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Synonyms were used for: ENGINEERING • FOR • OPTICAL ENGINEERING • SOCIETY
Search without synonyms: journal:(PROCEEDINGS - SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING)
Used synonyms:
- industrielle technik
- ingenieurwesen
- ingenieurwissenschaft
- ingenieurwissenschaften
- technik
- technikwissenschaften
- technique
- technische wissenschaften
Used synonyms:
- fur
Used synonyms:
- angewandte optik
- optische technik
- technische optik
Used synonyms:
- gesellschaft
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High-repetition-rate fluorine laser for microlithography [4000-173]
British Library Conference Proceedings | 2000| -
Highly durable low CoO mass production version of 2-kHz ArF excimer laser for DUV lithography [4000-158]
British Library Conference Proceedings | 2000| -
Output stabilization technology with chemical impurity control on ArF excimer laser [4000-157]
British Library Conference Proceedings | 2000| -
Lens aberration measurement technique using attentuated phase-shifting mask [4000-139]
British Library Conference Proceedings | 2000| -
Simulation-based method for sidelobe supression [4000-124]
British Library Conference Proceedings | 2000| -
Precise control of critical dimension shrinkage and enlargement by in-situ polysilicon etch [4000-101]
British Library Conference Proceedings | 2000| -
Effect of nonlinear errors on 300-mm wafer overlay performance [4000-87]
British Library Conference Proceedings | 2000| -
Deducing aerial image behavior from AIMS data [4000-74]
British Library Conference Proceedings | 2000| -
157-nm lithography simulation using a finite-difference time-domain method with oblique incidence in a multilayered medium [4000-71]
British Library Conference Proceedings | 2000| -
Rigorous diffraction analysis for future mask technology [4000-69]
British Library Conference Proceedings | 2000| -
Aberration averaging using point spread function for scanning projection systems [4000-51]
British Library Conference Proceedings | 2000| -
Long-term testing of optical components for 157-nm lithography [4000-44]
British Library Conference Proceedings | 2000| -
Comparison study for sub-0.13-mum lithography between ArF and KrF lithography [4000-39]
British Library Conference Proceedings | 2000| -
Integration considerations for 130-nm device patterning using ArF lithography [4000-38]
British Library Conference Proceedings | 2000| -
Practical optical-proximity-correction approach by considering interlayer overlap [4000-30]
British Library Conference Proceedings | 2000| -
Customized illumination aperture filter for low k~1 photolithography process [4000-25]
British Library Conference Proceedings | 2000| -
System for velocity and positioning tracking and recording of a moving object (Invited Paper) [2729-28]
British Library Conference Proceedings| -
Acceleration determination using spatio-temporal Fourier transform [2729-26]
British Library Conference Proceedings| -
Precision angle orientation measurement with the use of inertial measuring unit employing low accuracy optical gyros [2729-22]
British Library Conference Proceedings| -
System for noncontact measurement of torsional vibrations of shafts [2729-19]
British Library Conference Proceedings| -
Methods of the study of flows on the basis of space and temporary selection of the scattered light (Invited Paper) [2729-14]
British Library Conference Proceedings| -
Measurement of the motion and surface topology of the living organisms using computer-aided laser microscopy (Invited Paper) [2729-29]
British Library Conference Proceedings| -
Doppler effect in optical velocimetry (Invited Paper) [2729-10]
British Library Conference Proceedings| -
Diffuse optical methods for assessing breast cancer chemotherapy [8940-57]
British Library Conference Proceedings | 2014| -
Optical characterization of ex-vivo axillary lymph nodes of breast-cancer patients using a custom-built spectrophotometer [8940-25]
British Library Conference Proceedings | 2014| -
Diffusing-wave polarimetry for tissue diagnostics [8940-6]
British Library Conference Proceedings | 2014| -
Propagation and scattering of vector light beam in turbid scattering medium [8940-5]
British Library Conference Proceedings | 2014| -
Parametric study of different contributors to tumor thermal profile [8940-24]
British Library Conference Proceedings | 2014| -
Noninvasive diagnosis of oral cancer by Stokes shift spectroscopy [8940-20]
British Library Conference Proceedings | 2014| -
Implementation of predictive control strategy for maintenance of fiber optic communication lines [8787-24]
British Library Conference Proceedings | 2013| -
Digital processing of Doppler signal by means of fast Fourier transform [2729-13]
British Library Conference Proceedings| -
Comparison between the time-of-flight velocimeter and the laser Doppler velocimeter for measurements on solid surfaces [2729-12]
British Library Conference Proceedings| -
Novel solid state lasers for optical velocimetry (Invited Paper) [2729-04]
British Library Conference Proceedings| -
Moving atoms: a nightmare for spectroscopists (Invited Paper) [2729-03]
British Library Conference Proceedings| -
Reticle heating feed-forward control (RHC2) on NXT:1980Di immersion scanner for enhanced on-product overlay [10147-42]
British Library Conference Proceedings | 2017 -
Scanner-to-scanner CD analysis and control in an HVM environment [10147-9]
British Library Conference Proceedings | 2017 -
Effective use of aerial image metrology for calibration of OPC models [10147-33]
British Library Conference Proceedings | 2017 -
Constructing freeform source through the combination of neural network and binary ant colony optimization [10147-58]
British Library Conference Proceedings | 2017 -
A physical model for innovative laser direct write lithography [10147-28]
British Library Conference Proceedings | 2017 -
The ultra-violet partial coherence modulation transfer function for lithography [10147-57]
British Library Conference Proceedings | 2017 -
Angular velocity measurements in Sagnac interferometer (Invited Paper) [2729-23]
British Library Conference Proceedings| -
Electrochemiluminescene observation and measurements of eletrohydrodynamic streams (Invited Paper) [2729-16]
British Library Conference Proceedings| -
Generics of systems for measuring linear and angular velocities of solid objects (Invited Paper) [2729-11]
British Library Conference Proceedings| -
Microscale optoelectronic infrared-to-visible upconversion device as the implantable light sources for optogenetics neuromodulation
British Library Conference Proceedings | 2020| -
Lithography and OPC friendly triple patterning decomposition method for VIA [10147-55]
British Library Conference Proceedings | 2017
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