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Mechanics of Microelectromechanical Systems [2005]
- 1
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Stiffness Basics
- 65
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Microcantilevers, Microhinges, Microbridges
- 131
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Microsuspensions
- 183
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Microtransduction: Actuation and Sensing
- 263
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Static Response of Mems
- 343
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Microfabrication, Materials, Precision and Scaling