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Large Scale Integrated Circuits Technology: State of the Art and Prospects [1982]
- 3
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Semiconductor Devices and the Role of Physics in their Development
- 17
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LSI: Prospects and Problems
- 33
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Silicon Crystals for Large Scale Integrated Circuits
- 70
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Structural Techniques for Bulk Defects Characterization
- 89
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Planar Processing: Silicon Oxidation
- 112
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Planar Processing: Diffusion
- 132
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Ion Implantation
- 200
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Silicon Epitaxy
- 223
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Computer Simulation of Complete IC Fabrication Process
- 254
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Beam Processing Techniques Applied to Crystal Silicon Substrates
- 281
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Lithography Systems for VLSI
- 315
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Bipolar Linear Integrated Circuits
- 350
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Bipolar Digital Circuits
- 373
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Advanced Bipolar Devices and Related Problems
- 399
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MOS Technologies and Devices for LSI
- 457
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Silicon on Insulator Integrated Circuits
- 487
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Advanced Silicon MOS Devices and Related Problems
- 517
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Semiconductor Component Accelerated Testing and Data Analysis
- 597
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Basic Integrated Circuit Failure Mechanisms
- 639
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Miniaturization Limits for Mos Technology
- 647
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Physics of Submicron Devices
- 670
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The Role of GaAs in High Speed Integrated Circuits
- 728
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Josephson Integrated Circuits