SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress (English)
- New search for: Schmidt, S
- New search for: Schmidt, S
- New search for: Hänninen, T
- New search for: Wissting, J
- New search for: Hultman, L
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- New search for: Santana, A
- New search for: Tobler, M
- New search for: Högberg, H
In:
Journal of applied physics
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121
, 17
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2017
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ISSN:
- Article (Journal) / Print
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Title:SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stress
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Contributors:Schmidt, S ( author ) / Hänninen, T / Wissting, J / Hultman, L / Goebbels, N / Santana, A / Tobler, M / Högberg, H
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Published in:Journal of applied physics ; 121, 17
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Publisher:
- New search for: AIP
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Place of publication:Melville, NY
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Publication date:2017
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DOI:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
- New search for: 33.00 / 50.30
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Table of contents – Volume 121, Issue 17
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
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Nanomechanical and wettability properties of Bi2Te3 thin films: Effects of post-annealingJian, Sheng-Rui / Le, Phuoc Huu / Luo, Chih-Wei / Juang, Jenh-Yih et al. | 2017
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Erratum: “Effects of electron exchange-correlation potential on electrostatic oscillations in single-walled carbon nanotubes” [J. Appl. Phys. 115, 204304 (2014)]Khan, S. A. / Hassan, Sunia et al. | 2017
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Composite targets in HiPIMS plasmas: Correlation of in-vacuum XPS characterization and optical plasma diagnosticsLayes, Vincent / Monje, Sascha / Corbella, Carles / Schulz-von der Gathen, Volker / von Keudell, Achim / de los Arcos, Teresa et al. | 2017
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The use of charge extraction by linearly increasing voltage in polar organic light-emitting diodesZüfle, Simon / Altazin, Stéphane / Hofmann, Alexander / Jäger, Lars / Neukom, Martin T. / Schmidt, Tobias D. / Brütting, Wolfgang / Ruhstaller, Beat et al. | 2017
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Angular dependence of plasma parameters and film properties during high power impulse magnetron sputtering for deposition of Ti and TiO2 layersHippler, R. / Hubicka, Z. / Cada, M. / Ksirova, P. / Wulff, H. / Helm, C. A. / Stranak, V. et al. | 2017
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Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: ExperimentČapek, Jiří / Kadlec, Stanislav et al. | 2017
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Tutorial: Reactive high power impulse magnetron sputtering (R-HiPIMS)Anders, André et al. | 2017
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Preface to Special Topic: Reactive high power impulse magnetron sputteringHecimovic, A. / Gudmundsson, J. T. et al. | 2017
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Space-charge-limited current in nanowiresAlagha, S. / Shik, A. / Ruda, H. E. / Saveliev, I. / Kavanagh, K. L. / Watkins, S. P. et al. | 2017
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Finite amplitude effects on drop levitation for material properties measurementAnsari Hosseinzadeh, Vahideh / Holt, R. Glynn et al. | 2017
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Giant-spin nonlinear response theory of magnetic nanoparticle hyperthermia: A field dependence studyCarrião, M. S. / Aquino, V. R. R. / Landi, G. T. / Verde, E. L. / Sousa, M. H. / Bakuzis, A. F. et al. | 2017
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Evolution of target condition in reactive HiPIMS as a function of duty cycle: An opportunity for refractive index gradingGanesan, Rajesh / Akhavan, Behnam / Partridge, James G. / McCulloch, Dougal G. / McKenzie, David R. / Bilek, Marcela M. M. et al. | 2017
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Magnetic order and noncollinear spin transport of domain walls based on zigzag graphene nanoribbonsZhang, Y. / Yan, X. H. / Guo, Y. D. / Xiao, Y. et al. | 2017
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Analysis of loss mechanisms in Ag2ZnSnSe4 Schottky barrier photovoltaicsGershon, Talia / Gunawan, Oki / Gokmen, Tayfun / Brew, Kevin W. / Singh, Saurabh / Hopstaken, Marinus / Poindexter, Jeremy R. / Barnard, Edward S. / Buonassisi, Tonio / Haight, Richard et al. | 2017
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Investigation of stress induced interface states in Al2O3/InGaAs metal-oxide-semiconductor capacitorsPalumbo, F. / Winter, R. / Tang, K. / McIntyre, P. C. / Eizenberg, M. et al. | 2017
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Enhanced oxidation of TiO2 films prepared by high power impulse magnetron sputtering running in metallic modeStranak, V. / Kratochvil, J. / Olejnicek, J. / Ksirova, P. / Sezemsky, P. / Cada, M. / Hubicka, Z. et al. | 2017
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Investigation of plasma spokes in reactive high power impulse magnetron sputtering dischargeHecimovic, A. / Corbella, C. / Maszl, C. / Breilmann, W. / von Keudell, A. et al. | 2017
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Sensitivity on materials optical properties of single beam torsional Casimir actuationTajik, Fatemeh / Sedighi, Mehdi / Palasantzas, George et al. | 2017
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Optical damage assessment and recovery investigation of hydrogen-ion and deuterium-ion plasma-irradiated bulk ZnO single crystalsEmpizo, Melvin John F. / Yamanoi, Kohei / Mori, Kazuyuki / Iwano, Keisuke / Iwasa, Yuki / Minami, Yuki / Arita, Ren / Fukuda, Kazuhito / Takano, Keisuke / Shimizu, Toshihiko et al. | 2017
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In-situ determination of the flat band carrier concentration and surface charge density of individual semiconductor nanowires by a combination of electrical and field emission measurementsChen, Yicong / Song, Xiaomeng / Li, Zhibing / Deng, Shaozhi / She, Juncong / Xu, Ningsheng / Chen, Jun et al. | 2017
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Ultra-wideband and broad-angle linear polarization conversion metasurfaceSun, Hengyi / Gu, Changqing / Chen, Xinlei / Li, Zhuo / Liu, Liangliang / Martín, Ferran et al. | 2017
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Analysis of electromagnetic propagation in the magnetic plasma state in spin-ice systemsLópez-Bara, F. I. / López-Aguilar, F. et al. | 2017
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A study of the oxygen dynamics in a reactive Ar/O2 high power impulse magnetron sputtering discharge using an ionization region modelLundin, D. / Gudmundsson, J. T. / Brenning, N. / Raadu, M. A. / Minea, T. M. et al. | 2017
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Growth and ferroelectric properties of La and Al codoped BiFeO3 epitaxial filmsIzumi, Hirokazu / Yoshimura, Takeshi / Fujimura, Norifumi et al. | 2017
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Optical emission spectroscopy during the deposition of zirconium dioxide films by controlled reactive high-power impulse magnetron sputteringPajdarová, Andrea Dagmar / Vlček, Jaroslav / Rezek, Jiří et al. | 2017
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Depoling and fatigue behavior of Pb(Mg1/3Nb2/3)O3-PbTiO3 single crystal at megahertz frequencies under bipolar electric fieldChen, Zhaojiang / Li, Shiyang / Zhang, Yang / Cao, Wenwu et al. | 2017
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Interfacial characteristics and multiferroic properties of ion-doped BiFeO3/NiFe2O4 thin filmsGuo, Meiyou / Tan, Guoqiang / Zheng, Yujuan / Liu, Wenlong / Ren, Huijun / Xia, Ao et al. | 2017
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Quantization of acoustic-phonon shear modes in a nanowaveguideMazouchi, M. / Dutta, M. / Stroscio, M. A. et al. | 2017
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Magnetic properties, exchange bias, and memory effects in core-shell superparamagnetic nanoparticles of La0.67Sr0.33MnO3Rostamnejadi, A. / Venkatesan, M. / Salamati, H. / Ackland, K. / Gholizadeh, H. / Kameli, P. / Coey, J. M. D. et al. | 2017
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Photonic band-gap and defect modes of a one-dimensional photonic crystal under localized compressionSánchez, A. / Porta, A. V. / Orozco, S. et al. | 2017
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Formation of gold grating structures on fused silica substrates by femtosecond laser irradiationTakami, Akihiro / Nakajima, Yasutaka / Terakawa, Mitsuhiro et al. | 2017
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Unprecedented Al supersaturation in single-phase rock salt structure VAlN films by Al+ subplantationGreczynski, G. / Mráz, S. / Hans, M. / Primetzhofer, D. / Lu, J. / Hultman, L. / Schneider, J. M. et al. | 2017
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Process- and optoelectronic-control of NiOx thin films deposited by reactive high power impulse magnetron sputteringKeraudy, Julien / Delfour-Peyrethon, Brice / Ferrec, Axel / Garcia Molleja, Javier / Richard-Plouet, Mireille / Payen, Christophe / Hamon, Jonathan / Corraze, Benoît / Goullet, Antoine / Jouan, Pierre-Yves et al. | 2017
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A study of tantalum pentoxide Ta2O5 structures up to 28 GPaStavrou, Elissaios / Zaug, Joseph M. / Bastea, Sorin / Kunz, Martin et al. | 2017
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Comment on “Effects of electron exchange-correlation potential on electrostatic oscillations in single-walled carbon nanotubes” [J. Appl. Phys. 115, 204304 (2014)]Moradi, Afshin et al. | 2017
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Identifying phase transition behavior in Bi1/2Na1/2TiO3-BaTiO3 single crystals by piezoresponse force microscopyLee, Hyun-Young / Wang, Ke / Yao, Fang-Zhou / Sun, Wei / Zhou, Zhen / Zhang, Mao-Hua / Li, Xiaobing / Luo, Haosu / Lee, Jae-Shin / Li, Jing-Feng et al. | 2017
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Extended Rice-Walsh equation of state for metals based on shock Hugoniot data for porous samplesNagayama, K. et al. | 2017
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Determination of the complex refractive index and optical bandgap of CH3NH3PbI3 thin filmsGuerra, J. A. / Tejada, A. / Korte, L. / Kegelmann, L. / Töfflinger, J. A. / Albrecht, S. / Rech, B. / Weingärtner, R. et al. | 2017
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Thermal annealing behavior of nano-size metal-oxide particles synthesized by ion implantation in Fe-Cr alloyZheng, C. / Gentils, A. / Ribis, J. / Borodin, V. A. / Descoins, M. / Mangelinck, D. / Dalle, F. / Arnal, B. / Delauche, L. et al. | 2017
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Pure and conformal CVD nickel and nickel monosilicide in high-aspect-ratio structures analyzed by atom probe tomographyLi, Kecheng / Feng, Jun / Kwak, Junkeun / Yang, Jing / Gordon, Roy G. et al. | 2017
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Macroscopic model for analyzing the electro-optics of uniform lying helix cholesteric liquid crystalsTan, Guanjun / Lee, Yun-Han / Gou, Fangwang / Hu, Minggang / Lan, Yi-Fen / Tsai, Cheng-Yeh / Wu, Shin-Tson et al. | 2017
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Measurement and modeling of plasma parameters in reactive high-power impulse magnetron sputtering of Ti in Ar/O2 mixturesČada, M. / Lundin, D. / Hubička, Z. et al. | 2017
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Highly efficient flexible piezoelectric nanogenerator and femtosecond two-photon absorption properties of nonlinear lithium niobate nanowiresGupta, Manoj Kumar / Aneesh, Janardhanakurup / Yadav, Rajesh / Adarsh, K. V. / Kim, Sang-Woo et al. | 2017
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Dynamic focusing of acoustic wave utilizing a randomly scattering lens and a single fixed transducerYin, Jie / Tao, Chao / Liu, Xiaojun et al. | 2017
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Upper limit to the thermal penetration depth during modulated heating of multilayer thin films with pulsed and continuous wave lasers: A numerical studyBraun, Jeffrey L. / Hopkins, Patrick E. et al. | 2017
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Evolution of sputtering target surface composition in reactive high power impulse magnetron sputteringKubart, T. / Aijaz, A. et al. | 2017
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The research of effective flexoelectric coefficient along 1123 direction in polyvinylidene fluorideLiu, Kaiyuan / Zhang, Shuwen / Xu, Minglong / Wu, Tonghui / Shen, Shengping et al. | 2017
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Ultrafast response of dielectric properties of monolayer phosphorene to femtosecond laserSu, Gaoshi / Wang, Feng / Jiang, Lan / Zhang, Xiaoqin / Su, Xiaoxing / Qu, Liangti / Lu, Yongfeng et al. | 2017
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Synthesis of tunable plasmonic metal-ceramic nanocomposite thin films by temporally modulated sputtered fluxesMagnfält, D. / Melander, E. / Boyd, R. D. / Kapaklis, V. / Sarakinos, K. et al. | 2017
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Understanding the maximum dynamical heterogeneity during the unfreezing process in metallic glassesWang, B. / Wang, L. J. / Wang, W. H. / Bai, H. Y. / Gao, X. Q. / Pan, M. X. / Guan, P. F. et al. | 2017
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A global plasma model for reactive deposition of compound films by modulated pulsed power magnetron sputtering dischargesZheng, B. C. / Wu, Z. L. / Wu, B. / Li, Y. G. / Lei, M. K. et al. | 2017
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Quantification of the hysteresis and related phenomena in reactive HiPIMS dischargesBritun, Nikolay / Konstantinidis, Stephanos / Belosludtsev, Alexandr / Silva, Tiago / Snyders, Rony et al. | 2017
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Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: ModelKadlec, Stanislav / Čapek, Jiří et al. | 2017
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Ab Initio evaluation of electron transport properties of Pt, Rh, Ir, and Pd nanowires for advanced interconnect applicationsLanzillo, Nicholas A. et al. | 2017
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Comprehensive modeling of Joule heated cantilever probesSpieser, M. / Rawlings, C. / Lörtscher, E. / Duerig, U. / Knoll, A. W. et al. | 2017
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Optical transmittance and reflectance studies and evidence of weak electron–phonon interaction in Type-I Ge clathrate Ba8Ga16Ge30Udono, Haruhiko / Imai, Motoharu / Kojima, Shuhei / Kume, Tetsuji / Tanigaki, Katsumi / Tajima, Hiroyuki et al. | 2017
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SiNx coatings deposited by reactive high power impulse magnetron sputtering: Process parameters influencing the residual coating stressSchmidt, S. / Hänninen, T. / Wissting, J. / Hultman, L. / Goebbels, N. / Santana, A. / Tobler, M. / Högberg, H. et al. | 2017
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Size-dependent plastic deformation of twinned nanopillars in body-centered cubic tungstenXu, Shuozhi / Startt, Jacob K. / Payne, Thomas G. / Deo, Chaitanya S. / McDowell, David L. et al. | 2017
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Low-temperature growth of dense and hard Ti0.41Al0.51Ta0.08N films via hybrid HIPIMS/DC magnetron co-sputtering with synchronized metal-ion irradiationFager, H. / Tengstrand, O. / Lu, J. / Bolz, S. / Mesic, B. / Kölker, W. / Schiffers, Ch. / Lemmer, O. / Greene, J. E. / Hultman, L. et al. | 2017
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Depoling and fatigue behavior of PbO3-PbTiO3 single crystal at megahertz frequencies under bipolar electric fieldZhaojiang Chen et al. | 2017