Stereophotogrammetric tactile-optical probe for three-dimensional microparts (English)

The tactile-optical probe - so called fiber probe - is a unique, established solution for the measurement of microparts. Due to the very small probing element diameters - down to 20 micron - the fiber probe allows the measurement of otherwise inaccessible micro geometries like deep, small holes The extremely low probing forces in the order of some microN assure that even sensitive workpieces will not be damaged by the probing element The tactile-optical method of measurement based on this principle did not feature full 3D-capabilities until now. A new approach to overcome this limitation is the stereoscopic detection of the probing sphere, adding full 3D-capabilities to the fiber probe by the application of photogrammetric methods. An appropriate sensor is presented in this paper.