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Was heißt es, wach zu sein? : Eine Theorie der Wachheit
GWLB - Gottfried Wilhelm Leibniz Bibliothek | 2020| -
Method for characterizing a feature on a mask and device for carrying out the method
Free accessEuropean Patent Office | 2015| -
Verfahren zur Charakterisierung einer Struktur auf einer Maske und Vorrichtung zur Durchführung des Verfahrens
Free accessEuropean Patent Office | 2021| -
INSPECTION DEVICE FOR MASKS FOR SEMICONDUCTOR LITHOGRAPHY AND METHOD
Free accessEuropean Patent Office | 2021| -
Inspection device for masks for semiconductor lithography and method
Free accessEuropean Patent Office | 2021| -
Inspection device for masks for semiconductor lithography and method
Free accessEuropean Patent Office | 2024| -
Apparatus and method for inspecting mask for semiconductor lithography
Free accessEuropean Patent Office | 2022| -
IMPACT OF SCANNER-AXIAL-CHROMATIC ABERATION ON AERIAL IMAGE
Free accessEuropean Patent Office | 2021| -
Was heißt es, wach zu sein? : eine Theorie der Wachheit
GWLB - Gottfried Wilhelm Leibniz Bibliothek | 2020| -
INSPECTION DEVICE FOR MASKS FOR SEMICONDUCTOR LITHOGRAPHY AND METHOD
Free accessEuropean Patent Office | 2019| -
INSPECTION DEVICE FOR MASKS FOR SEMICONDUCTOR LITHOGRAPHY AND METHOD
Free accessEuropean Patent Office | 2019| -
Inspektionsvorrichtung für Masken für die Halbleiterlithographie und Verfahren
Free accessEuropean Patent Office | 2020| -
Die Biogenese des Hepatitis-C-Virus-Core-Proteins
GWLB - Gottfried Wilhelm Leibniz Bibliothek | 1998| -
Verfahren zur Bestimmung optischer Eigenschaften einer Photomaske für die Halbleiterlithographie unter Verwendung einer flexiblen Beleuchtungseinheit
Free accessEuropean Patent Office | 2024| -
Method and apparatus for characterizing microlithographic mask
Free accessEuropean Patent Office | 2022|
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