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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators [2002]

1
Introduction
27
Basics for a Thermally Actuated Micromirror
67
Microscanner Technology
77
One-Dimensional Microscanner
113
Two-Dimensional Microscanner
135
Advanced Optical Filters of Porous Silicon
165
Micromachining Using Porous Silicon
195
Tunable Optical Filter and IR Gas Spectroscopy
211
Conclusions and Outlook
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