Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
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Analysis of conductive filament density in resistive random access memories: a 3D kinetic Monte Carlo approachAldana, Samuel / García-Fernández, Pedro / Romero-Zaliz, Rocío et al. | 2018
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Unbiased roughness measurements: Subtracting out SEM effects, part 2Lorusso, Gian F. / Rutigliani, Vito / Van Roey, Frieda et al. | 2018
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Progress in metal organic cluster EUV photoresistsSakai, Kazunori / Xu, Hong / Kosma, Vasiliki et al. | 2018
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Variations of the field of view depending on the Si deflector shape in a microcolumnKim, Hyung Woo / Lee, Young Bok / Kim, Dae-Wook et al. | 2018
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Highly parallel scanning tunneling microscope based hydrogen depassivation lithographyRandall, John N. / Owen, James H. G. / Lake, Joseph et al. | 2018
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On the trends and application of pattern density dependent isofocal dose of positive resists for 100 keV electron beam lithographyLopez, Gerald G. / de Villafranca, Glen / Azadi, Mohsen et al. | 2018
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Experimental study of field emission from ultrasharp silicon, diamond, GaN, and tungsten tips in close proximity to the counter electrodeLenk, Claudia / Lenk, Steve / Holz, Mathias et al. | 2018
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Effect of surface treatments on electrical properties of β-Ga2O3Yang, Jiancheng / Sparks, Zachary / Ren, Fan et al. | 2018
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Development of ultralight nanocellulose magnets using ultrasonic agitationBradley, Derek T. / Clausen, Eric / Shand, Paul M. et al. | 2018
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Review Article: Review of electrohydrodynamical ion sources and their applications to focused ion beam technologyGierak, Jacques / Mazarov, Paul / Bruchhaus, Lars et al. | 2018
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Investigating the interplay of lateral and height dimensions influencing neuronal processes on nanogroovesBastiaens, Alex J. / Xie, Sijia / Luttge, Regina et al. | 2018
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In situ femtosecond pulse laser ablation for large volume 3D analysis in scanning electron microscope systemsRandolph, Steven Jeffrey / Filevich, Jorge / Botman, Aurelien et al. | 2018
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Analysis of negative electron affinity InGaN photocathode by temperature-programed desorption methodKashima, Masahiro / Sato, Daiki / Koizumi, Atsushi et al. | 2018
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Effect of carbon doping on threshold voltage and mobility of In-Si-O thin-film transistorsKurishima, Kazunori / Nabatame, Toshihide / Mitoma, Nobuhiko et al. | 2018
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Single electron transistors with e-beam evaporation of SiO2 tunnel barriersFilmer, Matthew J. / Snider, Gregory L. / Orlov, Alexei O. et al. | 2018
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Improving the resolution and throughput of achromatic Talbot lithographyKazazis, Dimitrios / Tseng, Li-Ting / Ekinci, Yasin et al. | 2018
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Brightness measurements of the nano-aperture ion sourcevan Kouwen, Leon / Kruit, Pieter et al. | 2018
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Moth-eye antireflection nanostructure on glass for CubeSatsLiu, Yaoze / Soltani, Mohammad / Dey, Ripon Kumar et al. | 2018
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Electrospun charge transport structures for hybrid perovskite solar cellsMurphy, John P. / Brockway, Molly C. / Andriolo, Jessica M. et al. | 2018
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Broadband UV-assisted thermal annealing of low-k silicon carbonitride films using a C-rich silazane precursorChang, Wei-Yuan / Chung, Hau-Ting / Chen, Yi-Chang et al. | 2018
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Effects of oxygen-inserted layers and oxide capping layer on dopant activation for the formation of ultrashallow p-n junctions in siliconZhang, Xi / Connelly, Daniel / Takeuchi, Hideki et al. | 2018
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Magnetic nanotubes obtained from atomic layer deposition coated electrospun nanofibersPereira, Alejandro / Escrig, Juan / Palma, Juan Luis et al. | 2018
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Atomic force microscope integrated with a scanning electron microscope for correlative nanofabrication and microscopyRangelow, Ivo W. / Kaestner, Marcus / Ivanov, Tzvetan et al. | 2018
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Fabrication of astronomical x-ray reflection gratings using thermally activated selective topography equilibrationMcCoy, Jake A. / McEntaffer, Randall L. / Eichfeld, Chad M. et al. | 2018
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Designing an anisotropic noise filter for measuring critical dimension and line edge roughness from scanning electron microscope imagesJi, Hyesung / Lee, Soo-Young et al. | 2018
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Gaussian distribution in current-conduction mechanism of (Ni/Pt) Schottky contacts on wide bandgap AlInGaN quaternary alloyArslan, Engin / Altındal, S¸emsettin / Ural, Sertaç et al. | 2018
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Interaction of hydrogen with hafnium dioxide grown on silicon dioxide by the atomic layer deposition techniqueKolkovsky, Vladimir / Scholz, Sebastian / Kolkovsky, Valery et al. | 2018
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TEOS layers for low temperature processing of group IV optoelectronic devicesAssali, Simone / Attiaoui, Anis / Mukherjee, Samik et al. | 2018
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Prediction of surface topography due to finite pixel spacing in focused ion beam milling of circular holes and trenchesRumyantsev, Alexander V. / Borgardt, Nikolay I. et al. | 2018
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Structural characterization of tantalum nitride films as wet etch stop layer in advanced multiwork function metal gate MOSFETsMennell, Petra / Parvaneh, Hamed / Bayindir, Zeynel et al. | 2018
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Optimized structure of standard sample with programed defects for pattern inspection using electron beamsIida, Susumu / Uchiyama, Takayuki et al. | 2018
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Influence of tetramethylammonium hydroxide on niobium nitride thin filmsToomey, Emily / Colangelo, Marco / Abedzadeh, Navid et al. | 2018
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Effects of Ar+ etching of Cu2ZnSnSe4 thin films: An x-ray photoelectron spectroscopy and photoluminescence studyYakushev, Michael V. / Sulimov, Mikhail A. / Skidchenko, Ekaterina et al. | 2018
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Reactivity studies and structural properties of Al on compound semiconductor surfacesSarney, Wendy L. / Svensson, Stefan P. / Wickramasinghe, Kaushini S. et al. | 2018
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Phenol-functionalized polymerization control additives for negative tone epoxide crosslinking molecular resistsNarcross, Hannah / Sharp, Brandon L. / Ludovice, Peter J. et al. | 2018
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Fabrication and replication of re-entrant structures by nanoimprint lithography methodsKehagias, Nikolaos / Francone, Achille / Guttmann, Markus et al. | 2018
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Field emission from diamond nanotips for scanning probe lithographyHofmann, Martin / Lenk, Claudia / Ivanov, Tzvetan et al. | 2018
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Dual-band ultraviolet photodetectors comprising nanostructured MgZnO on ZnO filmsLee, Ching-Ting / Lin, Tzu-Shun / Lee, Hsin-Ying et al. | 2018
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Band alignment of atomic layer deposited SiO2 on (010) (Al0.14Ga0.86)2O3Fares, Chaker / Ren, F. / Lambers, Eric et al. | 2018
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Enhancing the focused ion beam etch rate of Ag films by Joule heatingSasaki, Takahiro / Tohmyoh, Hironori et al. | 2018
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Silver-doped tin oxide for electrical property enhancement in p-type channel thin film transistorNguyen, An Hoang-Thuy / Nguyen, Manh-Cuong / Ji, Hyungmin et al. | 2018
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Preparation of Ga-terminated negative electron affinity-GaAs (100) surface by HCl-isopropanol treatment for nanoanalysis by scanning tunneling microscopyFukuzoe, Ryutaro / Hirao, Masayuki / Yamanaka, Daichi et al. | 2018
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Field-emission scanning probe lithography tool for 150 mm waferHolz, Mathias / Guliyev, Elshad / Ahmad, Ahmad et al. | 2018
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Sharp GaN nanowires used as field emitter on active cantilevers for scanning probe lithographyLenk, Claudia / Hofmann, Martin / Ivanov, Tzvetan et al. | 2018
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Future prospects of fluoride based upconversion nanoparticles for emerging applications in biomedical and energy harvestingTiwari, Surya P. / Maurya, Sachin K. / Yadav, Ram S. et al. | 2018
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Effects of lithographic parameters in massively parallel electron-beam systemsMoon, Soomin / Lee, Soo-Young / Choi, Jin et al. | 2018
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Statistical comparison of field height correction by Z-stage movement versus height-correction hardware in a modern electron-beam lithography toolYoung, Michael P. et al. | 2018
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Stochastic simulation of pattern formation in electron beam lithographyYasuda, Masaaki / Koyama, Masanori / Shirai, Masamitsu et al. | 2018
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Enhanced cracking in Si/B-doped Si0.70Ge0.30/Si heterostructures via hydrogen trapping effectWei, Xing / Xue, Zhongying / Chang, Yongwei et al. | 2018
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Nanostructures prepared by vacuum-line deposition of organosilanes through a colloidal maskVerberne-Sutton, Susan D. / LeJeune, Zorabel M. / Hill, Sean et al. | 2018
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Effects of annular-cylindrical combined channel Hall thruster length on the discharge characteristicsDing, Yongjie / Su, Hongbo / Jia, Boyang et al. | 2018
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Solid-source doping by using phosphosilicate glass into p-type bulk Si (100) substrate: Role of the capping SiO2 barrierKikuchi, Yoshiaki / Peter, Antony / Pawlak, Bartlomiej Jan et al. | 2018
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Effect of magnetic field directionality on discharging characteristics of Hall effect thruster with azimuthal diversion railDing, Yongjie / Su, Hongbo / Wang, Lei et al. | 2018
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Tutorial on interpreting x-ray photoelectron spectroscopy survey spectra: Questions and answers on spectra from the atomic layer deposition of Al2O3 on siliconShah, Dhruv / Patel, Dhananjay I. / Roychowdhury, Tuhin et al. | 2018
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Visualization of organic/inorganic hybridization of UV-cured films with trimethylaluminum by scanning transmission electron microscopy and energy dispersive x-ray spectroscopyNakagawa, Masaru / Uehara, Takuya / Ozaki, Yuki et al. | 2018
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Theoretical investigation of the enhancement factor for a single field emitter in close proximity to the counter electrodeLenk, Steve / Lenk, Claudia / Rangelow, Ivo W. et al. | 2018