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Optical Microscanners and Microspectrometers using Thermal Bimorph Actuators [2002]
- 1
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Introduction
- 27
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Basics for a Thermally Actuated Micromirror
- 67
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Microscanner Technology
- 77
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One-Dimensional Microscanner
- 113
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Two-Dimensional Microscanner
- 135
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Advanced Optical Filters of Porous Silicon
- 165
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Micromachining Using Porous Silicon
- 195
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Tunable Optical Filter and IR Gas Spectroscopy
- 211
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Conclusions and Outlook