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Preparation and characterization of Er-doped AlN films by RF magnetron sputtering
British Library Online Contents | 2018| -
Preparation and characterization of Er-doped AlN films by RF magnetron sputtering
British Library Online Contents | 2018| -
Preparation and characterization of Er-doped AlN films by RF magnetron sputtering
British Library Online Contents | 2018| -
Deposition of highly c-axis-oriented ScAlN thin films at different sputtering power
Online Contents | 2017| -
Deposition of highly c-axis-oriented ScAlN thin films at different sputtering power
Online Contents | 2017| -
Graph layout optimization method and system, electronic equipment and readable storage medium
Free accessEuropean Patent Office | 2021| -
Investigation of substrate temperature for Sc13Al87N piezoelectric film deposited on silicon substrate
Online Contents | 2016|Contributors: Tai, Zhiwei
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