Journal of Micromechanics and Microengineering
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
- 1415
-
Au micro-pattern fabrication on cellulose paper: comparison of μ-contact printing and liftoff techniquesLim, H G / Cho, G Y / Kim, Jaehwan et al. | 2007
- 1415
-
Au micro-pattern fabrication on cellulose paper: comparison of mu-contact printing and liftoff techniquesLim, H. G. / Cho, G. Y. / Kim, J. et al. | 2007
- 1415
-
Au micro-pattern fabrication on cellulose paper: comparison of my-contact printing and liftoff techniquesLim, H.G. / Cho, G.Y. / Kim, Jaehwan et al. | 2007
- 1420
-
Droplet ejection performance of a monolithic thermal inkjet print headSen, A K / Darabi, J et al. | 2007
- 1428
-
Calcium alginate microcapsule generation on a microfluidic system fabricated using the optical disk processHuang, Keng-Shiang / Liu, Ming-Kai / Wu, Chun-Han et al. | 2007
- 1435
-
A biochemical sensing system using an 11-MUA/calix[6]arene bilayer to sense amine vaporsYao, Da-Jeng / Yang, Yong-Ruei / Tai, Chu-Chun et al. | 2007
- 1442
-
A low melting point alloy as a functional material for a one-shot micro-valveDebray, A / Shibata, M / Fujita, H et al. | 2007
- 1451
-
Micro-electrochemical machining using multiple tool electrodesPark, Min Soo / Chu, Chong Nam et al. | 2007
- 1458
-
Characteristics of chip formation in micro V-grooving using elliptical vibration cuttingKim, Gi Dae / Loh, Byoung Gook et al. | 2007
- 1467
-
In situ analysis of bacterial capture in a microfluidic channelBalasubramanian, Ashwin K / Beskok, Ali / Pillai, Suresh D et al. | 2007
- 1479
-
Three-dimensional hydrodynamic focusing in two-layer polydimethylsiloxane (PDMS) microchannelsChang, Chih-Chang / Huang, Zhi-Xiong / Yang, Ruey-Jen et al. | 2007
- 1487
-
Improved design of low-pressure fluidic microvalvesPandolfi, Anna / Ortiz, Michael et al. | 2007
- 1494
-
Simulation and experimental verification of nanoscale motion in a 2-axis quasi-passive platform*Li, Biao / Zhu, Yu / Sharon, Andre et al. | 2007
A portion of the paper appeared at Hiltonhead 2006.
- 1494
-
Simulation and experimental verification of nanoscale motion in a 2-axis quasi-passive platformfootnote pos="infobottom" id="*">A portion of the paper appeared at Hiltonhead 2006.Li, Biao et al. | 2007
- 1494
-
Simulation and experimental verification of nanoscale motion in a 2-axis quasi-passive platformLi, B. / Zhu, Y. / Sharon, A. et al. | 2007
- 1504
-
An on-chip transformer in silicon-based technologyHsu, Heng-Ming / Tsai, Ming-Chang / Huang, Kuo-Hsun et al. | 2007
- 1511
-
Nd-YAG laser microvia drilling for interconnection applicationTan, Bo / Venkatakrishnan, Krishnan et al. | 2007
- 1518
-
Polymeric nanofeatures of 100 nm using injection moulding for replicationHuang, C K et al. | 2007
- 1527
-
PCR biocompatibility of lab-on-a-chip and MEMS materialsChristensen, T B / Pedersen, C M / Gröndahl, K G et al. | 2007
- 1533
-
Fabrication of round channels using the surface tension of PDMS and its application to a 3D serpentine mixerLee, Kangsun / Kim, Choong / Shin, Kyeong Sik et al. | 2007
- 1542
-
Fabrication of two types of micro ion sources for a micro time-of-flight mass spectrometerYoon, Hyeun Joong / Song, Seong Ho / Hong, Nguyen Tuan et al. | 2007
- 1549
-
Integrating bulk piezoelectric materials into MEMS for high authority actuatorsHucker, M J / Warsop, C et al. | 2007
- 1558
-
Compound jet instability in a microchannel for mononuclear compound drop formationLee, S Y / Snider, C / Park, K et al. | 2007
- 1567
-
A microengineered alignment bench for a nanospray ionization sourceSyms, R R A / Zou, H / Bardwell, M et al. | 2007
- 1575
-
A single-mask substrate transfer technique for the fabrication of high-aspect-ratio micromachined structuresTang, M / Liu, A Q / Agarwal, A et al. | 2007
- 1583
-
Capacitive detection in resonant MEMS with arbitrary amplitude of motionTrusov, Alexander A / Shkel, Andrei M et al. | 2007
- 1593
-
Smoothing dry-etched microstructure sidewalls using focused ion beam milling for optical applicationsSong, In-Hyouk / Peter, Yves-Alain / Meunier, Michel et al. | 2007
- 1598
-
Design, simulation and characterization of an inertia micro-switch fabricated by non-silicon surface micromachiningYang, Zhuoqing / Ding, Guifu / Chen, Weiqiang et al. | 2007
- 1605
-
Enhancement of the sensitivity of pressure sensors with a composite Si/porous silicon membraneSujatha, L / Bhattacharya, Enakshi et al. | 2007
- 1611
-
Mechanical properties of flexible microcomponents with a mobile loadPustan, M / Rymuza, Z et al. | 2007
- 1618
-
Injection flow during steam condensation in silicon microchannelsWu, Huiying / Yu, Mengmeng / Cheng, Ping et al. | 2007
- 1628
-
A novel meandered coplanar waveguide for RF microelectromechanical systemsSun, Xiaofeng / Ding, Guifu / Li, Binhong et al. | 2007
- 1632
-
A novel micropump with fixed-geometry valves and low leakage flowHwang, Il-Han / An, Jae-Yong / Ko, Kwang-Hee et al. | 2007
- 1640
-
Novel fabrication of a pressure sensor with polymer material and evaluation of its performanceKo, H S / Liu, C W / Gau, C et al. | 2007
- 1649
-
A low actuation voltage electrostatic actuator for RF MEMS switch applicationsChu, Chia-Hua / Shih, Wen-Pin / Chung, Sheng-Yuan et al. | 2007
- 1657
-
A silicon straight tube fluid density sensorNajmzadeh, M / Haasl, S / Enoksson, P et al. | 2007
- 1664
-
The generation of mould patterns for multimode optical waveguide components by direct laser writing of SU-8 at 364 nmRabe, E / Kopetz, S / Neyer, A et al. | 2007
- 1671
-
A finite element method modeling approach for the development of metal/silicon nitride MEMS single-use valve arraysCardenas, Michelle L / Cardenas-Valencia, Andres M / Dlutowski, Jay et al. | 2007
- 1680
-
Improved design of micromachined lateral suspensions using intermediate framesPike, W T / Kumar, S et al. | 2007
- 1695
-
A new analytical solution of microchannel gas flowStevanovic, Nevena D et al. | 2007
- 1703
-
Integration of a UV curable polymer lens and MUMPs structures on a SOI optical benchHsieh, Jerwei / Hsiao, Sheng-Yi / Lai, Chun-Feng et al. | 2007
- 1710
-
The fabrication of microfluidic structures by means of full-wafer adhesive bonding using a poly(dimethylsiloxane) catalystSamel, Björn / Chowdhury, M Kamruzzaman / Stemme, Göran et al. | 2007
- 1715
-
A normally latched, large-stroke, inchworm microactuatorfootnote pos="infobottom" id="*">This paper was presented at the 19th IEEE MEMS Conference, held in Istanbul, Turkey, 22–26 January 2006, and is an expansion of the abstract as printed in the Technical Digest of the meeting.Toda, Risaku et al. | 2007
- 1715
-
A normally latched, large-stroke, inchworm microactuator*Toda, Risaku / Yang, Eui-Hyeok et al. | 2007
This paper was presented at the 19th IEEE MEMS Conference, held in Istanbul, Turkey, 22–26 January 2006, and is an expansion of the abstract as printed in the Technical Digest of the meeting.
- 1715
-
A normally latched, large-stroke, inchworm microactuatorToda, R. / Yang, E.-H. et al. | 2007
- 1721
-
A hybrid microsystem for parallel perfusion experiments on living cellsGreve, Frauke / Seemann, Livia / Hierlemann, Andreas et al. | 2007
- 1731
-
Atomic layer deposition enhanced rapid dry fabrication of micromechanical devices with cryogenic deep reactive ion etchingChekurov, N / Koskenvuori, M / Airaksinen, V-M et al. | 2007
- 1737
-
The development of BCB-sealed galvanic cells. Case study: aluminum-platinum cells activated with sodium hypochlorite electrolyte solutionDlutowski, J / Biver, C J / Wang, W et al. | 2007
- N47
-
Fabrication of an inexpensive cleanroom module for microsystem testingJohnstone, R W / Tsang, S-H / Foulds, I G et al. | 2007
- N52
-
Surface micromachining technology with two SU-8 structural layers and sol–gel, SU-8 or SiO2/sol–gel sacrificial layersConédéra, V / Salvagnac, L / Fabre, N et al. | 2007
- N58
-
Ultrasonic vibration-assisted femtosecond laser machining of microholesZheng, H Y / Huang, H et al. | 2007
-
NOTE: Fabrication of an inexpensive cleanroom module for microsystem testingJohnstone, R.W. et al. | 2007
-
NOTE: Ultrasonic vibration-assisted femtosecond laser machining of microholesZheng, H.Y. et al. | 2007