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High-repetition-rate fluorine laser for microlithography [4000-173]
British Library Conference Proceedings | 2000| -
Highly durable low CoO mass production version of 2-kHz ArF excimer laser for DUV lithography [4000-158]
British Library Conference Proceedings | 2000| -
Output stabilization technology with chemical impurity control on ArF excimer laser [4000-157]
British Library Conference Proceedings | 2000| -
Lens aberration measurement technique using attentuated phase-shifting mask [4000-139]
British Library Conference Proceedings | 2000| -
Simulation-based method for sidelobe supression [4000-124]
British Library Conference Proceedings | 2000| -
Precise control of critical dimension shrinkage and enlargement by in-situ polysilicon etch [4000-101]
British Library Conference Proceedings | 2000| -
Effect of nonlinear errors on 300-mm wafer overlay performance [4000-87]
British Library Conference Proceedings | 2000| -
Deducing aerial image behavior from AIMS data [4000-74]
British Library Conference Proceedings | 2000| -
157-nm lithography simulation using a finite-difference time-domain method with oblique incidence in a multilayered medium [4000-71]
British Library Conference Proceedings | 2000| -
Rigorous diffraction analysis for future mask technology [4000-69]
British Library Conference Proceedings | 2000| -
Aberration averaging using point spread function for scanning projection systems [4000-51]
British Library Conference Proceedings | 2000| -
Long-term testing of optical components for 157-nm lithography [4000-44]
British Library Conference Proceedings | 2000| -
Comparison study for sub-0.13-mum lithography between ArF and KrF lithography [4000-39]
British Library Conference Proceedings | 2000| -
Integration considerations for 130-nm device patterning using ArF lithography [4000-38]
British Library Conference Proceedings | 2000| -
Practical optical-proximity-correction approach by considering interlayer overlap [4000-30]
British Library Conference Proceedings | 2000| -
Customized illumination aperture filter for low k~1 photolithography process [4000-25]
British Library Conference Proceedings | 2000| -
System for noncontact measurement of torsional vibrations of shafts [2729-19]
British Library Conference Proceedings| -
Methods of the study of flows on the basis of space and temporary selection of the scattered light (Invited Paper) [2729-14]
British Library Conference Proceedings| -
Acousto-optic devices in optical velocimetry: frequency shifters, spectrum analyzer [2729-09]
British Library Conference Proceedings| -
Digital processing of Doppler signal by means of fast Fourier transform [2729-13]
British Library Conference Proceedings| -
Comparison between the time-of-flight velocimeter and the laser Doppler velocimeter for measurements on solid surfaces [2729-12]
British Library Conference Proceedings| -
Novel solid state lasers for optical velocimetry (Invited Paper) [2729-04]
British Library Conference Proceedings| -
Moving atoms: a nightmare for spectroscopists (Invited Paper) [2729-03]
British Library Conference Proceedings| -
Brain metastasis detection by resonant Raman optical biopsy method [8940-11]
British Library Conference Proceedings | 2014| -
Tryptophan content for monitoring breast cancer cell aggressiveness by native fluorescence spectroscopy [8940-41]
British Library Conference Proceedings | 2014| -
Cross-phase modulation in optical Kerr media: review of discovery experiments (Invited Paper) [8940-38]
British Library Conference Proceedings | 2014| -
Enhanced visualization of the bile duct via parallel white light and indocyanine green fluorescence laparoscopic imaging [8940-26]
British Library Conference Proceedings | 2014| -
Autofluorescence lifetime metrology for label-free detection of cartilage matrix degradation [8940-16]
British Library Conference Proceedings | 2014| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017 -
450mm lithography status for high volume manufacturing [10147-11]
British Library Conference Proceedings | 2017 -
Angular velocity measurements in Sagnac interferometer (Invited Paper) [2729-23]
British Library Conference Proceedings| -
Electrochemiluminescene observation and measurements of eletrohydrodynamic streams (Invited Paper) [2729-16]
British Library Conference Proceedings| -
Generics of systems for measuring linear and angular velocities of solid objects (Invited Paper) [2729-11]
British Library Conference Proceedings| -
Imaging multiple cortical areas with high spatio-temporal resolution using innovative wide-field imaging system
British Library Conference Proceedings | 2020| -
Adjusting the transmission bands of the negative curvature hollow-core fibers
British Library Conference Proceedings | 2023| -
Design and fabrication of special photonic crystal fibers for sensing applications
British Library Conference Proceedings | 2023| -
Numerical optimization of tunable Dy-doped ZBLAN fiber lasers for yellow emission
British Library Conference Proceedings | 2023| -
Stabilizing DFB laser injection-locked to an external polarization maintaining optical fiber ring cavity
British Library Conference Proceedings | 2023| -
Direct measurement of the maximum detection range of an automotive lidar with a table-top setup for series production
British Library Conference Proceedings | 2023| -
Stokes polarimeter using vector diffractive optical elements
British Library Conference Proceedings | 2023| -
Tailored gas-absorbing materials for packaged opto-electronic devices
British Library Conference Proceedings | 2023| -
Fiber optical coupling with engineered scattering elements
British Library Conference Proceedings | 2023| -
Process margin improvement through finger-print removal based on scanner leveling data [10147-8]
British Library Conference Proceedings | 2017 -
Automated detection and classification of printing sub-resolution assist features using machine learning algorithms [10147-23]
British Library Conference Proceedings | 2017 -
Development of the next-generation ArF excimer laser with ultra-narrow stable spectral bandwidth for multiple patterning immersion lithography [10147-59]
British Library Conference Proceedings | 2017 -
Third therapeutic spectral window for deep tissue imaging [8940-30]
British Library Conference Proceedings | 2014| -
Si-photonics waveguides manufacturability using advanced RET solutions [10147-36]
British Library Conference Proceedings | 2017 -
Improving the topography performance of ion implantation resist [10147-48]
British Library Conference Proceedings | 2017
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