TRIPLE PIPE HEATING DEVICE OF EASY INSTALLATION FOR HEATING EXHAUST GAS IN SEMICONDUCTOR AND LCD MANUFACTURING PROCESS (Korean)
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2019
- Patent / Electronic Resource
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Title:TRIPLE PIPE HEATING DEVICE OF EASY INSTALLATION FOR HEATING EXHAUST GAS IN SEMICONDUCTOR AND LCD MANUFACTURING PROCESS
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Additional title:DISPOSITIF DE CHAUFFAGE À TRIPLE TUYAU D'INSTALLATION FACILE PERMETTANT DE CHAUFFER UN GAZ D'ÉCHAPPEMENT DANS UN PROCÉDÉ DE FABRICATION DE SEMI-CONDUCTEUR ET DE LCD
설치가 용이한 반도체 및 LCD 제조공정의 배기가스 가열용 3중 배관 가열장치 -
Patent number:WO2019004566
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Patent applicant:
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Patent family:
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Contributors:LEE SEUNGYONG ( author )
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Publisher:
- New search for: Europäisches Patentamt
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Publication date:2019-01-03
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Type of media:Patent
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Type of material:Electronic Resource
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Language:Korean
- New search for: H01L / F16L
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Classification:
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