Year of publication
Type of media
Source
Subject
Type of material
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Synonyms were used for: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Search without synonyms: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Used synonyms:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Used synonyms:
- fur
Used synonyms:
- angewandte optik
- optische technik
- technische optik
Used synonyms:
- gesellschaft
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High-repetition-rate fluorine laser for microlithography [4000-173]
British Library Conference Proceedings | 2000| -
Highly durable low CoO mass production version of 2-kHz ArF excimer laser for DUV lithography [4000-158]
British Library Conference Proceedings | 2000| -
Output stabilization technology with chemical impurity control on ArF excimer laser [4000-157]
British Library Conference Proceedings | 2000| -
Lens aberration measurement technique using attentuated phase-shifting mask [4000-139]
British Library Conference Proceedings | 2000| -
Simulation-based method for sidelobe supression [4000-124]
British Library Conference Proceedings | 2000| -
Precise control of critical dimension shrinkage and enlargement by in-situ polysilicon etch [4000-101]
British Library Conference Proceedings | 2000| -
Effect of nonlinear errors on 300-mm wafer overlay performance [4000-87]
British Library Conference Proceedings | 2000| -
Deducing aerial image behavior from AIMS data [4000-74]
British Library Conference Proceedings | 2000| -
157-nm lithography simulation using a finite-difference time-domain method with oblique incidence in a multilayered medium [4000-71]
British Library Conference Proceedings | 2000|
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