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Design and simulation of a piezoelectric micropump for drug delivery systems
Springer Verlag | 2023| -
Characterization of Residual Stress in a-SiC:H Deposited by RF-PECVD for Manufacturing of Membranes for Cell Culture
British Library Conference Proceedings | 2016| -
Study of the annealing effect in optical properties for phosphorus-doped a-Si x C1− x :H films deposited by PECVD
IOP Institute of Physics | 2023| -
Stress Reduction of Amorphous Silicon Deposited by PECVD
British Library Conference Proceedings | 2016| -
Silicon nitride etching in high- and low-density plasmas using SF6-O2-N2 Mixtures
Online Contents | 2003| -
Procesos de grabado seco de silicio monocristalino con alta velocidad de grabado y anisotropia para su aplicacion en la fabricacion de MEMS
British Library Online Contents | 2007| -
Piecewise-Linear Algorithm Applied to R^2 Experimental Plasma Etching Process
British Library Conference Proceedings | 2012| -
Reactive Ion Etching of SiGe Using Halogen-Based Plasmas
British Library Conference Proceedings | 2004| -
Silicon nitride etching in high- and low-density plasmas using SF6/O2/N2 mixtures
Tema Archive | 2003| -
Fabrication and characterization of a micro-fuel cell made of metallized PMMA
British Library Online Contents | 2013| -
Silicon Microstructures: 3-D Micromachining with KOH Solution
British Library Conference Proceedings | 2005| -
Grabado anisotropico de silicio para aplicacion en micromaquinado usando plasmas de SF~6/CH~4/O~2/Ar y SF~6/CF~4/O~2/Ar
British Library Online Contents | 2004|
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