Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor (English)
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In:
Sensors and Materials, Tokyo
;
23
, 3
;
159-166
;
2011
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ISSN:
- Article (Journal) / Print
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Title:Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor
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Contributors:Wu, Aimin ( author ) / Wei, Xing ( author ) / Yang, Zhifeng ( author ) / Chen, Jing ( author ) / Chen, Ming ( author ) / Bi, Dawei ( author ) / Zhang, Zhengxuan ( author ) / Wang, Xi ( author )
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Published in:Sensors and Materials, Tokyo ; 23, 3 ; 159-166
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Publisher:
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Publication date:2011
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Size:8 Seiten, 19 Quellen
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ISSN:
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Coden:
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Type of media:Article (Journal)
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Type of material:Print
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Language:English
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Keywords:
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Source:
Table of contents – Volume 23, Issue 3
The tables of contents are generated automatically and are based on the data records of the individual contributions available in the index of the TIB portal. The display of the Tables of Contents may therefore be incomplete.
- 147
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Nondispersive Infrared Ray CH~4 Gas Sensor Using Focused Infrared Beam Structures (S & M 0834)Park, J. / Yi, S. et al. | 2011
- 159
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Silicon-on-Insulator-on-Cavity-Structured Micropressure Sensor (S & M 0835)Wu, A. / Wei, X. / Yang, Z. / Chen, J. / Chen, M. / Bi, D. / Zhang, Z. / Wang, X. et al. | 2011
- 159
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Silicon-on-Insulator-on-Cavity-Structured Micropressure SensorWu, Aimin / Wei, Xing / Yang, Zhifeng / Chen, Jing / Chen, Ming / Bi, Dawei / Zhang, Zhengxuan / Wang, Xi et al. | 2011
- 167
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Hot-Spring-Experience Apparatus Based on Questionnaire (S & M 0836)Murakami, K. / Oyabu, T. / Shimomura, Y. et al. | 2011
- 179
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Decision Fusion via Integrated Sensing System for a Smart Airbag Deployment Scheme (S & M 0837)Hannan, M.A. / Hussain, A. / Samad, S.A. et al. | 2011