Sarro, P.M. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
57
FEM Simulation on Micro-Cutting Planarization Process of Metal Bump and Resin for LSI Chip Stacking/Bonding
Sasahara, H. / Iwashita, R. / European Society for Precision Engineering and Nanotechnology | 2009
58
Manufacturing of Micro Components by Means of Plunge Rotary Swaging
Kuhfuss, B. / Moumi, E. / European Society for Precision Engineering and Nanotechnology | 2009
61
Roll-to-Flat Thermal Imprint System Development for Large Area Micro Pattern Replication
Lan, S. / Lee, T.-J. / Lee, H.-J. / Lee, N.-K. / Lee, S.-H. / Ni, J. / Lee, M.G. / European Society for Precision Engineering and Nanotechnology | 2009
62
Micro-cutting Characteristics of Micro-machine Tools
Kimura, H. / Mitsui, K. / Kitahara, T. / European Society for Precision Engineering and Nanotechnology | 2009
65
Influence of Included Carbide Particles on Ultra-Precision Cutting Characteristics of Steels with Coated-Cemented-Carbide Tool
Shinozaki, A. / Yasui, H. / European Society for Precision Engineering and Nanotechnology | 2009
66
Application of Fiber Lasers in Material Processing Exemplarily Demonstrated for the Production of Metal Micro-Sieves
Scholz, T. / Baumeister, M. / Dickmann, K. / European Society for Precision Engineering and Nanotechnology | 2009
69
Tribological Analysis of Micro Milled Surfaces for Micro Forming Tools
Brinksmeier, E. / Riemer, O. / Twardy, S. / European Society for Precision Engineering and Nanotechnology | 2009
70
Reactive Plasma Jet Machining for Free Form Surface Correction
Arnold, T. / Bohm, G. / European Society for Precision Engineering and Nanotechnology | 2009
73
Metrology Challenges for High Energy Density Science Target Manufacture
Seugling, R.M. / Bono, M.J. / Davis, P. / European Society for Precision Engineering and Nanotechnology | 2009
74
New Mechanical Pretreatment Process to Prepare Aluminum Crankcases for Thermal Spraying
Hoffmeister, H.-W. / Schnell, C. / European Society for Precision Engineering and Nanotechnology | 2009
77
Study on the Squeezing Effect on Surface Generation in Single Point Diamond Turning with Finite Element Approach
Wang, H. / To, S. / Cheung, C.F. / Lee, W.B. / European Society for Precision Engineering and Nanotechnology | 2009
78
New Coating Strategy for Hot Embossing of Glass
Schubert, A. / Edelmann, J. / European Society for Precision Engineering and Nanotechnology | 2009
81
FIB Fabrication of Three Dimensional Structured Surfaces
Sun, J. / Hrncir, T. / Chang, W. / Luo, X. / European Society for Precision Engineering and Nanotechnology | 2009
82
Micro Milling - Investigations on Process Structure Interactions
Uhlmann, E. / Wagner, U.v. / Mahr, F. / Shi, Y. / European Society for Precision Engineering and Nanotechnology | 2009
85
Influence of Parallel Step Feed on Surface Roughness in New Ultra-Smoothness Grinding Method
Sakamoto, R. / Yasui, H. / Tanaka, Y. / European Society for Precision Engineering and Nanotechnology | 2009
86
Precision Hermetically Sealed Display Encasements for Historic Documents
Durand, K. / Zurovcik, D. / Slocum, A. / European Society for Precision Engineering and Nanotechnology | 2009
89
Ultra-Precision Machining of Tungsten-Based Alloys Using the Cutting-Burnishing Method with Alumina Ceramic Tools
Nishioka, K. / Sugita, N. / Mitsuishi, M. / Watanabe, T. / Yamasaki, H. / European Society for Precision Engineering and Nanotechnology | 2009
90
Machine-Integrated Measurement of Specular Free-Formed Surfaces Using Phase-Measuring Deflectometry
Richter, C. / Kurz, M. / Knauer, M.C. / Faber, C. / Olesch, E. / Hausler, G. / Oberschmidt, D. / Essmann, J. / Uhlmann, E. / European Society for Precision Engineering and Nanotechnology | 2009
93
Comparison of Diamond Drilling and Laser Drilling Techniques in Glass Drilling for Fabrication of MEMS
Chang, W. / Sun, J. / Luo, X. / European Society for Precision Engineering and Nanotechnology | 2009
94
Verification of the Process - and Wear Behavior of CVD Diamond Micro Grinding Wheels by Grinding Hard and Brittle Materials
Hoffmeister, H.-W. / Wittmer, R. / European Society for Precision Engineering and Nanotechnology | 2009
97
Efficient Technique for 3D Micro Structuring of Carbide and Brittle Materials with Diamond Micro-shaft Grinding Tools
Engmann, J. / Schueler, G.M. / Haberland, R. / Walk, M. / Aurich, J.C. / European Society for Precision Engineering and Nanotechnology | 2009
98
LNE Ultra Precision Coordinate Measuring Machine: Calibration Results for the XY Metrology Loop
Ducourtieux, S. / Larsonnier, F. / Lahousse, L. / Leleu, S. / David, J. / Vailleau, G.P. / European Society for Precision Engineering and Nanotechnology | 2009
101
Analysis of an Overlay Error in 3D Microfabrication Technology using Surface Activated Bonding
Yamada, T. / Takahashi, M. / Mitsui, K. / European Society for Precision Engineering and Nanotechnology | 2009
102
Implications of Forces Observed During Sinking EDM on Precision Manufacturing
Klocke, F. / Garzon, M. / Kamenzky, S. / European Society for Precision Engineering and Nanotechnology | 2009
105
Micro Electrical Discharge Machining Using Carbon Fibres as Tool Electrodes
Kudla, L. / European Society for Precision Engineering and Nanotechnology | 2009
106
Multi-functional Surface Design Based on Spatial Spectral Composition of the Structure
Moronuki, N. / Uchiyama, S. / Kaneko, A. / Suzuki, Y. / European Society for Precision Engineering and Nanotechnology | 2009
109
HYDROMEL - A European Project for Future Hybrid Assembly
Steinecker, A. / European Society for Precision Engineering and Nanotechnology | 2009
110
`Thermal Stepper': A High Stability Positioning System for Micro Adjustment
van Schieveen, J.P. / Spronck, J.W. / Nihtianov, S.N. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
113
Study of a Vibration-Assisted Punch Press Machine for Thin Sheet Metal
Mukose, R. / Mitsui, K. / European Society for Precision Engineering and Nanotechnology | 2009
114
Machining of Micro-Features on Hard Metals by μEDM
Qian, J. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
117
Fundamental Study on Releasability of Resin from EDMed Surface
Kitada, R. / Okada, A. / Uno, Y. / Yang, Y. / Hioki, H. / European Society for Precision Engineering and Nanotechnology | 2009
118
An Adhesive Based Chuck for Precision Machining
Balabanava, N. / Sempels, S. / Qian, J. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
122
Hot Molding Process Evaluation of Microstructures Generated by Micro Machining and Micro Indentations
Dias, P.N.P. / Jasinevicius, R.G. / European Society for Precision Engineering and Nanotechnology | 2009
122
Precision Hexapod-A Design Work for Specifications
Olea, G. / Staud, J. / Schneider, M. / Amelung, L. / Nicklin, C. / Arnold, T. / Burt, M. / European Society for Precision Engineering and Nanotechnology | 2009
126
The Influence of Crystallographic Orientation upon Material Removal Modes in Single Point Diamond Turning of Silicon
Jasinevicius, R.G. / Pizani, P.S. / European Society for Precision Engineering and Nanotechnology | 2009
126
Active Shape Control of Transmissive Optical Elements
Valentin, C.L. / Vermeulen, J.P.M. / Cadee, T. / Rixen, D.J. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
130
Lapping of EDM Processed Tool Steel Surfaces Using Three-dimensional Figure-8 Tool Motion
Mizuno, M. / Iyam, T. / Nishikawa, N. / Mifune, H. / European Society for Precision Engineering and Nanotechnology | 2009
130
Automated Finishing of Free-Formed Steel Moulds
Klocke, F. / Dambon, O. / Zunke, R. / Tuecks, R. / Telgen, T. / European Society for Precision Engineering and Nanotechnology | 2009
134
Six-Axis Compliant Manipulator for Laser Assembly
Brecher, C. / Pyschny, N. / de Souza, D.F. / European Society for Precision Engineering and Nanotechnology | 2009
134
A High Accuracy Ultrasonic System for Measurement of Air Temperature
Aldawi, F.J. / Longstaff, A.P. / Fletcher, S. / Pislaru, C. / Myers, A. / Briggs, J. / European Society for Precision Engineering and Nanotechnology | 2009
138
An Embedded Temperature Control System of PCR Microfluidic Chip Based On VxWorks
Chen, T. / Zhen, K. / Yao, L.-y. / Qi, H. / Wu, J. / Zuo, T. / European Society for Precision Engineering and Nanotechnology | 2009
138
Machining Performance of Electro-Chemical Discharge Machining by Forced Discharge Dispersion
Furutani, K. / Murase, Y. / Shintani, H. / Arakawa, S. / European Society for Precision Engineering and Nanotechnology | 2009
142
Modelling of Material Removal in Polishing Processes
Loresch, I. / Riemer, O. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
142
Functionalising of Textile Surfaces with a Combination of Laser Treatment and Sol-Gel Coating
Samm, K. / Kling, R. / Korger, M. / Tillmanns, A. / Janssen, E. / European Society for Precision Engineering and Nanotechnology | 2009
146
Ultraprecision Grinding of Tungsten Carbide Moulds for Hot Pressing Glasses
Meiners, K. / Rickens, K. / Riemer, O. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
146
Dressing of Micro Profiles by Wire Electro Discharge Dressing
Denkena, B. / de Leon, L. / Hahmann, D. / European Society for Precision Engineering and Nanotechnology | 2009
150
Development of Sensitive Skin Based on Distributed PCF-Bragg Grating Sensors
Yan, C. / Ferraris, E. / Van Gijseghem, T. / Dubruel, P. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
150
Subsurface Damage Analysis of Ultra-precise Ground Tungsten Carbide
Klocke, F. / Damon, O. / Hunten, M. / Bresseler, B. / European Society for Precision Engineering and Nanotechnology | 2009
154
Fabrication of Novel Designed AFM Probe Integrated with Microneedle for Cellular Function Analysis
Kato, N. / Sakai, T. / Shibata, T. / Kawashima, T. / Mineta, T. / Makino, E. / European Society for Precision Engineering and Nanotechnology | 2009
154
Tolerances in the Field of Micro Metal Injection Moulding
Salk, N. / Haack, J. / Imgrund, P. / European Society for Precision Engineering and Nanotechnology | 2009
158
Electro Less Deposition and Structuring of Silver Electrodes Inside Closed Micro Fluidic Channels
Heuck, F. / Sarro, P.M. / Slabbekoorn, J. / Akiyama, T. / deRooij, N.F. / Staufer, U. / European Society for Precision Engineering and Nanotechnology | 2009
159
Precision Machining with Abrasive Jets
Olsen, J. / European Society for Precision Engineering and Nanotechnology | 2009
162
Fabrication of AFM Probe Integrated with High-aspect-ratio Diamond Tip
Shibata, T. / Sutou, T. / Kawashima, T. / Nomura, M. / Mineta, T. / Makino, E. / European Society for Precision Engineering and Nanotechnology | 2009
164
Development and Performance Demonstration of the NANOMEFOS Non-contact Measurement Machine for Freeform Optics
Henselmans, R. / Cacace, L.A. / Kramer, G.F.I.J. / Rosielle, P.C.J.N. / Steinbuch, M. / European Society for Precision Engineering and Nanotechnology | 2009
167
Aspects of Tactile Probing on a Micro Scale
Bos, E.J.C. / Schellekens, P.H.J. / Dietzel, A.H. / European Society for Precision Engineering and Nanotechnology | 2009
168
Long Travel Advanced Nanopositiong Stage with Non-contact Magnetic Lead Screw and Co-plan Moving Stage with Independent Driving Mechanism
Chen, C.-J. / Chang, L.-C. / Wu, C.-L. / Wang, S.-H. / Yu, T.-C. / Ho, H.-C. / European Society for Precision Engineering and Nanotechnology | 2009
171
Experimental Verification of Super-resolution Microscopy Using Standing Evanescent Light with Image Retrieval
Takahashi, S. / Kudo, R. / Okada, S. / Usuki, S. / Takamasu, K. / European Society for Precision Engineering and Nanotechnology | 2009
172
Development of a New Micro-machining Center Concept with Integrated Metrology Modules
Buice, E.S. / Langen, H.H. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
175
Development of the New Spanish National Primary Pressure Standard
Eguia, J. / Herrero, A. / Calvo, R. / Ruiz, S. / Medina, M.N. / European Society for Precision Engineering and Nanotechnology | 2009
176
Design and Realization of a Long-stroke Translation Stage for Metrological AFM
Werner, C. / Rosielle, P.C.J.N. / Steinbuch, M. / European Society for Precision Engineering and Nanotechnology | 2009
179
``Macro Sensor'' - Palletizing on Submicron Level
Sterner, C. / Koch, R. / Djupsjobacka, A. / Dahlquist, H. / Nilsson, L.-E. / European Society for Precision Engineering and Nanotechnology | 2009
180
Theoretical Study on a Constant-Flow Hydrostatic Water Bearing for a Machine-Tool Table
Okuyama, S. / Yui, A. / Kitajima, T. / European Society for Precision Engineering and Nanotechnology | 2009
183
High Resolution Position Sensing using Laser Scan Metrology
Makinouchi, S. / Imai, T. / Watanabe, A. / Ohara, T. / Wakui, S. / European Society for Precision Engineering and Nanotechnology | 2009
184
Multichannel Adaptive Control for Active Vibration Reduction in Wood Milling Processes
Hoffmeister, H.-W. / Loeis, K. / Schuller, B.-C. / Suguino, M.V. / Stoeterau, R.L. / European Society for Precision Engineering and Nanotechnology | 2009
187
Interrelationship of Micro Dimensional Metrology and Micro Functional Testing for the Quality Assurance of Micro Gears
Lanza, G. / Albers, A. / Viering, B. / Becke, C. / European Society for Precision Engineering and Nanotechnology | 2009
188
Oscillation Polishing for Narrow and Long Materials
Une, A. / Yoshitomi, K. / Mochida, M. / Yoshida, M. / European Society for Precision Engineering and Nanotechnology | 2009
191
Proposal of a Vibrating Touch Probe for On-machine Measurement of Optical Elements
Mizumoto, H. / Yabuta, Y. / Arii, S. / Tazoe, Y. / European Society for Precision Engineering and Nanotechnology | 2009
192
PRIGO: Parallel Robotics Inspired Goniometer for Protein Crystallography
Glettig, W. / Henein, S. / Breguet, J.-M. / Schulze-Briese, C. / European Society for Precision Engineering and Nanotechnology | 2009
195
Mechatronic System for High-Precision Surface Structure Inspection Using Vision Method
Giesko, T. / European Society for Precision Engineering and Nanotechnology | 2009
196
Development of a Force Controlled Orbital Polishing Spindle
Brecher, C. / Wenzel, C. / Tuecks, R. / Zunke, R. / European Society for Precision Engineering and Nanotechnology | 2009
199
Experimental Determination of the Effective Contact Radius of Ruby Microspheres
Meess, R. / Dziomba, T. / Loffler, F. / European Society for Precision Engineering and Nanotechnology | 2009
200
Design of Water Driven Stage
Nakao, Y. / Kawakami, M. / European Society for Precision Engineering and Nanotechnology | 2009
203
Evaluation of Probing Errors Based on a Point Cloud Analysis in Coordinate Metrology
Lanza, G. / Peters, J. / European Society for Precision Engineering and Nanotechnology | 2009
204
Design of a 5-Axis Ultraprecision Micro Milling Machine (UltraMill) and its Key Enabling Technologies
Cheng, K. / Huo, D. / Wardle, F. / Nor, K.M. / European Society for Precision Engineering and Nanotechnology | 2009
207
Uncertainty Contribution of Different Phase Shifting Algorithms in Gauge Block Interferometric Calibration
Alvarez-Valado, V. / Gonzalez-Jorge, H. / Dorrio, B.V. / Rodriguez, F. / Valencia, J.L. / Rodriguez, J. / Yebra, F.J. / European Society for Precision Engineering and Nanotechnology | 2009
208
Ultraprecise 5-Axis Machining by Compact, Integral Design
Brecher, C. / Utsch, P. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology | 2009
211
Study of the Relation Between Cutting Tool Conditions and Machined Surfaces in Micro Square Endmilling
Li, P. / Oosterling, J.A.J. / Hoogstrate, A.M. / Langen, H.H. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
212
``iTool'' -Process and Design Considerations for Innovative Diamond Tool Making
Brecher, C. / Utsch, P. / Sobotka, A. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology | 2009
215
Development of a Measuring System for Micro Hole Accuracy Using an Optical Fiber Probe: Accuracy Evaluation
Murakami, H. / Katsuki, A. / Onikura, H. / Sajima, T. / Kondo, E. / European Society for Precision Engineering and Nanotechnology | 2009
216
Determination of Thermo-Mechanical State of a Cooled Ball Screw Feed Drive
Horejs, O. / Barta, P. / Hornych, J. / European Society for Precision Engineering and Nanotechnology | 2009
219
Software Datum Design for Straightness Profile Measurement Based on the Least Uncertainty Criterion
Okuyama, E. / European Society for Precision Engineering and Nanotechnology | 2009
220
Controller Strategies for an Ultra-high Precision Stage
Teo, C.S. / Smith, S.T. / Yang, H. / Hocken, R.J. / Buice, E.S. / Otten, D. / European Society for Precision Engineering and Nanotechnology | 2009
223
Measurement and Characterisation of Microstructures made by Cutting Processes
Bretschneider, M. / Kastner, M. / Reithmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
224
Characteristics of Interferometric Measuring System for Sub-Nanometer Positioning
Uchida, Y. / Iwata, M. / European Society for Precision Engineering and Nanotechnology | 2009
227
Design of a Thermally and Mechanically Stable Metrological Atomic Force Microscope at KuLeuven
Piot, J. / Qian, J. / Piree, H. / Kotte, G. / Van Haesendonck, C. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
228
Ultraprecision Machining System for Fabricating Nano-Devices
Takahashi, M. / Yoshioka, H. / Shinno, H. / European Society for Precision Engineering and Nanotechnology | 2009
231
An Automatic Interferometer for the Short and Long Gauge Blocks
Eom, T. / Kim, J. / Kim, J.-A. / Ryu, H.Y. / Kang, C.-S. / European Society for Precision Engineering and Nanotechnology | 2009
232
Application of a PID Controller for a Piezoelectric Tilt Stage
Pinheiro, J.A. / Duduch, J.G. / European Society for Precision Engineering and Nanotechnology | 2009
235
Multi-scale Optical Metrology for the Quality Control of Polymer Microfluidic Systems
Tosello, G. / Marinello, F. / Hansen, H.N. / European Society for Precision Engineering and Nanotechnology | 2009
236
Dressing Characteristics in Newly Developed In-process SADFC Dressing Method for Ultra-smoothness Grinding
Tanaka, Y. / Yasui, H. / Sakamoto, R. / European Society for Precision Engineering and Nanotechnology | 2009
239
Design and Characterization of the MIKES Metrology Atomic Force Microscope
Korpelainen, V. / Seppa, J. / Lassila, A. / European Society for Precision Engineering and Nanotechnology | 2009
240
An Adjustable Kinematic Coupling for Use in Machine Tools with a Tight Structural Loop
Rothenhofer, G. / Slocum, A. / Bosworth, W. / European Society for Precision Engineering and Nanotechnology | 2009
243
Traceability for Surface Roughness Measurements by Metrology AFM
Hemming, B. / Korpelainen, V. / Seppa, J. / Lassila, A. / European Society for Precision Engineering and Nanotechnology | 2009
244
Compensation Methods of Relative Position Errors Between Tool Tip and Workpiece by Using High Response Fine Motion Mechanism
Fujita, T. / Matsubara, A. / European Society for Precision Engineering and Nanotechnology | 2009
247
A Traceability Infrastructure for Three-Dimensional Surface Measurements at the National Physical Laboratory
Leach, R.K. / Giusca, C. / Naoi, K. / European Society for Precision Engineering and Nanotechnology | 2009
248
Development of a Linear-Motor-Driven Table Supported by Hydrostatic Water Bearings Test and Evaluation of Table Load Capacity and Static Stiffness
Yui, A. / Okuyama, S. / Kitajima, T. / Fujita, E. / Slocum, A.H. / Rothenhofer, G. / European Society for Precision Engineering and Nanotechnology | 2009
251
Influence of Pad Thickness on Ultra-Smoothness Polishing Characteristic of Aluminium Type of Magnetic Disk Substrate
Takagi, M. / Yasui, H. / Kusaba, K. / European Society for Precision Engineering and Nanotechnology | 2009
252
The Design of a High Speed Milling Spindle Using Active Magnetic Bearings; Rotor Shape Optimization
Kimman, M.H. / Langen, H.H. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
255
Development of a Measuring System for Shape and Dimension Determination of Micro-components
Goda, J. / Mitsui, K. / European Society for Precision Engineering and Nanotechnology | 2009
256
An Active Aerodynamic Bearing for Ultraprecision Machining
Mizumoto, H. / Yabuta, Y. / Arii, S. / Tazoe, Y. / Yokouchi, S. / European Society for Precision Engineering and Nanotechnology | 2009
259
Planarization of a Glass Surface with Patterned Electrodes
Kang, D. / Moon, W. / European Society for Precision Engineering and Nanotechnology | 2009
260
Generation of Accurate Periodic Motion for the Identification of Nonlinear Phenomena in MEMS Sensors
Spiewak, S. / Ludwick, S. / Selvakumar, A. / Doyle, M. / Hauer, G. / Lawrence, E. / European Society for Precision Engineering and Nanotechnology | 2009
263
Design of the LNE Metrological Atomic Force Microscope
Poyet, B. / Ducourtieux, S. / David, J. / Lahousse, L. / European Society for Precision Engineering and Nanotechnology | 2009
264
Recent Developments of the Flexure Stage Used for the LNE Watt Balance Experiment
Villar, F. / David, J. / Geneves, G. / European Society for Precision Engineering and Nanotechnology | 2009
267
Development of a Multifunctional Microelectromechanical Nano-Force Actuator for Calibration of the Spring Constant of an AFM Cantilever
Gao, S. / Zhang, Z.K. / Wu, Y. / Herrmann, K. / European Society for Precision Engineering and Nanotechnology | 2009
269
Image Guided Robotic Neurosurgery
McFarland, G. / European Society for Precision Engineering and Nanotechnology | 2009
271
Optical Characterization of Turned and Anodized Aluminium
Tabrizian, N. / Hansen, P.E. / Hansen, H.N. / European Society for Precision Engineering and Nanotechnology | 2009
273
Hydraulic Actuation in Miniature Medical Robots
Moers, A.J.M. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
275
Development of a 1 m Range Line Scale Calibration Facility
Koops, K.R. / Nieuwenkamp, J.W. / Kotte, G.J.W.L. / Heemskerk, M.A. / European Society for Precision Engineering and Nanotechnology | 2009
277
Micro Metal Injection Moulding (μ-MIM) for Medical Applications
Imgrund, P. / Haack, J. / Salk, N. / European Society for Precision Engineering and Nanotechnology | 2009
279
Complex Rough Surface Characterisation Using a Modified and Calibrated Optical Laser Triangulation System
Ang, K.C. / Wood, R.J.K. / Wang, L. / European Society for Precision Engineering and Nanotechnology | 2009
281
Adhesion of Authentic Suprastructures on Machined Surfaces of Titanium Alloy
Uhlmann, E. / Bruckner, P. / Stelzer, C. / Huynh, Q.U. / Hansen, U. / European Society for Precision Engineering and Nanotechnology | 2009
283
Thermal Characterisation of a 2D Grid Encoder
Aguilar, J.J. / Yague, J.A. / Valenzuela, M. / Brau, A. / European Society for Precision Engineering and Nanotechnology | 2009
285
Influence of Grinding Process on Performance of Ceramic Ophthalmic Scalpels
Linke, B. / Schlutter, D. / Wegner, H. / Klocke, F. / European Society for Precision Engineering and Nanotechnology | 2009
287
Analysis of Unbalances of Crank Shafts Using Geometric Data
Gillhaus, R. / Kastner, M. / Haskamp, K. / Abo-Namous, O. / Reithmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
289
Improved Tracking for Systems with Configuration Dependent Dynamics by the Application of Robust Iterative Learning Control
Hakvoort, W.B.J. / Aarts, R.G.K.M. / Jonker, J.B. / European Society for Precision Engineering and Nanotechnology | 2009
291
Characterisation of Micro/Nano CMM Probes
Dai, G. / Butefisch, S. / Pohlenz, F. / Brand, U. / Danzebrink, H.-U. / Bosse, H. / European Society for Precision Engineering and Nanotechnology | 2009
293
Femtosecond Laser Machining Microfluidic Structures Inside Photosensitive Glass for Biochemical Analysis
Zheng, H.Y. / Wang, Z. / European Society for Precision Engineering and Nanotechnology | 2009
295
Development of Focused Ion Beam Technique for High Speed Steel 3D-SEM Artifact Fabrication
Carli, L. / MacDonald, A.N. / De Chiffre, L. / Marinello, F. / Carmignato, S. / Horsewell, A. / European Society for Precision Engineering and Nanotechnology | 2009
297
Manufacture of Cell Fusion Device Utilizing Mechanical Fabrication and FIB Fabrication
Umezu, S. / Naruse, T. / Gong, J.S. / Ohmori, H. / Ito, Y. / Katahira, K. / European Society for Precision Engineering and Nanotechnology | 2009
299
Study on Error Factors for Shape Measurement of Large-Size Silicon Wafer with Vertical Measuring Device
Sasaki, T. / Itou, Y. / Natsu, W. / European Society for Precision Engineering and Nanotechnology | 2009
301
Dynamic Analysis of Osteon Fracturing and Crack Propagation for a New Bone Cutting Device
Sugita, N. / Osa, T. / Aoki, R. / Mitsuishi, M. / European Society for Precision Engineering and Nanotechnology | 2009
303
Industrial Comparison of Optical Coordinate Measuring Systems
Voltan, A. / Carmignato, S. / Savio, E. / European Society for Precision Engineering and Nanotechnology | 2009
305
Increasing precision and performance by relaxing the classical design rules: bio inspired design
Warmerdam, T. / Soemers, H. / European Society for Precision Engineering and Nanotechnology | 2009
307
Optical Roughness Measurement - Simulation and Application of a Scattered Light Measuring Process
Patzelt, S. / Liebehentze, D. / Tausendfreund, A. / Goch, G. / European Society for Precision Engineering and Nanotechnology | 2009
310
Determining the Optimal Actuator Placement for Parallel Flexure Systems
Hopkins, J.B. / Culpepper, M.L. / European Society for Precision Engineering and Nanotechnology | 2009
311
Areal Surface Texture Calibration by Enhanced Micro-CMM
Kung, A. / Meli, F. / European Society for Precision Engineering and Nanotechnology | 2009
315
Development of a laser-assisted moulding process for the replication of micro- and nanostructured surfaces
Michaeli, W. / Klaiber, F. / European Society for Precision Engineering and Nanotechnology | 2009
316
Development of an Active Aerostatic Slide with Sub-micrometer Precision in 6 Degrees of Freedom
Aguirre, G. / Al-Bender, F. / Van Brussel, H. / European Society for Precision Engineering and Nanotechnology | 2009
319
Determination of 3D Surface Roughness Parameters by Using Cross-Section Methods
Kumermanis, M. / Rudzitis, J. / Torims, T. / European Society for Precision Engineering and Nanotechnology | 2009
320
Integration of a Motor Drive within Active Magnetic Bearings for High-Speed Micro-Milling
Borisavljevic, A. / Kimman, M.H. / Tsigkourakos, P. / Polinder, H. / Langen, H.H. / Ferreira, J.A. / European Society for Precision Engineering and Nanotechnology | 2009
323
On the Development of Fiducials Mark Design and Calibration Methods for Micro and -Nano-CMM Multi-Probe and Multi-orientation Measurement Strategies
de la Maza, B. / Pereda, F. / Ventura, T. / European Society for Precision Engineering and Nanotechnology | 2009
324
Contactless Positioning Using a Thin Air Film
Wesselingh, J. / van Ostayen, R.A.J. / Spronck, J.W. / Schmidt, R.H.M. / van Eijk, J. / European Society for Precision Engineering and Nanotechnology | 2009
327
New 3D Micro-CMM Triplanar Simetry Design Concept
Morquecho, A. / Vicente, A.S. / Laya, R. / Ventura, T. / European Society for Precision Engineering and Nanotechnology | 2009
328
Optical Measurement of a Micro Coriolis Mass Flow Sensor
Kristiansen, L. / Mehendale, A. / Brouwer, D.M. / Zwikker, J.M. / Klein, M.E. / European Society for Precision Engineering and Nanotechnology | 2009
332
Determination of Wall Thickness Deviations of Rings Inside a Turning Centre
Stobener, D. / Goch, G. / European Society for Precision Engineering and Nanotechnology | 2009
333
Enhancement of the Static and Dynamic Compliance of a Milling Machine by an Adaptronic Spindle System
Denkena, B. / Gummer, O. / European Society for Precision Engineering and Nanotechnology | 2009
336
Wavelength Corrected, Non-Polarizing Heterodyne Laser Interferometry in Air
Joo, K.-N. / Ellis, J.D. / Spronck, J.W. / Schmidt, R.H.M. / European Society for Precision Engineering and Nanotechnology | 2009
337
A MEMS Mirror for Miniature Laser Projection
Soemers, H. / van Lierop, D. / Sanders, R. / Kuijpers, T. / de Jong, B. / European Society for Precision Engineering and Nanotechnology | 2009
340
Experimental Study of the Vibration Effect on the Step Height Evaluation Based on Microscopic Interferometric Measurement
Guo, T. / Chen, J.P. / Fu, X. / Hu, X.T. / European Society for Precision Engineering and Nanotechnology | 2009
341
Ultra-Precise Continuous Path Control Over a One-Millimeter Stroke by Means of Flexure Guide and Electromagnetic Linear Motor
Fukada, S. / Nishimura, K. / Matsuda, T. / European Society for Precision Engineering and Nanotechnology | 2009
344
e-Xplorer, Advanced Tool for Surface Nano Metrology
Guezenec, R.P. / Grandin, T. / Levecq, X. / Nutsch, A. / European Society for Precision Engineering and Nanotechnology | 2009
345
Silicon Flexure-Based Micro-Balance for Batch Weighing Processes
Henein, S. / Barrot, F. / Dommann, A. / Walter, P. / Schwab, P. / Droz, S. / Verjus, C. / Overstolz, T. / European Society for Precision Engineering and Nanotechnology | 2009
348
Nanometer-Level Spindle Metrology in a Production Environment
Knapp, B.R. / Marsh, E.R. / Arneson, D.A. / Martin, D.L. / European Society for Precision Engineering and Nanotechnology | 2009
349
Performance Analysis and Parametric Design of an Ultra Precision XY Parallel Kinematics Stage Using a Coupled Flexure Leaf Spring Mechanism
Hwang, D. / Chun, S.-J. / Kim, H.-U. / Lee, S.-H. / Lee, M.G. / Jeong, J. / European Society for Precision Engineering and Nanotechnology | 2009
352
Replica Calibration Artefacts for Optical 3D Scanning of Micro Parts
De Chiffre, L. / Carmignato, S. / Cantatore, A. / Jensen, J.D. / European Society for Precision Engineering and Nanotechnology | 2009
353
Development of a High Precision Self-Adjusting Laser Mirror Module
Brecher, C. / Wenzel, C. / Stimpfi, J. / Emonts, M. / European Society for Precision Engineering and Nanotechnology | 2009
356
A Fast Algorithm for the High Order Linear and Nonlinear Gaussian Regression filter
Zeng, W. / Jiang, X. / Scott, P.J. / Xiao, S. / Blunt, L. / European Society for Precision Engineering and Nanotechnology | 2009
357
Design and Control of a Parallel Kinematic 6-DOFs Precision Manipulator
Huijts, M.B.P. / Brouwer, D.M. / van Dijk, J. / European Society for Precision Engineering and Nanotechnology | 2009
360
A Probing System for Measuring the Molecule-Level Interaction Force
Kim, S. / Moon, W. / European Society for Precision Engineering and Nanotechnology | 2009
361
Benchmark of High Level Programming - Pilot Case Vibration Control
Carlqvist, P. / Ivone, D. / During, C. / Wikander, J. / European Society for Precision Engineering and Nanotechnology | 2009
364
Study and Solution of Problems in a High-Precision Optical Inspection of Metal Surface
Zbrowski, A. / Giesko, T. / European Society for Precision Engineering and Nanotechnology | 2009
365
Magnetically Levitated Platform for High Precision Scanning Motion
Angelis, G. / Prevoo, J.-M. / Aladagli, I. / Tousain, R. / European Society for Precision Engineering and Nanotechnology | 2009
368
Repeatability in Millimetre-Scale Kinematic Relocation Systems
Alsoufi, M.S. / Chetwynd, D.G. / European Society for Precision Engineering and Nanotechnology | 2009
369
Thermo-Mechanical Design of a Temperature Controlled Heat Shield
Lamers, R.J.M. / Limpens, M.P.M.A. / Olieslagers, R. / Galaktionov, O.S. / European Society for Precision Engineering and Nanotechnology | 2009
372
Development and Test of a Heterodyne Phase Measurement Electronics
Flugge, J. / Weichert, C. / Koning, R. / Hu, H. / Bosse, H. / European Society for Precision Engineering and Nanotechnology | 2009
374
Reduction of Disturbance Effects and Positioning Noise for High-Precision Planar Magnetic Guidances
Volkert, R. / Sattel, T. / Bertram, T. / European Society for Precision Engineering and Nanotechnology | 2009
376
Depth Calibrations of a 2D-CMOS-Based Partially Coherent Light Interferometer
Pernechele, C. / Chinellato, S. / Manzan, F. / Carmignato, S. / Voltan, A. / European Society for Precision Engineering and Nanotechnology | 2009
378
A Flexure-Based Planar Positioner with Friction Controllable Element
Torii, A. / Banno, M. / Ueda, A. / Doki, K. / European Society for Precision Engineering and Nanotechnology | 2009
382
Design of High Precision Linear Motor with Halbach Magnet Array and Sparse Winding 3 Phase Coil Model
Kim, J. / Lee, S.-H. / Kim, B. / Lee, M.G. / European Society for Precision Engineering and Nanotechnology | 2009
385
Spatial Wavelength Range of Surface Roughness Improved Using Elastic Emission Machining
Kanaoka, M. / Takino, H. / Nomura, K. / Mimura, H. / Yamauchi, K. / Mori, Y. / European Society for Precision Engineering and Nanotechnology | 2009
386
Control and Excitation of Ultrasonic Motors Using a Test-Bench with Dedicated Electronic Circuits
Rothenhofer, E. / Schinkothe, W. / Keck, A. / Keller, B. / Retzbach, A. / Keinert, M. / European Society for Precision Engineering and Nanotechnology | 2009
389
Mechanical Improvements for the New LNE Calculable Cross Capacitor
Lahousse, L. / Thevenot, O. / Consejo, C. / David, J. / European Society for Precision Engineering and Nanotechnology | 2009
390
Real Time Error Compensation Integrating Open Control System and Laser Interferometer
Uhlmann, E. / Essmann, J. / European Society for Precision Engineering and Nanotechnology | 2009
390
A High Speed Scanning Heterodyne Interferometer for In Process Surface Measurement
Gao, F. / Wang, K. / Jiang, X. / European Society for Precision Engineering and Nanotechnology | 2009
393
One-Step Alignment of Bulk Micro Components
Brecher, C. / Weinzierl, M. / Freundt, M. / European Society for Precision Engineering and Nanotechnology | 2009
394
Development of a Planar Piezomotor with a Direct and Resonant Mode of Operation
Houben, M. / De Mot, B. / Van de Vijver, W. / Van Brussel, H. / Reynaerts, D. / European Society for Precision Engineering and Nanotechnology | 2009
397
Innovations in Microtarget Mass Production Enabling Progress in Ultra High Power Laser Applications
Tolley, M. / Beardsley, M. / Hiscock, P. / Spencer, J. / Spindloe, C. / Stevens, R. / European Society for Precision Engineering and Nanotechnology | 2009
398
A Piezo-Driven Adaptive Tool Holder for Ultraprecision Diamond Tool Alignment
Schonemann, L. / Brinksmeier, E. / Osmer, J. / European Society for Precision Engineering and Nanotechnology | 2009
401
Deep Reactive Ion Etching of Quartz Crystal for Frequency Metrology
Boy, J.-J. / Queste, S. / European Society for Precision Engineering and Nanotechnology | 2009
402
High Torque and High Precision Rotary Table System Driven by Hybrid Actuator
Hayashi, M. / Yoshioka, H. / Sawano, H. / Shinno, H. / European Society for Precision Engineering and Nanotechnology | 2009
406
Ultra-precision Micro Texturing of Hardened Steel by Controlling Vibration Amplitude in Elliptical Vibration Cutting
Suzuki, N. / Yokoi, H. / Shamoto, E. / European Society for Precision Engineering and Nanotechnology | 2009
406
Model Based Compensation of Vibration Rectification in Precision Inertial Sensors
Spiewak, S. / Ludwick, S. / Selvakumar, A. / Doyle, M. / Hauer, G. / Lawrence, E. / European Society for Precision Engineering and Nanotechnology | 2009
410
Effect of Tool Chattering on Machining Surface of Micro Quadrangle Channel
Je, T.-J. / Lee, K.-W. / Choi, D.-S. / Kim, J.-G. / Park, K.-T. / Whang, K.-H. / European Society for Precision Engineering and Nanotechnology | 2009
411
Milling Strategies to Improve Accuracy and Surface Quality of Microstructured Parts
Neugebauer, R. / European Society for Precision Engineering and Nanotechnology | 2009
414
Self-assembly of Surface-modified Fine Particles on Patterned Substrate
Kaneko, A. / Aruga, D. / Moronuki, N. / Kanamori, Y. / European Society for Precision Engineering and Nanotechnology | 2009
415
Ultra-compact High Accuracy Robust Inspection Probe
Prestidge, T. / Buckingham, J. / McFarland, G. / European Society for Precision Engineering and Nanotechnology | 2009
418
Machining Technology of Micro Multiple Threads Screw Prism Pattern Roll Mold
Choi, D.-S. / Park, S.-C. / Je, T.-J. / Whang, K.-H. / European Society for Precision Engineering and Nanotechnology | 2009
419
On-machine Measurement of Deep-hole Accuracies: Measurement Error and its Compensation Scheme
Katsuki, A. / Onikura, H. / Sajima, T. / Murakami, H. / Satou, T. / Adachi, Y. / Duch, T. / European Society for Precision Engineering and Nanotechnology | 2009
423
Lens Array Manufacturing using a Driven Diamond Tool on an Ultra Precision Lathe
Scheiding, S. / Steinkopf, R. / Kolbmuller, A. / Risse, S. / Eberhardt, R. / Tunnermann, A. / European Society for Precision Engineering and Nanotechnology | 2009
423
The Influence of Real Contact Area Distribution on Thermal Contact Resistance of the Joint
Shimizu, S. / Nomura, S. / Sakamoto, H. / Yagyu, S. / European Society for Precision Engineering and Nanotechnology | 2009
427
New Nickel Plated Metal Mirrors Utilizing Meltspun Aluminium Silicon alloy
Gebhardt, A. / Risse, S. / Peschel, T. / Senden, R. / Bosch, A.J. / European Society for Precision Engineering and Nanotechnology | 2009
427
Linking Spindle Metrology with Rotary Axis Measuring Methods
Florussen, G.H.J. / Morel, M.A.A. / Spaan, H.A.M. / European Society for Precision Engineering and Nanotechnology | 2009
431
Closing the Gaps in the Precision Asphere Manufacturing Process Makes Them an Attractive Solution for Novel Optical Designs
Lormeau, J.P. / Tricard, M. / Forbes, G. / European Society for Precision Engineering and Nanotechnology | 2009
431
Calculation and Compensation of Thermal Errors of Machine Tools
Denkena, B. / Scharschmidt, K.-H. / European Society for Precision Engineering and Nanotechnology | 2009
435
Micro Structuring of Biocompatible Titanium-Alloys with Ultra-small Micro-End Mills
Schueler, G.M. / Engmann, J. / Marx, T. / Haberland, R. / Aurich, J.C. / European Society for Precision Engineering and Nanotechnology | 2009
435
Identification and Analysis for the Guideway Error based on the Cross-correlation Analysis in Machine Tools
Chen, D.J. / Zhang, F.H. / Dong, S. / Bonis, M. / European Society for Precision Engineering and Nanotechnology | 2009
439
Machine Integration of a Deflectometric Sensor for Flexible Asphere Measurement and Adaptive Manufacturing
Schmitt, R. / Vielhaber, K. / Erichsen, I. / van Amstel, W. / Krey, S. / Lengwenus, A. / European Society for Precision Engineering and Nanotechnology | 2009
439
A Generic Inverse Kinematics Model Using the Orthogonal Characteristics of 5-Axis Machine
So, B.S. / Ko, T.J. / European Society for Precision Engineering and Nanotechnology | 2009
443
Metrology Data Feedback for Shrinkage Compensated Polymer Lenses
Brecher, C. / Schmitt, R. / Buss, C. / Kolb, P. / Wenzel, C. / Kollmann, D. / European Society for Precision Engineering and Nanotechnology | 2009
443
Development of Self-compensating Hydorstatic Bearing Pads for Machine Tool Slideway Systems
Huang, H.-C. / Yaung, P.-C. / Lin, C.-Y. / Al-Bender, F. / European Society for Precision Engineering and Nanotechnology | 2009
447
A Multi-Axis Alignment System for Evaluation of a Quantum Tunnelling Linear Encoder
Chen, W. / Yang, G. / Lin, W. / European Society for Precision Engineering and Nanotechnology | 2009
447
Realization and Characterization of Disposable Polymer Chips for the Study of the Filling of Microchannels at Low Capillary Numbers
Bissacco, G. / Mistura, G. / Franzoi, A. / Pierno, M. / Carmignato, S. / Voltan, A. / European Society for Precision Engineering and Nanotechnology | 2009
451
Issues in Identification of Thermal Transfer Functions of Machine Tools
Hornych, J. / Barta, P. / Mares, M. / European Society for Precision Engineering and Nanotechnology | 2009
451
Machining Microstructures by Means of a High-Dynamic Fast-Tool-Servo
Denkena, B. / Steinbrenner, I. / Ostermann, J. / Dragon, R. / European Society for Precision Engineering and Nanotechnology | 2009
455
Ultrasonic assisted drilling of brittle hard materials
Schopf, C. / Rascher, R. / European Society for Precision Engineering and Nanotechnology | 2009
455
Technology Development for the Thinning of a Slider with an Integrated Microactuator (SLIM)
Cvetkovic, S. / Gatzen, H.H. / European Society for Precision Engineering and Nanotechnology | 2009
459
Diamond Machining of High Accuracy Components of the Near Infrared Spectrograph Nirspec for the JWST
Autschbach, L. / Gabbia, A. / Wang, H. / Thanel, E. / Dornheim, S. / Stott, R. / Gross, T. / Ubele, M. / Fischer, M. / Trunz, M. et al. | 2009
463
Monitoring of Cutting Torque in Micro End Milling
Shibahara, H. / Kumagai, M. / Kohda, S. / Okuda, K. / European Society for Precision Engineering and Nanotechnology | 2009
467
Bending Process of Silicon Wafer by Application of Laser
Okuda, K. / Nunobiki, M. / European Society for Precision Engineering and Nanotechnology | 2009
471
Application of Electroplated Electrodes in Micro Electro Discharge Machining (EDM)
Klocke, F. / Gatzen, H.H. / Kamenzky, S. / Garzon, M. / Traisigkhachol, O. / European Society for Precision Engineering and Nanotechnology | 2009
475
Influence of Engineered Diamond Wheels' Topography on Ductile Grinding of BK7
Mutlugunes, Y. / Rickens, K. / Brinksmeier, E. / European Society for Precision Engineering and Nanotechnology | 2009
479
Design and Kinematic Analysis of 6-DOF Precision Aligner for Micro-Assembly
Yoo, Y.-H. / Lee, S.-H. / Hong, M.-S. / Song, J.-Y. / Lee, C.-W. / Lee, M.G. / European Society for Precision Engineering and Nanotechnology | 2009
483
Dimensioning a Sinter-Joined Shaft to Collar Connection in Sub-Millimeter Range
Munzinger, C. / Trondle, M. / Klimscha, K. / Dieckmann, A.-M. / European Society for Precision Engineering and Nanotechnology | 2009
487
Automation of a Diode Laser Assembly Process
Brecher, C. / Freundt, M. / Wenzel, C. / European Society for Precision Engineering and Nanotechnology | 2009
491
Understanding ECM Phenomenon by Using Equivalent Circuit for Electrolytic Reaction
Natsu, W. / Kunimi, T. / Terada, A. / European Society for Precision Engineering and Nanotechnology | 2009
495
Process Influence on Shrinkage in Precision Glass Moulding
Klocke, F. / Dambon, O. / Hollstegge, D. / Wang, F. / Hunten, M. / European Society for Precision Engineering and Nanotechnology | 2009
499
Relationship between Removal Rate and Friction Force of a CMP Process for MEMS
Cvetkovic, S. / Miletic, D. / Gatzen, H.H. / European Society for Precision Engineering and Nanotechnology | 2009
503
Broaching of Micro Teeth for a PAD - Piezo Actuator Drive
Vogl, M. / Kraus, T. / Zeichfussl, R. / Wallenhauer, C. / Gottlieb, B. / Kappel, A. / Luth, T.C. / European Society for Precision Engineering and Nanotechnology | 2009
507
Identification of the Electro-Discharge Machining Process Model
Balemi, S. / Furlan, I. / European Society for Precision Engineering and Nanotechnology | 2009
511
New Manufacturing Process of Micro-Crater on Co-Cr-Mo Alloy Head Using Large Area Electron Beam-Irradiation for Extending Operating-Life of Artificial Hip Joints
Yoden, H. / Yoshikawa, M. / Yokomizo, S. / Kuramoto, K. / Fujiwara, K. / Kaneeda, T. / European Society for Precision Engineering and Nanotechnology | 2009
515
Automatic Pick-and-Place of 40 Microns Objects Using a Robotic Platform
Heriban, D. / Gauthier, M. / Regnier, S. / Chaillet, N. / Lutz, P. / European Society for Precision Engineering and Nanotechnology | 2009
519
Micro Grinding of Structured Ceramic Mold - Accuracy Improvement by Truing of Diamond Wheel Using Molybdenum
Suzuki, H. / Higuchi, T. / Yamamoto, Y. / Moriwaki, T. / European Society for Precision Engineering and Nanotechnology | 2009
523
Micro EDM Process Tolerance and its Effect on Electrode Wear Compensation Methods
Ivanov, A. / Ferri, C. / European Society for Precision Engineering and Nanotechnology | 2009
529
Assembly Automation for Micro-Products Coupling a Vibration Conveyor with A Gripper
Munzinger, C. / Dieckmann, A.-M. / Trondle, M. / Ruprecht, E. / European Society for Precision Engineering and Nanotechnology | 2009
533
PCD Tooling Made by Combined Laser Beam Machining and Focused Ion Beam Machining
Evans, R.W. / Durazo-Cardenas, I.S. / Allen, D.M. / European Society for Precision Engineering and Nanotechnology | 2009
537
Development of a Flexible and Reliable Numerical Simulation for Glass Molding Process
Klocke, F. / Dambon, O. / Wang, F. / Hollstegge, D. / Yi, A.Y. / European Society for Precision Engineering and Nanotechnology | 2009
542
Development of Electric Rust Preventive Machining Method for New Environmental Harmonic Machining Only Using Water
Nishikawa, N. / Iyama, T. / Mizuno, M. / Mifune, H. / European Society for Precision Engineering and Nanotechnology | 2009
546
Precision Design of Solar Collector Systems: Error Budgeting and Sensitivity Analysis
Figueredo, S. / Slocum, A. / European Society for Precision Engineering and Nanotechnology | 2009
550
Development and Prototyping of a Microturbine-Generator-Unit for Energy Supply of Distributed Fluidic Microsystems
Munzinger, C. / Trondle, M. / Herder, S. / Weis, M. / European Society for Precision Engineering and Nanotechnology | 2009

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