Journal of Micromechanics and Microengineering
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
- 1099
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A capacitive RF power sensor based on MEMS technologyFernández, L J / Wiegerink, R J / Flokstra, J et al. | 2006
- 1108
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The dynamic response of resistive microswitches: switching time and bouncingGranaldi, Alessandro / Decuzzi, Paolo et al. | 2006
- 1116
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Modelling and investigation of the mechanical and electrical characteristics of the silicon 3D-boss microprobe for force and deflection measurementsNesterov, Vladimir / Brand, Uwe et al. | 2006
- 1128
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Micro-Raman thermometry of thermal flexure actuatorsSerrano, J R / Phinney, L M / Kearney, S P et al. | 2006
- 1135
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MEMS-based compact dual-band bandpass filters with applications to wireless local area networkKim, Jong-Man / Lee, Sanghyo / Park, Jae-Hyoung et al. | 2006
- 1143
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Rapid cell-patterning and microfluidic chip fabrication by crack-free CO2 laser ablation on glassYen, Meng-Hua / Cheng, Ji-Yen / Wei, Cheng-Wey et al. | 2006
- 1154
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The electrothermal feasibility of carbon microcoil heaters for cold/hot gas microthrustersWilliams, K L / Eriksson, A B / Thorslund, R et al. | 2006
- 1162
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A 3D paired microelectrode array for accumulation and separation of microparticlesChen, D F / Du, H / Li, W H et al. | 2006
- 1170
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Fabrication of PMMA micro- and nanofluidic channels by proton beam writing: electrokinetic and morphological characterizationMahabadi, Kambiz Ansari / Rodriguez, Isabel / Haur, Sow Chorng et al. | 2006
- 1181
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Investigation of sidewall cracking in PMMA LIGA structuresHunter, L L / Skala, D M / Levey, B S et al. | 2006
- 1189
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Study of the electrical contact resistance of multi-contact MEMS relays fabricated using the MetalMUMPs processAlmeida, L / Ramadoss, R / Jackson, R et al. | 2006
- 1195
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Modeling of dry stiction in micro electro-mechanical systems (MEMS)Hariri, A / Zu, J W / Ben Mrad, R et al. | 2006
- 1207
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Design, fabrication and characterization of a novel gas microvalve using micro- and fine-machiningFazal, I / Louwerse, M C / Jansen, H V et al. | 2006
- 1215
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A silicon cantilever probe card with tip-to-pad electric feed-through and automatic isolation of the metal coatingWang, Fei / Li, Xinxin / Guo, Nanxiang et al. | 2006
- 1221
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Design, fabrication and testing of a micromachined integrated tunable microlensWang, Weisong / Fang, Ji et al. | 2006
- 1227
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A magnetostrictive mini actuator for long-stroke positioning with nanometer resolutionYang, B T / Bonis, M / Tao, H et al. | 2006
- 1233
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The lateral instability problem in electrostatic comb drive actuators: modeling and feedback controlBorovic, B / Lewis, F L / Liu, A Q et al. | 2006
- 1242
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Stabilization of dual-axis micromirrors beyond the pull-in point by integral sliding mode controlZhao, Yi / Tay, Francis E H / Chau, Fook Siong et al. | 2006
- 1251
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A microfluidic system with integrated molecular imprinting polymer films for surface plasmon resonance detectionfootnote pos="infobottom" id="*">The preliminary results of the current paper were presented at Transducers 2005, Seoul, Korea, 5–9 June 2005.Huang, Shih-Chiang et al. | 2006
- 1251
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A microfluidic system with integrated molecular imprinting polymer films for surface plasmon resonance detectionHuang, S.-C. / Lee, G.-B. / Chien, F.-C. et al. | 2006
- 1251
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A microfluidic system with integrated molecular imprinting polymer films for surface plasmon resonance detection*Huang, Shih-Chiang / Lee, Gwo-Bin / Chien, Fan-Ching et al. | 2006
The preliminary results of the current paper were presented at Transducers 2005, Seoul, Korea, 5–9 June 2005.
- 1258
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Modeling and performance of two types of piston-like out-of-plane motion micromechanical structuresLim, Si-Hyung / Horowitz, Roberto / Majumdar, Arunava et al. | 2006
- 1267
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A case study of surface tension gripping: the watch bearingLambert, Pierre / Seigneur, Frank / Koelemeijer, Sandra et al. | 2006
- 1277
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The effect of heat-treatment conditions on mechanical and morphological properties of a FIB-milled glassy carbon mold with micro patternsYoun, S W / Takahashi, M / Goto, H et al. | 2006
- 1285
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Creating a nano-sized light source by electrostatic trapping of nanoparticles in a nanogapHoshino, K / Yamada, K / Matsumoto, K et al. | 2006
- 1290
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Integrated bi-directional focusing and tracking actuators in a monolithic device for a MEMS optical pick-up headWu, Mingching / Fang, Weileun et al. | 2006
- 1298
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The formation of sharp AFM tips by single step etchingNeuzil, P / Nagarajan, R et al. | 2006
- 1301
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Development of a dual-axis thermal convective gas gyroscopeDau, Van Thanh / Dao, Dzung Viet / Shiozawa, Tatsuo et al. | 2006
- 1307
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Development of a low temperature MEMS process with a PECVD amorphous silicon structural layerChang, Stella / Sivoththaman, Siva et al. | 2006
- 1314
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On the selective magnetic induction heating of micron scale structuresYang, Hsueh-An / Lin, Chiung-Wen / Peng, Chih-Yu et al. | 2006
- 1321
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Strategies for void-free liquid filling of micro cavitiesGoldschmidtboeing, Frank / Rabold, Martin / Woias, Peter et al. | 2006
- 1331
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Numerical characterization of the flow rectification of dynamic microdiffusersSun, C-L / Huang, K H et al. | 2006
- 1340
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An integrated pressure and temperature sensor based on nanocrystalline porous siliconPramanik, C / Saha, H / Gangopadhyay, U et al. | 2006
- 1349
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Single-wafer-processed nano-positioning XY-stages with trench-sidewall micromachining technologyGu, Lei / Li, Xinxin / Bao, Haifei et al. | 2006
- 1358
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A microfluidic nanoliter mixer with optimized grooved structures driven by capillary pumpingChen, C F / Kung, C F / Chen, H C et al. | 2006
- 1366
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Electrical breakdown phenomena for devices with micron separationsChen, Ching-Heng / Yeh, J Andrew / Wang, Pei-Jen et al. | 2006
- 1374
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The mechanical properties of freestanding near-frictionless carbon films relevant to MEMSZhou, B / Wang, L / Mehta, N et al. | 2006
- 1382
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Higher order correction of electrostatic pressure and its influence on the pull-in behavior of microstructuresKrylov, Slava / Seretensky, Shimon et al. | 2006
- 1397
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Experimental investigation of water flow in smooth and rough silicon microchannelsHao, Peng-Fei / Yao, Zhao-Hui / He, Feng et al. | 2006
- 1403
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Carbon fibers as a novel material for high-performance microelectromechanical systems (MEMS)Desai, Shahyaan / Netravali, Anil / Thompson, Michael et al. | 2006
- 1408
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A novel micro/nano 1 × 4 mechanical optical switchLin, Wu-Lang / Fan, Kuang-Chao / Chiang, Li-Hung et al. | 2006
- 1408
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A novel micro/nano 1 x 4 mechanical optical switchLin, W.-L. / Fan, K.-C. / Chiang, L.-H. et al. | 2006
- 1416
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Inline-actuated suspension for the fine head positioning of HDDLau, Gih Keong / Du, Hejun et al. | 2006
- 1424
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An improved two-dimensional coupled electrostatic-mechanical model for RF MEMS switchesHamad, Ehab / Omar, Abbas et al. | 2006
- 1431
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Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologiesK-S Chen / I-K Lin / F-H Ko et al. | 2006
- 1431
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CORRIGENDUM: Fabrication of 3D polymer microstructures using electron beam lithography and nanoimprinting technologies| 2006
- N9
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Controlling the hydrophilicity of microchannels with bonding adhesives containing surfactantsLim, Yong Taik / Kim, Sung-Jin / Yang, Haesik et al. | 2006
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NOTE: Controlling the hydrophilicity of microchannels with bonding adhesives containing surfactantsLim, Yong Taik et al. | 2006