Journal of Micromechanics and Microengineering
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
Inhaltsverzeichnis
- 033001
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Black silicon method X: a review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipmentH V Jansen / M J de Boer / S Unnikrishnan et al. | 2009
- 33001
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TOPICAL REVIEW: Black silicon method: X. A review on high speed and selective plasma etching of silicon with profile control: an in-depth comparison between Bosch and cryostat DRIE processes as a roadmap to next generation equipmentJansen, H.V. et al. | 2009
- 035001
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Electromagnetic energy harvesting from vibrations of multiple frequenciesBin Yang / Chengkuo Lee / Wenfeng Xiang et al. | 2009
- 035002
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A precision hot embossing mold fabricated by high-resolution powder blasting with polydimethylsiloxane and SU-8 masking technologyT Lomas / A Wisitsoraat / F Chevasuvit et al. | 2009
- 035003
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Effect of undercut on the resonant behaviour of silicon nitride cantileversK Babaei Gavan / E W J M van der Drift / W J Venstra et al. | 2009
- 035004
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A novel masking method for high aspect ratio penetrating microelectrode arraysR Bhandari / S Negi / L Rieth et al. | 2009
- 035005
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Development of a soft actuator using a photocurable ionic gelShutaro Saito / Yuichi Katoh / Hisashi Kokubo et al. | 2009
- 035006
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Pull-in voltage uniformity analysis of digitally operated micro mirror array with torsional springsYun-Ho Jang / Yong-Kweon Kim et al. | 2009
- 035007
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A modified relaxation time Monte Carlo method with a multiple translational temperature model for micronozzle gas flowsXudong Lan et al. | 2009
- 035008
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Pull-in and snap-through instabilities in transient deformations of microelectromechanical systemsK Das / R C Batra et al. | 2009
- 035009
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Fabrication of copper-based microchannel devices and analysis of their flow and heat transfer characteristicsFanghua Mei / W A Phillips / B Lu et al. | 2009
- 035010
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Au-pattern fabrication on a cellulose film using a polyurethane acrylate moldKwangjoon Han / Kwang-Sun Kang / Jaehwan Kim et al. | 2009
- 035011
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A low-loss, single-pole, four-throw RF MEMS switch driven by a double stop comb driveS Kang / H C Kim / K Chun et al. | 2009
- 035012
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An active micro joining mechanism for 3D assemblyMohammad Mayyas / Ping Zhang / Woo Ho Lee et al. | 2009
- 035013
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A parylene-filled-trench technique for thermal isolation in silicon-based microdevicesYinhua Lei / Wei Wang / Huaiqiang Yu et al. | 2009
- 035014
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High fill-factor micromirror array using a self-aligned vertical comb drive actuator with two rotational axesMinsoo Kim / Jae-Hyoung Park / Jin-A Jeon et al. | 2009
- 035015
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In situ tuning of a MEMS microphone using electrodeposited nanostructuresSang-Soo Je / Jere C Harrison / Michael N Kozicki et al. | 2009
- 035016
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Surface acoustic wave induced streaming and pumping in 128^o Y-cut LiNbO~3 for microfluidic applicationsDu, X.Y. / Swanwick, M.E. / Fu, Y.Q. et al. | 2009
- 035016
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Surface acoustic wave induced streaming and pumping in 128° Y-cut LiNbO3 for microfluidic applicationsX Y Du / M E Swanwick / Y Q Fu et al. | 2009
- 035016/1
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Surface acoustic wave induced streaming and pumping in 128 deg of angle Y-cut LiNbO3 for microfluidic applicationsDu, X.Y. / Swanwick, M.E. / Fu, Y.Q. et al. | 2009
- 035017
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The effect of cross-section design of rectangular microchannels on convective steam condensationChing Yi Kuo / Chin Pan et al. | 2009
- 035018
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A micromachined thermally compensated thin film Lamb wave resonator for frequency control and sensing applicationsG Wingqvist / L Arapan / V Yantchev et al. | 2009
- 035019
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Ultralow contact angle hysteresis and no-aging effects in superhydrophobic tangled nanofiber structures generated by controlling the pore size of a 99.5% aluminum foilSangmin Lee / Woonbong Hwang et al. | 2009
- 035020
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A vortex-type micromixer utilizing pneumatically driven membranesSung-Yi Yang / Jr-Lung Lin / Gwo-Bin Lee et al. | 2009
- 035021
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Interconnection blocks: a method for providing reusable, rapid, multiple, aligned and planar microfluidic interconnectionsD Sabourin / D Snakenborg / M Dufva et al. | 2009
- 035022
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A 1 0 0 direction front-etched membrane structure for a micro-bolometerTieying Ma / Yidong Liu / Tie Li et al. | 2009
- 035022
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A [unknown]100[unknown] direction front-etched membrane structure for a micro-bolometerMa, T. / Liu, Y. / Li, T. et al. | 2009
- 035022/1
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A <100> direction front-etched membrane structure for a micro-bolometerMa, Tieying / Liu, Yidong / Li, Tie et al. | 2009
- 035023
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Polysilicon MEMS accelerometers exposed to shocks: numerical–experimental investigationAldo Ghisi / Stanislaw Kalicinski / Stefano Mariani et al. | 2009
- 035024
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Anodic oxidation of polycrystalline 3C-silicon carbide thin films during MEMS operationF Liu / C S Roper / I Laboriante et al. | 2009
- 035025
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Fabrication of morphological defect-free vertical electrodes using a (1 1 0) silicon-on-patterned-insulator process for micromachined capacitive inclinometersSung-Sik Yun / Dae-Hun Jeong / Se-Myung Wang et al. | 2009
- 035026
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A surface embossing technique to create micro-grooves on an aluminum fin stock for drainage enhancementLiping Liu / Anthony M Jacobi / Dmitri Chvedov et al. | 2009
- 035027
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Pneumatically driven micro-dispenser for sub-micro-liter pipettingSong-Bin Huang / Gwo-Bin Lee et al. | 2009
- 035028
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Thickness-dependent mechanical properties of polydimethylsiloxane membranesMiao Liu / Jianren Sun / Ying Sun et al. | 2009
- 037001
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Soft imprint lithography using swelling/deswelling characteristics of a polymer mold and a resist induced by a poor solventK L Lai / I C Leu / M H Hon et al. | 2009
- 037002
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Templateless prototyping of polydimethylsiloxane microfluidic structures using a pulsed CO2 laserHao-Bing Liu / Hai-Qing Gong et al. | 2009